Физические основы работы линий задержки на поверхностных акустических волнах (курсовая)

14

ГОУ ВПО “Воронежский государственный технический университет”

Кафедра конструирования и проектирования радиоэлектронных средств

КУРСОВАЯ РАБОТА

по курсу “Физические основы микроэлектроники”

Тема: “Физические основы работы линий задержки на поверхностных
акустических волнах”

Работу выполнил:

студент группы РК-051

Руководитель:

Балашов Ю.С.

Воронеж 2007 г.

Введение

К линейным пассивным акустоэлектронным устройствам относят устройства
частотной фильтрации (фильтры), акустические линии задержки,
согласованные (оптимальные) фильтры, или дисперсионные линии задержки,
кодирующие и декодирующие устройства. Наибольшее распространение
получили акустические фильтры (пьезоэлектрические, электромеханические,
фильтры на объемных волнах и ПАВ). Они применяются в различных системах
связи от радиовещания и телевидения до космической связи и радиолокации
для выделения полезного сигнала на фоне помех, для интегрирования
(накапливания) сигнала с определенными характеристиками, для изменения
частотного спектра сигнала. Акустические линии задержки изготавливаются
на времена задержки от нескольких нс до десятков мс с рабочими частотами
от нескольких МГц до нескольких ГГц. Дисперсионные линии задержки, в
которых время задержки зависит от частоты, применяются в качестве
оптимальных фильтров для обработки линейно частотно-модулированных
сигналов. Включение активных элементов в акустические линии задержки
позволяет усиливать акустические сигналы и превращает их в активные
устройства. Усиление УЗ-сигнала может осуществляться сверхзвуковым
дрейфом носителей. Режим усиления при определенных условиях может быть
переведен в режим генерации УЗ-волны. Этот эффект используется для
создания акустоэлектронных генераторов монохроматических сигналов и
сигналов со сложным спектром.

1. Технические параметры линий задержки на ПАВ

Основные параметры линий задержки на ПАВ – вносимое затухание, входное и
выходное сопротивление, частотная избирательность, полоса пропускаемых
частот. Все эти параметры зависят главным образом от устройства ВШП.
Важной проблемой при создании высокоэффективных акустоэлектронных
компонентов является уменьшение вносимого затухания путем рационального
конструирования ВШП. Необходимо также, чтобы преобразование
электрических сигналов в акустические и обратно происходило в заданной
полосе частот. Это особенно важно широкополосных линий задержки.
Геометрические размеры и форма входного ВШП определяют эффективность
преобразования электрического сигнала в акустическую волну. Для каждой
частоты наиболее эффективное преобразование получается при определенных
размерах ВШП. Число штырей ВШП определяет относительную полосу
пропускаемых частот. Самая широкая полоса будет при ВШП, состоящем из
двух штырей. Чем больше штырей, тем меньше ширина полосы пропускания.
Работа преобразователей на ПАВ ухудшается из-за различных вторичных
явлений, к которым, к примеру, относится отражение волн от границ
электродов. Это отражение – главная причина искажений выходного сигнала
и ухудшения параметров прибора. Вредным следует также считать прямое
прохождение электрического сигнала с входа на выход и передачу сигнала
объемной акустической волной. При снижении затухания и уменьшении
отражений за счет особых конструкций ВШП достигается однонаправленная
передача. Линии задержки на ПАВ обычно вносят затухания 0,5-1,5 дБ.
Верхняя частота, на которой работают такие линии, достигает 2 ГГц.
Относительная полоса пропускания может быть весьма различной: от долей
процента до 100%. Длительность задержки в зависимости от расстояния
между ВШП и от конструкции составляет единицы-сотни микросекунд.
Задержка может быть фиксированной или регулируемой. На торцы
звукопровода обычно наносят звукопоглощающие покрытия, чтобы уменьшить
отражение волн.

Динамический диапазон линий задержки 80-120 дБ. Для хорошей работы линии
задержки важна температурная стабильность её параметров. Температурный
коэффициент задержки (ТКЗ), близкий к нулю, получают, либо применяя
специальный материал для звукопровода (например, кремний с примесями
фосфора), либо делая звукопровод из двух частей, имеющих ТКЗ разного
знака, что создает взаимную компенсацию. Диапазон рабочих температур
линий задержки составляет десятки градусов. Для увеличения времени
задержки путь волны делают в виде ломанной линии, либо соединяют
последовательно несколько линий задержки. Регулируемые линии задержки
имеют несколько ВШП, расположенных на разных расстояниях. Включая тот
или иной ВШП, можно изменять время задержки.

В бытовой РЭА линии задержки на ПАВ используют для задержки сигнала
цветности в телевизионных приемниках (рис.1).

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fffffe5e5e5eeeeeeefefefefefeff0f0f0f1f1f1f1f1f1f2f2f2f2f2f2eff1f1eff1f1e
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eeeeeeeeeeeedededeeeeeeefefeff0f0f0f1f1f1efefefeeeeeeeeeeeef0f0f0f1f1f1f
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0eaf1f0eaf1f0eaf1f0eaf1f0eaf1f0eaf1ebebebedededeeeeeeefefefeeeeeeebebebe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2f2f0f0f0ececece6e6e6e3e3e3e3e3e3e8e8e8eeeeeeeeeeeeebebebebebebf0f0f0f5f
5f5eeefedf0f1eff2f3f1f2f3f1f1f2f0eff0ee0000f8fbf89497946265624245424b4e4
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ef4f4f4f7f7f7fffffff1f1f1d8d8d8e0e0e0fcfcfcf0f0f0f0f0f0efefefefefefefefe
feeeeeeeeeeeeeeeeeeeff1f1eff1f1eff1f1eff1f1eff1f1eff1f1eff1f1eff1f1eff3e
cf0f4edf2f6eff3f7f0f4f8f1f4f8f1f3f7f0f2f6eff6f6f4f3f3f1f0f0eef1f1eff5f5f
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5f2f4f4f2f4f4f2f5f2f3f6f2f4f8f1f4f8f1f4f8f1f2f6eff2f6eff1f5eeeff2eeeef1e
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defefeff2f2f2f1f1f1efefefeeeeeeeeeeeeefefeff0f0f0f0f0f0f0f0f0f0f0f0efefe
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eeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeefefefefefefefefeff0f0f0f1f1f1f4f4f4f6f6f
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0f0f0f0f0f0f0efefefefefefefefefeeeeeeeeeeeeefefefeeeeeeeeeeeef0f0f0f1f1f
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1f5eeeff2eeeef1eeeceeeeebededebeceeeeeeeef3f3f3f2f2f2ebebebedededf4f4f4f
2f2f2e8e8e8edededf0f0f0f2f2f2f2f2f2efefefeeeeeeeeeeeeefefefefefeff0f0f0f
1f1f1f0f0f0efefefedededebebebe9e9e9efefefefefeff0f0f0f0f0f0f0f0f0f0f0f0e
fefefefefefededededededeeeeeeeeeeeeeeeeeeeeeeeeefefefefefefefefeff0f0f0f
2f2f2f5f5f5f7f7f7f5f5f5f0f0f0ececece8e8e8eaeaeaedededf0f0f0f1f1f1f1f1f1f
0f0f0f0f0f0efefefefefefeeeeeeededededededeeeeeeefefefefefeff5f5f5f0f0f0e
dededececece8e8e8e3e3e3e6e6e6edededeeeeeeecececebebebecececf0f0f0f3f3f3f
4f4f4f3f3f3f0f0f0f0f0f0f0f0f0efefefefefefefefefeeeeeeeeeeeeeeeeeeededede
dededefefeff0f0f0efefefebebebe7e7e7e7e7e7e7e7e7e7e7e7e8e8e8eaeaeaededede
fefeff1f1f1f1f1f1efefefeeeeeeeeeeeef0f0f0f1f1f1f0f0f0eeeeeef5ecf4f3eaf2f
1e8f0efe6eeeee5edeee5edefe6eef0e7eff2e9f1f2e9f1f2e9f1f2e9f1f2e9f1f2e9f1f
2e9f1f2e9f1e8e8e8ecececf1f1f1f4f4f4f2f2f2ececece5e5e5dfdfdfeeeeeef1f1f1f
1f1f1e9e9e9e0e0e0dfdfdfe7e7e7f0f0f0ecedebeeefedf1f2f0f0f1efedeeececedeb0
00005000000070101000000030000000000

Рис.1 – Линии задержки сигнала цветности в телевизионных приемниках.

Условное обозначение типа линии задержки состоит из трех элементов:
ПЕРВЫЙ ЭЛЕМЕНТ – три (четыре) буквы. “УЛЗ” – ультразвуковая линия
задержки; “ЛЗЯ” – линия задержки яркостная; “ЛЗЯС” – линия задержки
яркостного сигнала.

ВТОРОЙ ЭЛЕМЕНТ – две (три) цифры, означающие время задержки в мкс.

ТРЕТИЙ ЭЛЕМЕНТ – цифра (несколько цифр): для УЛЗ – порядковый номер
разработки; а для ЛЗЯ (ЛЗЯС) – волновое сопротивление в Омах. Для
обозначения линий задержки зарубежные фирмы применяют собственную
маркировку. Фирма “PHILIPS” обозначает двумя буквами “DL” (delay lines),
что означает “линия задержки” и двумя (тремя) цифрами, указывающими на
порядковый номер разработки. Ниже для сравнения даны параметры некоторых
распространенных типов УЛЗ:

тип линии задержкисистема цветного телевид. (примен) средняя номинальн.
частота, МГц (Fmin-Fmax) время задержки, в мкс. (по ур. -3дб) затухание
ложного канала в дб. Rвx. = Rвых в ОмахLвx. /Lвых. в мкГ УЛ3-64-5SECAM
(CTV) 4,433619

(3,9…4,75) 63943 +30

-26

390

4,3/8,3

DL63

PAL-Braal (CTV) 3.575611 (2,8…4,5) 63486 ±5

-30

560

18

DL680

PAL

(VLP) 7,00000 (5,5. .8.5) 64400 ±50

-30

150

2,2

DL701

PAL-Europe (CTV/VCR) 4.433619 (3,43…5,23) 6394315

-33

390

10

DL703

PAL-Europe (VCR) 4.433619 (3,03. .5,43) 63935 ±5

-26

390

18

DL711

PAL-SECAM (CTV) 4.433619

(3,43 5,23) 63943 ±5

-33

390

10

DL720

PAL-Argent. (CTV) 3,582056 (2,8…4,5) 63929 ±5

-28

560

18

DL722

PAL-Argent. (CTV) 3,582056

(2,8. .4,5) 64069 ±5

-28

390

10

DL750

NTSC (CTV/VCR) 3.579545 (2,8…4,5) 63555 ±5

-28

560

18

DL872

(CF873) PAL-Europe (VCR comb) 4433619

(3,93…4,93) 128

-23

560

18

Основные параметры приборов на ПАВ:

1) время задержки Т, определяемое длиной пути L, проходимого упругими
волнами в звукопроводе от входного преобразователя до выходного, и
скоростью распространения УЗ v, т.е. T =L?v;

2) рабочая частота f0, приблизительно равная резонансной частоте
преобразователей, причем частота задерживаемого радиосигнала должна
совпадать с f0, а в случае задержки видеосигнала его надо сначала
преобразовать в радиосигнал с частотой заполнения f0, а затем выделить
огибающую (продетектировать);

3) полоса пропускания ?f, определяемая добротностью преобразователей и
частотной характеристикой потерь в звукопроводе;

4) уровень ложных сигналов – отношение амплитуды наибольшего из ложных
сигналов к амплитуде задержанного сигнала;

5) температурный коэффициент задержки, определяемый зависимостью
скорости распространения упругих волн в звукопроводе от температуры.

2. Физические основы работы линий задержки на ПАВ

Работа различных приборов пьезоэлектроники основана на
пьезоэлектрическом эффекте, который был открыт в 1880 г. французскими
учеными братьями П. Кюри и Ж. Кюри. Слово “пьезоэлектричество” означает
“электричество от давления”. Прямой пьезоэлектрический эффект или просто
пьезоэффект состоит в том, что при давлении на некоторые кристаллические
тела, называемые пьезоэлектриками, на противоположных гранях этих тел
возникают равные по величине, но разные по знаку электрические заряды.
Если изменить направление деформации, т.е. не сжимать, а растягивать
пьезоэлектрик, то заряды на гранях изменят знак на обратный.
Акустоэлектроника – сравнительно новая область электроники, посвященная
теории и практике создания устройств, основанных на акустоэлектронном
взаимодействии и служащих для преобразования и обработки сигналов. Это
могут быть преобразования временные (например, задержка сигналов или
изменение их длительности), частотные и фазовые (например,
преобразование частоты и спектра, фазовый сдвиг), амплитудные (усиление
и модуляция), такие сложные преобразования, как кодирование и
декодирование, интегрирование и т.п. В ряде случаев акустоэлектронные
методы более удобнее обычных, чисто электронных, а иногда даже
единственно пригодны. На основе акустоэлектронного взаимодействия могут
быть созданы пассивные устройства, например линии задержки, фильтры, и
активные – усилители, генераторы, модуляторы и др.

3. Принцип устройства линии задержки на ПАВ

Наиболее широкое применение получают акустоэлектронные приборы на ПАВ. К
ним относятся линии задержки, полосовые фильтры, резонаторы, различные
датчики т.п. Принцип устройства таких приборов показан на рис.2.
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fffffffa00fffffb000000bffb000000bfffffa00000affb000000bfffffa00000afff30
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0afffffb000000fffa00000afffffffffffffffa00affffffa00ffffffffffffffffffff
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fffffffffa00bffffb000000bffb000000bfffffa00000affb000000bfffffa00000afff
000000bfffffffffffffffffffffffffffffa00000afff300000bfffffa00000afffa000
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b00affffb00affffff000000bffffff00000ffffffff000abbba000abfffffffffffffff
ffffffffffa00bffffb000000bffb000000bfffffa00000affb000000bfffffa00000aff
f000000bfffffffffffffffffffffffffffffa00000afff300000bfffffa00000afffa00
000afffffb000000fffa00000afffffffffffffffa00affffffa00fffffffffffffffffb
00affffffb00afffff0affb00ffffff00000fffffffa03bffffffb000bffffffffffffff
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ff000000bfffffffffffffffffffffffffffffa00000afff000000bfffffa00000afffa0
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00afffffffb00bffff0afff00ffffff00000fffffff00bfffffffffa00bfffffffffffff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fffffffffffffffffffffffffffffff00000ffffffffffffffffffffffffffffffffffff
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ffffffffffffffffffffffffffffffaffffffffffffffffffffffffffffffffffffffffa
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fffffffffffffffffffffffffffffff00000ffffffffffffffffffffffffffffffffffff
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fffa0affffffffffffffffffffffffffffffffffffffffffffffffffffffffffffffffff
fffffffffffffffffffffffffffffff00000ffffffffffffffffffffffffffffffffffff
fffffffffffffffffffffffffffffffffffffffffffffffffffffffffffffb30ffffffff
ffffffffffffffffffffffffffffbba00fffffffffffffffffffffffffffffffffffffff
ffffaaffffffffffffffffffffffffffffffffffffffffffffffffffffffffffffffffff
fffffffffffffffffffffffffffffff00000ffffffffffffffffffffffffffffffffffff
ffffffffffffffffffffffffffffffffffffffffffffffffffffffffffffffa0ffffffff
fffffffffffffffffffffffffffffa00bfffffffffffffffffffffffffffffffffffffff
ffbba0ffffffffffffffffffffffffffffffffffffffffffffffffffffffffffffffffff
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ffb00affffffffffffffffffffffffffffffffffffffffffffffffffffffffffffffffff
fffffffffffffffffffffffffffffff0000005000000070101000000030000000000

Рис.2 – Принцип устройства электронного прибора на ПАВ.

В качестве звукопровода 1 обычно применяется пластина, или стержень, или
провод из пьезоэлектрического материала (например, ниобат лития LiNbO3,
пьезокварц SiO2, германат висмута Bi12GeO20, пьезокерамика) с тщательно
отполированной поверхностью, на которой расположены электромеханические
преобразователи: входной 2 и выходной 3. Эти преобразователи обычно
выполняются в виде гребенчатых электродов из тонкой металлической пленки
толщиной 0,1-0,5 мкм. Их называют встречно-штыревыми преобразователями
(ВШП). К входному ВШП подключен источник электрического сигнала, и в
звукопроводе возникает ПАВ. А в выходном преобразователе, к которому
подключена нагрузка, возникает электрический сигнал. Края на обоих
концах пластинки искажаются или нагружаются абсорбционной резиной для
подавления отражения в направлении распространения первичной волны. Если
на одну из систем ВШП подается высокочастотное напряжение, то на
поверхности пластинки за счет обратного пьезоэффекта генерируется
поверхностно-акустическая волна. Эта волна затем распространяется вдоль
поверхности пластинки до тех пор, пока не попадет на другую систему ВШП,
где она преобразуется обратно в высокочастотное напряжение. Время
задержки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 между входным и выходным электрическими сигналами
определяется по формуле: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, где l – среднее расстояние между системами ВШП,

v – скорость распространения поверхностно-акустической волны.

Максимальное акустоэлектрическое взаимодействие систем ВШП имеет место
при характеристической частоте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, определяемой следующим соотношением:

picscalex100010009000003fd0000000300170000000000050000000902000000000400
000002010100050000000102ffffff00040000002e011800050000003102010000000500
00000b0200000000050000000c02e00380041200000026060f001a00ffffffff00001000
0000c0ffffffb9ffffff40040000990300000b00000026060f000c004d61746854797065
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320a8e035e0301000000680008000000320a6d01640301000000760008000000320a6002
820001000000660010000000fb0280fe0000000000009001000000020002001053796d62
6f6c0002040000002d01020004000000f001010008000000320a60021302010000003d00
17000000fb0220ff0000000000009001000000cc0402001054696d6573204e657720526f
6d616e2043797200cca1040000002d01010004000000f001020008000000320ac0021201
0100000030000a00000026060f000a00ffffffff01000000000010000000fb0210000700
00000000bc02000000cc0102022253797374656d00cc040000002d01020004000000f001
0100030000000000, где h – шаг ВШП.

4. Физика ПАВ

Поверхностные акустические волны (ПАВ), упругие волны,
распространяющиеся вдоль свободной поверхности твердого тела или вдоль
границы твердого тела с другими средами и затухающие при удалении от
границ. ПАВ бывают двух типов: с вертикальной поляризацией, у которых
вектор колебательного смещения частиц среды расположен в плоскости,
перпендикулярной к границе (вертикальная плоскость), и с горизонтальной
поляризацией, у которых вектор смещения частиц среды параллелен границе
и перпендикулярен направлению распространения волны. Простейшим и
наиболее часто встречающимся на практике ПАВ с вертикальной поляризацией
являются Рэлея волны, распространяющиеся вдоль границе твердого тела с
вакуумом или достаточно разряженной газовой средой. Фазовая скорость
волн Рэлея cR=0,9 ct; где ct – фазовая скорость плоской поперечной
волны. В простом случае изотропного твердого тела эта

волна содержит продольную и поперечную компоненты, сдвинутые по фазе на
p/2 и лежащие

в плоскости, определяемой волновым вектором и нормалью к поверхности.
Таким образом, в общем

случае рэлеевская волна является эллиптически поляризованной. Толщина
слоя вещества, приводимого в движение волной Рэлея составляет величину
порядка длины волны l.

Ширина электродов и промежутков между ними в направлении распространения
ПАВ обычно равна l/4, где l – длина ПАВ. Толщина электродов обычно не
превышает 0.1 – 0.2 мкм.

5. Метод возбуждения и приема ПАВ с помощью ВШП

Линия задержки на поверхностных акустических волнах (ПАВ) (рис.2)
является твердотельным функциональным устройством и представляет собой
подложку из пьезоэлектрика 1, на поверхность которой методом
фотолитографии наносятся системы токопроводящих элементов. Одна из таких
систем – излучающий преобразователь ПАВ 2 – подключается к источнику
входного сигнала, другая – приемный преобразователь ПАВ 3 – к нагрузке.
Под действием высокочастотного электрического напряжения источника
сигнала в зазорах между смежными электродами излучающего преобразователя
возникает переменное электрическое поле, которое вследствие пьезоэффекта
материала подложки вызывает механические колебания в ее поверхностном
слое. Эти колебания распространяются в тонком приповерхностном слое
подложки в направлениях, перпендикулярных электродам в виде
поверхностных акустических волн. Между смежными электродами приемного
преобразователя вследствие обратного пьезоэффекта механические колебания
ПАВ обуславливают появление электрического напряжения, которое и
является выходным сигналом. С целью устранения нежелательных отражений
ПАВ от торцов подложки, а также с целью ослабления других типов
акустических волн, которые могут быть возбуждены излучающим
преобразователем ПАВ, все нерабочие грани и ее торцы покрываются
специальным звукопоглощающим покрытием.

6. Схемы ультразвуковых линий задержки

Схема включения линий задержки на ПАВ, работающих “на проход”.

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0000

Рис.3.

1 и 2 – преобразователи; 3 – звукопровод.

В зависимости от характера включения линий задержки на ПАВ могут
работать “на проход” (рис.3) или “на отражение” (рис.4), причем во
втором случае один и тот же преобразователь выполняет функции как
излучателя, так и приемника ультразвука (УЗ).

Схема включения задержки на ПАВ, работающих “на отражение”.

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