Iineianeee Ainoaea?noaaiiue
Oaoie/aneee Oieaa?neoao ei. I. Y. Aaoiaia
Eaeoaeneee oeeeae
EAOAAe?A IAOA?EAEIAAAeAIEss E IAOA?EAEIA YEAEO?IIIIE OAOIEEE
Eo?niaay ?aaioa
ii eo?no:” Oaoiieiaey iaoa?eaeia yeaeo?iiiie oaoieee”
OAIA: ” A?naieae eiaeey. Naienoaa, i?eiaiaiea. Iniaaiiinoe iieo/aiey
yieoaeneaeueiuo ieaiie.”
Auiieiee:
Oeiioaaa A. TH.
A?oiia: OOI-71
I?iaa?ee: Eoiaeei
TH. E.
a. Eaeoaa
1996 aiae
Niaea?aeaiea
.
Aaaaeaiea.
Yeaeo?ioece/aneea naienoaa iauaiiiai a?naieaea eiaeey.
Ciiiay no?oeoo?a a?naieaea eiaeey.
Iioe/aneea naienoaa a?naieaea eiaeey.
Iiaeaeaeiinoue a a?naieaea eiaeey.
Iaoiaeu aeoaieie i/enoee eiaeey e iuoueyea.
Iaoiaeu aeoaieie i/enoee eiaeey.
Iaoiaeu iieo/aiey iuoueyea e aai niaaeeiaiee aunieie noaiaie /enoiou.
Yieoaeneaeueiia ia?aueaaiea a?naieaea eiaeey ec aaciaie oacu.
Nenoaia In-AsCl3-H2 .
Nenoaia In-HCl-AsH3-H2.
Nenoaia InAs-SiCl4-H2.
Ie?ieec IIN.
AEeaeeioaciay yieoaeney a?naieaea eiaeey.
Iieaeoey?ii eo/aaay yieoaeney a?naieaea eiaeey.
Caeeth/aiea.
Nienie eniieueciaaiiie eeoa?aoo?u.
Aaaaeaiea.
Yieoaeneaeueiue a?naieae eiaeey – ia?niaeoeaiue iaoa?eae yeaeo?iiiie
oaoieee. Aunieay iiaeaeaeiinoue yeaeo?iiia a a?naieaea eiaeey
i?yiiciiiay no?oeoo?a iicaieytho eniieueciaaoue aai aeey ecaioiaeaiey
aunieiyooaeoeaiuo yeaeo?iiiuo e iioiyeaeo?iiiuo i?eai?ia, a /anoiinoe
auno?iaeaenoaothueo o?aicenoi?ia e eioaa?aeueiuo noai, oioii?eaiiuo
aeaoaeoi?ia EE – aeeaiaciia, eiaeaeoeeiiiuo eaca?ia n aeeeiie aieiu (3,5
iei.
Iaeiaei oe?ieia eniieueciaaiea oiieiieaii/iuo no?oeoo? a?naieaea eiaeey
naea?aeeaaaony ionoonoaeai iieoeciee?othueo iiaeeiaeae a nayce n iaeie
oe?eiie cai?auaiiie ciiu a?naieaea eiaeey. Neaaeoao oaeaea ioiaoeoue
iaaeinoaoi/ioth iaoaie/aneoth i?i/iinoue iaoa?eaea. Oeacaiiua i?iaeaiu
iiaoo auoue i?aiaeieaiu, ii e?aeiae ia?a /anoe/ii, i?e
aaoa?iyieoaeneaeueiii au?aueaaiee a?naieaea eiaeey. A yoii neo/aa, eae
i?aaeei, yieoaeneth i?iaiaeyo ia iiaeeiaeeao a?naieaea aaeeey n
i?eaioaoeeae iiaa?oiinoe (001).
Cia/eoaeueiia ?anniaeaniaaiea ia?aiao?ia ?aoaoie a?naieaea eiaeey e
a?naieaea aaeeey 7.4% i?eaiaeeo i?e iieo/aiee aaoa?iyieoaeneaeueiuo
ieaiie a?naieaea eiaeey e a?naieaea aaeeey iaoiaeaie aacio?ainii?oiie e
aeeaeeioaciie yieoaenee e oi?ie?iaaieth ia?aoiaeiiai neiy cia/eoaeueiie
oieueiu e e aieueoae ieioiinoe ii?oieiae/aneeo e no?oeoo?iuo aeaoaeoia.
Yoi iaoneiaeaii ia?aie/aieyie eae oece/aneiai oa?aeoa?a, i?enouei
aeaiiui yieoaeneaeueiui oaoiieiaeyi, oae e ia?aie/aieyi, naycaiiuie n
“iaiaaethaeaaiinoueth” i?ioeanna ?inoa.
Yeaeo?ioece/aneea naienoaa iauaiiiai a?naieaea eiaeey.
Ciiiay no?oeoo?a a?naieaea eiaeey.
Ciia i?iaiaeeiinoe.
A?naieae eiaeey yaeyaony i?yiiciiiui iieoi?iaiaeieeii, o eioi?iai ciia
i?iaiaeeiinoe noa?e/anee neiiao?e/ia e ieieioi aa iaoiaeeony a oeaio?a
ciiu A?eeethyia. Aaeece ieieioia e?eaecia ciiu aaeeea, aneaaenoaea /aai
yooaeoeaiay ianna yeaeo?iia i/aiue iaea e ?aaia me(0.026 m0.
?en.1. Caaeneiinoue yooaeoeaiie iannu yeaeo?iia io eiioeaio?aoeee
yeaeo?iiia.
Aaeaioiay ciia.
=0 a iai?aaeaiee [111] ia aaee/eio 0.008 a-1a .
=0. Eiaaony oaeaea o?aouey ciia, iieiaeaiea eioi?ie iaoneiaeaii
niei-i?aeoaeueiui acaeiiaeaenoaeai. Aaee/eia yooaeoeaiuo iann e
iaeioi?ua oa?aeoa?enoeee ciiiie no?oeoo?u i?eaaaeaiu ieaea:
Oe?eia cai?auaiiie ciiu Eg=0.35 yA (300 E)
Oaiia?aoo?iay caaeneiinoue Eg=(0.44-2.8(10-4T)yA
Yooaeoeaiay ianna yeaeo?iia me*=0.026 m0
Yooaeoeaiay ianna oyaeaeie aeu?ee mp*=0.41 m0
Yooaeoeaiay ianna eaaeie aeu?ee mi*=0.025 m0
Yooaeoeaiay ianna aeu?ee a ciia
niei-i?aeoaeueiiai ?anuaieaiey mj*=0.083 m0
Yia?aey niei-i?aeoaeueiiai ?anuaieaiey (Eg=0.43 yA.
Iioe/aneea naienoaa a?naieaea eiaeey.
Iaeaieueoee i?aeoe/aneee eioa?an i?aaenoaaeyao niaeo?aeueiue aeeaiacii a
aeece e?ay nianoaaiiiai iiaeiuaiey. Eiaiii a yoie iaeanoe aeeei aiei
(3-5 iei) ?aaioatho oioii?eaiieee, ecaioiaeaiiua ec yieoaeneaeueiuo
no?oeoo? a?naieaea eiaeey.
Iiaeiuaiea naaoa a oienoii iieoi?iaiaeieea iiaeao auoue iienaii
au?aaeaieai
I=I0(1-k)(exp(-(X), (1)
aaea I0 – eioaineaiinoue iaaeathuaai eceo/aiey, k – eiyooeoeeaio
io?aaeaiey, ( – eiyooeoeeaio iiaeiuaiey, X – eii?aeeiaoa.
Aaee/eia eiyooeoeeaioa io?aaeaiey a aeece e?ay nianoaaiiiai iiaeiuaiey
ia i?aauoaao 30-40% e iiaeao auoue ioeaiaia ec au?aaeaiey
(2)
aaea n – iieacaoaeue i?aeiieaiey.
A iieoi?iaiaeieeao, eae i?aaeei, iaeiia?aiaiii ?aaioaao ianeieueei
iaoaieciia iiaeiuaiey naaoa. Iniiaiua ec ieo:
nianoaaiiia eee ooiaeaiaioaeueiia iiaeiuaiea;
yeneiiiia;
iiaeiuaiea naiaiaeiuie iineoaeyie;
?aoao/aoia;
aioo?eciiiia.
Iieiue eiyooeoeeaio iiaeiuaiey a neo/aa iaeiia?aiaiiiai o/anoey
ianeieueeeo iaoaieciia iiaeiuaiey ?aaai:
. (3)
A oeacaiiii aeeaiaciia aeeei aiei 3-5 iei e iau/ii eniieuecoaiie iaeanoe
oaiia?aoo? 77-300 E ?aaioaao a iniiaiii aeaa iaoaiecia: nianoaaiiia
iiaeiuaiea e iiaeiuaiea ia naiaiaeiuo iineoaeyo. A iaeanoe nianoaaiiiai
iiaeiuaiey i?yiiciiiay no?oeoo?a a?naieaea eiaeey iaoneaaeeaaao ?aceoth
caaeneiinoue eiyooeoeeaioa iiaeiuaiey io yia?aee:
,
(4)
aaea e – ca?yae yeaeo?iia, h – iinoiyiiay Ieaiea, n – nei?inoue naaoa. A
a?naieaea eiaeey n-oeia aaee/eia Ag=0.35 yA i?e O=300 E, a iieacaoaeue
noaiaie a au?aaeaiee aeey (=0.85 n=1, a iaoa?eaea ?-oeia Ag=0.36 yA, a
n=0.5.
A eaae?iaaiiuo ia?acoeao ca n/ao iaeie yooaeoeaiie iannu yeaeo?iiia n
oaaee/aieai eiioeaio?aoeee iineoaeae i?ienoiaeeo auno?ia caiieiaiea ciiu
i?iaiaeeiinoe yeaeo?iiaie, a neaaenoaee /aai o?iaaiue Oa?ie iaoiaeeony
auoa aeia ciiu i?iaiaeeiinoe ia aaee/eio yia?aee (En. A yoii neo/aa
eiyooeoeeaio iiaeiuaiey iienuaaaony au?aaeaieai
(5)
o.a. i?ienoiaeeo naeaea e?ay iiaeiuaiey a noi?iio aieueoeo yia?aee.
Iiaeiuaiea ia naiaiaeiuo iineoaeyo a iaeanoe aeeei aiei, i?aauoathueo 3
iei, oioy neaaaa, /ai nianoaaiiia, oai ia iaiaa iiaeao ea?aoue
cia/eoaeueioth ?ieue a neeueii eaae?iaaiiuo ia?acoeao. A yoii neo/aa (
iienuaaaony au?aaeaieai
(6)
Ioeaiee iieacuaatho, /oi i?e (=3 iei e n=1018 ni-3 a ieanoeia a?naieaea
eiaeey oieueiie 400 iei iiaeioeony ieiei 80% naaoiaiai iioiea.
Iiaeaeaeiinoue a a?naieaea eiaeey.
Iiaeaeaeiinoue iineoaeae ca?yaea a e?enoaeeao a?naieaea eiaeey
ia?aie/eaaaony ianeieueeeie iaoaieciaie ?annaeaaiey:
?annayieai ia iioe/aneeo e aeonoe/aneeo oiiiiao;
ia eiiiuo i?eianyo;
ia iaeo?aeueiuo i?eianyo:
ia aeaoaeoao e?enoaeee/aneie ?aoaoee (aeeneieaoeeyo):
ia iineoaeyo ca?yaea.
A i?eaeeaeaiee a?aiaie ?aeaenaoeee ( iiaeaeaeiinoue au/eneyaony ii
oi?ioea
(7)
aaea ( – au/eneyaony aeey eaaeaeiai iaoaiecia ?annaeaaiey ioaeaeueii.
A iiiie?enoaeee/aneeo iauaiiuo ia?acoeao a?naieaea eiaeey aeinoeaioou
neaaeothuea cia/aiey iiaeaeaeiinoe:
n-oei, (=30000 ni2/An(300E),
?-oei, (=450 ni2/An(300E).
N?inoii eiioeaio?aoeeae i?eianae iiaeaeaeiinoue iaaeaao.
Iaoiaeu aeoaieie i/enoee eiaeey e iuoueyea.
Aeey iieo/aiey iiiie?enoaeeia a?naieaea eiaeey n aunieeie e noaaeeueiuie
yeaeo?ioece/aneeie ia?aiao?aie iaiaoiaeeii eniieueciaaoue auniei/enoua
enoiaeiua iaoa?eaeu.
A?naieae eiaeey n o?oaeii iiaeaeaaony i/enoea e?enoaeeecaoeeiiiuie
iaoiaeaie a neaaenoaea aunieiai aeaaeaiey aeennioeeaoeee i?e oaiia?aoo?a
ieaaeaiey, aunieie oeie/aneie aeoeaiinoe eiaeey e iuoueyea i?e
oaiia?aoo?a au?aueaaiey e aeeceeo e aaeeieoea cia/aiee eiyooeoeeaioia
?ani?aaeaeaiey iniiaiuo i?eianae a enoiaeiuo yeaiaioao, oaeeo eae na?a,
naeai, oeeie e ae?., a oaeaea ec-ca caa?yciaieai e?aiieai ec eaa?oea i?e
aunieie oaiia?aoo?a.
Iaoiaeu aeoaieie i/enoee eiaeey.
A eiaeee i?aaeiacia/aiiii aeey neioaca iieoi?iaiaeieeiauo niaaeeiaiee,
eeieoe?othueie yaeythony neaaeothuea i?eiane: aethieiee, iaaeue, iaaiee,
e?aiiee, na?aa?i, eaeueoeee, na?aa?i e na?a.
I?eiaiyaiua iaoiaeu i/enoee eiaeey iiaeii ?acaeaeeoue ia oeie/aneea e
oece/aneea. Iaoiaeu ia?aie a?oiiu – noaoei?eaeiue, yeno?aeoeeiiiue,
yeaeo?ieeoe/aneee e ia?ae?enoaeeecaoeey nieae ec ?anoai?ia. Oeie/aneea
iaoiaeu o?aaotho iaee/ey naa?o/enouo aniiiiaaoaeueiuo iaoa?eaeia eeneio,
uaei/ae, i?aaie/aneeo ?anoai?eoaeae. Iaoiaeu aoi?ie a?oiiu (oece/aneea)
– oa?iiia?aaioea, ?aeoeoeeaoeey, auoyaeaaiea ec ?anieaaa e ciiiay ieaaea
– aeeth/atho aicaeaenoaea ia eiaeee eaeeo-eeai aniiiiaaoaeueiuo
oeie/aneeo ?aaeoeaia.
I?e i?eiaiaiee aeey i?eaioiaeaiee yeaeo?ieeoa iniai /enoiai iao?ey
yeaeo?ieeoe/aneia ?aoeie?iaaiea eiaeey iicaieyao iieo/eoue eiaeee
/enoioie 99,9999% (auoiae ii oieo 90%).
Noaoei?eaeiue iaoiae iieo/aiey eiaeey aunieie /enoiou iicaieyao
iieo/aoue eiaeee /enoioie 99,9999%.
Aeey oniaoiiai inouanoaeaiey iaoiaea aaeooiiie oa?iiia?aaioee
iaiaoiaeeii auiieiaiey neaaeothueo oneiaee:
iaoa?eae eiioaeia?a aeieaeai auoue aeinoaoi/ii /enoui e ia
acaeiiaeaenoaiaaoue n ?anieaaeaiiii eiaeeai;
oa?iiia?aaioea aeieaeia i?iaiaeeony a oneiaeyo aunieiai aaeooia (10-6 ii
?o.no.) e a inoaoi/iie aoiinoa?a, ia niaea?aeauae oaeaaiaei?iaeia.
Oa?iiia?aaioea eiaeey i?iaiaeeony a eioa?aaea oaiia?aoo? 500-900IN.
Aa?oiee i?aaeae oaiia?aoo?iiai eioa?aaea ia?aie/eaaaony acaeiiaeaenoaeai
?anieaaeaiiiai eiaeey n eaa?oeai e cia/eoaeueiui oaaee/aiea oi?oainoe
ia?a eiaeey.
Aaeooiiay oa?iiia?aaioea iicaieyao iieo/eoue eiaeee /enoioie 99,9999%.
Ciiiay ieaaea yeaeo?e/anee ?aoeie?iaaiiiai eiaeey iicaieyao
inouanoaeyoue aeaeueiaeooth i/enoeo aai io i?eianae.
I?e auoyaeaaiee e?enoaeeia eiaeey ii iaoiaeo *io?aeueneiai yooaeoeaiay
i/enoea i?ienoiaeeo i?e au?aueaaiee e?enoaeeia n aieueoeie nei?inoyie
a?auaiey cao?aaee (60-100 ia/iei) e nei?inoueth ?inoa 2ni//. *enoioa
eiaeey au?auaiiiai ii iaoiaeo *io?aeueneiai, auoa 99,9999%. I?eiaiaiea
oieueei iaeiiai niiniaa i/enoee eiaeey iiaeao ieacaoueny iaaeinoaoi/iui,
e aiciiaeii iio?aaoaony ni/aoaiea ?acee/iuo niiniaia (oece/aneeo e
oeie/aneeo).
Iaoiaeu iieo/aiey iuoueyea e aai niaaeeiaiee aunieie noaiaie /enoiou.
Iauaa niaea?aeaiea i?eianae a iuoueyea eniieuecoaiii aeey neioaca
a?naieaea eiaeey, ia aeieaeii i?aauoaoue 1(10-5%, noiia?iia niaea?aeaiea
naeaia e oaeeo?a aeieaeii auoue
a ?aaeoeeiiiie eaia?a
SiCl4 ( SiCl2+2HCl, (19)
n enoi/iee a?naieaea eiaeey
2InAs+ SiCl4+ SiCl2(2Si+2InCl+1/4As4, (20)
2InAs+SiCl4(4InCl+As4, (21)
ia iiaeeiaeea
2InCl+As2+H2(2InAs+HCl. (22)
Oao?aoei?eae e?aiiey eae o?ainii?oiue aaaio a aacio?ainii?oiuo
?aaeoeeyo eiaao i?aeiouanoai ia?aae ae?oaeie oei?eaeaie:
iiaeao auoue iieo/ai iniai aunieie noaiaie /enoiou;
eiaao aunieia ia?oeeaeueiia aeaaeaiea i?e ioiineoaeueii iaaunieeo
oaiia?aoo?ao;
ia aeaao aeiii?iuo o?iaiae a yieoaeneaeueiii neia.
Ie?ieec IIN.
Cia/eoaeueiue eioa?an i?aaenoaaeytho ?aaeoeee iaoaeeii?aaie/aneeo
niaaeeiaiee. I?ioeannu oaeiai ?iaea i?iaiaeyony i?e ieceeo oaiia?aoo?ao,
/oi nouanoaaiii iiauoaao /enoioo, neioace?oaiiai niaaeeiaiey, e?iia oiai
neioac iiiaeo IIN iineo ecae?aoaeueiue oa?aeoa?, a oae eae oeaeue ?yae
i?eianae, aeeythueo ia yeaeo?ioece/aneea ia?aiao?u iieoi?iaiaeieeiauo
iaoa?eaeia, ia ia?acotho aiaeiae/iuo niaaeeiaiee, oi oaea a i?ioeanna
naiiai neioaca IIN i?ienoiaeeo i/enoea io iaaeaeaoaeueiuo i?eianae aei
o?iaiy 10-5-10-6 aan %.
Iniiaiuie ?aaeoeeyie, i?eaiaeyueie e ia?aciaaieth a?naieaea eiaeey i?e
o/anoee IIN, iiaeii iacaaoue neaaeothuea:
oa?ie/aneia ?aceiaeaiea eiaeeaeaeoaeueiiai IIN ii noaia
RnInAs(InAs+nRH (23)
?aceiaeaiea i?ienoiaeeo a aoiinoa?a aiaei?iaea;
?aaeoeee yeaiaioii?aaie/aneeo i?iecaiaeiuo, eiathueie iiaeaeaeiue
aiaei?iae ii noaia
(C2H5)3In+AsH3(InAs+3C2H6; (24)
niaianoiia ?aceiaeaiea aeaoo eee aieaa IIN eee aeae?eaeia, i?eaiaeyuaa e
ia?aciaaieth oaa?aeuo ?anoai?ao ia eo iniiaa.
A ea/anoaa enoi/ieeia eiaeey e iuoueyea aeey au?aueaaiey yieoaeneaeueiuo
no?oeoo? eniieuecothony iaoee- e yoee i?iecaiaeiua, yoe?aou o?eiaoee
eiaeey. Iineaaeiea niaaeeiaiey a n?aaiaiee n o?eiaoeeeiaeey aieaa
oaoiieiae/iu, oae eae iaiaa ?aaeoeeiiii niiniaiu e oaeiaiaa eae a
i?ioeanna i/enoee, oae e i?e i?iaaaeaiee i?ioeanna yieoaeneaeueiiai
ia?aueaaiey.
Eae i?aaeei, i?ioeann inaaeaeaiey oa?ie/aneei ?aceiaeaieai IIN
inouanoaeyaony a aoiinoa?a aiaei?iaea. Aiciiaeii i?iaaaeaiea i?ioeanna
oaeaea a niane aiaei?iaea e acioa eee oieueei a acioa.
A caaeneiinoe io oneiaee i?iaaaeaiey i?ioeanna oa?ie/aneiai ?aceiaeaiey
a?naieae eiaeey iiaeao auoue iieo/ai eae a aeaea ii?ioea, oae e a aeaea
yieoaeneaeueii au?auaiiuo neiaa.
Iaeiei ec i?aeiouanoa iaoiaea yaeyaony eaaeinoue i?iaaaeaiey eaae?iaaiey
a i?ioeanna yieoaeneaeueiiai ia?aueaaiey. N yoie oeaeueth i?eiaiytho
oe?ieee anni?oeiaio aeeeeueiuo niaaeeiaiee yeaiaioia.
Ec ?anniio?aiiuo aeeaa?aii ia?oeeaeueiuo aeaaeaiee aeey oei?eaeiiai,
oei?eaeii-aeae?eaeiiai iaoiaea e ie?ieeca o?eiaoeeeiaeey n a?neiii a
aiaei?iaea neaaeoao, /oi iaeneiaeueioth iaeanoue inaaeaeaiey a?naieaea
eiaeey eiaao nenoaia (CH3)3In-(CH3)3As-H2, ieieiaeueioth nenoaia
In-AsCl3-AsH3-H2. Ec yoiai neaaeoao, /oi n o/aoii ia?aie/aiee naycaiiuo
n eeiaoeeie, i?ioeann iieo/aiey yieoaeneaeueiuo no?oeoo? a?naieaea
eiaeey n eniieueciaaieai IIN iaiaa e?eoe/ai e oaiia?aoo?a, aeaaeaieth e
eiioeaio?aoeee ?aaaaioia, a inouanoaeaiea yoiai i?ioeanna aiciiaeii a
aieaa oe?ieii aeeaiaciia, /ai a neo/aa oei?eaeiiai iaoiaea.
Aaaeiui aii?inii n oi/ee c?aiey ?acaeoey iaoiaea iieo/aiey
yieoaeneaeueiuo no?oeoo? a?naieaea eiaeey n eniieueciaaieai IIN yaeyaony
aiciiaeiinoue caa?yciaiey neiaa oaea?iaeii. Oa?iiaeeiaie/aneei aiaeecii
i?ioeanna iieo/aiey a?naieaea eiaeey ii ?aaeoeee
(CH3)3In+AsH3(InAs+3CH4 (25)
iieacaii, /oi ia?aoiae oaea?iaea a neie a?naieaea eiaeey ca n/ao
aoi?e/iuo i?aa?auaiee oaeaaiaei?iaeia (iaoaia, yoaia, yoeeaia) a
i?enoonoaee ecauoea a?neia e aiaei?iaea iaaiciiaeii.
Iieo/aiea yieoaeneaeueiuo iieoi?iaiaeieeiauo no?oeoo? n eniieueciaaieai
IIN ioe?uaaao aiciiaeiinoe noeioee?iaaiey i?ioeannia aacioaciiai
au?aueaaiey iiae aicaeaenoaeai yeaeo?iiaaieoiiai iiey, eaca?iiai e
oeueo?aoeieaoiaiai iaeo/aiey.
Iniiaiuie iniaaiiinoyie e i?aeiouanoaaie iaoiaea yaeythony:
i?inoioa eiino?oeoeee ?aaeoi?a n iaeiie aunieioaiia?aoo?iie ciiie;
aieaa ieceay oaiia?aoo?a i?ioeanna, /oi oiaiueoaao yooaeo
naiieaae?iaaiey, oeo/oaao i?ioeeue ?ani?aaeaeaiey eiioeaio?aoeee ii
oieueia neiy;
aiciiaeiinoue iacaaeneiie ?aaoee?iaee enoiaeiuo eiiiiiaioia, /oi
iaania/eaaao aiciiaeiinoue iieo/aiey yieoaeneaeueiuo neiaa n ethaui
caaeaiiui i?ioeeai ?ani?aaeaeaiey eiioeaio?aoeee iineoaeae ca?yaea ii
oieueia neiy;
ionoonoaea o?aayueo aaaioia (HNl) a nenoaia iicaieyao inouanoaeyoue
?ino yieoaeneaeueiuo neiaa ia aaoa?iiiaeeiaeeao;
aiciiaeiinoue iieo/aoue noaiee?iiiua yieoaeneaeueiua neie (0.2-0.8 iei),
aaee/eia ia?aoiaeiie iaeanoe iiaeeiaeea-neie ninoaaeyao 0.03-0.1 iei.
AEeaeeioaciay yieoaeney a?naieaea eiaeey.
Ianiio?y ia oi, /oi iieo/aiea yieoaeneaeueiuo neiaa ec ia?iaie oacu
yaeyaony iniiaiui iai?aaeaieai a oaoiieiaee ecaioiaeaiey
iieoi?iaiaeieeiauo i?eai?ia i?ioeann yieoaeneaeueiiai inoa ec aeeaeeie
oacu a ?yaea neo/aaa iaeaaeaao iaeioi?uie i?aeiouanoaaie e i?eia?o
i?e iieo/aiee neeueiieaae?iaaiiuo neiaa;
p-n ia?aoiaeia aunieiai ea/anoaa.
Au?aueaaiea yieoaeneaeueiuo neiaa a?naieaea eiaeey i?iecaiaeeony n
eniieueciaaieai eaaeiieaaeeo iaoaeeia eee eo nianae, eioi?ua iiaoo auoue
eae aeiii?iuie oae e aeoeaioi?iuie i?eianyie a iieo/aaiuo neiyo.
Ia ea/anoai e yeaeo?ioece/aneea naienoaa yieoaeneaeueiuo neiaa,
au?aueaaaiuo ec aeeaeeie oacu, aeeytho neaaeothuea oaeoi?u:
nei?inoue ioeaaeaeaiey ?anoai?a-?anieaaa;
ia/aeueiay ?aaiiaaniay oaiia?aoo?a ?anoai?a-?anieaaa;
oaaee/aiea aana ?anoai?ythuaai aauanoaa naa?o ?aaiiaaniiai cia/aiey;
niioiioaiea iauaia ?anieaaa e eiioaeoe?othuae ieiuaaee iiaa?oiinoe
iiaeeiaeee n ?anieaaii;
oeceei-oeie/aneay i?e?iaea ?anoai?eoaey e ?anoai?eiiai aauanoaa;
iaoaeeia?aoe/aneia ninoiyiea iiaa?oiinoe iiaeeiaeee;
/enoioa eniieuecoaiuo a i?ioeanna aauanoa e eiino?oeoeeiiiuo iaoa?eaeia.
Ia ?en.5 i?aaenoaaeaia noaia onoaiiaee aeey i?iaaaeaiey i?ioeanna
yieoaeneaeueiiai ?inoa ec aeeaeeie oacu, a ia ?en.6 ecia?aaeaia e?eaay
iaa?aaa ia/e a oiaea i?ioeanna.
?en. 6. Oaiia?aoo?iue i?ioeeue i?ioeanna yieoaeneaeueiiai ?inoa InAs ec
aeeaeeie oacu.
Yeaeo?iiia?aoe/aneea e iaoaeeia?aoe/aneea enneaaeiaaiey onoaiiaeee, /oi
neie au?auaiiua a aunieioaiia?aoo?iuo iaeanoyo, eiatho aieaa
niaa?oaiioth no?oeoo?o ii n?aaiaieth n oaie, eioi?ua eioi?ua iieo/aiu a
ieceioaiia?aoo?iuo iaeanoyo.
Iieaeoey?ii eo/aaay yieoaeney a?naieaea eiaeey.
IEY - iaeei ec nia?aiaiiuo e iiiai iaauathueo oaoiieiae/aneeo iaoiaeia
au?aueaaiey oiieeo iiiie?enoaeee/aneeo iieoi?iaiaeieeiauo no?oeoo?.
Aeey inaaeaeaiey yieoaeneaeueiuo ieaiie a IEY eniieuecothony oi?aaeyaiia
enia?aiea ec oa?ie/aneiai enoi/ieea (eee iaeiia?aiaiiia enia?aiea ec
ianeieueeeo enoi/ieeia) a oneiaeyo naa?oaunieiai aaeooia. Oeie/iay
onoaiiaea IEY iieacaia ia ?en. 7.
?en.7. Noaia onoaiiaee aeey IEY: 1-iieaeoey?iua eee aoiiiua enoi/ieee n
caneiieaie; 2-iniiaiay caneiiea; 3-iiaeeiaeea; 4-aiaeeoe/aneee aeie.
Aea?aeaoaeue iiaeeiaeee e enoi/ieee aoiiiuo eee iieaeoey?iuo io/eia -
enia?eoaeueiua y/aeee - iaoiaeyony a oneiaeyo naa?oaunieiai aaeooia,
iieo/aaiiai eiiiie ioea/eie. Enia?eoaeueiua y/aeee i?aaenoaaeytho niaie
iaaieueoea iaa?aaaaiua eaia?u (“noaeaiu”), ioe?uoua a noi?iio
iiaeeiaeee. N oeaeueth oiaiueoaiey oaieiaiai acaeiiaeaenoaey e
i?aaeioa?auaiey acaeiiiai caa?yciaiey enia?eoaeueiua y/aeee ?acaeaeytho
ye?aiaie, ioeaaeaeaaiuie aeeaeeei acioii. Oaeie aea ye?ai iiiauatho
iicaaee aea?aeaoaey ia?acoea aeey oiaiueoaiey caa?yciaiey inoaoi/iie
aoiinoa?u a eaia?a. N yoie aea oeaeueth aea?aeaoaee enoi/ieeia,
iiaeeiaeee ecaioaaeeaatho ec iaoa?eaeia n ieceei aeaaeaieai ia?ia,
oaeeo, eae aeoiae, oaioae, a?aoeo. ?aai/ee aaeooi a ?inoiaie eaia?a
aeecie e 10-8Ia.
Aeey eiio?iey iieaeoey?iuo eee aoiiiuo io/eia e au?aueaaaiuo neiaa
iaiin?aaenoaaiii a i?ioeanna au?aueaaiey eniieuecothony aeeo?aeoiiao?
yeaeo?iiia aunieeo yia?aee “ia io?aaeaiea”, iann-niaeo?iiao?,
iaea-niaeo?iiao? e eiiiue aaeooiiao?, eiio?iee?othuee iaeo?aeueiua
aoiiiua io/ee.
Aiciiaeiinoue eiio?iey iaiin?aaenoaaiii a i?ioeanna au?aueaaiey - iaeii
ec cia/eoaeueiuo i?aeiouanoa IEY. A neo/aa IEY oaiia?aoo?a iiaeeiaeee
iiaeao auoue n?aaieoaeueii iaaunieie (500-600IN), /oi i?eaiaeeo e ieceie
nei?inoe ?inoa (ii?yaeea 0.1 ii/n) e ieceie nei?inoe iauaiiie aeeooocee.
Iniiaiay caneiiea e caneiiee enia?eoaeueiuo y/aae iicaieytho i/aiue
auno?i ia?ae?uaaoue io/ee. Yoi aeaao aiciiaeiinoue eciaiyoue ninoaa eee
o?iaaiue eaae?iaaiey au?aueaaaiuo no?oeoo? aoeaaeueii ia iaaeaoiiiii
?annoiyiee.
I?e au?aueaaiee neiaa a?naieaea eiaeey iaoiaeii IEY aoiiu eiaeey e
iieaeoeu As2 e As4 iiiaaeatho ia iiaeeiaeeo a?naieaea aaeeey (100). E
iiaa?oiinoe i?eeeiatho i?aeoe/anee ana aoiiu eiaeey. Iioie aoiiia
iuoueyea yaeyaony ecauoi/iui e oieueei iaeei aoii As ia eaaeaeue aoii In
inoaaony ia iiaeeiaeea, oi?ie?oy noaoeiiao?e/aneee ninoaa au?aueaaaiiai
neiy. Eioaineaiinoue iieaeoey?iuo io/eia e, neaaeiaaoaeueii, nei?inoue
inaaeaeaiey iiaeii aa?uee?iaaoue, iaiyy oaiia?aoo?o eiaeeaaiai
enoi/ieea. Iau/ii ieioiinoue iioiea eiaeey aeecea e 1015 aoii.(ni2(n), a
iuoueyea iia a 5-10 ?ac auoa.
A ea/anoaa aeiii?ia i?e au?aueaaiee a?naieaea eiaeey iaoiaeii IEY
eniieuecotho yeaiaiou IV a?oii, oaeea, eae Si, Ge e Sn. Iie iiaoo
aoiaeeoue a iiae?aoaoeo eiaeey eee iuoueyea, e oei eaae?iaaiey aoaeao
caaeneoue io niioiioaiey aaeainee eiaeey e iuoueyea. Iaeiaiaa
/oanoaeoaeueii e yoiio niioiioaieth ieiai, aaaaeaiea eioi?iai aeaao
iaoa?eae n-oeia. Naiie ?ani?ino?aiaiiie aeiii?iie i?eianueth,
ii-aeaeeiiio, e?aiiee, i?e aai eniieueciaaiee aeinoeaaaony iaeaieaa
aunieay iiaeaeaeiinoue i?e oaiia?aoo?a aeeaeeiai acioa, eioi?ay iau/ii
n/eoaaony iniiaiui ia?aiao?ii, oa?aeoa?ecothuei ea/anoai a?naieaea
eiaeey.
Eiioeaio?aoeey yeaeo?iiia a neiyo a?naieaea eiaeey, au?auaiiuo iaoiaeii
IEY, iiaeao i?aauoaoue 5(1018 ni-3, /oi cia/eoaeueii aieueoa oie
eiioeaio?aoeee, eioi?ay aeinoeaaaony i?e eniieueciaaiee aacioaciie
yieoaenee.
Aua iaeiei i?aeiouanoaii IEY yaeyaony naeaaeeaaiea iiaa?oiinoe a?naieaea
eiaeey a i?ioeanna ?inoa. Aeaaiaea?y yoiio naienoao iaoiae IEY iniaaiii
oaeiaii eniieueciaaoue i?e au?aueaaiee aaoa?iia?aoiaeia, naa?o?aoaoie e
iiiaineieiuo no?oeoo?. Eae e a neo/aa inoaeueiuo yieoaeneaeueiuo
iaoiaeia, ?aoathuei aeey ea/anoaa aoaeouae ieaiee yaeyaony ea/anoai
i?eaioiaeaiey iiaeeiaeee.
Caeeth/aiea.
?acoeueoaou n?aaiaiey ?acee/iuo iaoiaeia yieoaeneaeueiiai au?aueaaiey
i?eaaaeaiu a oaae. 1.
Nienie eniieueciaaiiie eeoa?aoo?u:
Aaenn A. Oeceea aaeueaaiiiaaieoiuo iieoi?iaiaeieeiauo i?eai?ia e eo
i?eiaiaiea/Ia?. n iai. iiae ?aae. Oiia?eee I. E. I.: Yia?aey, 1974. 384
n.
Enneaaeiaaiea i?eaiaeiinoe aiii- e aaoa?iyieoaeneaeueiuo neiaa GaAs,
InAs e InSb aeey nicaeaiey aeao/eeia Oieea ?acee/iuo iai?aaeaiee/
Ii?oiie A. ss., Iinoiuo I. A., Oeoiiia A. E., Aanniiia A. E.- A ei.:
Neioac e ?ino niaa?oaiiuo e?enoaeeia e ieaiie iieoi?iaiaeieeia.
Iiaineae?ne: Iaoea, Neae?neia ioaeaeaiea, 1981, n. 127-132.
Aa?eiaei E. E., Aeaan A. N., Eeoieoeeee I. E. Aaeueaaiiiaaieoiua yooaeou
e eo eniieueciaaiea. I.: Iaoeiino?iaiea, 1967. 72 n.
Aeaenaiae?ia E. I. Aaoa?iyieoaeneaeueiia inaaeaeaiea iieoi?iaiaeieeiauo
ieaiie.- Iee?iyeaeo?iieea, 1972, o. 1, ? 2, n. 120-133.
I?iaeaiu yieoaenee iieoi?iaiaeieeiauo ieaiie/ Iiae ?aae. Aeaenaiae?iaa
E.I. Iiaineae?ne: Iaoea, Neae?neia ioaeaeaiea, 1972. 226 n.
Aiae?aaa A. I., Aeieaeiia E. I., O?aoueyeia Ae. I. AEeaeeinoiay
yieoaeney a oaoiieiaee iieoi?iaiaeieeiauo i?eai?ia. I.: Niaaoneia
?aaeei, 1975. 328 n.
Iaeaoiee E. N., Iaie?ia E. E. Yieoaeneaeueiua ieaiee. I.: Iaoea, 1971.
480 n.
Iaci?u ii yeaeo?iiiie oaoieea: ?acaeoea oai?ee e i?aeoeee
yieoaeneaeueiiai ia?aueaaiey ec aeeaeeie oacu ia i?eia?a GaP/Oaaei?ia A.
A., Ieiaaeaeeiia I. N., Iaaneee I. A., Iaeeioeiaa E. ?. I., 1980. Aui. 3
(724). Na?. 6. “Iaoa?eaeu”. 22 n.
*enoyeia Ae.TH., ?aeeia TH. I. Oeceei-oeie/aneea iniiau oaoiieiaee
iee?iyeaeo?iieee. I.: Iaoaeeo?aey, 1979. 408 n.
Iaci?u ii yeaeo?iiiie oaoieea: Eeiaoeea inaaeaeaiey yieoaeneaeueiuo
neiaa niaaeeiaiee AIIIBV ec aaciaie oacu/No?aeue/aiei N. N., Iaoyo A.
A., I., 11979. Aui. 8 (678). Na?. 6, “Iaoa?eaeu”. 56 n.
Iaci?u ii yeaeo?iiiie oaoieea: Iieaeoey?ii-eo/aaay yieoaeney
(iniaaiiinoe oaoiieiaee e naienoaa ieaiie)/Aeaienia A. A., Naaeioueaa
TH. A., Naie/eei A. I. I., 1980. Aui. 14 (762). Na?. 7, “Oaoiieiaey,
i?aaiecaoeey i?iecaiaenoaa e iai?oaeiaaiea”. 76 n.
Ienai A. O., Yooaiaa?a I. Iniaaiiinoe iieo/aiey aaoa?iyieoaeneaeueiuo
no?oeoo? oeia AIIIBV.- A ei. ?ino e?enoaeeia. I.: Ie?, 1981, n. 9-77.
E?annae A., Iaeuenii A. Naienoaa e i?eiaiaiea ieaiie niaaeeiaiee
yeaiaioia a?oii III e V, iieo/aiiuo yieoaeneae ec aeeaeeie oacu.- A ei.:
Oeceea oiieeo ieaiie. I.: Ie?, 1977, o. 7, n. 58-63.
Wieder H. H. Transport coefficients of InAs epilayers.-Appl. Phys.
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Mc Carthy J. P. Preparation and properties of epitaxial InAs.- Solid-
State Electron, 1967, v. 10, N 7, p. 649-655.
Enneaaeiaaiea ia/aeueiuo noaaeee ?inoa, no?oeoo?iuo e yeaeo?ioece/aneeo
naienoa aaoa?iyieoaeneaeueiuo neiaa InAs ia GaAs/No?aeue/aiei N. N.,
Caoa?ia A. A., Ao?oeieaeue A. E. e ae?.- A ei.: ?ino e eaae?iaaiea
iieoi?iaiaeieeiauo e?enoaeeia e ieaiie. Iiaineae?ne: Iaoea, 1977, /. 2,
n. 98-106.
Molecular beat epitaxial growth of InAs/Yano M., Nogami M., Matsuchima
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Iaaeaeoia I. Oeceea iieoi?iaiaeieeiauo niaaeeiaiee yeaiaioia III e V
a?oii/Ia?. n aiae. iiae ?aae. A. E. Aieoaenath I.: Ie?, 1967. 477 n.
Ai?thiiaa I. A. Neiaeiua aeiaciiiaeiaiua iieoi?iaiaeieee. I.: Niaaoneia
?aaeei, 1968. 267 n.
Oeenoi E., ?ioc-Ein A. Iieoi?iaieieee oeia A3A5/Ia?. n aiae.
I.:EE,1963.324 n.
?acoaaaa A.A., A?eaia A.A., Aeii?a/aa A.A., Naeaiaoei A.A.
Iaoaeeii?aaie/aneea niaaeeiaiey. I.:Iaoea, 1972. 479 n.
Aeae?eaeu, aaeeaeu, IIN iniaie /enoiou. I.: Iaoea,1976.143 n.
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Aeoeae?oaiua i?ioeannu oaoiieiaee iee?iyeaeo?iieee: Iaaeaocianeee
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Ei?ci A.O. e ae?. Ieaiee ec yeaiaioi?aaie/aneeo niaaeeiaiee a
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