AeA?AEAAIEE OI?AA?NEOAO “EUeA?ANUeEA IIE?OAOI?EA”

Aeaaeoi Ieoaeei ?iiaiiae/

OAeE 621.382:537.312.8

Oaa?aeio?euei? ?ioaa?aeuei? naini?i? i?eno?i?

ia iniia? ia?aoai?thaa/?a iaaiAoiiai iiey

Niaoe?aeuei?noue 05.27.01 — oaa?aeio?eueia aeaeo?ii?ea

AAOI?AOA?AO

aeena?oaoe?? ia caeiaoooy iaoeiaiai nooiaiy

eaiaeeaeaoa oaoi?/ieo iaoe

Euea?a 1999

Aeena?oaoe??th ? ?oeiien.

?iaioa aeeiiaia ia eaoaae?? aeaeo?iiieo i?eeaae?a Aea?aeaaiiai
oi?aa?neoaoo «Euea?anueea iie?oaoi?ea», I?i?noa?noai ina?oe Oe?a?ie.

Iaoeiaee ea??aiee — aeieoi? oaoi?/ieo iaoe, i?ioani?

AIO?A Caiii TH??eiae/,

Aea?aeaaiee oi?aa?neoao “Euea?anueea iie?oaoi?ea”, caa?aeoaa/ eaoaae?e

Io?oe?ei? iiiiaioe : aeieoi? o?ceei-iaoaiaoe/ieo iaoe, i?ioani?
Ai?ae??iei TH??e Iiaeueyiiae/,

Oa?e?anueeee oaoi?/iee oi?aa?neoao ?aae?iaeaeo?ii?ee, caa?aeoaa/
eaoaae?e;

aeieoi? oaoi?/ieo iaoe, i?ioani?

Ae?oaeei?i Aiaoie?e Ieaenaiae?iae/,

Aea?aeaaiee oi?aa?neoao “Euea?anueea iie?oaoi?ea”,

i?ioani?

I?ia?aeia i?aai?caoe?y — Iaoeiai-ae?iaie/a ia’?aeiaiiy “Ea?ao”,

a?aeae?e iiaeo i?ia?aneaieo oaoiieia?e,

I?i?noa?noai i?iieneiai? iie?oeee (i.Euea?a)

Caoeno a?aeaoaeaoueny “05” aa?aciy 1999 ?. i 1400 aiae ia can?aeaii?
niaoe?ae?ciaaii? a/aii? ?aaee Ae 35.052.14 i?e Aea?aeaaiiio oi?aa?neoao?
“Euea?anueea iie?oaoi?ea” (290646, i.Euea?a-13, aoe.No.Aaiaea?e, 12).

C aeena?oaoe??th iiaeia iciaeiieoeny a iaoeia?e a?ae?ioaoe?
Aea?aeaaiiai oi?aa?neoaoo “Euea?anueea iie?oaoi?ea” (aoe. I?ioani?nueea,
1).

Aaoi?aoa?ao ?ic?neaiee “03” ethoiai 1999 ?.

A/aiee nae?aoa?

niaoe?ae?ciaaii? a/aii? ?aaee Aaeoea? ?.?.

CAAAEUeIA OA?AEOA?ENOEEA ?IAIOE

Aeooaeuei?noue oaie. Iaeiei c iai?yie?a ?icaeoeo no/anii? aeaeo?ii?ee ?
noai?aiiy oaa?aeio?eueieo a?iiey?ieo ?ioaa?aeueieo noai (?N) aenieiai
nooiaiy ?ioaa?aoe??, a oiio /ene? naini?ieo i?eno?i?a, o neeaae? yeeo
ie??i ia?aeiieo ia?aoai?thaa/?a ?ioaa?iaaii oaeiae caniae aoi?eiii?
ia?iaee neaiaeo. Iaeiei c iai?yie?a naini?ii? oaoi?ee ? oaa?aeio?euei?
iaaiaoiea?iaai? naini?i? i?eno?i?. ?o ?aae?caoe?y a iniiaiiio
cae?enith?oueny ia o?aaeeoe?eieo ia?aeiieo ia?aoai?thaa/ao – aeaiaioao
Oiea, ye? oa?aeoa?ecothoueny iecueeith e?ooeciith oa?aeoa?enoeee
ia?aoai?aiiy, ui i?ecaiaeeoue aei cia/iiai aia?ainiiaeeaaiiy.
Eaoa?aeuei? (ai?eciioaeuei?) iaaiaoiea?iaai? o?aicenoi?e ia aac?
a?iiey?ii? oaoiieia?? ? iaeieie c ia?niaeoeaieo ia?aeiieo
ia?aoai?thaa/?a iaaiaoiea?iaaieo naini?ieo i?eno?i?a. Aiie
caaacia/othoue nooo?ai aeuo e?ooecio ia?aoai?aiiy oa
aaaaoiia?aiao?e/i?noue ea?oaaiiy, ui ?icoe?th? ?o iioaioe?ei?
iiaeeeaino?. Iaeiae, i?e noai?aii? eaoa?aeueieo o?aicenoi?ieo no?oeoo? a
?ioaa?aeueieo noaiao aeieeathoue i?iaeaie, iia’ycai? c ia?aceoiei
aieeaii eiino?oeoeaieo aeaiaio?a no?oeoo?e ?N oa iaaea?iioaioe?ei?noth
aeo?aeiiai neaiaeo. I?e oeueiio ia ae??oai? ieoaiiy aoi?eiii? ia?iaee
neaiaeo a iaaiaoinaini?ieo i?eno?iyo – noaa?e?caoe?? ?aaeei?a aeeaeaiiy,
e?iaa?ecaoe?? oa oa?iieiiiainaoe?? oa?aeoa?enoeee ia?aoai?aiiy,
ei?aeoe?? aaeeoeaii? oa ioeueoeie?eaoeaii? iioeaie. Oiio i?iaaaeaiiy
aeine?aeaeaiue o aaeoc? noai?aiiy oaa?aeio?eueieo ?ioaa?aeueieo
naini?ieo i?eno?i?a ia iniia? ia?aoai?thaa/?a iaaiaoiiai iiey ?
aeooaeueieie aeey ?icaeoeo no/anii? i?e?iaeaeo?iiii? naini?eee.

Ca’ycie ?iaioe c iaoeiaeie i?ia?aiaie, ieaiaie, oaiaie. Aeena?oaoe?ei?
aeine?aeaeaiiy ? neeaaeiaith /anoeiith eiiieaenii? iaoeiai-oaoi?/ii?
i?ia?aie c i??i?eoaoieo iai?yie?a ?icaeoeo iaoee ? oaoi?ee AeEIO Oe?a?ie
(i?iaeo 05.44.02/053 — 92 — 95).

Iaoa ?iaioe oa caaaeaiiy aeine?aeaeaiue – ?ic?iaea oaa?aeio?eueieo
iaeiie?enoaeueieo a?iiey?ieo naini?ieo i?eno?i?a ia aac? eaoa?aeueieo
iaaiaoio?aicenoi??a. Caaaeaiiyie aeine?aeaeaiue aoee:

aiae?c oa aeyaeaiiy iiaeeeainoae canoinoaaiiy eaoa?aeueieo
iaaiaoio?aicenoi?ieo no?oeoo? ye ia?aeiieo ia?aoai?thaa/?a iaaiaoiiai
iiey;

aeine?aeaeaiiy aieeao eiino?oeoeaieo oa noaiioaoi?/ieo ia?aiao??a
no?oeoo?e iaaiaoio?aicenoi??a ia ?o oa?aeoa?enoeee;

?ic?iaea oa aeine?aeaeaiiy ?ioaa?aeueieo oaa?aeio?eueieo cania?a
aoi?eiii? ia?iaee neaiaeo, ye? caaacia/othoue noaa?e?caoe?th ?aaeei?a
aeeaeaiiy, e?iaa?ecaoe?th ooieoe?? ia?aoai?aiiy, oa?iieiiiainaoe?th
aeo?aeiiai neaiaeo oa ?icoe?ththoue ooieoe?iiaeuei? iiaeeeaino?
iaaiaoinaini?ieo i?eno?i?a;

noai?aiiy aeai?eoio iiaoaeiae i?ia?aiiaaiiai ei?aeoi?a oa?aeoa?enoee, ui
caaacia/o? i?aoeec?ei?noue ooieoe?iioaaiiy iaaiaoinaini?ieo i?eno?i?a.

Iaoeiaa iiaecia io?eiaieo ?acoeueoao?a:

noai?aii iia? oaa?aeio?euei? ?ioaa?aeuei? naini?i? i?eno?i? ia iniia?
eaoa?aeueieo aeaieieaeoi?ieo iaaiaoio?aicenoi??a eieaeueii? ?a?no?aoe??
oa aei??thaaiiy iaaiaoiiai iiey a iaaeao iaeeieoeue — nioaiue
i?e?oanea;

aecia/aii iaoai?cie aeaa?aaeaoe?? oa?aeoa?enoee aeaieieaeoi?ieo
iaaiaoio?aicenoi??a, ?ioaa?iaaieo o no?oeoo?o a?iiey?ii? ?N c
?cieyoe??th cai?ioii-ci?uaiei p-n ia?aoiaeii, aeyaeaii oa i?iaiae?ciaaii
i?e/eie aeanoaa?e?coth/iai aieeao ia?aceoii? o?aicenoi?ii? no?oeoo?e,
ooai?aii? i?aeeeaaeeith, oa iaaea?iioaioe?eiino? aeo?aeiiai neaiaeo, yea
coiiaeaia ?icnoi?uaiiyi caoiaaiiai oa?o.

?ic?iaeaii iia? eiino?oeoeai? ??oaiiy aeaieieaeoi?ieo eaoa?aeueieo
iaaiaoio?aicenoi??a, ye? caaacia/othoue /ooeea?noue o iaaeao 0,6 … 1,0
Oe-1 oa i?i?iaeueio iaaea?iioaioe?ei?noue i?e caaeia?eueiiio
eiao?oe??io? ia?aaea/? no?oio.

?ic?iaeaii ieceo iiaeo no?oeoo?ieo cania?a aoi?eiii? ia?iaee neaiaeo
iaaiaoinaini?ieo ?ioaa?aeueieo i?eno?i?a ?, cie?aia, aoce?a
noaa?e?caoe?? ?aaeei?a aeeaeaiiy, oa?iieiiiainaoe?? oa e?iaa?ecaoe??
oa?aeoa?enoeee ia?aoai?aiiy, i?ia?aiii? ei?aeoe?? aaeeoeaii? oa
ioeueoeie?eaoeaii? iioeaie.

I?aeoe/ia cia/aiiy iaea?aeaieo ?acoeueoao?a. ?ic?iaeai? a
aeena?oaoe?ei?e ?iaio? ??oaiiy, a naia no?oeoo?e iaaiaoio?aicenoi??a,
noaiioaoi?/i? ??oaiiy aoce?a ?N noaiiaeyoue iniiao ?ic?iaee
iaaiaoinaini?ieo i?eno?i?a, cie?aia, a?iiey?ieo ?N: c e?i?eiei aeoiaeii
c e?ooeciith ia?aoai?aiiy (1 … 40) A/Oe; c ii?iaiaith oa?aeoa?enoeeith c
ii?iaii ia?aieeaiiy (20 … 50) iOe; c iiooaeiei aeoiaeii c no?oiii
eiiooaoe?? aeaioaeoieo aeoiae?a aei 0,5 A.

?acoeueoaoe aeena?oaoe?eii? ?iaioe iathoue i?eeeaaeia cia/aiiy:

eiino?oeoe?? aeaieieaeoi?ieo eaoa?aeueieo iaaiaoio?aicenoi?ieo no?oeoo?,
aeathoue ciiao ciaioeoe iaaea?iioaioe?ei?noue aeo?aeiiai neaiaeo,
ca?eueoeoe cia/aiiy eiao?oe??ioa ia?aaea/? no?oio i?e cacaieai?e
i?aeeeaaeoe?, io?eiaoe aeo?aeiee neaiae ia ??ai? 50 ieA oa a?aeiinio
/ooeea?noue ia ??ai? (0,6 … 1,0) Oe-1;

aocee noaa?e?caoe?? aeaeo?e/ieo ?aaeei?a, oa?iieiiiainaoe??,
e?iaa?ecaoe??, caaeiaieueiythoue aeiiae no/anieo ?N c aia?ainiiaeeaaiiy
(i?e iai?oaao iaeiiiiey?iiai aeeaeaiiy a?ae 3 A ? aeua);

?ic?iaeaiee aeai?eoi ooieoe?iioaaiiy i?ia?aiiaaiiai ei?aeoi?a
oa?aeoa?enoee, yeee aaco?oueny ia neioac? ei?aeooth/eo no?oi?a
i?ia?aiiaaiith iao?eoeath aeaea?ae no?oio c aea?eeiai-caaaeaiei
ianooaaoaaiiyi no?oi?a ia eaoa?aeueieo p-n-p o?aicenoi?ao oa
niaoe?aeueiei aeaeiaeoaaiiyi eii??ie iao?eoe?, aea? iiaeeea?noue
i?i?i?coaaoe e?euee?noue aae?anieo oei oa no?oeoo?i? cao?aoe ei?aeoi?a.

Iniaenoee aianie caeiaoaa/a a iaea?aeaii? iaoeiaeo ?acoeueoao?a,
aeeeaaeaieo o aeena?oaoe??, iieyaa? a iniaeno?e ?ic?iaoe? i?eioeei?a
iiaoaeiae, noaiioaoi?/ieo ??oaiue aoce?a ?N [1-2, 4, 8, 10, 20, 24],
aeine?aeaeaii? ia?aeiieo ia?aoai?thaa/?a [5, 16, 22, 27], i?iaeooaaii?
oiiieia?? e?enoae?a ?N [3, 11, 14]. Noai?aiiy, aiae?c oa aeine?aeaeaiiy
e?enoae?a ?N aeeiiai? a ni?aaaoi?noa? ca?aeii c iaaaaeaiei nieneii
ioae?eaoe?e. Aeniiaee ? iieiaeaiiy, ui neeaaeathoue nooue aeena?oaoe??,
noi?ioeueiaai? aaoi?ii iniaenoi.

Ai?iaaoe?y ?acoeueoao?a aeena?oaoe??. Iniiai? ?acoeueoaoe aoee
i?aaenoaaeai? oa iaaiai?i? ia I?aeia?iaeieo iaoeiai-oaoi?/ieo
eiioa?aioe?yo “No/ani? i?iaeaie aaoiiaoeciaaii? ?ic?iaee ? ae?iaieoeoaa
?aae?iaeaeo?iiieo cania?a oa i?aeaioiaee ?iaeaia?ieo eaae??a” (Euea?a,
1994, 1996); I?aeia?iaei?e eiioa?aioe?? “Ia?aaeia? aeenieaei?
oaoiieia??” (Euea?a, 1994); XVIII – XXI Conferences of the International
Society for Hybrid Microelectronics, Poland Chapter (Warsaw, 1994;
Porabka-Kozubnik, 1995; Jurata, 1996; Ustron, 1997); Iaoeiai-oaoi?/i?e
eiioa?aioe??, i?enay/ai?e 120-??//th *a?i?aaoeueeiai oi?aa?neoaoo
(*a?i?aoe?, 1995); I?aeia?iaei?e iaoeia?e eiioa?aioe??, i?enay/ai?e
150-??//th a?ae aeiy ia?iaeaeaiiy ?. Ioethy (Euea?a, 1995); II
Iaoe?iiaeuei?e iaoeia?e eiioa?aioe?? “?ioi?iaoeea: oai??y, oaoiieia?y,
oaoi?ea – ?OOO-95” (Iaeana, 1995); 1-st International Modelling School
(Alushta, Ukraine, 1996); 1st and 2nd International Symposia on
“Microelectronics Technologies and Microsystems” (Rzeszow, Poland, 1997;
Lviv, Ukraine, 1998); 11th European Conference on Solid-State
Transducers “EuroSensors XI” (Warsaw, Poland, 1997), 4th International
Symposium for Informatics and Technology in Electronic Modules Domain
SIITME’98 (Bucharest, Romania, 1998).

Ioae?eaoe??. ?acoeueoaoe aeeiiaieo aeine?aeaeaiue a?aeia?aaeai? o 24
ae?oeiaaieo ?iaioao oa 3 cayaeao ia aeiaoiaee.

No?oeoo?a oa ianya aeena?oaoe??. Aeena?oaoe?y neeaaea?oueny ?c anooio,
i’youeio ?icae?e?a, aeniiae?a oa nieneo aeei?enoaii? e?oa?aoo?e.
Iniiaiee ci?no ?iaioe aeeeaaeaii ia 184 noi??ieao ae?oeiaaiiai oaenoo,
?ethno?iaaiiai 69 ?enoieaie oa 16 oaaeeoeyie. Nienie e?oa?aoo?e i?noeoue
128 iaeiaioaaiue.

INIIAIEE CI?NO ?IAIOE

O anooi? iaa?oioiaaia aeooaeuei?noue oaie aeena?oaoe?eii? ?iaioe,
noi?iiaaia iaoa aeine?aeaeaiue, iaaaaeaii iniiai? iaoeia? oa i?aeoe/i?
?acoeueoaoe.

O ia?oiio ?icae?e? nenoaiaoeciaaii oa i?iaaaeaii aiae?c ia?aoai?thaa/?a
iaaiaoiiai iiey, ?icaeyiooi aaeueaaiiiaaiaoi? aoaeoe a
iai?ai?ia?aeieeao, i?iaiae?ciaaii noai ?icaeoeo iaaiaoinaini?ieo
a?iiey?ieo i?eno?i?a. I?eae?eaii oaaao a?aeiiei eiino?oeoe?yi oa
oaoi?/iei ??oaiiyi aeaieieaeoi?ieo eaoa?aeueieo iaaiaoio?aicenoi??a.

Iieacaii, ui aeii?ioth/eie aeiiaaie aei iaeiie?enoaeueieo
iaaiaoinaini?ieo i?eno?i?a ? i?i?i?caoe?y aia?ainiiaeeaaiiy oa
iiaeeea?noue ooieoe?iioaaiiy c iecueeiaieueoieie iaeiiiiey?ieie
aeaea?aeaie aeeaeaiiy. Iaeiae ia oii? cia/ieo oni?o?a o noai?aii?
iaaiaoinaini?ieo noai ia aeene?aoieo aeaiaioao, i?iaeaie uiaei noai?aiiy
iaeiie?enoaeueieo iaaiaoinaini?ieo i?eno?i?a ia aac? ia?aeiieo
ia?aoai?thaa/?a – aeaieieaeoi?ieo eaoa?aeueieo iaaiaoio?aicenoi??a c
noaiaie noaa?e?caoe?? ?aaeei?a, oa?iieiiiainaoe?? ? e?iaa?ecaoe??
oa?aeoa?enoeee ia?aoai?aiiy – ? oaeoe/ii ia ae??oaieie.

O ae?oaiio ?icae?e? iaaaaeai? ?acoeueoaoe ?ic?iaee oa aeine?aeaeaiiy
iiaeo eiino?oeoe?e aeaieieaeoi?ieo eaoa?aeueieo iaaiaoio?aicenoi??a.
I?ae /an ?ic?iaee oa aeine?aeaeaiiy iaaiaoiea?iaaieo o?aicenoi??a
aecia/aii aieea aeayeeo eiino?oeoeaieo oa noaiioaoi?/ieo ia?aiao??a
?ioaa?aeueii? no?oeoo?e ia ?o oa?aeoa?enoeee, a naia
iaaea?iioaioe?ei?noue aeo?aeiiai aeeoa?aioe?eiiai neaiaeo o?aicenoi?a oa
aieea ia neaiae ia?aceoii? o?aicenoi?ii? no?oeoo?e, aeno?aeoi?ii a ye?e
aenooia? i?aeeeaaeea ?N. Oe? oa?aeoa?enoeee ia iiaeia iie?aueoe
aoi?eiieie ia?aoai?thaa/aie.

Aea/aia caeaaei?noue ia?aiao??a iaaiaoiea?iaaieo o?aicenoi??a a?ae
no?oeoo?ieo aeaiaio?a, aa?oeeaeueiiai oa caoiaaiiai oa??a, a oaeiae a?ae
?ici??o ai?oa?ii? iaeano? (?en. 1). Aeine?aeaeaia aaciaa eiino?oeoe?y
iaaiaoio?aicenoi?a, yea i?noeoue ai?oa?io, aea? aaciaeo oa aea?
eieaeoi?i? iaeano?. Caoiaaiee oa?, ae?aioth/e aeaeo?e/ia iiea
i?aeeeaaeee a?ae ai?oaen?eiiai oa?o, aea? ciiao i?i?i?coaaoe
aeno?aeoe?th iin??a o i?aeeeaaeeo. Iaeiae i?e oeueiio caoiaaiee oa?
ooioo? aeoeaio /anoeio aace eaoa?aeueiai iaaiaoio?aicenoi?a, ciaiooth/e
a i?e i?enei?thth/a iiea. Oea ciaioo? Oie?anueeo ??cieoeth iioaioe?ae?a
o aac?, a, ioaea, iia??oo? iaaiaoio /ooeea?noue o?aicenoi?a.

?en. 1. Iaaea?iioaioe?ei?noue SYMBOL 68 \f «Symbol» \s 12 D UC0 oa
e?ooecia ia?aoai?aiiy ( SYMBOL 68 \f «Symbol» \s 12 D UC+ —  SYMBOL 68
\f «Symbol» \s 12 D UC-) aeo?aeiiai neaiaeo ??cieo eiino?oeoe?e
aeaieieaeoi?ieo eaoa?aeueieo iaaiaoio?aicenoi??a (O1 — aac caoiaaiiai oa
aa?oeeaeueiiai oa??a,O1N — c caoiaaiei oa?ii, O1A — c aa?oeeaeueiei
oa?ii, O1AN — c aa?oeeaeueiei oa caoiaaiei oa?aie, O2, O2N, O2AN — c
aaea?/? a?eueoith ieiuath ai?oa?a ii a?aeiioaiith aei O1).

Aeyaeaii, ui aa?oeeaeueiee oa? i?aeoe/ii ia aieeaa? ia ia?aiao?e
iaaiaoio?aicenoi?a, a caoiaaiee oa? ciaioo? aieea ia?aceoii? no?oeoo?e,
ooai?aii? i?aeeeaaeeith. Ca?eueoaiiy ieiu? ai?oa?a aaea?/? coiiaeth?
c?inoaiiy /ooeeaino? ia 30 %. Oe? ?acoeueoaoe iieeaaeaii a iniiao
?ic?iaee iiaeo eiino?oeoe?e iaaiaoio?aicenoi?ieo no?oeoo?.

?ic?iaeaia iiaa eiino?oeoe?y ?ioaa?aeueiiai eaoa?aeueiiai
iaaiaoiea?iaaiiai o?aicenoi?a. Caia?aeaeaiiy aeaio aeca?eaeueii
?icoaoiaaieo o?aicenoi?ieo no?oeoo? oa iioei?caoe?y ?ici???a iaeano?
caoiaaiiai oa?o ciaioo? aieea i?aeeeaaeee oa iaaea?iioaioe?eiino?
aeo?aeiiai neaiaeo. Eiino?oeoe?y ?ic?iaeaiiai o?aicenoi?a iieacaia ia
?en. 2, a ?acoeueoaoe aeine?aeaeaiue aeo?aeieo iai?oa oa no?oi?a – ia
?en. 3.

?en. 2. Eiino?oeoe?y aeaieieaeoi?iiai eaoa?aeueiiai iaaiaoio?aicenoi?a.
?en. 3. Iaaea?iioaioe?ei?noue SYMBOL 68 \f «Symbol» \s 12 D UC0 oa
e?ooecia ia?aoai?aiiy ( SYMBOL 68 \f «Symbol» \s 12 D UC+ —  SYMBOL 68
\f «Symbol» \s 12 D UC-) aeo?aeiiai neaiaeo ?ic?iaeaii? eiino?oeoe??
aeaieieaeoi?iiai eaoa-?aeueiiai iaaiaoio?aicenoi?a.

Iaaea?iioaioe?ei?noue aeo?aeiiai neaiaeo aeaii? eiino?oeoe?? nooo?ai
iaioa, i?ae o aacia?e eiino?oeoe?? (?en. 1), ? a 2 … 5 ?ac?a iaioa a?ae
aeeoa?aioe?eii? neeaaeiai? ei?eniiai neaiaeo. Ciaioaiiy eiao?oe??ioa
ia?aaea/? no?oio i?e cacaieai?e i?aeeeaaeoe? ?N (a iaaeao 5 ?ac?a) oi/a
? ? aaaiiei, iaeiae, ii??aiyi c aaciaith no?oeoo?ith (?en. 1) oeae
ia?aiao? nooo?ai c??n. Aeo?aeiee no?oi ?ic?iaeaii? eiino?oeoe??
o?aicenoi?a noaiiaeoue ia iaioa i?ae 50 ieA, ui aea? iiaeeea?noue
i?iaiaeeoe aeaiaioa?io ia?iaeo neaiaeo. A?aeiinia /ooeea?noue
?ic?iaeaii? no?oeoo?e noaiiaeoue SR = 0,6 … 1,0 Oe-1, oiaoi, ia a?aei?io
a?ae aaciai? eiino?oeoe?? c caoiaaiei oa?ii, ia aeaa ii?yaeee aeua, a
oea aea? ciiao aeei?enoiaoaaoe ?? ye ia?aeiiiai ia?aoai?thaa/a
iaaiaoinaini?ieo i?eno?i?a.

Aeine?aeaeai? caeaaeiino? /ooeeaino? oa eiao?oe??ioa ia?aaea/? no?oio
o?aicenoi??a a?ae cia/aiiy aaciaiai no?oio (?en. 4). Iieacaii, ui
/ooeea?noue o?aicenoi??a c? ca?eueoaiiyi ?iai/eo no?oi?a c?inoa?, a
iacia/ia cieaeaiiy eiao?oe??ioa ia?aaea/? iiynith?oueny ciaioaiiyi
aoaeoeaiino? ai?oa?a oiui.

?en. 4. Caeaaei?noue /ooeeaino? oa eiao?oe??ioo ia?aaea/? no?oio
iaaiaoi-o?aicenoi?a a?ae no?oio aace.

O o?aoueiio ?icae?e? iienaii ?acoeueoaoe ?ic?iaee niaoe?ae?ciaaieo
aoce?a noaa?e?caoe?? ?aaeei?a aeeaeaiiy, oa?iieiiiainaoe?? oa
e?iaa?ecaoe?? oa?aeoa?enoeee ia?aoai?aiiy. ?aae?ciaaii iaaiaoinaini?i?
i?eno?i? – ia?aoai?thaa/ eiiiainaoe?eiiai oeio oa neaia? iaaiaoiiai
iiey.

Aeey noaa?e?caoe?? ?aaeei?a iaaiaoio?aicenoi??a o noaiao c
iecueei-aieueoiei aeeaeaiiyi aeei?enoaii i?eioeei noaa?e?caoe??
oi?ioaaiiy iii?ii? iai?oae, yea /enaeueii aei??aith? oe?ei? caai?iiaii?
ciie e?aii?th. Iieacaii iiaeeea?noue ni?iuaiiy noaie noaa?e?caoi?a i?e
iaeii/aniiio i?aeaeuaii? eiao?oe??ioa noaa?e?caoe??. Aeey caaacia/aiiy
iaeneiaeueiiai eiao?oe??ioa noaa?e?caoe?? ?aaeei?a ?iaioe
iaaiaoio?aicenoi?a c ianoaa?euei?noth a iaaeao 0,5 … 1 % ?ic?iaeaii
e?eueea eiino?oeoe?e noaa?e?caoi??a.

I?iaiae?ciaaii oaiia?aoo?i? caeaaeiino? oa?aeoa?enoee ia?aoai?aiiy
iaaiaoio?aicenoi??a. Iieacaii, ui ?o aecia/athoue neeaaeiei eiiieaenii
/eiiee?a, aaciina?aaei? a?aooaaiiy yeeo caeaa?eueoiai ia
i?aaenoaaey?oueny iiaeeeaei. Aeyaeaii, ui oaiia?aoo?iee eiao?oe??io
e?ooecie ia?aoai?aiiy ?ioaa?aeueieo iaaiaoio?aicenoi??a ciaoiaeeoueny a
iaaeao -0,5 … –1,5 %/0N ? caeaaeeoue a?ae aeaeo?io?ce/ieo ia?aiao??a
no?oeoo?e iaaiaoio?aicenoi?a, cie?aia eiioeaio?aoe?? aeiii?ii? aeii?oee
a aacia?e iaeano? o?aicenoi?a – ai?oaen?eiiio oa?? ?N, eiao?oe??io?a
?iaeaeoe?? p-n ia?aoiae?a oa ?iai/eo no?oi?a ? iai?oa. I?ae /an ?ic?iaee
iaaiaoinaini?ieo i?eno?i?a-ia?aieea/?a iaiao?aeii oi?ioaaoe iaai?
(iaioeueia?) cia/aiiy oaiia?aoo?iiai eiao?oe??ioa ia?aieeaiiy. Aeey
oeueiai ?ic?iaeaii oi?aa?naeuei? aocee oa?iieiiiainaoe??
iaaiaoinaini?ieo i?eno?i?a, oaiia?aoo?i? oa?aeoa?enoeee yeeo iiaeia
?aaoethaaoe a iaaeao –25 … +75 0N. A iniiao oa?iieiiiainaoe?? iieeaaeaii
noaio noaa?e?caoe?? eieaeoi?ieo no?oi?a iaaiaoio?aicenoi??a c? cai?ioiei
ca’yceii ca iai?oaith (?en. 5), a ye?e oaiia?aoo?iee eiao?oe??io iii?ii?
iai?oae iiaea ci?ithaaoeny a i?ioean? ?aaoethaaiiy. I?aeoe/ii oea
?aae?ciaaii a aeaio noaiioaoi?/ieo ??oaiiyo:

oaiia?aoo?iee eiao?oe??io iai?oae oa?iieiiiainaoe?? iaaoaa?
a?aeiia?aeieo aeiaeaoieo cia/aiue oae, ui ca?eueoaiiy iai?oae ia
?acenoi?? cai?ioiiai ca’yceo R0, a, ioaea, ? eieaeoi?ieo no?oi?a
iaaiaoio?aicenoi?a, iaoiiaeth? oa?iieiiiainaoe?th a?ae’?iiiai
oaiia?aoo?iiai eiao?oe??ioa e?ooecie ia?aoai?aiiy;

oaiia?aoo?iee eiao?oe??io iai?oae oa?iieiiiainaoe?? iiaea ci?ithaaoeny
ye ca cia/aiiyi oae ? ca ciaeii, oi?ioth/e caaeaio (iaioeueiao)
oaiia?aoo?io caeaaei?noue iaaiaoinaini?iiai i?eno?ith.

?en. 5. ?ic?iaeaiee aeaiaio oa?iieiiiainaoi?a – noaia noaa?e?caoe??
eieaeoi?ieo no?o-i?a iaaiaoio?aicenoi?a.

A?aeiii, ui iae?i?ei?noue oa?aeoa?enoeee ia?aoai?aiiy aeaaa/?a
iaaiaoiiai iiey ? iaei??th c nooo?aeo i?e/ei iaiaaeaiiy i?aoeec?eiino?
?o ooieoe?iioaaiiy. Aeey ciaioaiiy iae?i?eiino? iaie ?ic?iaeaii
oi?aa?naeueiee aoi?eiiee ia?aoai?thaa/ (?en. 6), yeee o neeaae?
iaeiie?enoaeueieo iaaiaoinaini?ieo i?eno?i?a caaacia/o? i?inoo oa
aoaeoeaio e?iaa?ecaoe?th ooieoe?? ia?aoai?aiiy ?ioaa?aeueieo
aeaieieaeoi?ieo iaaiaoio?aicenoi??a c iiaeeea?noth e?iaa?ecaoe?? neaiaeo
a aeeoa?aioe?ei?e oi?i?. I?e oeueiio aoei caaacia/aii iiaeeea?noue
ooieoe?iioaaiiy c iecueeiaieueoieie iaeiiiiey?ieie aeaea?aeaie aeeaeaiiy
(a?ae 3 A ? aeua) c i?i?iaeueieie no?oeoo?ieie cao?aoaie.

?en. 6. Noaia e?iaa?ecaoi?a ooieoe?? ia?aoai?aiiy ?ioaa-?aeueieo
aaaaoieieaeoi?ieo iaaiaoio?aicenoi??a.

?ic?iaeai? ia?aeii? ia?aoai?thaa/? – eaoa?aeuei? aeaieieaeoi?i?
iaaiaoio?aicenoi?e – caaacia/othoue aenie? cia/aiiy eiao?oe??ioa
ooieoe?iiaeueiiai ia?aoai?aiiy oa i?inoioo iiaeaeueoiai ia?iaeaiiy
neaiaeo. Iaeiae aiie ia onoaathoue iaea?eueoiai iaaeie?eo oaeeo aeaaa/?a
– iaa?aeoai?thaaiino? oa oaiia?aoo?ii? ianoaa?eueiino? aeo?aeiiai
neaiaeo. Ii?aeiaiiyi aeniei? /ooeeaino? c aeuith noaa?euei?noth
ii??aiyii c eaoa?aeueieie iaaiaoio?aicenoi?aie oa?aeoa?ecothoueny
?ic?iaeai? ia?aoai?thaa/? eiiiainaoe?eiiai oeio. ?o no?oeoo?ia noaia
i?noeoue ia?aeiiee ia?aoai?thaa/, yeee ooieoe?iiaeueii ii?aeio? aeaiaio
Oiea c eaoa?aeueiei iaaiaoio?aicenoi?ii, neaiaeueiee i?aeneethaa/ oa
?acenoi?e cai?ioiiai ca’yceo. I?eioeei ooieoe?iioaaiiy ?ic?iaeaiiai
naini?iiai i?eno?ith iieyaa? a oi?ioaaii? eiiiainaoe?eii?
aeaeo?i?oo?eii? neee, i?eeeaaeaii? aei Oie?anueeeo aeaeo?iae?a, yea
coiiaeth? aaeainoaaiiy aeo?aeieo no?oi?a iaaiaoio?aicenoi?a,
?ioaa?iaaiiai a no?oeoo?o aeaiaioa Oiea. Aecia/aii, ui eiao?oe??io
ia?aoai?aiiy (ao?aeiee no?oi – aeo?aeia iai?oaa) noaiiaeoue cia/aiiy
ii?yaeeo 1011 A/A. Ca cia/aiiy neioaciiai neaiaeo ia aoiae?
i?aeneethaa/a 300 ieA no?oi ci?uaiiy ia ia?aaeuo? 40 iA, oiaoi
ii/aoeiaee ?icaaeain noaiiaeoue 0,01 %.

Iieacaia iiaeeea?noue aeei?enoaiiy eaoa?aeueieo aeaieieaeoi?ieo
iaaiaoio?aicenoi??a o aaaaoieaiaeueieo i?eno?iyoaeey eieaeueii?
?a?no?aoe?? iaaiaoiiai iiey c i?inoi?iaith ?icae?eueiith caeaoi?noth 150
iei.

O /aoaa?oiio ?icae?e? iaaaaeai? ?acoeueoaoe ?ic?iaee aeai?eoio oa
no?oeoo?ieo cania?a ei?aeoe?? oa?aeoa?enoee iaeiie?enoaeueieo
iaaiaoinaini?ieo i?eno?i?a, ui caaacia/othoue i?i?i?caoe?th aaeeoeaii?
oa ioeueoeie?eaoeaii? iioeaie ooieoe?? ia?aoai?aiiy. Aeey i?aeaeuaiiy
i?aoeec?eiino? iaaiaoinaini?iiai i?eno?ith a neeaae ?ic?iaeaieo
aei??thaaeueieo aoce?a aaaaeaii ei?aeooth/? eiea, ye? eiiiainothoue
iayai? iioeaee.

Aeai?eoi ooieoe?iioaaiiy ei?aeoi?a aaco?oueny ia neioac? ei?aeooth/eo
no?oi?a i?ia?aiiaaiith iao?eoeath aeaea?ae no?oio. I?eioeeiiaeie
??oaiiyie ?ic?iaeaii? iao?eoe? ? aea?eeiai-caaaeaia ianooaaoaaiiy
no?oi?a ia eaoa?aeueieo p-n-p o?aicenoi?ao oa niaoe?aeueiee aeai?eoi
aeaeiaeoaaiiy eii??ie iao?eoe?, ui aea? ciiao i?i?i?coaaoe e?euee?noue
aae?anieo oei. ?ic?iaeaii noaie ei?aeoi?a (?en. 7), ia?aiao?e yeeo
oa?aeoa?ecothoueny aenieith noaa?euei?noth i?e iaa?aeoai?thaaiino? oa
ianoaa?eueiino? aeaiaioii? aace, aaeeoeaia oa ioeueoeie?eaoeaia iioeaee
ciaioai? aei cia/aiiy SYMBOL 177 \f «Symbol» \s 14 ± 1/200 noiniaii
caaeaiiai iaea?eueoiai a?aeoeeaiiy ia?aeiiiai ia?aoai?thaa/a.

?en. 7. Ooieoe?iiaeueia noaia i?ia?aiiaaiiai neioacaoi?a no?oio.

O i’yoiio ?icae?e? aeena?oaoe?? iaaaaeaii ?acoeueoaoe ?ic?iaee
oanoiaeo no?oeoo?, oaoiieia?y aeaioiaeaiiy iaaiaoinaini?ieo i?eno?i?a,
aecia/aii aeanoaa?e?coth/? aieeae ei?ion?a oa oaiciiai?oaeaiue ia
ia?aiao?e ?N, i?iaaaeaii aeine?aeaeaiiy ?icnoi?uaiiy caoiaaiiai oa?o a
iaaiaoinaini?ieo i?eno?iyo.

Caoiaaiee oa? no?oeoo?e a?iiey?ii? ?N caaacia/o? ciaioaiiy ia?aceoiiai
aieeao i?aeeeaaeee, iaeiae coiiaeth? nooo?aa c?inoaiiy
iaaea?iioaioe?eiino?. Oea iia’ycaii c ?icnoi?uaiiyi iaeano? caoiaaiiai
oa?o ii a?aeiioaiith aei iiaa?oiaaeo iaeanoae no?oeoo?e
iaaiaoio?aicenoi?a – ai?oa?a, aaciaeo oa eieaeoi?ieo iaeanoae. Oea
?icnoi?uaiiy ia ? iane?aeeii iaoi/iiai aca?iinoi?uaiiy a i?ioean?
oioie?oia?ao??, a ni?e/eiaia ?icnoi?uaiiyi oaeoe/iiai
i?noeaciaoiaeaeaiiy caoiaaiiai oa?o oa eiai ne?aeo ia iiaa?oi? e?enoaea.
sse a?aeiii, oapiaee p?no ai?oaen?eiiai oapo epaii?th noipiaiaeaeo?oueny
ci?uaiiyi ? picieooyi oioie?oiapao?/iiai paeue?oo caoiaaiiai oapo.
Anoaiiaeaii, ui iniiaieie /eiieeaie, ye? aieeaathoue ia ci?uaiiy, ?
oaiiapaoopa pinoo, eiioeaiopaoe?y SiCl4 a iapiaacia?e noi?o? ? eoo
picip??ioaoe?? iiaapoi? i?aeeeaaeee a?ae ieiuei c iaeeie ?iaeaenaie.
I?iaiaeeeeny aeine?aeaeaiiy c aecia/aiiy aieeao aaee/eie ?icnoi?uaiiy
caoiaaiiai oa?o ia iaaea?iioaioe?ei?noue aeoiaeo iaaiaoio?aicenoi?a, a
oaeiae aieeao oaoiieia?/ieo /eiiee?a ia aaee/eio ?icnoi?uaiiy. Aeey
ni?iuaiiy i?ioeaaeo?e e?euee?nii? ioe?iee ?icnoi?uaiiy iaie aecia/aii
caeaaei?noue i?iaeaieo iai?oa niaoe?aeueii? oanoiai? o?ao?e a?ae
cia/aiiy ?icnoi?uaiiy caoiaaiiai oa?o.

Aeyaeaii aeanoaa?e?coth/ee aieea ei?ion?a ?N ia ?o ia?aiao?e,
ni?e/eiaiee caeeoeiaith iaiaai?/ai?noth ei?ion?a oa iaoai?/ieie
iai?oaeaiiyie ? aeaoi?iaoe?yie a ciiioiaaiiio a ei?ion? e?enoae?.
?ic?iaeai? iaoiaee ciaioaiiy aieeao oeeo /eiiee?a aeei?enoaiiyi
niaoe?aeueieo n?oaeiaeo e?enoaeio?eia/?a oa canoinoaaiiyi niaoe?aeueiiai
eeath. A ?acoeueoao? i?iaaaeaieo aeine?aeaeaiue ?ic?iaeai? ? aeaioiaeai?
iaaiaoinaini?i? i?eno?i?:

Iaaiaoinaini?iee i?eno??e c e?i?eiei aeoiaeii.

e?ooecia ia?aoai?aiiy 1 … 40 A/Oe;

iai?oaa aeeaeaiiy 5 … 12 A;

no?oi niiaeeaaiiy ia a?eueoa 5 iA.

Iaaiaoinaini?iee i?eno??e c ii?iaiaith oa?aeoa?enoeeith

ii??a ia?aieeaiiy 20 … 50 iOe;

iai?oaa aeeaeaiiy 5 … 12 A;

no?oi niiaeeaaiiy ia a?eueoa 5 iA.

Iaaiaoinaini?iee i?eno??e c iiooaeiei aeoiaeii.

ii??a ia?aieeaiiy 20 … 50 iOe;

no?oi eiiooaoe?? aeaioaeoieo aeoiae?a aei 0,5 A;

iai?oaa aeeaeaiiy 9 … 12 A.

?ACOEUeOAOE ?IAIOE ? AENIIAEE

I?iaaaeaii eiiieaen o?ceei-oaoiieia?/ieo oa eiino?oeoeaii-noaiioaoi?/ieo
aeine?aeaeaiue c noai?aiiy oaa?aeio?eueieo iaaiaoinaini?ieo a?iiey?ieo
i?eno?i?a ia eaoa?aeueieo aeaieieaeoi?ieo iaaiaoio?aicenoi?ao ia iniia?
a?iiey?ii? oaoiieia??.

?ic?iaeaii iia? eiino?oeoe?? aeaieieaeoi?ieo iaaiaoi-o?aicenoi??a ye
ia?aeiieo ia?aoai?thaa/?a iaaiaoinaini?ieo i?eno?i?a,
iaaea?iioaioe?ei?noue aeo?aeiiai neaiaeo yeeo ciaioaia ? a 2 – 5 ?ac?a
iaioa a?ae aeeoa?aioe?eii? neeaaeiai? ei?eniiai neaiaeo. A?aeiinia
/ooeea?noue ca?eueoo?oueny a 5 — 10 ?ac?a ? noaiiaeoue
SR = 0,6 … 1,0 Oe-1.

Iieacaii, ui ?ciethth/ee p-n-ia?ao?ae a?iiey?ii? ?N ?, cie?aia,
i?aeeeaaeea ?-oeio i?ia?aeiino?, aieeaathoue ia iniiai? oa?aeoa?enoeee
iaaiaoio?aicenoi?a: ciaioo?oueny eiao?oe??io ia?aaea/? no?oio
o?aicenoi?a oa eiai aaniethoia /oeea?noue. Aaaaeaiiy a no?oeoo?o
iaaiaoio?aicenoi?a caoiaaiiai oa?o ciaioo? aeno?aaoth/ee aieea
i?aeeeaaeee, iaeiae, i?ecaiaeeoue aei ??ceiai ca?eueoaiiy
iaaea?iioaioe?eiino? aeo?aeiiai neaiaeo iaaiaoio?aicenoi?a.

Iieacaii, ui cia/aiiy ii/aoeiai? iaaea?iioaioe?eiino? aeo?aeiiai neaiaeo
aaciaeo eaoa?aeueieo iaaiaoio?aicenoi??a nooo?ai ia?aaeuo?
aeeoa?aioe?eio neeaaeiao aeo?aeiiai neaiaeo i?e oeiiaiio cia/aii?
?iaeoeoe?? iaaiaoiiai iiey SYMBOL 68 \f «Symbol» \s 14 D A =  SYMBOL
177 \f «Symbol» \s 14 ± 30 iOe. Iaaiaoio?aicenoi?e aac caoiaaiiai oa?o
oa?aeoa?ecothoueny cia/ii iaioith iaaea?iioaioe?ei?noth, iaeiae, ia?
i?noea cieaeaiiy a?eueoa i?ae a 100 ?ac?a eiao?oe??ioa ia?aaea/? no?oio.

?ic?iaeai? iia? iaeiie?enoaeuei? iaaiaoinaini?i? i?eno?i? ia
eaoa?aeueieo iaaiaoio?aicenoi?ieo ia?aoai?thaa/ao, a neeaae yeeo
aoiaeyoue caniae aoi?eiii? ia?iaee neaiaeo: noaa?e?caoi? ?aaeei?a
aeeaeaiiy iaaiaoio?aicenoi?a, oa?iieiiiainaoi? oa?aeoa?enoeee
ia?aoai?aiiy, e?iaa?ecaoi?e ooieoe?? ia?aoai?aiiy, ia?aoai?thaa/
eiiiainaoe?eiiai oeio oa eiio?iea? aaaaoieaiaeueieo iaaiaoinaini?ieo
aei??thaa/?a – neaia? iaaiaoiiai iiey. Aecia/aii, ui iaeneiaeueiee
eiao?oe??io noaa?e?caoe?? ?aaeei?a ?iaioe iaaiaoio?aicenoi?a (0,5 … 1 %)
caaacia/o?oueny a?ae’?iiei cai?ioiei ca’yceii neioacii? neeaaeiai?
eieaeoi?ieo no?oi?a iaaiaoio?aicenoi?a.

Iieacaii, ui aaaaeaiiy a e?enoae i?ia?aiiaaiiai ei?aeoi?a oa?aeoa?enoee
caaacia/o? i?aeaeuaiiy i?aoeec?eiino? ooieoe?iioaaiiy iaeiie?enoaeueieo
iaaiaoinaini?ieo i?eno?i?a aei cia/aiiy SYMBOL 177 \f «Symbol» \s 14 ±
1/200 noiniaii caaeaiiai iaea?eueoiai a?aeoeeaiiy ia?aeiiiai
ia?aoai?thaa/a. ?ic?iaeaiee aeai?eoi ooieoe?iioaaiiy ei?aeoi?a
aaco?oueny ia neioac? ei?aeooth/eo no?oi?a i?ia?aiiaaiith iao?eoeath
aeaea?ae no?oio, ui aea? ciiao i?i?i?coaaoe e?euee?noue aae?anieo oei oa
no?oeoo?i? cao?aoe ei?aeoi?a.

Aeine?aeaeaii i?e/eie iiyae ?icnoi?uaiiy caoiaaiiai oa?o oa ?ic?iaeaii
iaoiaee ciaioaiiy eiai aieeao a iaaiaoinaini?ieo i?eno?iyo. ?ic?iaeaia
iaoiaeeea e?euee?nii? oa ye?nii? ioe?iee ?icnoi?uaiiy caoiaaiiai oa?o
oeyoii aecia/aiiy i?iaeaieo iai?oa niaoe?aeueii? oanoiai? o?ao?e, ye?
ei?aeththoue c aaee/eiith ?icnoi?uaiiy.

Ia iniia? aaciaiai i?ioeano aeaioiaeaiiy a?iiey?ieo ?N aeaioiaeaii
e?eueea oaa?aeio?eueieo iaeiie?enoaeueieo iaaiaoinaini?ieo i?eno?i?a: c
e?i?eiei aeoiaeii (e?ooecia ia?aoai?aiiy 1 … 40 A/Oe); c ii?iaiaith
oa?aeoa?enoeeith (ii??a ia?aieeaiiy 20 … 50 iOe) oa c iiooaeiei aeoiaeii
(no?oi eiiooaoe?? aei 0,5 A).

INIIAI? ?ACOEUeOAOE AeENA?OAOe?? IIOAE?EIAAI? A ?IAIOAO

Gotra Z., Golyaka R., Gladoun M., Martinov D., Bansky J., Kalita W.,
Slosarcik S., Dovica M. Controlled voltage source with relative
temperature scale // International Journal of Microcircuits & Electronic
Packaging. -1997. -Vol.20.-No.3.-P.447-452.

Gotra Z., Golyaka R., Morozov Yu., Gladoun M., Slosarcik S., Gmiterko A.
Secondary transducers of sensor integrated circuits with signal bus
supply // Journal of Electrical Engineering.
-1997.-Vol.48.-No.11-12.-P.292-297.

Aeaaeoi I.?., Aieyea ?.E., Aio?a C.TH., Ii?icia TH.A.
Ooieoeiiiaeueii-neioacoth/i ia?aoai?thaa/i ia niaoeiaeiciaaieo
aiaeiaiaeo ia?aiiiaeoaa/ao // Oaiaoe/iee cai?iee noaoae «Noaiioaoiiea
iioaa?aeueieo aiaeiaiaeo naini?ieo i?eno?i?a». -Eueaia: A-ai AeO
“Eueaianueea iieioaoiiea”, 1996. -N.11-25.

Aeaaeoi I.?., Aieyea ?.E., Aio?a C.TH., Ia?oeiia Ae.I. Aeaiaioia aaca
oa?iieiiiainaoei? oa?aeoa?enoee naini?ieo i?eno?i?a // Oaiaoe/iee
cai?iee noaoae «Noaiioaoiiea iioaa?aeueieo aiaeiaiaeo naini?ieo
i?eno?i?a». -Eueaia: A-ai AeO “Eueaianueea iieioaoiiea”, 1996.
-N.95-110.

Cayaea 95010316 IIE5 H 01 L 29/82 ia aeaea/o iaoaioa Oe?a?ie ia aeiao?ae
“Ieaia?iee iaaiioio?aicenoi?”, Cia?eei E.I., Aio?a C.TH., Aieyea ?.E.,
Aeaaeoi I.?. Cayae.: 23.01.1995. “I?ii.aeani?noue”, ?3, 1996.

Cayaea 97052096 ia aeaea/o iaoaioa Oe?a?ie ia aeiao?ae “Aeaea?aei
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Cayaea 97052101 ia aeaea/o iaoaioa Oe?a?ie ia aeiao?ae “Aeaeo?iiia
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Aio?a C.TH., Aieyea ?.E., Aeaaeoi I.?. I?eioeeie iiaoaeiae
iaai?-oiea?iaaieo ?ioaa?aeueieo noai ia eaoa?aeueieo iaai?oio?aicenoi?ao
// Iaoa??aee i?aeia?iaeii? iaoeiai-oaoi?/ii? eiioa?aioe?? “No/ani?
i?iaeaie aaoiiaoeciaaii? ?ic?iaee ? ae?iaieoeoaa ?aae?iaeaeo?iiieo
cania?a oa i?aeaioiaee ?iaeaia?ieo eaae??a”, Euea?a, 1994. -C. 84-86.

Golyaka R., Gladoun M., Kalita W., Nevmerzhytska O. Energy independent
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Gotra Z., Golyaka R., Kalita W., Gladoun M. Principles of high-sensitive
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Gotra Z., Kalita W., Golyaka R., Gladoun M., Zabarylo A. Magnetic field
scanner // Proceedings of XIX ISHM-Poland Chapter Conference,
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Aio?a C.TH., Aieyea ?.E., Aeaaeoi I.?., Ia?oeiia Ae.I. Iioaa?aeueia
noaia eiio?iea?a iaaiioiaeiiaea // «Oiceei-iaoaiaoe/ii iaoee». Iaoa??aee
iaoeiai? eiioa?aioei? aeeeaaea/ia, niia?iaioieeia oa nooaeaioia,
i?enay/aii? 120-?i//th canioaaiiy *a?iiaaoeueeiai oiiaa?neoaoo,
*a?i?aoe?, 1995. O.2 -N.16.

Aio?a C.TH., Aieyea ?.E., Ii?icia TH.A., Aeaaeoi I.?. I/ieoaaeueiee
?aaeei ?iaioe i?eeiaeueieo i?eno?i?a // Oace aeiiia?aeae iiaeia?iaeii?
iaoeiai? eiioa?aioei?, i?enay/aii? 150-?i//th aiae aeiy ia?iaeaeaiiy
aeaeaoiiai oe?a?inueeiai oiceea i aeaeo?ioaoiiea Iaaia Ioethy, Eueaia,
1995. -N.210-211.

Aio?a C.TH., Aieyea ?.E., Aeaaeoi I.?. Iaeiie?enoaeueiee neaia?
iaaiioiiai iiey // Oace aeiiia?aeae iiaeia?iaeii? iaoeiai? eiioa?aioei?
i?enay/aii? 150-?i//th aiae aeiy ia?iaeaeaiiy aeaeaoiiai oe?a?inueeiai
oiceea i aeaeo?ioaoiiea Iaaia Ioethy, Eueaia, 1995. -N.211-212.

Aio?a C.TH., Aieyea ?.E., Ii?icia TH.A., Aeaaeoi I.?. I/ieoaaeueiee
?aaeei ?iaioe iioi?iaoeieii-aeii?thaaeueieo nenoai oa eiai caaacia/aiiy
// Iaoa??aee aeiiia?aeae ae?oai? iaoeiiiaeueii? iaoeiai? eiioa?aioei?
«Iioi?iaoeea: oai?iy, oaoiieiaiy, oaoiiea-IOOO-95», Iaeana, 1995.
-N.31-32.

Aio?a C.TH., Eaeioa A., Aeaaeoi I.?. Ia?aeiiee ia?aoai?thaa/ aeey
neaia?a iaaiioiiai iiey // Oace aeiiia?aeae iiaeia?iaeii?
iaoeiai-oaoii/ii? eiioa?aioei? «No/anii i?iaeaie aaoiiaoeciaaii?
?ic?iaee i ae?iaieoeoaa ?aaeiiaeaeo?iiieo caniaia», Eueaia, 1996. -N.98.

Aeaaeoi I.?., Iaaci?ia A.A. Aieea oaoiieiai/ieo oaeoi?ia ia
aiaeoai?thaaiinoue oa noaaieueiinoue ia?aiao?ia iaaiioicaini?ieo
aiiiey?ieo IN // Oace aeiiia?aeae iiaeia?iaeii? iaoeiai-oaoii/ii?
eiioa?aioei? «No/anii i?iaeaie aaoiiaoeciaaii? ?ic?iaee i ae?iaieoeoaa
?aaeiiaeaeo?iiieo caniaia», Eueaia, 1996. -N.181.

Aieyea ?.E., Aeaaeoi I.?., Ii?icia TH.A., Caaa?eei A.TH. I?ia?aiia
caaacia/aiiy aeey iioeiicaoei? no?oeoo?ieo caniaia eiiaa?ecaoei?
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“1-st International Modelling School”, Alushta (Ukraine), 1996. -N.23.

Aieyea ?.E., Aeaaeoi I.?., Ii?icia TH.A., Caaa?eei A.TH. ?aaeicaoeiy
eoneiai-ai?ieneiaoeieieo neioacaoi?ia ia ooieoeiiiaeueii-iioaa?iaaieo
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Gotra Z., Kalita W., Golyaka R., Gladoun M., Martinov D. Integrated
temperature controlled voltage sources // Proceedings of XX ISHM-Poland
Conference. Jurata (Poland), 1996. -?.137-140.

Kalita W., Golyaka R., Gladoun M., Morozov Yu., Zabarylo A. Complex
function dependencies synthesiser on the base of analogue integrated
circuits // Proceedings of XX ISHM-Poland Conference. Jurata (Poland),
1996. -?.141-144.

Gotra Z., Golyaka R., Gladoun M. Magnetotransistors in the integrated
sensor devices // Proceedings of 1-st International Symposium on
Microelectronics Technologies and Microsystems. Rzeszow (Poland), 1997.
-?.21-26.

Gotra Z., Golyaka R., Gladoun M. Ensuring of the precision of
solid-state sensor devices // Proceedings of 1-st International
Symposium on Microelectronics Technologies and Microsystems. Rzeszow
(Poland), 1997. -pp.70-75.

Gotra Z., Kalita W., Golyaka R., Gladoun M. Thermocompensator of
integrated magnetosensitive circuits // Proceedings of 11th European
Conference on Solid-State Transducers «EuroSensors XI». Warsaw (Poland),
1997.-Vol.2. -P.667-670.

Gotra Z., Potencki J., Golyaka R., Gladoun M. Microelectronics sensor
with frequency output // Proceedings of XXI ISHM-Poland Conference.
Ustron (Poland), 1997. -P.145-148.

Gotra Z., Kalita W., Golyaka R., Gladoun M. Linearisation process of
transduction characteristic in magnetosensitive IC // Proccedings of
2-st International Symposium on «Microelectronics Technologies and
Microsystems». Lviv (Ukraine), 1998. -P.19-22.

Gotra Z., Golyaka R., Gladoun M. Improved primary transducers for
magnetosensitive integrated circuits // Proceedings of 4-th
International Symposium for Informatics and Technology in Electronic
Modules Domain “SIITME’98”. Bucharest (Romania), 1998.-Part 1. -P.75-79.

Aeaaeoi I.?. Oaa?aeio?euei? ?ioaa?aeuei? naini?i? i?eno?i? ia iniia?
ia?aoai?thaa/?a iaaiaoiiai iiey. — ?oeiien.

Aeena?oaoe?y ia caeiaoooy iaoeiaiai nooiaiy eaiaeeaeaoa oaoi?/ieo iaoe
ca niaoe?aeuei?noth 05.27.01 — oaa?aeio?eueia aeaeo?ii?ea. -Aea?aeaaiee
oi?aa?neoao “Euea?anueea iie?oaoi?ea”. Euea?a, 1999.

Aeena?oaoe?th i?enay/aii ?ic?iaoe? oa aeine?aeaeaiith oaa?aeio?eueieo
?ioaa?aeueieo naini?ieo i?eno?i?a ia aeaieieaeoi?ieo eaoa?aeueieo
iaaiaoio?aicenoi?ao ia iniia? a?iiey?ii? oaoiieia??. ?ic?iaeai?
iaeiie?enoaeuei? iaaiaoinaini?i? i?eno?i? ia iiaeo eiino?oeoe?yo
iaaiaoio?aicenoi??a. O neeaae i?eno?i?a aoiaeyoue caniae aoi?eiii?
ia?iaee neaiaeo: noaa?e?caoi? ?aaeei?a aeeaeaiiy iaaiaoio?aicenoi?a,
oa?iieiiiainaoi? ? e?iaa?ecaoi? oa?aeoa?enoeee ia?aoai?aiiy,
ia?aoai?thaa/ eiiiainaoe?eiiai oeio oa eiio?iea? aaaaoieaiaeueieo
iaaiaoinaini?ieo i?eno?i?a. Aeine?aeaeaie aieea oaoiieia?/ieo /eiiee?a
ia ia?aiao?e iaaiaoinaini?ieo i?eno?i?a.

Eeth/iai neiaa: a?iiey?ia iioaa?aeueia noaia, aeaieieaeoi?iee
iaaiaoio?aicenoi?, iaaiaoinaini?iee i?eno??e..

Aeaaeoi I.?. Oaa?aeioaeueiua eioaa?aeueiua naini?iua ono?ienoaa ia
iniiaa i?aia?aciaaoaeae iaaieoiiai iiey. — ?oeiienue.

Aeenna?oaoeey ia nieneaiea o/aiie noaiaie eaiaeeaeaoa oaoie/aneeo iaoe
ii niaoeeaeueiinoe 05.27.01 — oaa?aeioaeueiay yeaeo?iieea.
-Ainoaea?noaaiiue oieaa?neoao «Eueaianueea iieioaoiiea». Eueaia, 1999.

Aeenna?oaoeey iinayuaia ?ac?aaioea e enneaaeiaaieth oaa?aeioaeueiuo
eioaa?aeueiuo naini?iuo ono?ienoa ia aeaooeieeaeoi?iuo eaoa?aeueiuo
iaaieoio?aicenoi?ao ia iniiaa aeiiey?iie oaoiieiaee. ?ac?aaioaiu
iaaieoinaini?iua ono?ienoaa ia iiauo eiino?oeoeeyo iaaieoio?aicenoi?ia.
A ninoaa ono?ienoa aoiaeyo n?aaenoaa aoi?e/iie ia?aaioee neaiaea:
noaaeeecaoi? ?aaeeiia ieoaiey iaaieoio?aicenoi?ia, oa?iieiiiainaoi? e
eeiaa?ecaoi? oa?aeoa?enoeee i?aia?aciaaiey, i?aia?aciaaoaeue
eiiiainaoeeiiiiai oeia e eiio?iea? iiiaieaiaeueiuo iaaieoinaini?iuo
ono?ienoa. Enneaaeiaaii aeeyiea oaoiieiae/aneeo oaeoi?ia ia ia?aiao?u
iaaieoinaini?iuo ono?ienoa.

Eeth/aaua neiaa: aeiiey?iay eioaa?aeueiay noaia, aeaooeieeaeoi?iue
iaaieoio?aicenoi?, iaaieoinaini?iia ono?ienoai.

Gladoun M.R. Solid-state integrated sensor devices on the basis of
magnetic-field transducers. — Manuscript.

Thesis for a candidate’s degree by speciality 05.27.01 — solid-state
electronics. SYMBOL 30 \f «Times New Roman» \s 14 _ State University
«Lviv Polytechnic». Lviv, 1999.

The dissertation is devoted to design and investigations of solid-state
integrated sensor devices on lateral dual-collector magnetic field
transistor on the basis of bipolar IC technology that is one of the
direction of modern electronics. Except primary transducers such devices
include facilities for signal secondary processing.

The analysis of magnetic field primary transducers such as Hall-effect
elements, magnetodiode, magnetotransistors was conducted. It was shown
that lateral magnetosensitive transistors are perspective primary
tansducers for sensor devices. They ensure improved transconductance and
control by different parameters which widen applications of sensor
devices.

During the design and investigations of different types of lateral
magnetotransistors we estimated influence of structural and circuitrical
parameters of integrated structure (vertical and hidden layers, size and
position of emitter region) on their characteristics, especially it
concerns non-equipotentiality of output differential signal and
influence of parasitic transistor structure formed by substrate. We
investigated that isolating p-n junction of bipolar IC, especially
p-type substrate influence on main magnetotransistor parameters. It
means reduction of current factor and absolute sensitivity. The
introduction of hidden layer into structure decreases substrate
extraction but also it leads to increase of non-equipotentiality.

The new structure of dual-collector lateral magnetotransistors as
primary transducer of magnetosensitive devices is elaborated and
investigated. The improved parameters is achieved by taking into
parallel of two mirrored transistor structures and optimization of the
hidden layer size and position. The non-equipotentiality of output
signal is reduced and it is in 2 … 5 times less than differential
component of useful signal. The relative sensitivity is improved in
5 …10 times and is SR = 0.6 … 1.0 T-1.

After investigations we elaborated new magnetosensitive devices and
facilities for signal secondary processing. They are compensatory
transducer, multichannel magnetosensor — magnetic field scanner with
resolution 150 SYMBOL 109 \f «Symbol» \s 14 m m, magnetotransistor
supply mode stabilizer, thermocompensator and linearizator of
transduction characteristic. Special circuitrical solution allows to
improve parameters of magnetosensitive devices that use facilities for
secondary processing. It was established that maximal magnetotransistor
supply mode stabilization factor (0.5 … 1%) can be achieved by negative
feedback of collector currents’ sinphase component.

It was shown, that introduction of programmable corrector of
characteristic provides precision improvement of magnetosensitive
devices functioning up to SYMBOL 177 \f «Symbol» \s 14 ± 1/200 value
relatively to determined maximal deviation of primary transducer. The
elaborated algorithm of corrector functioning is based on synthesis of
correction currents by programmable matrix of current sources which
allows to minimize buses’ amount and corrector structural expenditure.

The causes of hidden layer disalignment are investigated. The new method
for estimation of hidden layer disalignment is elaborated. This method
is based on measurement of breakdown voltages of special test figure
which correlate with disalignment value.

Some solid-state single-crystal magnetosensitive devices on the basis of
standard bipolar IC technology were produced. There are magnetosensitive
device with linear output (transconductance is 1 … 40 V/T),
magnetosensitive device with threshold output (switching threshold is
20 … 50 mT), magnetosensitive device with power output (commutation
current is up to 0.5 A).

Key words: bipolar integrated circuit, dual-collector magnetotransistor,
magnetosensitive device.

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