16
CAII??CUeEEE AeA?AEAAIEE OI?AA?NEOAO
O?EIEI NA?A?E EAII?AeIAE*
OAeE 621.315.592.382:621.383.4
NO?OEOO?A OA O?CE*I? AEANOEAINO? E?AII?EIAEO
EIIIICEOe?E C ?ICOII?ssAeEIAAIEIE OA?AIE
niaoe?aeuei?noue 01.04.10 – O?ceea iai?ai?ia?aeiee?a oa ae?aeaeo?ee?a
AAOI?AOA?AO
aeena?oaoe?? ia caeiaoooy iaoeiaiai nooiaiy
eaiaeeaeaoa o?ceei-iaoaiaoe/ieo iaoe
Caii??aeaey –1999
Aeena?oaoe??th ? ?oeiien.
?iaioa aeeiiaia a Caii??cuee?e aea?aeaai?e ?iaeaia?i?e aeaaeai??
I?i?noa?noaa ina?oe Oe?a?ie.
Iaoeiaee ea??aiee aeieoi? oaoi?/ieo iaoe, i?ioani?
Eaa?icii Aeaaeae ?aeaeaae/,
Caii??cueea aea?aeaaia ?iaeaia?ia aeaaeai?y,
caa?aeoaa/ eaoaae?e o?ce/ii? oa a?iiaaee/ii?
aeaeo?ii?ee
Io?oe?ei? iiiiaioe: aeieoi? o?ceei-iaoaiaoe/ieo iaoe, i?ioani?
Eeoia/aiei Iao?i A?eai?iae/,
?inoeooo yaea?ieo aeine?aeaeaiue IAI Oe?a?ie,
caa?aeoaa/ a?aeae?eo ?aae?aoe?eii? o?ceee
eaiaeeaeao o?ceei-iaoaiaoe/ieo iaoe, aeioeaio
Aao?ooei Aieiaeeie? ?aaaiiae/,
Caii??cueeee aea?aeaaiee oi?aa?neoao,
aeioeaio eaoaae?e oaa?aeio?ei? aeaeo?ii?ee oa
i?e?iaeaeo?ii?ee
I?ia?aeia onoaiiaa: ?inoeooo o?ceee iai?ai?ia?aeiee?a IAI Oe?a?ie
I?i?noa?noaa ina?oe Oe?a?ie i. Ee?a,
a?aeae?e o?ce/ieo iniia ?ioaa?aeueii? aeaeo?ii?ee
Caoeno a?aeaoaeaoueny 9 09 1999 ?. i 15 aiaeei? ia can?aeaii?
niaoe?ae?ciaaii? a/aii? ?aaee E17.051.04 a Caii??cueeiio aea?aeaaiiio
oi?aa?neoao? ca aae?anith: 330600, i. Caii??aeaey,
aoe. AEoeianueeiai, 66.
C aeena?oaoe??th iiaeia iciaeiieoenue o a?ae?ioaoe? CAeO ca aae?anith:
330600, Oe?a?ia, i. Caii??aeaey, aoe. AEoeianueeiai, 66.
Aaoi?aoa?ao ?ic?neaiee “25″__07__ 1999 ?.
A/aiee nae?aoa?
niaoe?ae?ciaaii? ?aaee ___________________________________ Oaaoeue TH.A.
CAAAEUeIA OA?AEOA?ENOEEA ?IAIOE
Aeooaeuei?noue oaie. Oni?oe a aeine?aeaeaii? o?ce/ieo i?ioean?a, ye?
a?aeaoaathoueny a oiieeo iai?ai?ia?aeieeiaeo oa?ao oa oa?oaaoeo
no?oeoo?ao oeio ae?aeaeo?ee – iai?ai?ia?aeiee,
iaoae – ae?aeaeo?ee – iai?ai?ia?aeiee, aaoa?iia?ao?aeieo eiiiiceoe?yo oa
?i., iaeaea oe?eeii aecia/athoue i?ia?an no/anii? oaa?aeio?ei?
aeaeo?ii?ee oa i?e?iaeaeo?ii?ee.
Aaaeaoueny aeoeaiee iiooe iiaeo o?ce/ieo aoaeo?a, iia’ycaieo ?c
aca?iiae??th aaaaoioacieo no?oeoo?, noai?aieo ca aeiiiiiaith ?iiii?
?iieaioaoe??, aenieioaiia?aoo?ieo ? aeaeo?io?i?/ieo i?ioean?a. Aea/aiith
aeeiai?ee aca?iiae?? ??ciiiai?oieo ca o?ce/iith no?oeoo?ith ie?aeiaeo
eiiiiceoe?e, ?o aieeao ia aieiai? o?ce/i? oa?aeoa?enoeee (aeaeo?e/i?,
no?oeoo?i?, iioe/i?) i?enay/aia cia/ia e?euee?noue ?ia?o.
Oiio ia ia?oee ieai aenoaathoueny i?iaeaie aea/aiiy aoaeo?a, iia’ycaieo
c ??ciiiai?oieie o?ce/ieie /eiieeaie aieeao, oaeeie ye oa?i?/i? ia?iaee,
?aae?aoe?eia ii?ii?iaiiy, aaoa?oaaiiy, ?iiia ?iieaioaoe?y ia iieacieee
yeino? caaaeaieo no?oeoo? oa eiiiiceoe?e, aeaioiaeaieo ia?aaaaeii ia
iniia? e?aii?th, yeee ? ? caeeoa?oueny aieiaiei iaoa??aeii a
iai?ai?ia?aeieeiaiio i?eeaaeiaoaeoaaii?.
Iacaaaeath/e ia aaeeeee ianya oai?aoe/ieo ? aenia?eiaioaeueieo
?acoeueoao?a, ye? iaeiie/aii a oeueiio iai?yieo, aein? a?ae/oaa?oueny
ianoa/a nenoaiaoeciaaieo aeaieo, ye? iienothoue i?ioeane aaoa?oaaiiy
aeaoaeo?a, iaoai?cie eiiieaeniooai?aiiy, oi?ioaaiiy oa??a ??ciiai
i?ecia/aiiy a ooieoe?iioth/eo iaeanoyo iai?ai?ia?aeieeiaeo no?oeoo?.
Aa?oi a?aooaaoe, ui iiceoeaieo ?acoeueoao?a iiaeia aeinyaoe o?eueee
caaaeyee eiiieaeniiio i?aeoiaeia?, ui i?noeoue o nia? ciaiiy o?ce/ieo
i?ioean?a, ye? a?aeaoaathoueny a aaaaoioa?iaeo no?oeoo?ao, ea?oaaiiy
ieie oa iiaeaethaaiiyi.
Aei iiiaioo iinoaiiaee ?iaioe ia aoee aeinoaoiuei iiaii aea/ai?
iaoai?cie aca?iiae?? ?icoii?yaeeiaaieo aaaaoioacieo oa?oaaoeo no?oeoo?
?c aeii?oeiaeie ? aeaoaeoieie eiiieaenaie a e?aii?th; e?iaoe/i?
iniaeeaino? oi?ioaaiiy ie?aie ii?enoiai e?aii?th; i?iaeaie, ye?
iia’ycai? c aieeaii neeaaeo ? no?oeoo?e oa?oaaoeo oac ia iioe/i?,
o?ce/i?, aeaeo?e/i? oa?aeoa?enoeee ae?ia?a oaa?aeio?ei? aeaeo?ii?ee.
Ia’?eoaie aeey aeine?aeaeaiue aoee ia?ai?: aacia? aeaiaioe
i?e?iaeaeo?ii?ee: e?aii?eiaee ai?oaen?eii -ieaia?iee o?aicenoi? ?
aaciaee aeaiaio oioiaeaeo?ii?ee: e?aii?eiaee oioiaeaeo?e/iee
ia?aoai?thaa/.
A inoaii? ?iee iaeei c iaea?eueo ia?niaeoeaieo iai?yie?a o ?ic?iaoe? oa
aaeineiiaeaii? iai?ai?ia?aeieeiaeo i?eeaae?a iia’yco?oueny c
aeei?enoaiiyi eiiiiceoe?e c ?icoii?yaeeiaaieie oa?aie. Ne?ae oaeiae
acyoe aei oaaae, ui aei ii/aoeo iaoeo aeine?aeaeaiue ?ieue oaeeo
eiiiiceoe?e a oi?ioaaii? aaciaeo oioiia?aoai?thaaeueieo eiiiiceoe?e oeio
oe?ieiciiiee iai?ai?ia?aeiee – ae?aeaeo?ee – aocueeiciiiee
iai?ai?ia?aeiee ? ieaia?ieo a?iiey?ieo o?aicenoi?ieo no?oeoo?, aoea
aena?oeaia aeineoue neaai.
Ana aeua iaaaaeaia aeicaiey? aaaaeaoe, ui iinoaaeaia i?e aeeiiaii? oe???
?iaioe caaaeaiiy aea/aiiy no?oeoo?e oa o?ce/ieo aeanoeainoae e?aii?eiaeo
E?aii?eiaee. ?in?enueei-oe?a?inueeee o?ce/iee neiaiee/ Oee.
A.A. Aae/aiei, I.C. AEioaenueeee, I.I. Eocueiaiei, ?.Ae. Iaeai?iaea.
–E.: Aeae-ai AI O?N?. –1959. –N.67. eiiiiceoe?e c ?icoii?yaeeiaaieie
oa?aie aeineoue aeooaeueia ye a iaoeiaiio, oae ? a i?aeoe/iiio aniaeoao.
Ca’ycie ?iaioe c iaoeiaeie i?ia?aiaie, ieaiaie, oaiaie.
Aeena?oaoe?eia ?iaioa aeeiioaaeanue o a?aeiia?aeiino? c ieaiiaeie
eiiieaenieie aeine?aeaeaiiyie eaoaae?e eiiiiiaio?a oa iaoa??ae?a
aeaeo?iiii? oaoi?ee Caii??cueei? aea?aeaaii? ?iaeaia?ii? aeaaeai?? ca
oaiaie:
1. Oeo? I-336.13 “?ic?iaea ? ai?iaaaeaeaiiy aenieiaoaeoeaii? oaoiieia??
noai?aiiy oioiia?aoai?thaa/?a oa niiy/ieo aaoa?ae ia ?o canaae? c
aeei?enoaiiyi aoi?eiieo ?ano?n?a iai?ai?ia?aeieeiaiai ae?iaieoeoaa”
(1993-1995 ?.?., aaeocaaee ieai I?i?noa?noaa i?iieneiaino? Oe?a?ie).
2. I?ia?aia 04.00 Aeieia?/ii /enoa aia?aaoeea oa ?ano?nicaa??aath/?
oaoiieia??. ?icae?e 04.10 “Iao?aaeeoe?ei? ? a?aeiiaethaaeuei? aeaea?aea
aia?a?? oa aoaeoeai? nenoaie ?o aeei?enoaiiy” 04.10.02/001e-95
(05.21.04/155-93 Iiaeoeue) “?ic?iaea ? ai?iaaaeaeaiiy i?iieneiai?
oaoiieia?? aeaioiaeaiiy oioiia?aoai?thaaeueieo aeaiaio?a aeey niiy/ieo
aaoa?ae” (1993-1996 ?.?., Caiiaiee – Aea?aeaaiee eii?oao Oe?a?ie c
ieoaiue iaoee oa oaoiieia?e).
3. Aea?aeathaeaeaoia oaia “?ic?iaea ? aeine?aeaeaiiy oaoiieia??
oi?ioaaiiy e?aii?eiaeo no?oeoo? c ae?aeaeo?e/ieie oa?aie,
oioiaeaeo?e/ieo ia?aoai?thaa/?a oa aaaaoiooieoe?iiaeueieo aeaiaio?a ia
?o canaae?”(1994-1996 ?.?., oaiaoe/iee ieai I?i?noa?noaa ina?oe
Oe?a?ie).
4. Aea?aeathaeaeaoia oaia ”Aeine?aeaeaiiy o?ce/ieo aeanoeainoae oa
oaciaiai neeaaeo oaa?aeio?eeo e?aii?eiaeo no?oeoo?”(1997-1999 ?.?.,
oaiaoe/iee ieai I?i?noa?noaa ina?oe Oe?a?ie iaeac ?37 a?ae 13.02.97 ?.).
Iaoa ?iaioe –– eiiieaenia oai?aoe/ia oa aenia?eiaioaeueia aeine?aeaeaiiy
no?oeoo?ieo ? aeaeo?io?ce/ieo oa?aeoa?enoee aaaaoioacieo oa?oaaoeo
nenoai ia iniia? e?aii?th, a oaeiae aieeao aaoa?oth/eo ?
a?aeaeca?eaethaaeueieo oa??a ia aeanoeaino? oioiia?aoai?thaaeueieo ?
o?aicenoi?ieo eiiiiceoe?e.
Aeey aeinyaiaiiy iinoaaeaii? iaoe iaiao?aeii ?ica’ycaoe ianooii?
caaaeaiiy:
1. ?ic?iaeoe oa aaeineiiaeeoe eiiieaen iaoiae?a oa cania?a eiio?ieth
no?oeoo?ieo (iioe/ia i?e?ineii?y, i?ina?oethaaeueia oa ?ano?iaa
aeaeo?iiia i?e?ineii?y) oa aeaeo?io?ce/ieo (ieoiiee oa iiaa?oiaaee ii??,
aieueoaiia?i? oa aieueooa?aaei? oa?aeoa?enoeee, eiao?oe??ioe iiaeeiaiiy
oa a?aeaeooy, aaia?aoe?eiee /an aeeooy oa ?io.) ia?aiao??a aeaioiaeaieo
eiiiiceoe?e.
2. Aeine?aeeoe i?ioeane eiiieaeniooai?aiiy c o/anoth aeii?oie oa ?ooiieo
aeaoaeo?a no?oeoo?e c o?aooaaiiyi ae?? eieaeueieo i?oaeieo iaoai?/ieo
iai?oa a e?aii?eiaeo no?oeoo?ao c ?iieaioiaaiei ?iiaie a?aiio oa?aie oa
ie?aeaie ii?enoiai e?aii?th.
3. I?iaanoe iaoaiaoe/ia iiaeaethaaiiy i?oaeieo iai?oa, ye? ?i?oe?eiaai?
eieaeueiith ?iiiith ?iieaioaoe??th a?aiio ia iiaa?oi? e?aii?eiaeo
no?oeoo?.
4. Aeine?aeeoe aeaeo?io?ce/i? oa no?oeoo?i? ia?aiao?e e?aii?eiaeo
aaoa?iia?ao?aeieo eiiiiceoe?e oeio
iai?ai?ia?aeiee- ae?aeaeo?ee- iai?ai?ia?aeiee, ye? i?noyoue
?icoii?yaeeiaai? oa?e, a oaeiae cae?enieoe aenia?eiaioaeueio ia?aa??eo
iaea?aeaieo ?acoeueoao?a oeyoii aeaioiaeaiiy ia ?o iniia?
oioiaeaeo?e/ieo ia?aoai?thaa/?a.
5. Ia iniia? io?eiaieo aenia?eiaioaeueieo ?acoeueoao?a i?iaanoe
noaoenoe/ia iiaeaethaaiiy oa ?ic?aooiee ia?aiao??a aieueoaiia?ieo
oa?aeoa?enoee oioiaeaeo?e/ieo ia?aoai?thaa/?a.
Iaoeiaa iiaecia.
1. Aia?oa io?eiaii ?acoeueoaoe eiiieaenieo aeine?aeaeaiue ye?nieo oa
ooieoe?iiaeueieo ia?aiao??a i?ea?iaeueieo aaciaeo iai?ai?ia?aeieeiaeo
oioiia?aoai?thaaeueieo eiiiiceoe?e oeio
iai?ai?ia?aeiee – ae?aeaeo?ee – iai?ai?ia?aeiee c oa?ii ii?enoiai
e?aii?th ITO/porSi/nSi/n+Si oa ITO/porSi/nSi/n+Si Al ? n-p-n a?iiey?ieo
e?aii??aeo o?aicenoi?ieo no?oeoo?, a yeeo i?enooi? ?icoii?yaeeiaai?
oa?e.
2. Aia?oa cai?iiiiiaaii oa aeine?aeaeaii eaaoaaiiy ITO-oa??a
ae?eaoiiaoii aethi?i?th [Al(AA)3], anoaiiaeaii ? c’yniaaii iia’ycaia c
oeei i?aeneeaiiy iiaeeiaiiy na?oea (ia 2,3% a ae?aiacii? aeiaaeei oaeeue
0,42–0,61 iei) oa ciaioaiiy iiaa?oiaaiai iii?o ie?aee InxSnyO aei
cia/aiue 10 Ii/.
3. Aia?oa cae?eniaii noaoenoe/ia iiaeaethaaiiy AAO aaoa?iia?aoiaeo oeio
ITO/porSi/nSi/n+Si, ui aeicaieeei e?euee?nii ioe?ieoe aianie i?ioean?a
aeeooc??, ia’?iii?, iiaa?oiaai? ?aeiia?iaoe?? oa aaia?aoe?? iin??a
ca?yaeo a iaoai?ci aeiaeaoeiaiai iiaeeiaiiy oioii?a o oa?? ii?enoiai
e?aii?th.
4. ?ic?iaeaii aiae?oe/io iiaeaeue oi?ioaaiiy iae?ineii?/ieo i?oaeieo
iai?oa i?e ?iieaioaoe?? ?ii?a a?aiio a o?aicenoi?io no?oeoo?o n-p-n
oeio, ui iiynith? eieae?caoe?th iiaa?oiaaeo noie?a aeey ?ooeeaeo
aeaoaeo?a oa aeii?oie ia eeoeaa?e iiaa?oi? eiiiiceoe??.
Iniaenoee aianie aeena?oaioa. Aaoi? nieaioaaa ? aeeiiaa a?eueo?noue
aenia?eiaioaeueieo aeine?aeaeaiue, cae?eniea o?ce/io ?ioa?i?aoaoe?th
iaea?aeaieo ?acoeueoao?a, i?aeaiooaaa iniaenoi oa a ni?aaaoi?noa?
iniiai? iaoeia? ioae?eaoe??, ye? aoee iieeaaeai? a iniiao
aeena?oaoe?eii? ?iaioe ? aecia/eee ?? iaoeiao iiaecio. Aeena?oaioo
iaeaaeeoue i?ia?aeia ?ieue a iaoiaeieia?/iiio, aia?aoo?iiio oa
iao?ieia?/iiio caaacia/aii? ?iaioe, aeaioiaeaii? aeine?aeieo oa
iaeina??eieo c?ace?a, ia?iaoe? ?acoeueoao?a aei??thaaiue c aeei?enoaiiyi
IAII.
Aeinoia??i?noue io?eiaieo o aeena?oaoe?? ?acoeueoao?a
i?aeoaa?aeaeo?oueny iaeaaeiei nooiaiai ?o ocaiaeaeaiino? c a?aeiieie oa
iioae?eiaaieie oai?aoe/ieie oa aenia?eiaioaeueieie aeaieie ?ioeo
aeine?aeiee?a, aenieei ??aiai ?o iao?ieia?/iiai caaacia/aiiy,
aoaeoeai?noth ai?iaaaeaeaiiy.
I?aeoe/ia oe?ii?noue.
1. ?ic?iaeaii ?aaeaiaio aeaioiaeaiiy oioiia?aoai?thaaeueieo
aaoa?ino?oeoo?, eaaiaaieo aoeao?eaoeaoiiaoii aethi?i?th, c aenieeie
iieacieeaie yeino? oa oaoiieia?/iino?, ye? iiaeooue aooe aeei?enoai? ?
/anoeiai aeei?enoiaothoueny ia Caii??cueeiio aea?aeaaiiio
oeoaii – iaai??aiio eiia?iao?, Caii??cueeiio ae?iaie/iio ia’?aeiai?
“Aaiia”, a i?iaeaii?e eaai?aoi??? CAe?A.
2. ?ic?iaeaii ?aaeaiaio, ui ia?aaeaa/a? eiia?iiaaia aaoa?oaaiiy i?e
oi?ioaaii? o?aicenoi?ieo e?aii??aeo eiiiiceoe?e c ?icoii?yaeeiaaieie
oa?aie, yeee aeei?enoiao?oueny a CII “Aaiia”.
3. ?acoeueoaoe, iaaaaeai? a aeena?oaoe??, aeei?enoiaothoueny a
iaa/aeueiiio i?ioean? (CAe?A).
4. ?acoeueoaoe aeine?aeaeaiue a noeoiiino? iiaeooue aooe aeei?enoai?
aeey iiaeaeueoiai aea/aiiy o?ce/ieo i?ioean?a o iai?ai?ia?aeieeiaeo
eiiiiceoe?yo c ?icoii?yaeeiaaieie oa?aie, oaeineiiaeaii? ?nioth/eo
oaoiieia?/ieo i?ioean?a i?e?iaeaeo?ii?ee, i?e ?ic?iaoe?
iai?ai?ia?aeieeiaeo i?eeaae?a oa ?ioaa?aeueieo noai ianooiieo iieie?iue.
Ai?iaaoe?y ?iaioe.
Iniiai? iaoa??aee aeena?oaoe?? aeiiia?aeaeenue ? iaaiai?thaaeenue ia
iaoe?iiaeueieo oa i?aeia?iaeieo iaoeiaeo eiioa?aioe?yo ? neiiic?oiao, a
oiio /ene? ia:
– Oha International Conference on Material Science of Chalcogenide and
Diamond-Structure Semiconductors (CMSCDSS-94), aeiaoaiue 1994 ?.,
i. *a?i?aoe?.
– IX Ana?in?enueeiio neiiic?oi? c ?ano?iai? aeaeo?iiii? i?e?ineii?? ?
aiae?oe/ieo iaoiae?a aeine?aeaeaiiy oaa?aeeo o?e (SEM’95), o?aaaiue
1995 ?., i. *i?iiaie?aea.
– V I?aeia?iaei?e eiioa?aioe?? c o?ceee ? oaoiieia?? oiieeo ie?aie,
aeiaoaiue 1995 ?., i. ?aaii-O?aie?anuee.
– V ?in?enuee?e iaoeia?e nooaeaionuee?e eiioa?aioe??, /a?aaiue 1996 ?.,
i. Oiinuee.
– Ia?o?e Ana?in?enuee?e eiioa?aioe?? c iaoa??aeiciaanoaa ?
o?ceei-o?i?/ieo iniia oaoiieia?? io?eiaiiy eaaiaaieo e?enoae?a e?aii?th
(E?aii?e-96), eenoiiaae 1996 ?., i. Iineaa.
– Fourth International symposium on space means for power utilities
(SPS’97), na?iaiue 1997 ?., i. Iii?aaeue, Eaiaaea.
– Second international school-conference on physical problems in
material science of semiconductors (??MSS-97), aa?anaiue 1997 ?.,
i. *a?i?aoe?;
Iniiai? iieiaeaiiy ?iaioe ia??iaee/ii aeiiia?aeaeenue ? iaaiai?thaaeenue
ia can?aeaiiyo ?aa?iiaeueiiai iaoeiaiai nai?ia?o c o?ceee,
iaoa??aeiciaanoaa ? oaoi?/ieo canoinoaaiiyo iai?ai?ia?aeiee?a, a oaeiae
ia can?aeaiiyo ? iaoeiaeo nai?ia?ao eaoaae?e eiiiiiaio?a ? iaoa??ae?a
aeaeo?iiii? oaoi?ee Caii??cueei? aea?aeaaii? ?iaeaia?ii? aeaaeai??.
Ioae?eaoe??. Ca iaoa??aeaie aeena?oaoe?? iioae?eiaaii 16 ae?oeiaaieo
?ia?o, a oiio /ene? 5 noaoae o iaoeiaeo oaoiaeo aeaeaiiyo Oe?a?ie oa
?ioeo e?a?i, ia?ae?e yeeo caoaa?aeaeo? AAE Oe?a?ie, a oaeiae
i?aeaioiaeaii o?e iaoeiai-oaoi?/ieo ca?oe.
No?oeoo?a ? ia’?i aeena?oaoe??. Aeena?oaoe?y neeaaea?oueny c? anooio,
i’yoe ?icae?e?a, aeniiae?a, ia?ae?eo aeei?enoaieo e?oa?aoo?ieo aeaea?ae,
ui aeeth/a? 185 iaeiaioaaiue. Aeena?oaoe?y aeeeaaeaia ia 133 noi??ieao
ae?oeiaaiiai oaenoo ? i?noeoue 40 ?enoie?a ? oaaeeoeue.
INIIAIEE CI?NO ?IAIOE
O anooi? iaa?oioiaaia aeooaeuei?noue oaie, ?? ca’ycie ?c
iaoeiai-aeine?aeieie i?ia?aiaie, noi?ioeueiaai? iaoa ? caaaeaiiy ?iaioe,
?? iaoeiaa iiaecia ? i?aeoe/ia oe?ii?noue oa ai?iaaoe?y.
O ia?oiio ?icae?e? iaaaaeaii ?acoeueoaoe eeaneo?eaoe?? ?icoii?yaeeiaaieo
oa??a o iai?ai?ia?aeieeao. Ca iioae?eiaaieie ia nueiaiaei?oi?e aeaiue
aeaieie a?aecia/a?oueny, ui iniiaieie iaoiaeaie ?o oi?ioaaiiy ? aiiaeia
o?aaeaiiy oa ?iieaioaoe?y ?ii?a c aenieith aia?a??th.
Iaaaaeaii iaeyae oai?aoe/ieo ? aenia?eiaioaeueieo ?acoeueoao?a
oi?ioaaiiy oioiia?aoai?thaa/?a oeio oe?ieiciiiee iai?ai?ia?aeiee –
ae?aeaeo?ee – aocueeiciiiee iai?ai?ia?aeiee. Iaaiai?th?oueny ?ieue ?
iniaeeaino? aeei?enoaiiy ooiaeueii-oiieiai ae?aeaeo?eea a
oioiia?aoai?thaa/ao c no?oeoo?ith ITO/SiOx/nSi. Aena?oeaii ia?aaaae, ui
aea? canoinoaaiiy oiieeo ITO–ie?aie i?e aeaioiaeaii?
oioiia?aoai?thaa/?a. Aeacaii ia niaoeeo?/io ?ieue ?icoii?yaeeiaaieo
oa??a iniaeeai ii?enoiai e?aii?th, ye aioea?aeaeca?eaethaaieo iie?eoo?a.
Ocaaaeueiaii aeai? i?i iioe/i? ? aeaeo?io?ce/i? aeanoeaino? ii?enoiai
e?aii?th a caeaaeiino? a?ae aeei?enoaii? aia?aoo?e ? oiia oi?ioaaiiy.
Iieacaii, ui o no/ani?e a?o/eciyi?e iaoeiai-oaoi?/i?e i?aeoeoe?
i?aeoe/ii a?aenooi?e aeina?ae aeaioiaeaiiy oioiia?aoai?thaa/?a ia iniia?
eiiiiceoe?? oeio oe?ieiciiiee iai?ai?ia?aeiee (ITO) – ae?aeaeo?ee –
ii?enoee e?aii?e. Aecia/ai? iaea?eueo ia?niaeoeai? iai?yiee
aeine?aeaeaiiy no?oeoo?e oa o?ce/ieo aeanoeainoae oa??a ii?enoiai
e?aii?th, ye? io?eiai? ca aeiiiiiaith aiiaeiiai o?aaeaiiy.
?icaeyiooi ?acoeueoaoe aenia?eiaioaeueieo ? oai?aoe/ieo ?ia?o, ye?
aeine?aeaeothoue iiaaae?iee ?ooiieo aeaoaeo?a oa iaaaaeai? aeii?oie, ui
cae?eniththoue nooo?aee aieea ia aeaeo?e/i? oa?aeoa?enoeee eiiiiceoe??,
yeee iiaeia ciaioeoe ca aeiiiiiaith i?iaaaeaiiy a?aeiia?aeieo
aaoa?oth/eo ia?iaie.
I?iaaaeaii oaeiae iaeyae ?ia?o, i?enay/aieo c’ynoaaiith aieeao
aeaoaeo?a, ye? aeieeathoue i?ae /an ?iiii? ?iieaioaoe??, ? aeeeeeathoue
?icaeiaiiy aeiaeaoeiaeo i?oaeieo iai?oa ? ci?io eiao?oe??io?a aeeooc??
eaaoth/eo aeii?oie.
Iiaeaii ia?ae?e iaoiae?a aaoa?oaaiiy aeaoaeo?a a aeoeaieo iaeanoyo
e?enoaea, ye? aacothoueny ia noai?aii? a iaaeoeaieo ae?eyieao
iaaeineiiaeinoae, ui iiaeeiathoue ye oaeaeeiaeeooiaeoth/? aeii?oee, oae
? oi/eia? aeaoaeoe.
Iienaii o?ce/i? aoaeoe, ui noi?iaiaeaeothoue i?ioean aaoa?oaaiiy.
I?iaaaeaii iaeyae cania?a ?aae?caoe?? i?ioeano aaoa?oaaiiy, ye?
aacothoueny ia aoaeo? ca?eueiaiiy aeii?oie aai ?iceeaaeaiiy aeaoaeo?a ia
neeaaeia? /anoeie.
I?iaiae?ciaaii ?iaioe, a yeeo iiaeaii a?aeiiino? uiaei cania?a
aioo??oiueiai, eieaeueiiai ? eiia?iiaaiiai aaoa?oaaiiy.
I?iaaaeaii iaeyae ? aiae?c ?ioi?iaoe?eieo aeaea?ae, ye? oi?eathoueny
oiia oi?ioaaiiy ?icoii?yaeeiaaieo aaoa?oth/eo oa??a o o?aicenoi?ieo
no?oeoo?ao.
Iniaeeao oaaao, caaaeath/e ia ?noioi? ia?aaaae, i?eae?eaii
aeine?aeaeaiiyi aeanoeainoae oa no?oeoo?e ?icoii?yaeeiaaieo oa??a o
o?aicenoi?ieo eiiiiceoe?yo, i?e oi?ioaaii? yeeo aeei?enoiao?oueny ?iiia
?iieaioaoe?y.
O ae?oaiio ?icae?e? iaaaaeaii ?acoeueoaoe ?ic?iaee oa aeine?aeaeaiiy
iaoiae?a aeaioiaeaiiy e?aii?eiaeo no?oeoo? c ?icoii?yaeeiaaieie oa?aie,
ui aeei?enoiaoaaeenue a aeena?oaoe??.
Iienaii i?ea?iaeueio iaoiaeeeo aeaioiaeaiiy aa?’??iooai?thth/iai
oe?ieiciiiiai iecueeiiiiiai iai?ai?ia?aeieea ioeueaa?ecaoe??th c
ianooiiei i??ieecii, iaa?oioiaaii oa ?aeiiaiaeiaaii iniiai? ia?aiao?e
i?ioeano ioeueaa?ecaoe??.
Aeey io?eiaiiy ITO –oa?o aeei?enoiaoaaee ?ic/ei
InCl3:SnCl4(5H2O):H2O:CH3CH2OH o oaeeo ni?aa?aeiioaiiyo:
30-35:1:100-150:100-150.
Oaiia?aoo?o i?aeeeaaeee aeo?eioaaee a iaaeao 400-490 N0, /an iaianaiiy
?ic/eio – a?ae 30 aei 50 naeoiae.
?icoii?yaeeiaaiee oa? c ii?enoith no?oeoo?ith noai?thaaee ia?aae
iia?aoe??th iaianaiiy ITO–ie?aee.
Aeey oe??? iaoe aoea ?ic?iaeaia niaoe?aeueia eaai?aoi?ia onoaiiaea
oi?ioaaiiy oa??a ii?enoiai e?aii?th iaoiaeii aiiaeiiai o?aaeaiiy a
?ic/ei? ieaaeeiai? eeneioe, iien yei? iaaaaeaii a aeena?oaoe??.
O i?ioean? i?iaaaeaiiy o?aaeaiiy oo?eiaiiy ieaaeeiai? eeneioe a ?ic/ei?
ci?ithaaee a?ae 10% aei 49%. Oiaueia io?eiaieo oa??a ii?enoiai e?aii?th
ciaoiaeeeany a iaaeao a?ae 0,514 iei. Aecia/aiiy oiaueie ii?enoiai
e?aii?th cae?enithaaee ca aeiiiiiaith iioe/iiai i?e?ineiio iaoiaeii
einiai oe?oa c ianooiiei aeaei?oaaiiyi iaae? ?icae?eo o ?ic/ei? (CrO3:
H2O: HF=3:6:2).
Aeaoaeueii iienaii ?ic?iaeaio aenia?eiaioaeueio iaoiaeeeo aeaioiaeaiiy
oioiia?aoai?thaa/?a, ca aeiiiiiaith yei? aoei aeaioiaeaii aeine?aei?
c?acee.
?ic?iaeaii ? i?aaenoaaeaii iaoiaeeeo oi?ioaaiiy o?aicenoi?ieo no?oeoo? c
aeei?enoaiiyi eiia?iiaaieo iaoiae?a aaoa?oaaiiy.
I?eoiaai? n+-oa?e noai?thaaee ca aeiiiiiaith eieaeueii? ?iiii?
?iieaioaoe?? no?ie c aia?a??th 60 eaA i?e aeic? 1.5*1015ni-2 ia
onoaiiaoe? “Aacoaee-5″. C ianooiiith ?? ?icaiieith i?e oaiia?aoo??
1200Ni i?ioyaii 3,5 aiaeei a aoiinoa?? a?aiio a aeeooc?ei?e ia/? oeio
NAeI 125/3-15. Oiaueia i?eoiaaiiai n+-oa?o i?e oeueiio neeaea
3,00,5 iei, a iiaa?oiaaee ii?? – 3510 Ii/.
I?eoiaai? ?+-oa?e oi?ioaaee ca aeiiiiiaith aeainoaae?eii? aeeooc?? ai?o
(oaiia?aoo?e caaiiee oa ?icaiiee a?aeiia?aeii neeaee 950Ni ? 1050Ni).
Oi?ioaaiiy aace cae?enithaaee ca aeiiiiiaith ?iiii? ?iieaioaoe?? ai?o c
aia?a??th 120 eaA i?e aeic? 3,5*1013ni-2 ? ?icaiieith i?e oaiia?aoo??
1050Ni.
Ai?oa?io iaeanoue noai?thaaee iaoiaeii ?iiii? ?iieaioaoe?? ieo’yeo c
aia?a??th 60 eaA i?e aeic? 2,5*1015 ni-2. Oa?iiia?iaeo ?iieaioiaaieo
oa??a cae?enithaaee aeo?eieith i?e oaiia?aoo?? 900Ni a acio? c
i?enooi?noth ia??a nieyii? eeneioe.
Oi?ioaaiiy ?icoii?yaeeiaaii? aaoa?ii? iaeano? o ai?oaen?eiiio oa??
cae?enithaaeinue iaoiaeii eieaeueii? ?iieaioaoe?? ?ii?a a?aiio c
aia?a??th 80 eaA i?e aeic? 6*1014ni-2. Aiaeia?/ii aoea noi?iiaaia
ieaia?ia aaoa?ia iaeanoue ia?aae iia?aoe?yie oi?ioaaiiy aace oa ai?oa?a
c aia?a??th 80 eaA i?e aeicao 2*1014ni-2, 5*1014ni-2, 7*1014ni-2,
4*1015ni-2, 8*1015ni-2.
Ia iniia? oe??? iaoiaeeee aeaioiaeai? c aeei?enoaiiyi eiia?iiaaieo
iaoiae?a aaoa?oaaiiy aeine?aei? o?aicenoi?i? eiiiiceoe??.
Oi?ioaaiiy oa??a ii?enoiai e?aii?th aeeiioaaeinue ia?aae ia?iuoaaiiyi
ai?oaen?eiiai oa?o o?aaeaiiyi o 10% aiaeiiio ?ic/ei? ieaaeeiai? eeneioe
i?e aonoei? aiiaeiiai oieo 4 iA/ni2. I?ioyaii 80 n noai?thaaee
??aiii??iee oa? ii?enoiai e?aii?th oiaueiith 0,7 iei ? aonoeiith
1,94 a/ni3.
Ai?oaen?eiee oa?, ia yeiio aoea noi?iiaaia o?aicenoi?ia eiiiiceoe?y, iaa
oiaueio 1,900,03 iei.
Io?eiaii i?io?e? ?iciiae?eo aeii?oie a ai?oaen?eiiio oa??. Oiaueia
ia?ao?aeii? iaeano? ia no?oeoo?ao aac ie?aee ii?enoiai e?aii?th
neeaaeaea 0,6-0,7 iei, oiaoi i?aeoe/ii aiia aeinyaaea ia?aoiaeo
eieaeoi?-aaca, oei naiei ciaiooth/e eiai i?iaeaio iai?oao. Oiaueia
ia?ao?aeii? iaeano? ia no?oeoo?ao c ie?aeith ii?enoiai e?aii?th neeaaea?
0,2-0,3 iei, ui iiceoeaii iicia/a?oueny ia noaa?e?caoe?? ? c?inoaii?
i?iaeaieo iai?oa Uea. I?eaa?oa? oaaao cieaeaiiy aaee/ei no?oi?a aeoieo
Iaeoya ? Iaeoea, a oaeiae aeayeee c??no cia/aiue i?iaeaieo iai?oa
eieaeoi?-aaca Ueai(24A), eieaeoi?-ai?oa? Ueyi(6A), ciaioaiiy aeoie?a.
O?ao?e ?icae?e aeena?oaoe?? i?enay/aii ?ic?iaeai, i?iaaaeaiei c iaoith
iaoiaee/iiai oa iao?ieia?/iiai caaacia/aiiy aei??o o?ce/ieo ia?aiao??a
oa nooiaith no?oeoo?ii? aeineiiaeino? e?aii?eiaeo eiiiiceoe?e c
?icoii?yaeeiaaieie oa?aie.
Iienaii iniaeeaino? iaoiaeeee aecia/aiiy eiao?oe??ioo iiaeeiaiiy oa
iaoiaeeeo ?ic?aooieo eiao?oe??ioa a?aeaeooy, ui aeei?enoiaoaaeenue a
?iaio?.
Iaaeaii iien iaoiaeeee aei??thaaiiy oiaueie oa??a, ieoiiiai ?
iiaa?oiaaiai iii?o, niaeo?aeueieo, aieueo-aiia?ieo ? aieueo-oa?aaeieo
oa?aeoa?enoee oioiia?aoai?thaa/?a oa aeine?aeaeaiiy aoaeoeaii? aonoeie
ii?enoiai e?aii?th.
Aeine?aeaeaiiy no?oeoo?e ?icoii?yaeeiaaieo oa??a a e?aii?? aoei
i?iaaaeaii ca aeiiiiiaith iioe/ii? oa aeaeo?iiii? ?ano?iai? ?
i?ina?/oaaeueii? i?e?ineii??.
Aonoeia aeaoaeo?a a aeoeaieo iaeanoyo o?aicenoi?ii? no?oeoo?e
aei??thaaeanue ca aeiiiiiaith naeaeoeaiiai o?aaeaiiy c aeei?enoaiiyi
iioe/ii? i?e?ineii??.
Aeaoaeueii iienaii iaoiaeeeo aeaeo?iiii-i?e?ineii?/ieo aeine?aeaeaiue
noiniaii aeaoaeo?a no?oeoo?e a aaaaoioa?iaeo e?aii?eiaeo eiiiiceoe?yo.
Aiae?c /eneaiieo oioici?ie?a, io?eiaieo ca aeiiiiiaith ?ano?iai?
aeaeo?iiii? oa iioe/ii? i?e?ineii??, aeicaiey? ?ioa?i?aooaaoe aeaoaeoe,
ye? niinoa??aathoueny ye ii?e.
Aea/aiiy no?oeoo?e ii?enoiai e?aii?th aeeiioaaeinue ca iaoiaeii aiae?co
/i?ii-a?eiai eiio?anoo cia?aaeaiiy ia iniia? iaoiaeeee aecia/aiiy
no?oeoo?e iaeeo aeeneieaoe?eieo iaoaeue.
Iaaiai?th?oueny, ui cai?iiiiiaaiee iaoiae aiae?co /i?ii-a?eiai eiio?anoo
cia?aaeaiiy aeicaiey? aecia/eoe i?e?iaeo iaaeineiiaeinoae, yeui aiie
iathoue ?ici??e ia iaioa 40 .
Aeey iina?aaeiuei? ioe?iee no?oeoo?e ii?enoiai e?aii?th aeei?enoiaoaaee
eiai aoaeoeaio aonoeio, yeo ni?anoaaeyee c aeaeo?iiia?aiaie iiaa?oi?
ie?aie.
*aoaa?oee ?icae?e aeena?oaoe?? i?noeoue ?acoeueoaoe aeine?aeaeaiue
aeaeo?io?ce/ieo aeanoeainoae oa aeaoaeo?a no?oeoo?e e?aii?eiaeo
oioiia?aoai?thaaeueieo eiiiiceoe?e c ?icoii?yaeeiaaieie oa?aie.
Aeine?aeaeaiiy c?ace?a ca iaoiaeii ?ano?iai? i?e?ineii?? iieacaei, ui
aeo?aaeai? ii?e iathoue i??ai?aeaeueio oi?io c aa?oeiith a aeeaei?
e?enoaeo ? i?aenoaaith ia iiaa?oi? ieanoeie.
?c ca?eueoaiiyi aeie? ieaaeeiai? eeneioe a?ae 20 aei 49% o aiaeiiio
?ic/ei? i?e o?aaeaii? c o?eniaaiith aonoeiith aiiaeiiai no?oio 10 iA/ni2
? /ano o?aaeaiiy (3 oaeeeie) ae?aiao? ii? ca?eueoo?oueny. I?e
i?aeaeuaii? aonoeie no?oio ? iino?eiiio /an? o?aaeaiiy 5 oaeeei o
?ic/ei? 20% ieaaeeiai? eeneioe ? 10% aoeeiaiai nie?oo, aai ca?eueoaii?
/ano i?ioeano aei 10 oaeeei o ?ic/ei? 20% ieaaeeiai? eeneioe ? 10%
aoeeiaiai nie?oo i?e aonoei? aiiaeiiai no?oio 10 iA/ni2 a?aeaoaa?oueny
?ico?aaeaiiy ii?.
Ae?aiao? ii? ia aeine?aeaeaieo c?aceao neeaa 50-210 . Aeyaeaii, ui a?i
ca?eueoo?oueny c ca?eueoaiiyi aonoeie no?oio, /ano aiiaeiiai o?aaeaiiy
oa oiaueie ie?aee ii?enoiai e?aii?th.
Iaeneiaeueia e?euee?noue ii? (4*108 – 8*109ni-2) a?aeiia?aea? ae?aiaciio
ae?aiao?a 50-80 .
Ca?eueoaiiy ae?aiao?a ii?, ye iieacaee aeine?aeaeaiiy, a?aeaoaa?oueny ia
o?eueee ca ?aooiie ?ic/eiaiiy e?aii?th ia ?o no?ieao, aea ? /a?ac aoaeo
ia’?aeiaiiy ae??aieo, aeecueei ?icoaoiaaieo ii?.
C i?e?iaeeo?aeoe?eieo ci?ie?a aeaeii, ui c?acee c ii?enoei oa?ii iathoue
?aoeaene, ye? a?aeiia?aeathoue ca i?enooi?noue aii?oii? neeaaeiai?.
Iaeiae e?i?? Eeeo/?, oa?aeoa?i? aeey iiiie?enoaee/iiai e?aii?th,
iiai?noth ia cieeathoue. ?c ca?eueoaiiyi aonoeie no?oio o?aaeaiiy
c?inoa? aeiey aii?oii? oace.
Aeey iiaii? ioe?iee yeino? eiiiiceoe?? iaiao?aeii oaeiae aeaoaeueii
aeine?aeeoe oa? oe?ieiciiiiai iai?ai?ia?aeieea. C oe??th iaoith
i?iaaaeaii aei??thaaiiy caeaaeiino? aeaeo?e/iiai iiaa?oiaaiai iii?o
ie?aee InxSnyO a?ae i?ioeaioiiai neeaaeo SnCl4(5H2O) a ?ic/ei?.
Aecia/aii, ui i?e iaaaeeeeo eiioeaio?aoe?yo ieiaa a noi?o? eiai aoiie
cai?uothoue aoiie ?iae?th a no?oeoo?? ie?aee, oei naiei aenooiath/e a
yeino? aeiii??a. I?ioa, i?e ca?eueoaii? a ?ic/ei? eiioeaio?aoe??
c’?aeiaiiy SnCl4(5H2O) c?inoa? iayai?noue oace SnO2 o neeaae? ie?aee
InxSnyI, ui i?ecaiaeeoue aei cieaeaiiy eiioeaio?aoe?? a?eueieo iin??a
ca?yaeo ? ciaioaiiy aeaeo?ii?ia?aeiino?.
I?iaaaeaii aei??thaaiiy iiaa?oiaaiai aeaeo?e/iiai iii?o ie?aee InxSnyO,
ye? eaaiaai? aoeao?eaoeaoiiaoii aethi?i?th Al(AA3). Anoaiiaeaii, ui i?e
oeueiio iiaa?oiaaee ii?? ie?aie ciaioo?oueny aei cia/aiue 10 Ii/, i?e
iayaiino? Al(AA)3 o ?ic/ei? a?ey 2%.
Oea iiaea aooe iiyniaii oei, ui aeii?oea Al ia? a?eueo iecueeee aeaniee
ieoiiee ii?? i?ae In ? Sn.
I?iaaaeaii ?ic?aooiie caeaaeiino? eiao?oe??ioa a?aeaeooy oa?o ITO a?ae
oiaueie. Iaeiaioee ?ici?? eiao?oe??ioa a?aeaeooy iathoue iie?eooy c
oiaueiith a?ae 500 aei 800 o ae?aiacii? aeiaaeei oaeeue 0,42-0,61 iei.
Aea/aii aieea oaiia?aoo?e i?aeeeaaeee ia oi?ioaaiiy ie?aie InxSnyO.
I?iaaaeaii aeine?aeaeaiiy niaeo?aeueieo oa?aeoa?enoee
oioiia?aoai?thaa/?a c oiaueiith ie?aee 800 , c yeeo aeaeii, ui iaea?eueo
ni?eyoeeaith oaiia?aoo?ith iaieeaiiy ie?aee ? 4000N aeey n-oeio e?aii?th
oa 4250N aeey ?-oeio e?aii?th.
Aea/aiiy aeanoeainoae iaeano? i?inoi?iaiai ca?yaeo aaoa?iia?ao?aeo
iaoiaeii aieueooa?aaeieo oa?aeoa?enoee iieacaei, ui c?acee c ii?enoei
oa?ii iathoue iai?oao a?aen?/ee VD=0.53 A, oiae? ye aeey c?ace?a aac
ii?enoiai oa?o oey aaee/eia neeaaea? – 0.45 A. ?ic?aoiaaii
eiioeaio?aoe?th aeiii?ieo aeii?oie a neaaieaaiaai?e iaeano?
ai?oaen?eiiai oa?o, yea neeaea: aeey c?ace?a aac ii?enoiai oa?o
–6,55*1014ni-3, a aeey c?ace?a c ii?enoei oa?ii – 3,95*1014ni-3.
Aeine?aeaeaii caeaaei?noue iai?oae oieinoiai oiaeo a?ae aeiaaeeie oaee?
(niaeo?aeuei? oa?aeoa?enoeee) aeey oioiia?aoai?thaaeueieo eiiiiceoe?e
oeio ITO/SiOx/porSi/nSi/n+Si, ITO(eaaiaaiiai
Al(AA)3)/SiOx/porSi/nSi/n+Si oa ITO/SiOx/nSi/n+Si .
Aeoiaey/e c io?eiaieo aenia?eiaioaeueieo aeaieo, aecia/aii eiao?oe??io
caiiaiaiiy () ? eiao?oe??io ei?enii? ae??.
Anoaiiaeaii, ui a?aeaoaa?oueny aeiaeaoeiaa iiaeeiaiiy oioii?a o
ii?enoiio e?aii?th, ui aaaea aei ca?eueoaiiy iai?oae oieinoiai oiaeo,
no?oio ei?ioeiai caieeaiiy oa ? eiao?oe??io ei?enii? ae?? aei cia/aiue
Uoc= 4953 iA, Isc= 29 iA/ci2, =0,63.
Aeey c’ynoaaiiy iaoai?ci?a, ui a?aeiia?aeathoue ca i?ioeane iiaeeiaiiy
oioii?a, i?iaaaeaii noaoenoe/ia iiaeaethaaiiy AAO aaoa?iia?aoiaeo
iai?ai?ia?aeiee – ae?aeaeo?ee – iai?ai?ia?aeiee c o?aooaaiiyi aianeo
iaoai?ci?a aeeooc??, ia’?iii?, iiaa?oiaai? ?aeiia?iaoe?? oa aaia?aoe??
iin??a ca?yaeo a ia’?iiiio oa??.
?ic?aooiie eiao?oe??io?a aieueoaiia?ieo oa?aeoa?enoee aoei aeeiiaii ca
aeiiiiiaith oi?ioee:
(1)
aea Dp, Dn – eiao?oe??io aeeooc?? iin??a; pn0, np0 – ??aiiaaaia?
eiioeaio?aoe?? iin??a; Ln, Lp – aeiaaeeia aeeooc??; Nc, Nv – aoaeoeaia
u?euei?noue noai?a a?aeiia?aeii a cii? i?ia?aeiino? oa aaeaioi?e cii?;
q – ca?yae aeaeo?iio; U – iai?oaa ci?uaiiy; k – iino?eia Aieueoeiaia;
T – oaiia?aoo?a; n – eiao?oe??io ia?aeaaeueiino?, yeee a?aeiia?aea? ca
ia?aaeuaiiy aeeooc?eiiai no?oio iaae ?aeiia?iaoe?eiei; Eg -oe?eia
caai?iiaii? ciie; W-oe?eia iaeano? i?inoi?iaiai ca?yaeo; -/an aeeooy
iainiiaieo iin??a ca?yaeo; Vs-oaeaee?noue iiaa?oiaai? ?aeiia?iaoe??; –
eiioaeoia ??cieoey iioaioe?ae?a.
?ic?aooiie eiao?oe??io?a ??aiyiiy aieueoaiia?ieo oa?aeoa?enoee
oioiaeaeo?e/ieo ia?aoai?thaa/?a i?iaiaeeany iaoiaeii iaeiaioeo
eaaae?ao?a ca ?acoeueoaoaie aei???a oaiiiaeo AAO ?c onoaiiaeaiith
caaaeueiith iioeaeith A=1*10-4. Cia/aiiy A aecia/aeiny oaeei ??aiyiiyi:
wmetafile8? ??????Y????????
???????????yyy????.????1?????????????
`@???&??yyyy?????Ayyycyyy????????&?
?MathType???????u?th??????aea yi –aenia?eiaioaeueia cia/aiiy iiooeiai?
ooieoe??; f(xi) – oai?aoe/ia cia/aiiy ooieoe??; i – iioeaea a
iaeeie/iiio aeina?ae?; i – iiia? aeina?aeo; m – e?euee?noue aeina?ae?a.
sseui f(x)=Z(x, a0, a1, a2, a3… .ak), aea a0, a1,
a2…ak –eiao?oe??ioe, oi A iiaeia oyaeoe ye ooieoe?th aei ia?ai?iiiai.
Oiae? ca iaiao?aeiith oiiaith ?nioaaiiy aeno?aioio ooieoe?? a oi/eao
aeno?aioio i?eaaoi? iio?aei? ca ci?iieie iiaeii? aei??aithaaoe ioeth.
Iaea?aeeii nenoaio ??aiyiue:
(3)
Ae??ooth/e /enaeueiei iaoiaeii oeth nenoaio ??aiyiue, aecia/a?ii
cia/aiiy eiao?oe??io?a a0, a1, a2, … , ak .
Aaaaeaii oae? cai?ie:
I(Ui)=f(Ui)= wmetafile8? ??Y???????????
???????????yyy????.????1?????????????
?A!???&??yyyy?????Ayyy«yyy?!??«?????&??MathType??A?
???u?????????”????-????? ???? 7??? %??? !???
??? c
???u@th??????Ii=yi; (5)
Oiae? io?eia?ii oaea ??aiyiiy:
wmetafile8? ??A nenoaia ??aiyiue (3) aoaea iaoe aeaeyae:
(7)
O i’yoiio ?icae?e? i?iaaaeaii aeine?aeaeaiiy o?ce/ieo aeanoeainoae ?
?iciiae?eo aeaoaeo?a o e?aii?eiaeo o?aicenoi?ieo eiiiiceoe?yo.
A?aeiii, ui iniiaieie aeaeaie aeaoaeo?a o i?eiiaa?oiaaeo iaeanoyo i?oai?
i?e ?iii?e ?iieaioaoe?? ? aaeain?? ? i?aeaoceia? aoiie. Aiie i?a?othoue
o e?enoae?/i?e ?ao?ooe? ? aca?iiae?thoue ?c aeii?oeaie, ni?eyth/e
ca?eueoaiith eiioeaio?aoe?? aoi?eiieo aeaoaeo?a – ae?aaeain?e,
o?eaaeain?e, oao?aaaeain?e ? eiiieaen?a c aoiiaie aeii?oie. O i?ioean?
a?aeiae?a e?i?ei? aeaoaeoe iiaeooue ci?ithaaoe nai? ?ici??e ?
i?noeaciaoiaeaeaiiy a ?ao?ooe?. I?e oeueiio anoaiiaeaii, ui aeeneieaoe??
ia a?aeiaeththoueny aae aei oaiia?aoo?e 10000N. Oa?aeoa? aeaoaeo?a a
iniiaiiio aecia/a?oueny oeiii ?ii?a, aeicith oa aia?a??th ?iieaioaoe??,
a oaeiae oiiaaie oa?iiia?iaie. I?ney ?iieaioaoe?? c aeicaie, ui
ia?aaeuothoue aeico aii?o?caoe?? ? a?aeiia?aeii? oa?iiia?iaee a
i?eiiaa?oiaa?e iaeano?, niinoa??aa?oueny iie?e?enoae?/ia oaca.
?iiia ?iieaioaoe?y ? oa?iiia?iaee i?e ai?oaen?eiiio ia?iuoaaii?
ni?eythoue aeiaeiaiith iaoai?/ieo iai?oa ? noeioethaaiith i?a?aoe??
oi/eiaeo ? ?ioeo no?oeoo?ieo aeaoaeo?a.
sse a?aeiii, oi/eia? aeaoaeoe aeoeaii aca?iiae?thoue ?c aeeneieaoe?yie.
I?ioa aiie, ye ? i?aeaoceia? aoiie, iiaeooue ciaoiaeeoueny a
eaac???aiiaac? ye ?c aeeneieaoe?yie, oae ? c iiaa?oiath.
Aeey aiae?co iane?aee?a aca?iiae?? ??cieo aeaoaeo?a aoei i?iaaaeaii
iiaeaethaaiiy i?oaeieo iai?oa i?e ?iieaioaoe?? ?ii?a a?aiio a
i?eiiaa?oiaaee oa? e?aii?th.
Cia/aiiy i?oaeieo iai?oa ?ic?aoiaoaaee ca aeiiiiiaith ??aiyiiy:
wmetafile8? ??e???????????
???????????yyy????.????1?????????????
a@???&??yyyy?????Ayyy°yyy???aea A – iiaeoeue THiaa, –
eiao?oe??io noeneo (?icoyae) ooaoaoe, iaoiiaeaiee ?ici??iith
iaa?aeiia?aei?noth aoii?a ai?iaaaeaeaieo aeii?oie ? aoii?a ?ao?oee, N(o,
z) – i?io?eue ?iciiae?eo aeii?oie; o – ?ici?? iaeano? ?iieaioaoe??; z –
aeeaeia i?iieeiaiiy ?ii?a; – eiao?oe??io Ioaniia.
Ca?aene ?ic?aoiaaii aeicia? caeaaeiino? cia/aiue i?oaeieo iai?oa,
ooai?aieo ?icoii?yaeeiaaieie oa?aie aiane?aeie ?iiii? ?iieaioaoe??
a?aiio.
C iaoith aecia/aiiy ?ici??o aeiaaeeie ?ooiiino? aeaoaeo?a i?iaaaeaii
aenia?eiaioaeuei? aeine?aeaeaiiy aaia?aoe?eiiai /ano aeeooy a
ia?iieaioiaaieo iaeanoyo no?oeoo?e. C’yniaaii, ui ca?eueoaiiy aeice
?iieaioaoe?? ciaioo? e?euee?noue aeii?oeiaeo oa oi/eiaeo aeaoaeo?a, ui
iiaea aooe iia’ycaii c aeieeiaiiyi ia?ao?aeii? iaeano? i?ae
?iieaioiaaieie oa ia?iieaioiaaieie ae?eyieaie, ?ici??e yeeo ca iaoeie
aei??thaaiiyie aeinyaathoue 50 iei.
O ?iaio? aia?oa aeine?aeaeaia iiaeeea?noue aeei?enoaiiy ie?aie ii?enoiai
e?aii?th ye no?oeoo?iiai aaoa?o o i?ioean? aeaioiaeaiiy ai?oaen?eieo
no?oeoo?.
I?iaaaeaii aeine?aeaeaiiy aaoa?oth/eo aeanoeainoae ii?enoiai e?aii?th,
io?eiaiiai ia?aae ai?oaen?eiei ia?iuoaaiiyi. Aenia?eiaioaeuei?
aeine?aeaeaiiy aeyaeee, ui ca?eueoaiiy oiaueie ii?enoiai e?aii?th aaaea
aei c?inoaiiy oiaueie aii?oiiai e?aii?th oa ooai?aiiy ye
iie?e?enoae?/ii? oace i?ae /an ia?iuoaaiiy ai?oaen?eieo oa??a.
I?e ci?i? aoaeoeaii? aonoeie ii?enoiai e?aii?th a?ae 1,92 a/ni3 aei
1,48 a/ni3 aonoeia aeaoaeo?a o ai?oaen?ei?e ie?aoe? ciaoiaeeoueny a
iaaeao a?ae 8.0*100ni-2 aei 1.2*107ni-2.
Ca?eueoaiiy aoaeoeaii? aonoeie ii?enoiai e?aii?th a?ae 1,7 a/ni3 aei
2,0 a/ni3 aaaea aei c?inoaiiy aonoeie aeaoaeo?a aei 8*102ni-2, a
cieaeaiiy ?? a?ae 1,54 a/ni3 aei 1,5 a/ni3 i?ecaiaeeoue aei ca?eueoaiiy
aonoeie aeaoaeo?a aei 104ni-2, ui a?aeaoaa?oueny a iniiaiiio ca ?aooiie
i?iieeiaiiy aeaoaeo?a a ai?oaen?eiee oa? c aaoa?oth/eo ae?eyiie.
Aenia?eiaioaeuei? caeaaeiino? aonoeie aeaoaeo?a o ai?oaen?eiiio oa??
e?aii?th iaae iaeanoyie, ye? aoee ia?iaeai? aiiaeiei o?aaeaiiyi, ? o?,
ui ia aoee ia?iaeai?, a?ae aonoeie oa?o ii?enoiai e?aii?th iieacothoue,
ui i?e aonoei? a?ae 1,54 aei 1,62 a/ci3 u?euei?noue aeaoaeo?a oiaeiaee
oa ae?neieaoe?e iaae ?+–iaeanoyie neeaea 4*105ni-21,1*106ni-2, i?e
oeueiio u?euei?noue aeaoaeo?a iaae n+–iaeanoyie neeaea
8*100ni21,1*101ni-2. Oea iiaeia iiynieoe oi?ioaaiiyi eieaeueieo
iaoai?/ieo iai?oa ye o eaoa?aeueiiio, oae ? o iiia?a/iiio iai?yieao.
Aeine?aeaeoaaeanue oaeiae caeaaei?noue aonoeie aeaoaeo?a a?ae
iine?aeiaiino? iia?aoe?e aeaioiaeaiiy o?aicenoi?ieo eiiiiceoe?e c
??cieie aeicaie ?iieaioaoe?? 2*1014 – 7*1015ni-2 ?ii?a a?aiio i?e
ooai?aii? eiia?iiaaiiai aaoa?oaaiiy.
Oaeei /eiii, iieacaii, ui aoaeoeai?noue iaoiaeo no?oeoo?iiai aaoa?oaaiiy
aaco?oueny ia noai?aii? noaa?eueieo oeaio??a caoiieaiiy aeii?oie ?
aeaoaeo?a o eieaeueieo ae?eyieao iiaa?oi? e?aii?eiaeo ieanoei ca ?aooiie
aiiaa?aeoaaiiy ?iiaie a?aiio ? caaacia/aii? a?aeiia?aeieo oiia
ooai?thaaiiy ca?iaee?a ia ieo. O ae?aiacii? aeei?enoaieo o ?iaio? aeic
5-7*1014 ni-2 ?iieaioiaai? ?iie a?aiio noai?ththoue ?aae?aoe?ei?
aeaoaeoe, aeeaeia i?iieeiaiiy yeeo o e?aii?e neeaaea? a?eueoa 60 ii.
Ciaioaiiy aonoeie aeaoaeo?a aei 1,45*101ni-2 niinoa??aa?oueny, yeui
aeica ?iieaioaoe?? neeaaea? 7*1014ni-2. Oea aea? aeiaeaoeia? iiaeeeaino?
aeey ea?oaaiiy ye?noth o?aicenoi?ii? no?oeoo?e a caeaaeiino? a?ae aeice
?iieaioaoe??.
A ?iaio? iieacaii, ui aoaeoeaia ea?oaaiiy aeaeo?io?ce/ieie ia?aiao?aie
o?aicenoi?ii? eiiiiceoe?? iiaeeeaa oaeiae oeyoii noai?aiiy aaoa?ieo
noie?a ye a ia’?i? ai?oaen?eiiai oa?o, oae ? ia eiai iiaa?oi? a i?noeyo
oi?ioaaiiy i?aeaeaiaioii? ?cieyoe??.
O AENIIAEAO noi?ioeueiaai? iniiai? ?acoeueoaoe ?iaioe:
1. Aia?oa i?iaaaeaii aiae?c ?icaeoeo ii?iooai?aiiy a no?oeoo?ao c
iaiaeii??aeiei ?iciiae?eii eaaoth/eo aeii?oie, yeee iieacaa, ui
e?i?ei?noue e?iaoeee ooai?aiiy ii? niinoa??aa?oueny o?eueee aei ??aiy
eaaoaaiiy Nmax/5. Aeae? e?i?eia caeaaei?noue ia?aoiaeeoue aei
ia?aaie?/ii?, ui iia’ycaii ?c a?eueo nooo?aith ci?iith eiioeaio?aoe??
ae??ie, ye? a?aeiia?aeathoue ca aeoeaaoe?th i?ioeano ii?iooai?aiiy.
2. Aeyaeaii, ui u?euei?noue oa oiaueia ie?aie ii?enoiai e?aii?th nooo?ai
aieeaathoue ia i?ioeane ia?a?iciiae?eo aeaoaeo?a oa eaaoth/eo aeii?oie o
e?aii?eiaeo ai?oaen?eieo no?oeoo?ao. Ie?aee ii?enoiai e?aii?th ?c
aonoeiith 1,54-1,62 a/ci3 oa oiaueiith 2,5 iei iiaeooue ni?eyoe
aaeueioaaiith i?ioean?a oaa?aeio?ei? aeeooc?? eaaoth/eo aeii?oie ?c
neeueiieaaiaaieo o neaaieaaiaai? oa?e oa aeyaeythoue aaoa?oth/?
aeanoeaino? aei oi/eiaeo aeaoaeo?a oa oaeaeei aeeooiaeoth/eo aeii?oie a
ai?oaen?eieo no?oeoo?ao.
3. I?iaaaeaii noaoenoe/ia iiaeaethaaiiy aieueoaiia?ieo oa?aeoa?enoee
oioiaeaeo?e/ieo ia?aoai?thaa/?a ?c no?oeoo?ith iai?ai?ia?aeiee –
ae?aeaeo?ee – iai?ai?ia?aeiee. Aia?oa aeey oaeeo aaaaoioacieo no?oeoo?,
ye InxSnyO/SiO2/nSi/n+Si oa InxSnyO/SiO2/porSi/nSi/n+Si ca i?aenoieaie
ei?aeyoe?eiiai oa ?aa?aneaiiai aiae?co ?ic?aoiaai? eiao?oe??ioe oaiiiaeo
aieueoaiia?ieo oa?aeoa?enoee ? aeaoa?i?iaoe??.
4. Aia?oa aeine?aeaeaii i?ioeane noai?aiiy aaaaoioacieo eiiiiceoe?e oeio
InxSnyAlzO/SiO2/porSi/nSi/n+Si, aeine?aeaeaii aeaeo?io?ce/i? oa
niaeo?aeuei? oa?aeoa?enoeee oioiaeaeo?e/ieo ia?aoai?thaa/?a, noai?aieo
ia ?o canaae?. Anoaiiaeaii, ui aeei?enoaiiy aethi?i?th oa ie?aie
ii?enoiai e?aii?th, ni?eythoue iie?ioaiith Uoo, ?ec, eiao?oe??ioo
ei?enii? ae?? oa oaeoi?o caiiaiaiiy aieueoaiia?ii? oa?aeoa?enoeee
oioiaeaeo?e/ieo ia?aoai?thaa/?a.
5. I?iaaaeaii ?ic?aooiie i?oaeieo iai?oa o ?icoii?yaeeiaaieo no?oeoo?ao
e?aii?th, noai?aieo ca aeiiiiiaith eieaeueii? ?iiii? ?iieaioaoe?? a?aiio
oa anoaiiaeaii ?o a?aeiia?aeia ei?aeyoe?y c ia?aiao?aie ?iieaioaoe??.
Aeanoeaino? aaoa?oaaiiy aeaoaeo?a ciaoiaeeoueny a ae?aiacii? aeic
?iieaioaoe?? a?ae 1015ni-3 aei 5*1018 ni-3.
6. ?ic?iaeaii ?aaeaiaioe noai?aiiy aaciaiai aeaiaioo ?ioaa?aeueii?
aeaeo?ii?ee – ai?oaen?eii-ieaia?iiai o?aicenoi?o oa aaciaiai aeaiaioo
oioiaeaeo?ii?ee – oioiaeaeo?e/iee ia?aoai?thaa/. Aenia?eiaioaeueii
aeiaaaeaii, ui aeei?enoaiiy aaaaoioa?iaeo eiiiiceoe?e cia/ii i?aeaeuo?
yeino? aeaeo?e/ieo i?eeaae?a.
Iniiaiee ci?no aeena?oaoe?? a?aeia?aaeaiee a ianooiieo ioae?eaoe?yo:
1. AEieoaeaa A.E., O?eiei N.E. Enneaaeiaaiea aaooa?e?iaaiey a e?aiieaauo
o?aicenoi?iuo no?oeoo?ao// Iee?iyeaeo?iieea. –1996. –O.25. –?6.
–N.436-441.
2. O?eiei N.E., Eieiiiaoe A.I., Eaaeicii Ae.E., Enneaaeiaaiea
yeaeo?ioece/aneeo e iioe/aneeo oa?aeoa?enoee ITO/nSi/n+Si
oioii?aia?aciaaoaeae n ?acee/iie no?oeoo?ie iiaa?oiinoe e?aiiey//
Ecaanoey aunoeo o/aaiuo caaaaeaiee. ?aaeeiyeaeo?iieea. –1998. –O.41.
–?11. –N.67-72.
3. O?eiei N.E. Enneaaeiaaiea no?oeoo?u neiaa ii?enoiai e?aiiey iaoiaeii
i?inaa/eaathuae iee?ineiiee// A?niee Caii??cueeiai aea?aeaaiiai
oi?aa?neoaoo: Ca??iee iaoeiaeo noaoae. O?ceei-iaoaiaoe/i? iaoee.
–Caii??aeaey, 1999. –?1. –N.154-157.
4. O?eiei N.E, Eaaeicii Ae.E., Eieiiiaoeue A.I. Yenia?eiaioaeueiua
enneaaeiaaiey naienoa ii?enoiai e?aiiey// Ninoiyiea, i?iaeaiu e
iai?aaeaiey ?acaeoey i?iecaiaenoaa oeaaoiuo iaoaeeia a Oe?aeia. Na.
iao/i. o?oae. –Caii?iaeuea,. 1997. –N.346-352.
5. Eieiiiaoe A.I., I?eoiaeueei A.A., O?eiei N.E., Oooeia E.A. Aieea
no?oeoo?e ? iaoai?/ieo aeanoeainoae iie?e?enoae?/iiai e?aii?th ia
ei?iaeaiiy ENAe?// A?niee *a?i?a?anueeiai oaoiieia?/iiai ?inoeoooo:
Ca??iee. –*a?i?a?a, 1997. –?4. –N.145-152.
6. Eaaeicii Ae.E., AEieoaeaa A.E., O?eiei N.E., I?eoiaeueei A.A.
Aeine?aeaeaiiy aeaeo?e/ieo ia?aiao??a oioiia?aoai?thaa/?a aeaioiaeaieo
ia oaenoo?iaaieo iiaa?oiyo// The first international conference on
material science of chalcogenide and diamond–structure semiconductors.
New device applications (NMSCDSS-94). –Chernivtsi, 1994. –Vol.II.
–N.218.
7. Levinson D.I., Zholudev G.K., Khripko S.L. Investigating defects
under aluminum films// Proceeding IX Russian Symposium on scanning
electron and analytical methods of solids investigations. SEM
characterization of semiconductor materials and structures (REM-95).
–Chernogolovka, 1995. –N.38-39.
8. Eaaeicii Ae.E., AEieoaeaa A.E., O?eiei N.E., Aeine?aeaeaiiy no?oeoo?e
c i?eoiaaieie ?ciethth/eie oa?aie// Iaoa??aee V I?aeia?iaei?e
eiioa?aioe?? c o?ceee ? oaoiieia?? oiieeo ie?aie. –?aaii-O?aie?anuee,
1995. -N.41.
9. Eaaeicii Ae.E., AEieoaeaa A.E., O?eiei N.E., Aieea neeaaeo ITO oa??a
ia ia?aiao?e oioiia?aoai?thaa/?a// Iaoa??aee V I?aeia?iaei?e
eiioa?aioe?? c o?ceee ? oaoiieia?? oiieeo ie?aie. – ?aaii-O?aie?anuee,
1995. -N.77.
10. AEieoaeaa A.E., O?eiei N.E., Oiiaiei I.A. Enneaaeiaaiea
yeaeo?e/aneeo oa?aeoa?enoee AEN n i?eiaiaieai ii?enoiai e?aiiey// Oacenu
aeieeaaeia V ?inneeneie iao/iie nooaeai/aneie eiioa?aioeee. Oeceea
oaa?aeiai oaea. –Oiine, 1996. –N.69-70.
11. Eaaeicii Ae.E., AEieoaeaa A.E., O?eiei N.E. Aaooa?e?iaaiea a
e?aiieaauo ieanoeiao ieaii/iuie iie?uoeyie// Oacenu aeieeaaeia Ia?aie
Ana?inneeneie eiioa?aioeee ii iaoa?eaeiaaaeaieth e oeceei-oeie/aneei
iniiaai oaoiieiaee iieo/aiey eaae?iaaiiuo e?enoaeeia e?aiiey
“E?aiiee-96”. – I., 1996. –N.256.
12. Eaaeicii Ae.E., AEieoaeaa A.E., O?eiei N.E. Eiiaeie?iaaiiia
aaooa?e?iaaiea a e?aiieaauo iiiie?enoaeee/aneeo no?oeoo?ao// Oacenu
aeieeaaeia Ia?aie Ana?inneeneie eiioa?aioeee ii iaoa?eaeiaaaeaieth e
oeceei-oeie/aneei iniiaai oaoiieiaee iieo/aiey eaae?iaaiiuo e?enoaeeia
e?aiiey “E?aiiee-96”. – I., 1996. –N.257.
13. Eaaeicii Ae.E., AEieoaeaa A.E., O?eiei N.E. No?oeoo?iia
aaooa?e?iaaiea a e?aiieaauo iiiie?enoaeee/aneeo no?oeoo?ao// Oacenu
aeieeaaeia Ia?aie Ana?inneeneie eiioa?aioeee ii iaoa?eaeiaaaeaieth e
oeceei-oeie/aneei iniiaai oaoiieiaee iieo/aiey eaae?iaaiiuo e?enoaeeia
e?aiiey “E?aiiee-96”. – I., 1996. –N.258.
14. Eaaeicii Ae.E., AEieoaeaa A.E., O?eiei N.E. Ieaia?iia aaooa?e?iaaiea
a e?aiieaauo iiiie?enoaeee/aneeo no?oeoo?ao// Oacenu aeieeaaeia Ia?aie
Ana?inneeneie eiioa?aioeee ii iaoa?eaeiaaaeaieth e oeceei-oeie/aneei
iniiaai oaoiieiaee iieo/aiey eaae?iaaiiuo e?enoaeeia e?aiiey
“E?aiiee-96”. – I., 1996. –N.259.
15. Eaaeicii Ae.E., AEieoaeaa A.E., O?eiei N.E. Eaai?aoi?iay onoaiiaea
aeey iieo/aiey ieaiie ii?enoiai e?aiiey// Oacenu aeieeaaeia Ia?aie
Ana?inneeneie eiioa?aioeee ii iaoa?eaeiaaaeaieth e oeceei-oeie/aneei
iniiaai oaoiieiaee iieo/aiey eaae?iaaiiuo e?enoaeeia e?aiiey
“E?aiiee-96”. – I., 1996. –N.277.
16. Khripko S.L., Levinzon D.I., Zholudev G.K. Properties and
application on film coatings in solar energy converters// Proceeding 4
International symposium on space means for power utilities (SPS-97). –
Montreal, 1997. –?.131-133.
O?eiei N.E. No?oeoo?a ? o?ce/i? aeanoeaino? e?aii??aeo eiiiiceoe?e ?c
?icoii?yaeeiaaieie oa?aie. – ?oeiien.
Aeena?oaoe?y ia caeiaoooy iaoeiaiai nooiaiy eaiaeeaeaoa
o?ceei-iaoaiaoe/ieo iaoe ca oaoii 01.04.10 – o?ceea iai?ai?ia?aeiee?a ?
ae?aeaeo?ee?a. – Caii??cueeee aea?aeaaiee oi?aa?neoao, Caii??aeaey,
1999.
O aeena?oaoe?? aeine?aeaeaii no?oeoo?o ? o?ce/i? aeanoeaino?
e?aii?eiaeo eiiiiceoe?e ? i?eeaae?a ?c ?icoii?yaeeiaaieie oa?aie
?iieaioiaaiiai ? ii?enoiai e?aii?th. Ia oe?ieiio iaoa??ae? ?c
aeei?enoaiiyi aeaea?ae ??cii??aeii? /aniai? i?eiaeaaeiino? o ?iaio?
?icaeyioo? aioea?aeaeca?eaethaai? oa aaoa?oth/? aeanoeaino? oa??a
?iieaioiaaiiai oa ii?enoiai e?aii?th. I?iaaaeaii eiiieaeni?
aeine?aeaeaiiy no?oeoo?ieo ? o?ce/ieo aeanoeainoae eiiiiceoe?e a?ae oiia
?o oi?ioaaiiy. I?iaaaeaii aeaeo?io?ce/i? aeine?aeaeaiiy io?eiaieo
oioiaeaeo?e/ieo ia?aoai?thaa/?a ? o?aicenoi?ieo no?oeoo?.
Eeth/ia? neiaa: ?icoii?yaeeiaai? oa?e, eiiiiceoe?y, ii?enoee e?aii?e,
?iieaioiaaiee e?aii?e, aeaoaeoe no?oeoo?e, aaeoi? Ath?aa?na,
oioiaeaeo?e/iee ia?aoai?thaa/, o?aicenoi?ia no?oeoo?a.
O?eiei N.E. No?oeoo?a e oece/aneea naienoaa e?aiieaauo eiiiiceoeee n
?acoii?yaei/aiiuie neiyie. – ?oeiienue.
Aeenna?oaoeey ia nieneaiea o/aiie noaiaie eaiaeeaeaoa
oeceei-iaoaiaoe/aneeo iaoe ii niaoeeaeueiinoe 01.04.10 – oeceea
iieoi?iaiaeieeia e aeeyeaeo?eeia. – Caii?iaeneee ainoaea?noaaiiue
oieaa?neoao, Caii?iaeuea, 1999.
A aeenna?oaoeee enneaaeiaaiu no?oeoo?a e oece/aneea naienoaa e?aiieaauo
eiiiiceoeee e i?eai?ia n ?acoii?yaei/aiiuie neiyie, oaeeie eae neie
eiieaioe?iaaiiiai e ii?enoiai e?aiiey. Ia iaoe?iii iaoa?eaea n
eniieueciaaieai ?aciia?aiaiiuo enoi/ieeia a ?aaioa ?anniio?aiu
aioeio?aaeathuea e aaooa?e?othuea naienoaa neiaa eiieaioe?iaaiiiai e
ii?enoiai e?aiiey. I?iaaaeaiu eiiieaeniua enneaaeiaaiey no?oeoo?iuo e
oece/aneeo naienoa eiiiiceoeee io oneiaee eo oi?ie?iaaiey. I?iaaaeaiu
yeaeo?ioece/aneea enneaaeiaaiey iieo/aiiuo oioiyeaeo?e/aneeo
i?aia?aciaaoaeae e o?aicenoi?iuo no?oeoo?.
Eeth/aaua neiaa: ?acoii?yaei/aiiua neie, eiiiiceoeey, ii?enoue e?aiiee,
eiieaioe?iaaiiue e?aiiee, aeaoaeou no?oeoo?u, aaeoi? Ath?aa?na,
oioiyeaeo?e/aneee i?aia?aciaaoaeue, o?aicenoi?iay no?oeoo?a.
Khripko S.L. The Structure and physical characteristics of silicon
compositions with disordered layers. – Manuscript.
The Thesis on competition a teaching degrees of candidate of
physico-mathematical sciences on professions 01.04.10 – physics of
semiconductors and dielectrics. – Zaporozhye state university,
Zaporozhye, 1999.
The results of disordered layers classification in semiconductors are
presented. It is understood from published data, that the main methods
of layers shaping is an anode etching and implantation by high energy
ions.
It is presented the review of results of theoretical and experimental
investigation of wide-zone semiconductor – isolator – narrow-zone
semiconductor photoelectric converters shaping.
The advantage of using fine ITO-films at fabrication of photoelectric
converters is shown. The specific role disordered layers as
anti-reflecting covering (especially for porous silicon) is specified.
The data of optical and electrophysical characteristics of porous
silicon depending on used equipment and conditions of shaping are
discussed. It is shown that in modern domestic research practical is
missing the experience of photoelectric converters fabrication base on
wide-zone semiconductor (ITO)- isolator – -porous silicon compositions.
List of methods of gettering defects is presented for active areas of
crystal.
In etching process contents of hydrofluoric acid in solution change from
10% to 49%. The thickness of porous silicon layers was from 0,5 – 14 m.
The porous silicon layers shaping was before epitaxial layer growth at
anode current density 4 iA/cm2.
The particularities of factor of absorption determination and reflection
factor calculation, which was used in the work is presented.
The techniques of layers thickness, resistivity and surface resistance,
spectral, current-voltage and capacitance-voltage characteristics
measurement for photoelectric converters and study of porous silicon
density are presented.
The study of disordered layers structure of silicon was carried by means
of optical, electronic raster and x-raying microscopy.
Density of defects in active areas of transistor structure was measured
by means of selective etching. The technique of electronic-microscopic
study for defects of structure in laminated silicon compositions was
presented.
The maximum amount of pores (4*108 – 8*109 sm-2) corresponds to the
diameter range 40-80.
The microdifractive pictures shows that samples with porous layer have
the reflexes, which have charge of presence of amorphous phase.
The dependencies of InxSnyO film surface resistance from percent
contents SnCl4(5H2O) in solution were measured. It is stated that under
small concentrations of tin in mixtures its atoms substitute the atoms
an india in structure of film. However, when SnCl4(5H2O) concentrations
increase in the solution, contents of phase SnO2 increases in
composition of film InxSnyO, that cause reduction of free carriers
concentrations and reduction of conduction.
The calculation of ITO layer reflection factor from thickness was
carried out. The least size of reflection factor has covering with
thickness from 500 to 800 within the range of waves lengths 0,42-0,61 m.
The forming of defects in nearsurface areas of silicon under ion
implantation was explored. Their own sizes and site can change in
process of lattice defects annealing. The nature of defects is basically
defined by the type of ions, dose and energy of implantation, as well as
thermal processing conditions.
Gettering characteristics of porous silicon, got before epitaxy was
measured. The results show that porous silicon thickness increase leads
to amorphous silicon thickness increasing and both polycristalline and
amorphous phases formation.
When the density of porous silicon changes from 1,92 g/sm3 to
1,48 g/sm3, the epitaxial film defects density inheres in borders from
8.0*100sm-2 to 1.2*107 sm-2.
It notes that in interval of porous silicon density from 1,54 g/sm3 to
1,62 g/sm3 density of defects in epitaxial layer changes from
1,1*106 sm-2 to 4,0*105 sm2. In this interval density of defects in
nearby areas an epitaxial film on n+-layer inheres in borders
8,0*100sm-2 – 1,1*101sm-2.
Also was researched dependency of defect density from the operational
procedure of fabrication of transistor compositions with different doses
of implantations 2*1014–7*1015ni-2 ions of argon when forming
multifunction gettering.
The defect density reduction 1,45*101 sm-2 exists if implantation dose
is 7*1014 sm-2. This enables control a quality transistor structure
depending on implantation dose.
In work is shown that efficient control electrophysical parameters of
transistor composition is possible also by making the gettering sewers
both in volume epitaxial layer and on its surface in places of
multilevel isolation shaping.
Key words: disordered layers, composition, porous silicon, implanted
silicon, defects of structure, vector Burgers, photoelectric converter,
transistor structure.
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