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Робототехнические комплексы (РТК) электрофизической обработки (курсовая)

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РОБОТОТЕХНИЧЕСКИЕ КОМПЛЕКСЫ (РТК) ЭЛЕКТРОФИЗИЧЕСКОЙ ОБРАБОТКИ

Современное состояние развития электрофизических методов обработки и
возможность их роботизации

В настоящее время есть перспективы и настоятельная необходимость
широкого внедрения методов упрочнения деталей за счет нанесения
плазменно-ионных покрытий, ионного легирования, лазерной закалки и
модификации, а также комбинированных технологий упрочнения. Все это
обусловлено тем, что запасы легирующих элементов вольфрама, хрома,
никеля и других металлов практически иссякли во всех странах (исключение
составляет Китай, где вольфрам добывается в огромных количествах),
поэтому легирование всего объема конструкции материала тем или иным
элементом становится все более проблематичным, что требует использования
методов упрочнения поверхностных слоев за счет концентрации легирующих
элементов в нем или изменения фазового или кристаллического состояния
поверхностного слоя за счет химико-термической обработки.

Все перечисленные электрофизические методы обработки используются для
обеспечения требуемых характеристик и нуждаются в роботизации и
автоматизации. В то же время для применения ряда металлических покрытий
и химических элементов в обработке необходимо вывести ручной труд из
зоны обработки (по требованиям охраны труда). Это позволяет утверждать,
что роботизация электрофизических технологий является важной и
своевременной задачей.

При нанесении покрытий, ионно-лучевой, светолучевой, электротермической
и других методах обработки деталь или напыляющая головка (имплантер,
лазер) для получения высококачественных деталей подвергаются сложным
манипуляционным движениям. Дальнейшее повышение качества обрабатываемых
деталей не возможно без использования комплексно роботизированных
установок: для нанесения покрытий (на плоские детали и стекла,
диэлектрические детали, детали машиностроения); объемной термической
обработки: установок термомеханической и термоциклической обработки;
установок цементации и азотирования, установок диффузионного насыщения,
установок нанесения покрытий из парогазовой смеси, газового
хромирования, светолучевой, электроннолучевой обработок.

Для реализации практически всех технологий показана возможность создания
гибких производственных робототехнических комплексов. Даны примеры
типовой компоновки гибких технологических робототехнических комплексов
для электрофизической обработки, включающих подготовительные
технологические операции.

Роботизированные установки для напыления тонкослойных покрытий на
поверхность листового материала

Установки представляют собой герметичную камеру из нержавеющей стали,
внутри которой с помощью вакуумной системы и системы напуска газа
создается разреженная газовая среда определенного состава при давлении
10-210-1 Па. В камеру помещены магнетронные распылительные системы,
представляющие собой диод с аномальным тлеющим разрядом в скрещенных
электрическом и магнитном полях. Плазма благодаря магнитному полю
генерируется преимущественно вблизи катода и распыляет его. Образующиеся
частицы осаждаются на обрабатываемой поверхности, создавая
модифицирующее покрытие. Плазма может быть химически активной, и тогда в
ней можно получать оксиды, нитриды и другие соединения металлов с
газами. Это позволяет существенно расширить состав наносимых покрытий.
Установки адаптированы применительно к определенным технологическим
процессам и изготовлены в разных вариантах, например: проекты “Аметист”,
“Аметист-3”, “Яшма”, “Изумруд”, “Опал”.

Преимущества магнетронных систем следующие:

– хорошая адгезия осаждаемых слоев по отношению к поверхности твердого
тела;

– широкий спектр осаждаемых материалов;

– возможность осаждения многослойных покрытий;

– высокая пространственная однородность покрытий;

– большие размеры обрабатываемых образцов;

– широкий круг материалов, на которые могут быть осаждены модифицирующие
покрытия;

– отсутствие высоких температур на обрабатываемой поверхности.

К недостаткам относятся:

– ограничения по осаждению магнитных материалов;

– весьма сложная система управления.

Проект “АМЕТИСТ”

Установка предназначена для тонирования листового стекла и изготовления
зеркал. Отличительная особенность состоит в том, что она снабжена
стационарными распылительными системами, вертикально расположенными в
центре камеры, а также обеспечена возможность сканирования листов
относительно неподвижных магнетронов.

Роботизированная установка “АМЕТИСТ-3”

В отличие от установки “Аметист” роботизированная система “Аметист-3”
обладает двумя манипулируемыми (подвижными) планарными магнетронами. Это
позволяет увеличить загрузку рабочей камеры и производительность
установки. Загрузка и выгрузка листов может осуществляться с помощью
робота IR 601/60 (схват имеет 18 вакуумных присосок).

Роботизированная установка комбинированной обработки “ЯШМА”

Установка для ионно-лучевой обработки и осаждения покрытий “Яшма”
является наиболее совершенной из семейства магнетронных распылительных
систем.

Отличительные особенности ее конструкции позволяют обеспечить следующие
режимы обработки:

– осаждение покрытий из двух видов магнетронных источников: с дискового,
позиционируемого с помощью роботизированной системы, или неподвижного
протяженного, позволяющего проводить напыление последовательно с двух
катодов;

– ионная имплантация газовых ионов;

– осаждение покрытий с ионным ассистированием;

– ионное перемешивание осажденных покрытий ядрами отдачи.

Иными словами, наличие магнетронов двух типов обеспечивает за один цикл
обработки изделия последовательное нанесение трех разных покрытий
(немагнитные материалы, металлы и сплавы). Использование ионного
источника позволяет совместить процесс нанесения пленки с ионной
имплантацией, называемый комбинированной обработкой. Таким образом,
существенно повышается адгезия пленки с подложкой и, следовательно,
улучшается качество покрытия обрабатываемого изделия.

Рабочая камера установки снабжена вращающимся поворотным столом.

Роботизированная установка “ИЗУМРУД”

Установка предназначена для обработки листового стекла. Отличительной
особенностью является то, что она не дискретного, а непрерывного
действия. Установка снабжена входным и выходным шлюзами, которые
позволяют производить ее загрузку без разгерметизации рабочей камеры,
благодаря этому существенно повышается производительность.

На входе и выходе из установки имеется рольганговый участок,
обеспечивающий подачу стекла, которое подается и снимается роботом IR
601/60 с вакуумным схватом.

Роботизированная установка “ОПАЛ”

Установка предназначена для нанесения тонкопленочных покрытий из
металлических материалов, а также их оксидов и нитридов методом
распыления в вакууме металлических катодов плазмой аномального тлеющего
разряда магнетронного типа. Принцип действия установки основан на
дискретном шлюзовании кассеты с листовыми или малогабаритными изделиями
и последующей обработке их в рабочей камере, постоянно находящейся под
вакуумом. Рабочая камера оснащена системами предварительной очистки
изделий потоком ионов и магнетронного распыления. Одновременно
обрабатываются две пластины размерами 2600×1600 мм или обе стороны
малогабаритных штучных изделий. Управление установкой осуществляется с
унифицированного пульта, регламентирующего работу вакуумной системы и
процесс напыления в полуавтоматическом режиме.

Установка и выгрузка кассеты с листовыми или малогабаритными изделиями
осуществляется роботом с вакуумным многопозиционным схватом.

Роботизированная установка магнетронного напыления УМН-8

Установка УМН-8 – это двухкамерная установка непрерывного действия с
шлюзовой загрузкой, двумя параллельно работающими ионно-магнетронными
системами очистки-напыления, содержащими по одному ионному источнику
очистки и по два магнетрона напыления. Свойства получаемых покрытий
варьируются путем изменения толщины пленок, комбинации различных
материалов (оксидов, нитридов металла) и подбора стехиометрии.

Установка может снабжаться робототехническим комплексом для загрузки и
выгрузки деталей.

Роботизированная установка вакуумная металлизационная УВМ-20У

Эта установка предназначена для нанесения алюминиевого покрытия в
вакууме на поверхность изделий из стекла. Процесс металлизации изделий
происходит в вакуумной камере установки при давлении 6,6510-2 Па (510-4
мм рт.ст.) и заключается в конденсации паров алюминия на поверхность
изделий, которые размещаются в контейнере, установленном в камере.

Для открывания камеры, загрузки и выгрузки можно использовать
робототехнический комплекс.

Роботизированная установка вакуумная напылительная УВН-4ЭД

Установка УВН-4ЭД предназначена для нанесения металлических покрытий
(титан, алюминий, нержавеющая сталь, медь) на стекла при производстве
зеркал, а также для тонирования стекол.

Вакуумная металлизационная установка УВН-4ЭД – однокамерная,
периодического действия.

Управление установкой дистанционное. Процесс металлизации изделий
происходит в вакуумной камере установки при давлении 6,6510-2 Па (510-4
мм рт.ст.) и заключается в конденсации паров металла на поверхность
изделий, которые размещаются в контейнере, устанавливаемом в камере.

Загрузка и выгрузка деталей или листового стекла осуществляется с
применением робототехнического комплекса.

Роботизированная установка вакуумная напылительная УВН-4М

Эта установка предназначена для нанесения магнетронным распылением
металлов на поверхность изделий различной геометрической формы, открытой
для прямого попадания на нее испаряемых паров металла.

Установка может быть использована в производстве товаров народного
потребления с улучшенной цветовой и декоративной отделкой поверхности, а
также изделий с повышенной коррозионно- и износостойкостью.

Принцип работы установки основан на распылении материала мишени, которое
осуществляется ионами рабочего газа, образующимися в плазме аномального
тлеющего разряда, в скрещенных электрических и магнитных полях. Загрузка
и выгрузка деталей может осуществляться с помощью робототехнического
комплекса.

Роботизированная установка вакуумная напылительная УВН-4МC-5

Установка предназначена для нанесения декоративного покрытия
магнетронным распылением металлов на поверхность изделий различного
назначения.

Установка может быть использована в производстве товаров народного
потребления, для улучшения цветовой и декоративной поверхности различных
изделий, а также изделий с повышенной коррозионной и износостойкостью.

Установка изготавливается в климатическом исполнении УХЛ, категории 4 по
ГОСТ 15150.

Загрузка и выгрузка деталей может осуществляться с помощью
робототехнического комплекса.

Автоматизированные и роботизированные установки для нанесения покрытий
на диэлектрики

Роботизированная установка “PLASMASCAN”

В установках PlasmaScan ключевая идея заложена в обработке неподвижной
подложки с помощью систем ионной очистки и распыления, установленных на
сканирующей каретке. При этом обеспечивается возможность применения
полного набора распыляемых материалов. Подложка загружается и
выгружается из главной камеры через шлюзовую камеру. В результате
источники очистки и распыления постоянно находятся в зоне высокого
вакуума. Полный цикл напыления включает загрузку подложки, ионно-лучевую
очистку, нанесение всех предусмотренных слоев в одном цикле напыления и
выгрузку подложки.

Установка PlasmaScan незаменима для получения разнообразных и сложных
покрытий как при проведении исследований, так и при мелкосерийном
производстве тонкопленочных структур.

Гибкое и удобное в управлении программное обеспечение служит для
построения производственных сетей, сравнимых по производительности с
установками линейного типа, но значительно превосходящих последние по
гибкости организации производства.

Области применения:

– исследование и производство плоских дисплеев (Flat Panel Display);

– напыление для лазерных элементов;

– производство DWDM и CWDM фильтров;

– производство диэлектрических фильтров и зеркал.

Концепция системы:

1. Протяженный ионно-лучевой источник распыления IBSS или двойной
планарный магнетрон IzoMag с автоматически меняющимися мишенями из
различных материалов.

2. Протяженный ионно-лучевой источник очистки IBCS, используемый для
окончательной очистки поверхности подложки от микрочастиц,
адсорбированных паров газов или молекул воды и подготовки ее к
напылению.

Подложка загружается в рабочую камеру через шлюзовую систему и остается
неподвижной в течение всего процесса напыления. Оптический контроль
осуществляется непосредственно по самой подложке. Датчик кварцевого
контроля также находится в плоскости подложки.

Будучи испытанной с широким перечнем распыляемых материалов (Ti, Ta, Nb,
In-Sn (5%), Al, Mg, Si, Ge, Pb, Cu, Ag и т.д) и комбинацией газов (Ar,
O2, N2, H2, C2H2, C3F8, C3H8, и т.д.), установка PlsamaScan
предоставляет неограниченные возможности для разработки и исследования
новых процессов и тонкопленочных покрытий, что невозможно с
использованием традиционного вакуумного напылительного оборудования.

Система ионно-лучевого распыления IBSS

Назначение. Система IBSS (рис.1) является высокоэффективным инструментом
для качественного нанесения покрытий из металлов, сплавов, окислов,
нитридов методом ионно-лучевого распыления протяженных мишеней в среде
аргона, кислорода, азота, фреонов или смеси этих газов и позволяет
обеспечить:

– нанесение проводников, полупроводников и диэлектриков;

– температуру подложки при распылении не выше 60°С (140°F).

– возможность последовательного распыления нескольких различных
материалов в одном процессе;

– большой динамический диапазон скоростей нанесения

(1 A/сек10 A/сек);

– очень гладкую поверхность пленок;

– высокую плотность структуры пленок;

– однородный состав многокомпонентных пленок;

– возможность распыления мишеней длиной до 3360 мм;

– уровень неравномерности не хуже ±2% по поверхности распыления;

– надежную непрерывную работу;

– стабильные реактивные процессы распыления;

– возможность работы с инертными (Ar, He, Ne, и т.д.) и активными газами
(O2, N2, CFx, CxHy и т.д.);

– косое напыление.

Схема установки IBSS показана на рис.1.
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Рис. 1 – Схема установки IBSS

Применение системы ионно-лучевого распыления IBSS наиболее эффективно в
следующих областях:

– напыление на чувствительные к температуре подложки;

– высококачественные оптические пленки для дисплейной промышленности;

– высокоточная оптика;

– износоустойчивые пленки;

– сверхтонкие пленки (нанотехнологии).

Система распыления IzoMag является высокоэффективным инструментом для
нанесения покрытий из металлов, сплавов, окислов и нитридов методом
двойного магнетронного распыления на переменном токе с частотами 40…80
кГц и магнетронного распыления на постоянном токе.

Система двойного магнетронного распыления на постоянном/переменном токе
IzoMag

Схема установки IzoMag представлена на рис. 2.
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Рис. 2 – Схема установки IzoMag

Основные достоинства и преимущества IzoMag:

– возможность распыления от одного до четырех материалов мишеней в одном
цикле на постоянном токе;

– возможность чередующегося нанесения слоев с низким и высоким
коэффициентом преломления;

– возможность нанесения сплавов переменного состава при одновременном
независимом распылении двух металлических мишеней на постоянном токе;

– возможность распыления мишеней длиной до 1646 мм;

– уровень неравномерности не хуже ±5% по поверхности распыления;

– надежная непрерывная работа.

Применение системы двойного магнетронного распыления IzoMag наиболее
эффективно в следующих областях:

– высококачественные оптические пленки для дисплейной промышленности;

– износоустойчивые пленки;

– декоративные пленки;

– напыление на большие поверхности;

– оптические пленки;

– защитные пленки.

Система ионно-лучевой очистки IBCS

Описание изделия. Система ионно-лучевой очистки IBCS предназначена для
финишной очистки поверхности подложки от молекулярных частиц,
адсорбированных газов, полимерных фрагментов, воды, а также для
активации поверхностных связей подложки в вакуумной камере
непосредственно перед нанесением покрытия. Ионно-лучевая очистка
гарантирует отличную адгезию между первым нанесенным слоем и подложкой.
Ионно-лучевой источник очистки может поставляться с оригинальным блоком
питания IPS-С5K.

Достоинства:

– возможность работы с инертными (Ar) и активными (O2, N2, CFx, CxHy )
газами и их смесями;

– очистка с равномерностью не хуже ±5% подложки с шириной до 3400 мм;

– надежная продолжительная работа;

– давление в вакуумной камере в процессе очистки

10-3…102Па;

– легкая и надежная установка в вакуумные установки поточного и
периодического действия;

– возможность обработки поверхности под различными углами: 10 …90°;

– высокая скорость очистки;

– надежная адгезия без специальных подслоев;

– возможность обрабатывать различные типы подложек (металлические,
полупроводники, диэлектрики, полимеры).

Применение. Система ионно-лучевой очистки (рис.3) обеспечивает
эффективную атомарную очистку и подготовку поверхности подложки при
использовании в следующих областях:

– нанесение покрытий на большие подложки при производстве
плоскопанельных дисплеев (FPD);

– нанесение покрытий на большие подложки при производстве архитектурного
стекла;

– производство кремниевых микроэлектронных чипов;

– оптика и лазеры;

– оптическая электроника и телекоммуникации.
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Рис. 3 – Схема ионно-лучевого источника очистки

Автоматизированная установка “НИКОЛАЙ”

Установка предназначена для получения тонких пленок различных материалов
на стекле, полиэтилене, металле, бумаге методом вакуумного дугового и
магнетронного напыления. Установка позволяет получать полупрозрачные и
зеркальные пленки на листовых и рулонных материалах, изделиях большого
габарита.

Имеется возможность получения многокомпонентных составов (до шести
элементов плюс реактивные газы).

Установка рассчитана на эксплуатацию в условиях умеренного климата.
Управление установкой производится от ЭВМ, что гарантирует высокое
качество и стабильность технологии.

Список литературы

1. Гибкие производственные комплексы /под.ред. П.Н.Белянина. – М.:
Машиностроение, 1984. – 384с.

2. Гибкое автоматическое производство/под.ред. С.А.Майорова. – М.:
Машиностроение, 1985. – 456с.

3. Иванов А.А. ГПС в приборостроении. – М.: Машиностроение,1988. – 282с.

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