NOINUeEEE AeA?AEAAIEE OI?AA?NEOAO

Ia/a?aiei TH??e Ieoaeeiae/

OAeE 539.292.539.2

NO?OEOO?A OA AEAEO?IOICE*II AEANOEAINOI

IAOAEAAEO IEIAIE C IAI?AI?IA?AeIEEIAEI

IIE?EOOssI A OIIAAO OIII*II? OA

AeEOOCIEII? ACA?IIAeI? AOIIIA

01.04.07 — o?ceea oaa?aeiai o?ea

AAOI?AOA?AO

aeena?oaoe?? ia caeiaoooy iaoeiaiai nooiaiy

eaiaeeaeaoa o?ceei-iaoaiaoe/ieo iaoe

Noie-1999

Aeena?oaoe??th ? ?oeiien.

?iaioa aeeiiaia a Noinueeiio aea?aeaaiiio oi?aa?neoao?,

I?i?noa?noai ina?oe Oe?a?ie.

Iaoeiaee ea??aiee — aeieoi? o?ceei-iaoaiaoe/ieo iaoe, i?ioani?
I?ioeaiei ?aai THoeiiae/, Noinueeee aea?aeaaiee oi?aa?neoao, caa?aeoaa/
eaoaae?e i?eeeaaeii? o?ceee.

Io?oe?ei? iiiiaioe: aeieoi? o?ceei-iaoaiaoe/ieo iaoe, i?ioani?

Iai/aoa Iao?i Ieaen?eiae/, Oa?e?anueeee aea?aeaaiee iie?oaoi?/iee
oi?aa?neoao,

i?ioani? eaoaae?e o?ce/iiai iaoa??aeiciaanoaa aeey aeaeo?ii?ee oa
aae?ioaoi?ee;

eaiaeeaeao o?ceei-iaoaiaoe/ieo iaoe,

noa?oee iaoeiaee ni?a?ia?oiee

Eieio Aieiaeeie? sseiae/, ?inoeooo o?ceee oaa?aeiai o?ea,
iaoa??aeiciaanoaa ? oaoiieia?e Iaoe?iiaeueiiai iaoeiaiai oeaio?o,

Oa?e?anueeee o?ceei-oaoi?/iee ?inoeooo,

ia/aeueiee a?aeae?eo.

I?ia?aeia onoaiiaa — Oa?e?anueeee aea?aeaaiee oi?aa?neoao.

Caoeno a?aeaoaeaoueny “23” aa?aniy 1999 ?. i 15 aiaeei? ia can?aeaii?
niaoe?ae?ciaaii? a/aii? ?aaee Ae55.051.02 o Noinueeiio aea?aeaaiiio
oi?aa?neoao? ca aae?anith: 244007, i. Noie, aoe. ?einueeiai-Ei?naeiaa,
2, aoae. 216, ei?i. AO.

C aeena?oaoe??th iiaeia iciaeiieoeny o a?ae?ioaoe? Noinueeiai
aea?aeaaiiai oi?aa?neoaoo.

Aaoi?aoa?ao ?ic?neaiee “20” na?iiy 1999 ?ieo.

A/aiee nae?aoa?

niaoe?ae?ciaaii? a/aii? ?aaee I.A. Ai?enaiei

ANOOI

Aeine?aeaeaiiy aeaeo?io?ce/ieo aeanoeainoae ? e?enoae?/ii? aoaeiae
oiieeo ie?aie iaoae?a, iai?ai?ia?aeiee?a, nieaa?a oa ?i. aeicaieythoue
aea/aoe yaeua (?ici??i? aoaeoe), ye? ae?aaeai? aeoaea neaai a ianeaieo
c?aceao ? i?aaenoaaeythoue ?ioa?an ia o?eueee aeey iiaeaeueoiai ?icaeoeo
i?e?iaeaeo?ii?ee oa aaaaoueio aaeocae iaoee ? oaoi?ee (iioeee, eini?/ii?
oa aoiiii? i?iieneiaino?, IA* oaoi?ee oa ?i.), aea e aeey a?eueo
aeeaieiai ?icoi?iiy ooiaeaiaioaeueieo ieoaiue o?ceee oaa?aeiai o?ea.

Inoaii?i /anii aaaeooueny aeine?aeaeaiiy aaaaoioa?iaeo ie?aeiaeo
no?oeoo? ia iniia? iaoae?a oa iai?ai?ia?aeiee?a, aea aeyaeythoue naaa
iniaeeaino?, iia’ycai? c ?icn?thaaiiyi iin??a aeaeo?e/iiai no?oio ia
iaaeao ?icae?eo oa??a, ?c ci?iith ciaea oaiia?aoo?iiai eiao?oe??ioa
iii?o (OEI) o aaaaoioa?iaeo ie?aeao, eiiiiiaioe yeeo a?ae??ciythoueny
ciaeii OEI oa ?i.

Iaio aea/aieie, aea aeineoue oe?eaaeie ? ieoaiiy i?i o?ce/i?
aeanoeaino? iaoaeaaeo ie?aie c iai?ai?ia?aeieeiaei aai iaoaeaaei
iie?eooyi o aeae?eueea iiiioa??a. ?ioa?an aei oeeo ia’?eo?a aeeeeeaiee
oe?eei ?yaeii oaeoi??a:

iiaeeea?noth iiaeeo?eaoe?? aeanoeainoae iiaa?oi? aaciai? ie?aee oeyoii
iaianaiiy iie?eooy;

ooai?aiiyi iiaa?oiaaeo nieaa?a oa o?i?/ieo niieoe aoiiaie iie?eooy oa
aaciai? ie?aee c a?aei?iieie, i?ae o ianeaieo c?aceao, aeanoeainoyie;

ianeaaoe??th iiaa?oi? aaciai? ie?aee;

iiaeeeaith ci?iith ia?aiao??a aeaeo?iia?aiino (eiao?oe??ioa
aeca?eaeueiino? iiaa?oi? ie?aee (p), eiao?oe??io?a i?ioiaeaeaiiy (r) oa
?icn?thaaiiy (R) iin??a aeaeo?e/iiai no?oio ia iaae? e?enoae?o?a) i?ney
iaianaiiy iie?eooy oa a?aeiaethaaiiy.

Aeii?ioth/ee aieea ia oa?aeoa? aeaeo?io?ce/ieo aeanoeainoae aaeooiieo
eiiaeainao?a iathoue aeeooc?ei? i?ioeane (noeoii?noue yaeu, iia’ycaieo c
aeeooc??th aoii?a iie?eooy, aac?a caeeoeiai? aoiinoa?e ii iaaeao ca?ai,
iiaa?oi? oa a ia’?i ?ao?oee c?acea) oa o?i?/ia aca?iiae?y c
/oaei??aeieie aoiiaie i?ae /an eiiaeainaoe?? oa oa?iiia?iaee.

Aeine?aeaeaiiy i?ioean?a aca?iiae?? aoii?a iaoaeo ? aac?a i?ae ae??th
io/ea aeaeo?ii?a aeicaieythoue c?iaeoe ioe?ieo /anoee iai?oaeii
?icn?yieo (I?) aeaeo?ii?a oa ciiaeaethaaoe iiaeeea? i?ioeane ia iiaa?oi?
ie?aee i?e oa?iiia?iaoe?. Ona oea ? coiiaeei aea?? oaie oa iinoaiiaeo
caaea/ aeaii? ?iaioe.

Aeooaeueiinoue oaie. ?acoeueoaoe aenia?eiaioaeueieo aeine?aeaeaiue
aeacothoue ia oa, ui, ciiithth/e oiiae eiiaeainaoei? (nooiiiue i neeaae
aaeooio, oaeaeeinoue eiiaeainaoei?, oaiia?aoo?o iiaeeeaaeee), iiaeia
ciiithaaoe oaciaee i oiii/iee neeaae, oice/ii oa no?oeoo?ii aeanoeainoi
iaieethaaieo ieiaie. Oae, o na??? ?ia?o A.N. Eiaaia ?c ni?a?ia?oieeaie
[aeea., iai?eeeaae, 1] i?ioyaii inoaii?o ?ie?a aea/aeanue aca?iiae?y
aaeooiieo eiiaeainao?a c aaciaei na?aaeiaeuai. Oaeiae a?aeii? ?iaioe c
aeine?aeaeaiiy aieeao iiaa?oi? i?aeeeaaeee, eaca?iiai ii?ii?iaiiy oa
?aaeoe?e a ?ioa?oaen? a?ia?ieo nenoai ia aeanoeaino? ie?aie.
I?iaiaeeeenue ? aeine?aeaeaiiy oaciaeo oa oiii/ieo ia?aoai?aiue o
ie?aeao, caeieniaieo aaciina?aaeiuei a eieiii aeaeo?iiiiai iie?ineiia
i?ae ae??th io/ea aeaeo?iiia.

Iaeyae aaea ?nioth/eo ?ia?o c oe??? oaiaoeee aeaco? ia oa, ui aeayei
aniaeoe oeeo i?iaeai iiai?noth ia c’yniaai?. Oae, ia /an iinoaiiaee
caaea/i aeaii? ?iaioe ia aoee aea/ai? ieoaiiy i?i ciiio ia?aiao?ia
aeaeo?iia?aiino p, r, R oa (g ((g — na?aaeiy aeiaaeeia a?eueiiai i?ia?ao
(NAeAI) iin??a aeaeo?e/iiai no?oio a ie?aoe?), eiao?oe??ioa
iicaeiaaeiuei? oaici/ooeeaino? (EO) gl oiieeo iaoaeaaeo eiiaeainaoia
iiney iaianaiiy iaiiai?iaiaeieeiaiai aai iaoaeaaiai iie?eooy, i?i
iiaeeeainoue ?aaeicaoei? aeneoiiiiai iaoaiicio i?iaiaeiinoi [2] a
nenoaiao oeio II/Ia/I (II — iaiiai?iaiaeiee, Ia — iaoae, I —
i?aeeeaaeea) oa ii.

A?aeii? aenia?eiaioaeuei? aeai? ia aeicaieeee aeaoe ocaaaeueiaieo
aeniiae?a i?i aca?iiae?th aaeooiieo eiiaeainao?a c aacaie caeeoeiai?
aoiinoa?e, c iaeiiai aieo, oa i?i aeeooc?ei? i?ioeane, o?i?/i? ?
no?oeoo?i? ia?aoai?aiiy — c ?ioiai. ?acoeueoaoe c aeaeo?io?ce/ieo
aeanoeainoae ia caaaeaee iiaee aooe i?aaeeueii ?ioa?i?aoiaai? /a?ac
a?aenooi?noue ?ioi?iaoe?? i?i no?oeoo?o oa oaciaee neeaae ie?aie.

O ca’yceo c ?aaeueiith iiaeeea?noth ci?ie ia?aiao??a aeaeo?iia?aiino,
eiao?oe??ioa oaici/ooeeaino? ie?aie oeyoii iaianaiiy iie?eooy
a?aee?eaathoueny ia?niaeoeae ia o?eueee aeey i?aeoe/iiai aeei?enoaiiy
oeeo yaeu, a ? a ieai? ooiaeaiaioaeueieo aeine?aeaeaiue, ine?eueee oae?
nenoaie ? ia’?eoaie c iiaeie, i?eoaiaiieie o?eueee ?i aeanoeainoyie
a?aei?iieie a?ae aeanoeainoae /enoeo c?ace?a. ?c aeuacacia/aiiai
aeieeaa? aeioe?euei?noue i?iaaaeaiiy aenia?eiaioaeueieo aeine?aeaeaiue o
oe?e iaeano? oa aeooaeuei?noue oaie aeaii? ?iaioe.

Ca’ycie ?iaioe c iaoeiaeie i?ia?aiaie, ieaiaie, oaiaie. Aeena?oaoe?eia
?iaioa aoea aeeiiaia a?aeiia?aeii aei ieaio iaoeiaeo aeine?aeaeaiue
eaoaae?e i?eeeaaeii? o?ceee o?ceei-oaoi?/iiai oaeoeueoaoo Noinueeiai
aea?aeaaiiai oi?aa?neoaoo a ?aieao athaeaeaoii? iaoeiai-aeine?aeii? oaie
?68.01.01.97-99.

Iaoa ? caaea/? aeine?aeaeaiiy iieyaathoue o aea/aii? aeaeo?io?ce/ieo
aeanoeainoae iaoaeaaeo ie?aie Cr, Ni, V, Sc, Cu oa o?i?/ieo ia?aoai?aiue
o ieo a oiiaao o?i?/ii? oa aeeooc?eii? aca?iiae?? c iieaeoeaie
caeeoeiai? aoiinoa?e aaciina?aaeiuei a i?ioean? eiiaeainaoe?? ?
oa?iiia?iaee; c aoiiaie iai?ai?ia?aeieeiaiai (Ge, Si) iie?eooy aai
aa?oiueiai oa?o. I?e oeueiio aoee iinoaaeai? oae? caaea/?:

iaoiaeii ian-niaeo?iiao??? aea/eoe aca?iiae?th aoiia?ieo io/e?a oa
na?aeineiiaeainiaaieo ie?aie oeeo iaoa??ae?a ?c caeeoeiaith aoiinoa?ith
? c?iaeoe aeniiaee i?i ooai?aiiy iiaeeeaeo o?i?/ieo niieoe oa oaa?aeeo
?ic/ei?a o ie?aeiaeo c?aceao;

iaoiaeii A?IN aeine?aeeoe aeaiaioiee neeaae oa aeeooc?ei? i?ioeane o
ie?aeiaeo nenoaiao (Ge, Si)/(Cr, Ni, Cu)/I;

aeine?aeeoe oacia? oa o?i?/i? ia?aoai?aiiy a iaeiioa?iaeo ie?aeao oa
ie?aeiaeo nenoaiao (a-Ge, e-Ge)/(Cr, Ni, Cu)/I, (a-Si, e-Si)/(Cr, Ni,
Cu)/I (a — aii?oiee, e — e?enoae?/iee) o i?ioean? oa?iiia?iaee oa
aiiaa?aeoaaiiy aeaeo?iiaie;

iaoiaeii aeaeo?iiii?o anoaiiaeoe ci?io OEI oa eiao?oe??io?a p, R ? r
aeey ie?aie iaoae?a i?ney iaianaiiy iie?eooy oa a?aeiaethaaiiy nenoaie.

aeine?aeeoe ci?io eiao?oe??ioa oaici/ooeeaino? ie?aie Cr oa Ni
aiane?aeie iaianaiiy iie?eooy Ge.

A?aeiia?aeii aei iinoaaeaii? iaoe aeei?enoiaoaaeenue oae? iaoiaee
aeine?aeaeaiiy:

aaeooiia eiiaeainaoe?y c ian-niaeo?iiao?e/iei eiio?ieai neeaaeo
caeeoeiai? aoiinoa?e o i?ioean? eiiaeainaoe?? ? oa?iiia?iaee ie?aie;

iaoiae aeaeo?iiii?o;

aoi?eiia ?iiia ian-niaeo?iiao??y (A?IN);

aeaeo?iiia i?e?ineii?y, aeaeo?iiia?ao?y (AA);

Aea?? ia’?eoaie aeine?aeaeaiiy ie?aie ? ie?aeiaeo nenoai ia iniia?
iaoae?a Cr, Ni, V, Sc, Cu oa iai?ai?ia?aeiee?a Ge ? Si aoa coiiaeaiee
oei, ui:

iaaeinoaoiuei aoee aea/ai? i?ioeane aca?iiae?? aoiiieo io/e?a Cr, Cu, V,
Ge, Si c iieaeoeaie caeeoeiai? aoiinoa?e a i?ioean? eiiaeainaoe??,
oa?ii- oa aeaeo?iiii? ia?iaee ie?aie;

i?aeoe/ii aoee a?aenooi? ?acoeueoaoe aeine?aeaeaiiy i?ioean?a aca?iii?
aeeooc?? a nenoaiao (Ge, Si)/(Ni, Cu)/I;

ia iiiaio iinoaiiaee caaea/? aeaii? ?iaioe ia aoee aea/ai? aoaeoe,
iia’ycai? c iiaeeo?eaoe??th aeaeo?io?ce/ieo aeanoeainoae (OEI,
oaici/ooeea?noue) oiieeo iie?e?enoae?/ieo iaoaeaaeo ie?aie Ni, Cr oa Cu
oeyoii iaianaiiy iie?eooy Ge aai Si oiaueiith a aeae?eueea iiiioa??a.

Iaoeiaa iiaecia iaea?aeaieo ?acoeueoao?a. O aeena?oaoe?ei?e ?iaio?
aia?oa:

i?iaaaeai? nenoaiaoe/i? aeine?aeaeaiiy oaciaiai neeaaeo,
aeaeo?ii?ia?aeiino? oiieeo iaoaeaaeo ie?aie Cr, Ni, Cu a oiiaao ?o
aeeooc?eii? oa o?i?/ii? aca?iiae?? c aoiiaie iie?eooy (Ge, Si) oa
caeeoeiaith aoiinoa?ith o i?ioean? eiiaeainaoe?? oa oa?iiia?iaee o
aaeooii?e eaia?? aai i?ae ae??th io/ea aeaeo?ii?a o eieii? aeaeo?iiiiai
i?e?ineiia;

i?e aca?iiae?? c ie?aeith, e?eueeino? iai?oaeii ?icn?yieo aeaeo?ii?a
ca iaeeieoeth /ano ia iaeeieoe? ieiu? c?acea E, aaeuei?aii?
ni?iiiaeiino? S oa aeiaaeeie i?ia?ao Ri;

cae?eniaia ai?iaaoe?y i?e?ineii?/ii? iiaeae? aeey OEI o aeiaaeeo
aeaioa?iaeo ie?aeiaeo nenoai a-II/Ia/I;

ia iniia? ia?iaee ?ici??ieo caeaaeiinoae OEI aeey ie?aie Ni, Cr, Cu ?
Ge/Ni/I, Ge/Cr/I, Si/Cu/I oa aiae?co aeeooc?eieo i?io?e?a iieacaii, ui
aeeooc?y aoii?a iie?eooy ii iaaeao e?enoae?o?a coiiaeth? ca?eueoaiiy (o
aeiaaeeo ie?aie Ge/Ni/I, Ge/Cr/I) eiao?oe??ioa i?ioiaeaeaiiy iaae? ca?ia
r, ye ? eiao?oe??ioa aeca?eaeueiino? iiaa?oi? ie?aee p, ui, a naith
/a?ao, aaaea aei ciaioaiiy aeaeo?e/iiai iii?o ? OEI, ca?eueoaiiy c
iiaeaeueoei ciaioaiiyi eiao?oe??ioa iicaeiaaeiuei? oaici/ooeeaino? gl.

Oaeiae aoei i?iaaaeaia iiaeaeueoa aea/aiiy i?iaeaie, yea iia’ycaia c
iiaeeea?noth ?aae?caoe?? aeneoiiiiai iaoai?cio i?ia?aeiino? ia i?eeeaae?
nenoai (Ge, Si)/(Cr, Ni, Cu)/I, i?e/iio aeey ie?aie Ge/Ni/I, Si/Cu/I oea
c?iaeaii aia?oa.

I?aeoe/ia cia/aiiy iaea?aeaieo ?acoeueoao?a iieyaa? a io?eiaii?
nenoaiaoe/ieo aeaieo c oaciaiai neeaaeo, o?i?/ii? aca?iiae?? oa o?i?/ieo
ia?aoai?aiue o ie?aeao Cr, Ni, V, Sc, Ge, Si, Si/Cu/I, Ge/Cu/I, Si/Ni/I,
Ge/Ni/I, Ge/Cr/I, Cu/Cr/I o i?ioean? iaea?aeaiiy oa oa?iiia?iaee ie?aie,
ye? iiaeooue aooe aeei?enoai? i?e ?ic?iaoe? aeaiaio?a i?e?iaeaeo?ii?ee.
Aaaeeeaeie c oi/ee ci?o ooiaeaiaioaeueiino? ? ?acoeueoaoe aeine?aeaeaiue
OEI ? oaiciaoaeoo a iaoaeaaeo ie?aeao c iai?ai?ia?aeieeiaei aai
iaoaeaaei iie?eooyi o ieai? anoaiiaeaiiy o?ce/iiai aoaeoo, yeee
coiiaeth? ciaioaiiy OEI ? eiao?oe??ioa oaici/ooeeaino?.

Aea/aiiy iiaeeeaino? ?aae?caoe?? aeneoiiiiai iaoai?cio i?ia?aeiino? a
nenoaiao (Ge, Si)/(Cr, Ni, Cu)/I a?aeiineoueny oaeiae aei
ooiaeaiaioaeueieo ieoaiue o?ceee oaa?aeiai o?ea c oi/ee ci?o a?eueo
aeeaieiai ?icoi?iiy i?ioeano aeaeo?ii?ia?aeiino? o ie?aeiaeo nenoaiao
oeio II/Ia.

Iniaenoee aianie caeiaoaa/a. ?acoeueoaoe, iiaeai? o aeena?oaoe?ei?e
?iaio?, ? i?aenoieii aeine?aeaeaiue, aeeiiaieo aaoi?ii o ni?ai?aoe? c
iaoeiaei ea??aieeii oa nooaeaioaie. Aeena?oaioii aoei aeaioiaeaii
iaiao?aeia aeey i?iaaaeaiiy aenia?eiaio?a iaeaaeiaiiy oa iiaea?i?ciaaii
aaeooiio onoaiiaeo, ui aeaei iiaeeea?noue i?iaiaeeoe ian-niaeo?iiao?e/i?
aeine?aeaeaiiy caeeoeiai? aoiinoa?e aaciina?aaeiuei o i?ioean?
iaea?aeaiiy oa oa?iiia?iaee c?ace?a. A?eueo?noue aenia?eiaio?a aoee
aeeiiai? aaoi?ii naiino?eii. Aeena?oaio iniaenoi ii?aoethaaa a?eueo?noue
aenia?eiaioaeueieo aeaieo. Eiio iaeaaeeoue nooo?aa ?ieue a
?ioa?i?aoaoe?? iaea?aeaieo ?acoeueoao?a, iaienaii? oa ioi?ieaii?
iaoeiaeo i?aoeue.

Ai?iaaoe?y ?acoeueoao?a aeena?oaoe??. Iniiai? ?acoeueoaoe aeena?oaoe??
aena?oethaaeenue ia I?aeia?iaei?e iaoeia?e eiioa?aioe?? i?enay/ai?e
150-??//th a?ae aeiy ia?iaeaeaiiy ?aaia Ioethy (Euea?a, 1995 ?.),
iaoeiai-oaoi?/i?e eiioa?aioe?? ”Oaoieea e oeceea yeaeo?iiiuo nenoai e
ono?ienoa” (Noie, 1995 ?.), ?? I?aeia?iaei?e eiioa?aioe?? MPSL’96 (Noie,
1996 ?.), VI I?aeia?iaei?e eiioa?aioe?? c o?ceee ? oaoiieia?? oiieeo
ie?aie (IEOOOI-VI, ?aaii-O?aie?anuee, 1997 ?.), I?aeia?iaeiiio
neiiic?oi? ”Ion implantation of science and technology” (IIST’97,
Ethae?i, 1997 ?.), 3-e I?aeia?iaei?e eiioa?aioe?? ”Oece/aneea yaeaiey a
oaa?ae(o oaeao”, i?enay/ai?e 80-??//th aeaaeai?ea ?.I. E?ooeoey (Oa?e?a,
1997), iaoeiai-oaoi?/ieo eiioa?aioe?yo aeeeaaea/?a, ani??aio?a,
ni?a?ia?oiee?a oa nooaeaio?a o?ceei-oaoi?/iiai oaeoeueoaoo Noinueeiai
aea?aeaaiiai oi?aa?neoaoo (Noie, 1997 ?., 1998 ?.), ??? I?aeia?iaei?e
eiioa?aioe?? MPSL’99 (Noie, 1999 ?.).

Ioae?eaoe??. Ca iaoa??aeaie aeena?oaoe?? iioae?eiaaii 18 ?ia?o, o oiio
/ene? 6 noaoae, 11 ?c ieo iaaiaeyoueny a nieneo ioae?eaoe?e o e?ioe?
aaoi?aoa?aoo.

No?oeoo?a oa ianya ?iaioe. Aeena?oaoe?eia ?iaioa caaaeueiei ianyaii 133
noi??iee neeaaea?oueny c anooio, 5 ?icae?e?a, caeeth/aiiy oa nieneo
aeei?enoaieo aeaea?ae ?c 139 iaeiaioaaiue. I?noeoue o nia? 40 ?enoie?a ?
17 oaaeeoeue.

INIIAIEE CI?NO ?IAIOE

O anooi? ?ice?eoi nooi?noue ? noai iaoeiai? i?iaeaie, iaa?oioiaaii
aeooaeuei?noue oa aeioe?euei?noue i?iaaaeaiiy ?iaioe, iinoaaeaii iaoo ?
noi?ioeueiaaii caaea/? aeine?aeaeaiue oa iaoiaee ?o ?ica’ycaiiy,
cacia/aii iniiai? iaea?aeai? ?acoeueoaoe oa ?o iaoeiaa iiaecia ?
i?aeoe/ia oe?ii?noue.

Ia?oee ?icae?e aeena?oaoe?? i?enay/aiee aiae?co e?oa?aoo?e c aea/aiiy
oaciaiai oa aeaiaioiiai neeaaeo i aeaeo?ioice/ieo aeanoeainoae iaoaeaaeo
ieiaie caeaaeii aiae oiia iaea?aeaiiy oa i?e iaianaii? iie?eooy.
C?iaeaiee aeniiaie i?i oa, ui iie?e?enoae?/i? ie?aee iaoae?a c
iai?ai?ia?aeieeiaei iie?eooyi ? iaeiaea/aieie, a aeaye? aniaeoe,
iia’ycai? c aeine?aeaeaiiyi aieeao /oaei??aeieo aoii?a ia ia?aiao?e
aeaeo?iia?aiino iaoaeaaeo ie?aie, iiaeeeaino? ?aae?caoe?? aeneoiiiiai
iaoai?cio i?ia?aeiino? o ie?aeao oeio II/Ia, caeeoeeenue iica oaaaith
aeine?aeiee?a.

O ae?oaiio ?icae?e? aeeeaaeaia iaoiaeeea iaea?aeaiiy ? aeine?aeaeaiiy
aeaeo?ii?ia?aeiino?, oaici/ooeeaino?, no?oeoo?e, aeaiaioiiai oa oaciaiai
neeaaeo c?ace?a. Oaeiae ?icaeyaeathoueny iniiai? ?acoeueoaoe c aea/aiiy
oaciaiai oa aeaiaioiiai neeaaeo, aeeooc?eieo i?ioean?a ? aeaeo?e/ieo
aeanoeainoae ie?aie.

Aiae?c ian-niaeo??a na?ae/eoue i?i oa, ui iiaa?oi? c?ace?a c aieo
i?aeeeaaeee oa aaeooio caa?oaeiai? ieneaeaie (Cr, Ni, Cu)Ox, (Ge, Si)Io
(?enoiie 1), oi/a a ia’?i? ie?aee ?o iaia?. O aeaioa?iaeo ie?aeao
Ge/Cr/I, Ge/Ni/I i?e oa?iiia?iaoe? niinoa??aathoueny aeeooc?ei? i?ioeane
(?enoiie 2), ui nooo?ai iiaea aieeiooe ia aeaeo?iiii-e?iaoe/i?
aeanoeaino? ia iaaeao ca?ai.

I?ae /an a?aeiaethaaiiy ie?aie i?ioyaii 3-4 oeeee?a o aaeooii?e eaia??
niinoa??aa?oueny iiaia noaa?e?caoe?y aeaeo?e/ieo aeanoeainoae, i?i ui
na?ae/aoue aeai?, io?eiai? a ?acoeueoao? aenia?eiaioo. Oiio
aeine?aeaeaiiy aieeao iie?eooy ia aeaeo?io?ce/i? aeanoeaino? iaoaeaaeo
ie?aie iiaeia ei?aeoii cae?enithaaoe aaea i?ney 2-3 oeeee?a
a?aeiaethaaiiy iaoaeaai? ie?aee.

Ine?eueee aea/aiiy no?oeoo?e oa aeaeo?io?ce/ieo aeanoeainoae iaoaeaaeo
ie?aie ia iiaea aaaaeaoeny eia?/ii caaa?oaiei aac ?icaeyaeo i?ioean?a
o?i?/ii? oa aeeooc?eii? aca?iiae?? aaeooiieo eiiaeainao?a c iieaeoeaie
caeeoeiai? aoiinoa?e, aoiiaie iai?ai?ia?aeiee?a aai iaoae?a o aeaeyae?
iie?eooy aai aa?oiueiai oa?o, oi a aeai?e ?iaio? aeine?aeaeaiiy
i?iaiaeeeenue oaeei /eiii ? oaeeie iaoiaeaie, ye? a aeicaieeee ioiieoe
on? oe? ieoaiiy.

?enoiie 1 — Ian-niaeo?e aoi?eiieo ?ii?a ?c iiaa?oi? ie?aie c aieo
aaeooio: a — Cr; a — Ni; a — Cu; a — Ge; ae — Si. *an o?aaeaiiy ?iiaie
Ar+ t(3 oa

?enoiie 2 — Aeeooc?ei? i?io?e? a?ae ie?aie: a — iaa?aeiaeaia ie?aea
Ge/Ni; a — a?aeiaeaia ie?aea Ge/Ni; a — iaa?aeiaeaia ie?aea Ge/Cr; a —
a?aeiaeaia ie?aea Ge/Cr

oaciooai?aiiy oa aeeooc??, aeathoue iiaeeea?noue ei?aeoii oa iaeiicia/ii
?icaeyaeaoe ieoaiiy i?i ci?io ia?aiao??a aeaeo?iia?aiino lg, p, r, R a
iaoaeaaeo ie?aeao i?ney iaianaiiy iie?eooy a ?aieao a?aeiieo oai?aoe/ieo
iiaeaeae Iayaeana-Oaoeeana (IO) oa Oaeue?-Oinna-I?oa?a (OOI).

O o?aoueiio ?icae?e? iiaeai? ?acoeueoaoe aeine?aeaeaiue aca?iiae??
aoiia?ieo io/e?a oa na?aeineiiaeainiaaieo ie?aie Cr, Cu, V, Ge oa Si c
aacaie caeeoeiai? aoiinoa?e. Iacaaaeath/e ia oa, ui iiaeiaii
aeineiaeaeaiiy aeicaieythoue iaea?aeaoe iioi?iaoeith i?i caeeoeiai aace,
yei iinoyoueny o aaeooiiie eaia?i, i?i aca?iiaeith oeeo aacia c
iaa?ioeie nii?aeyie oa na?aeineiiaeainiaaieie ieiaeaie, i?i oa?aeoa?
aaciaeaeieaiiy aaeooiieo iaoa?iaeia oa iioa, neiae aiaeiioeoe, ui aiie
oaeiae aeathoue ciiao ye?nii noaeeoe i?i iiaeeeao oiii/io aca?iiaeith
aac?a caeeoeiai? aoiinoa?e c aoiia?ieie io/eaie iaoaeia oa
iaiiai?iaiaeieeia iiae /an ?o eiiaeainaoei?, i?i oiii/ii oa oaciai
ia?aoai?aiiy o ieiaeao i?e oa?ii/iie ia?iaoei aai aiiaa?aeoaaiii
aeaeo?iiaie.

sse ?ethno?aoe?? ia ?enoieao 3 ? 4 cia?aaeai? ci?ie ian-niaeo?a
caeeoeiaeo aac?a aeey ie?aee Cr oa ?ioaineaiino? aeayeeo i?e?a ia
ian-niaeo?ao aeey ie?aee Ge.

Ne?ae a?aei?oeoe, ui iniiaieie eiiiiiaioaie o aaeooii?e eaia?? ia?aae
ii/aoeii iaieeaiiy ie?aie iaoae?a oa iai?ai?ia?aeiee?a ? ia?e aiaee
(H2O), acio (N2) i /aaeiee aac (CO), aoaeaeeneee aac (CO2), eaaei
aoaeaaiaeii (CH4, N2H2 oa iioi), o iacia/ieo eieueeinoyo — aiaeaiue (H1,
H2), eenaiue (I2), a?aii (Ar). O iiiaio iiaea/? iai?oae ia iie?aaeaiiaee
/iaiee aai eaoiae aeaeo?iiii-i?iiaiaai? aa?iaoe aeey a?oie aac?a N2, CO,
H2 ia? i?noea aeoaea ??cea ca?eueoaiiy ?ioaineaiino? i?e?a i?e
eiiaeainaoe?? i?aeoe/ii an?o aeine?aeaeoaaieo c?ace?a, a o aeiaaeeo
ie?aie Cr, Cu oea ni?aaaaeeeai ? aeey Ar; e??i oiai a?aeaoaa?oueny ??cea
ca?eueoaiiy eiioeaio?aoe?? N2H5 (ie?aee Cu) oa H2I (ie?aee Ge). Ia
noaae?? eiiaeainaoe?? c?ace?a oa i?ney aeieiaiiy iai?oae ia aeia?ieeo
an? aeine?aeaeoaai? ie?aee ?ic/eiythoue o nia? aai aca?iiae?thoue c
oaeeie aacaie, ye acio (N2), /aaeiee aac (CO), aiaeaiue (H2); ie?aee Cr,
Cu, Si ?ic/eiythoue o nia? (Ar+); ie?aee V aca?iiae?thoue c H2O, I2;
ie?aee Ge aca?iiae?thoue c H2O+.

Aca?iiae?y na?aeineiiaeainiaaieo ie?aie c aoiiaie oa iieaeoeaie
caeeoeiai? aoiinoa?e iiaea i?eaanoe aei ooai?aiiy iiaa?oiaaeo nieaa?a c
a?aei?iieie, i?ae a ia’?i? ie?aee, aeanoeainoyie, ui iiaea nooo?ai
aieeiooe ia ?icn?thaaiiy iin??a aeaeo?e/iiai no?oio ia iiaa?oi? c?acea,
a oaeiae — aei ooai?aiiy o?i?/ieo niieoe o i?ioean? oa?iiia?iaee ie?aie.

?enoiie 3 — Ci?ia ian-niaeo?a caeeoeiaeo aac?a i?e eiiaeainaoe?? ie?aee
o?iio: a — aei eiiaeainaoe??; a — o i?ioean? eiiaeainaoe?? ia ae?ai; a —
o i?ioean? eiiaeainaoe?? ia i?aeeeaaeeo; a — i?ney eiiaeainaoe??
(* — ?ioaineai?noue i?e?a ciaioaia a 10 ?ac?a)

ine?eueee eiioeaio?aoe?? iaea?eueo aeoeaieo o aeaiiio aeiaaeeo aac?a
cia/ii iaio?, i?ae eiioeaio?aoe?? ?ioeo aac?a.

Aeey oiai uia a?eueo aeeaoa aea/eoe ieoaiiy aca?iiae?? aac?a caeeoeiai?
aoiinoa?e ? aoiia?ieo io/e?a oa na?aeineiiaeainiaaieo ie?aie iaoae?a ?
iai?ai?ia?aeiee?a, iaiao?aeiee eiiieaeniee i?aeo?ae, yeee iieyaa? o
aea/aii? iaei??? ? o??? ae i?iaeaie aeae?eueeiia iaoiaeaie. C oe??th
iaoith o 4-io oa 5-io ?icae?eao aeena?oaoe?? iaie aoee i?iaaaeai?
aeaeo?iiii-i?e?ineii?/i? oa aeaeo?iiia?ao?/i? aeine?aeaeaiiy c
a?aeiaethaaiiy c?ace?a io/eii aeaeo?ii?a, a oaeiae aea/aia
aeaeo?ii?ia?aei?noue oa oaici/ooeea?noue iaoaeaaeo ie?aie c iie?eooyi.
Onoaiiaeaia ei?aeyoe?y io?eiaieo ?acoeueoao?a.

*aoaa?oee ?icae?e i?enay/aiee aeine?aeaeaiith oaciaeo oa o?i?/ieo
ia?aoai?aiue o ie?aeao o i?ioean? oa?iiia?iaee oa aiiaa?aeoaaiiy
aeaeo?iiaie.

?acoeueoaoe oeeo aeine?aeaeaiue iiaeai? a oaaeeoe? 1.

Oaaeeoey 1 — Oaciaee neeaae oa oiii/i? ia?aoai?aiiy o ieiaeiaeo
nenoaiao (Ge, Si, Cu)/(Cr, Ni, Cu)

Oaciaee neeaae ieiaie

Ieiaea naiaeineii-aeainiaaieo aiaeiaeaieo o aaeooiiie eaia?i aiaeiaeaieo
io/eii aeaeo?iiia

Ge/C/I a-Ge a-Ge, e-Ge e-Ge+neiaee GeO2

Si/C/I a-Si a-Si e-Si, SiC

Ge/Cu/I a-Ge+Cu a-Ge+Cu e-Ge+GeO2+neiaee Cu

Ge/Ni/I a-Ge+Ni a-Ge+Ni ?

Si/Ni/I a-Si+Ni a-Si+Ni Ni+neiaee (Ni3Si+Ni2Si)

Si/Cu/I a-Si+Cu a-Si+Cu e-Si+nei?ioa anueiai Cu5Si

Cu/Cr Cu+Cr Cu+Cr+Cr3O Cu+Cr2O3

Oe? aeai? aeathoue iiaeeea?noue noaa?aeaeoaaoe, ui i?e oa?iiia?iaoe?
nenoai iie?eooy/ie?aea (aeey aecia/aiiy OEI) iiaeia /aeaoe eeoa oaciaeo
ia?aoiae?a a-II(e-II, a ia ooai?aiiy o?i?/ieo niieoe, ine?eueee inoaii?
a?aeaoaathoueny eeoa i?e oa?iiia?iaoe? aeaeo?iiaie.

?icoeo?iaea aeaeo?iiia?ai iieaco?, ui aeineiaeaeoaaii c?acee iathoue
ia?aiao?e e?enoaei/ii? ?aoioee i?eaeecii oaei aai o?ioe aieueoi, iiae o
ianeaieo c?aceao, ui naiae/eoue i?i iacia/io aca?iiaeith aaeooiieo
eiiaeainaoia c aacaie caeeoeiai? aoiinoa?e.

sse aoei iieacaii aeua, o aeine?aeaeoaaieo iaoaeaaeo ie?aeao c
iie?eooyi ia?aiao?e e?enoae?/ii? ?ao?oee i?eaeecii oae? ae, ye ? o
ie?aeao aac iie?eooy, ui na?ae/eoue i?i a?aenooi?noue ia’?iii? aeeooc??.
O oie aea /an iaoiae A?IN oeaco? ia i?ioeeaaeia. C o?aooaaiiyi
aeuaneacaiiai oea iiaeia iiynieoe aeeooc?eieie i?ioeanaie ii iaaeao
ca?ai. Aeaia yaeua aea? iiaeeea?noue i?iaiicoaaoe ci?io aeaeo?io?ce/ieo
ia?aiao??a iaoaeaaeo ie?aie aiane?aeie iaianaiiy iie?eooy.

O e?ioe? ?icae?eo, ocaaaeueithth/e e?oa?aoo?i? aeai?, i?iaiae?ciaaii
yaeua, ye? iaoiiaeoue ca?iiiaaeiaa aeeooc?y aoii?a iai?ai?ia?aeiee?a /e
iaoae?a. Oea aaeni?aoe?y ?ii??aeieo aoii?a, aaeni?aoe?y aaeain?e oa
oacia? ia?aoiaee ia iaaeao ca?ai. I?e oeueiio aoei a?aoiaaii i?aeo?ae
A.A. Iie?iieaiiai, ca?aeii c yeei caaaeueiei i?eioeeiii oi?ioaaiiy iaae?
ca?ai iiaeia aaaaeaoe iaiaaaiiy iaeneiaeueiiai a?aeiiaeaiiy ?ic??aaieo
aoiiieo ca’yce?a c ??aiiaaaeiith a?aenoaiith i?ae aoiiaie r0.

O i’yoiio ?icae?e? iiaeai? ?acoeueoaoe aeine?aeaeaiue
aeaeo?ii?ia?aeiino? oa oaici/ooeeaino? iaoaeaaeo ie?aie Cr, Ni oa Cu c
iie?eooyi Ge oa Si. Aoei anoaiiaeaii ca?eueoaiiy i?ia?aeiino? ?
ciaioaiiy OEI oa eiao?oe??ioa iicaeiaaeiuei? oaici/ooeeaino? ie?aie Cr
oa Ni i?ney iaianaiiy aa?iai??aiai iie?eooy oa oa?iiia?iaee. O aeiaaeeo
ie?aie Cu e?aii??aa iie?eooy ni?e/eiyei ciaioaiiy i?ia?aeiino?. Ia
?enoieo 5 cia?aaeai? caeaaeiino? b*d, b-1*d a?ae d, c yeeo aecia/aeeny
ia?aiao?e aeaeo?iia?aiino l0(1-p), p, r oa R o ?aieao e?iaa?eciaaii?
iiaeae? IO oa iiaeae? OOI ?cio?iiiiai ?icn?thaaiiy iin??a ia iaaeao
e?enoae?a:

, (1)

(2)

(3)

(4)

aea b — OEI ie?aee; bg — OEI ie?aee i?e d((; H(a) — oaaoeueiaaia
ooieoe?y, yea caeaaeeoue a?ae ia?aiao?a ?icn?thaaiiy ia iaae? ca?ai a;
L — na?aaei?e ?ici?? e?enoae?o?a; l0 — NAeAI aeaeo?ii?a o ianeaiiio
c?aceo.

?ic?aooiie ia?aiao??a aeaeo?iia?aiino iieaco?, ui aeey ie?aie iaoae?a
aiie iathoue oae? cia/aiiy: p=0,10 (Ni), 0 (Cr), 0,01 (Cu); r=0,90-0,63
(Ni), 0,61 (Cr), 0,81 (Cu). I?ney iaianaiiy ia ieo iai?ai?ia?aeieeiaiai
iie?eooy ia?ii p=0,14 (Ge/Ni/I), 0 (Ge/Cr/I), 0,02 (Si/Cu/I);
r=0,92-0,68 (Ge/Ni/I), 0,86 (Ge/Cr/I), 0,63 (Si/Cu/I). NAeAI l0 o
aeeoociiio iaaeeaeaii? ciaoiaeeeanue ?c caeaaeiino? b*d a?ae d ?
noaiiaeea 29 (Ni), 124 (Cr), 38 (Cu) ii.

O oaaeeoe? 2 iiaeai? aenia?eiaioaeuei? cia/aiiy eiao?oe??io?a
oaici/ooeeaino? aeey ie?aie Cr (oeeeee 1-4) oa Ni (oeeeee 1-5) ? Ge/Cr/I
(oeeeee 5-8) oa Ge/Ni/I (oeeeee 6-8).

?enoiie 5 — Caeaaeiino? b*d oa b-1*d a?ae d aeey ie?aie: 1 — Ni; 2 —
Ge/Ni/I; 3 — Cr; 4 — Ge/Cr/I; 5 — Cu; 6 — Si/Cu/I

Oaaeeoey 2 — Caeaaei?noue gl a?ae iiia?a aeaoi?iaoe?eiiai oeeeeo aeey
ie?aie Cr, Ge/Cr oa Ni, Ge/Ni

Ie?aea gl (? aeaoi?iaoe?eiiai oeeeeo)

(d, ii) gl (1) gl (2) gl (3) gl (4) gl (5) gl (6) gl (7) gl (8)

Cr (45) 111,11 29,17 24,39 20,00 29,27 16,95 16,13 16,22

Cr (100) 14,00 6,83 7,14 6,67 35,29 8,89 8,48 7,27

Ni (40) 122,0 30,0 25,0 20,0 20,00 18,5 15,2 14,9

Ni (45) 32,43 27,59 31,58 25,81 20,00 23,88 27,59 24,14

Ni (60) — — — 15,63 13,56 21,43 16,13 15,63

Ni (120) 8,51 7,89 6,58 5,21 5,08 4,10 5,93 4,21

?enoiie 6 — Noaia ooai?aiiy aeneoii?a o aeaioa?iaeo ie?aeao Ge/Cr/I: J1
? J2 — aonoeia no?oio, coiiaeaia aeaniith i?ia?aei?noth o?iio ?
aa?iai?th a?aeiia?aeii; 1-3 — o?e iiaeeea? oeie aeneoiiieo ia?; v —
na?aaeiy oaeaee?noue iin??a no?oio; E — iai?oaeai?noue aeaeo?e/iiai
iiey; n — eiioeaio?aoe?y iin??a no?oio

ieoiiiai iii?o iaoaeaai? ie?aee i?ney iie?eooy ?? iai?ai?ia?aeieeii.

Io?eiai? iaie ?acoeueoaoe aeathoue i?aenoaae aiai?eoe i?i oa, ui
aeaioa?ia? ie?aee (a-Ge, a-Si)/(Cr, Ni, Cu)/I iiaeia ?icaeyaeaoe (o
a?aeiioaii? aeaeo?e/ieo aeanoeainoae) ye ie?aee c iie?eooyi.
A?aei?ii?noue aaee/ei OEI ie?aie Cr, Ni, Cu ? a-Ge/Cr/I, a-Ge/Ni/I,
a-Si/Cu/I a?aeiia?aeii iiynith?oueny ci?iith eiao?oe??ioa i?ioiaeaeaiiy
iaae? e?enoae?o?a r caaaeyee ca?iiiaaeia?e aeeooc?? aoii?a Ge ? Si o
ie?aee Cr, Ni oa Cu (aeea. ?enoiie 2). Aoiie Ge, ye? eieae?cothoueny ia
iaae? ca?ai, /anoeiai cae?eiaothoue aeaoaeoe no?oeoo?e, ui iaoiiaeth?
ca?eueoaiiy ia?aiao?a r oa a?aeiia?aeia ciaioaiiy OEI (ie?aee a-Ge/Cr/I,
a-Ge/Ni/I). ?ic?aooiee, i?iaaaeai? a ?aieao ?cio?iiii? iiaeae? OOI
aeey ?ici??iiai aoaeoo OEI iaeiioa?iaeo ie?aie, iieacothoue, ui r
ca?eueoo?oueny i?eaeecii ia 5-6%.

INIIAI? ?ACOEUeOAOE AeENA?OAOe?EII? ?IAIOE

Iniiaieie eiiiiiaioaie o aaeooii?e eaia?? ia?aae ii/aoeii iaieeaiiy
ie?aie iaoae?a oa iai?ai?ia?aeiee?a ? ia?e aiaee (H2O), acio (N2) i
/aaeiee aac (CO), aoaeaeeneee aac (CO2), eaaei aoaeaaiaeii (CH4, N2H2 oa
iioi), o iacia/ieo eieueeinoyo — aiaeaiue (H1, H2), eenaiue (I2), a?aii
(Ar). O i?ioean? eiiaeainaoe?? ie?aie niinoa??aa?oueny ?ic/eiaiiy o
ie?aeao oaeeo aac?a, ye aiaeaiue, acio, ia?e aiaee oa eenaiue.

Aiae?c aeine?aeaeaiue oaciaeo ? o?i?/ieo ia?aoai?aiue o ie?aeao Ge ? Si
i?e a?aeiaethaaii? (aei 700 E) o aaeooii?e eaia?? oa io/eii aeaeo?ii?a o
eieii? aeaeo?iiiiai i?e?ineiia iieacaa, ui oa?i?/ia a?aeiaethaaiiy o
aaeooii?e eaia?? iiaea i?eaanoe eeoa aei e?enoae?caoe?? aii?oii? oace
Ge, a oie /an ye i?ae ae??th aeaeo?iiiiai io/ea ooai?ththoueny niieoee
GeO2 oa SiC.

~10-5, E~1020 n-1(i-2, S~10-14 Aeae(i2/ea, Ri~10-5 i i?e ieeneaii?
ie?aie aei neeaaeo Ia2I3. Aea/ai? o?i?/i? ia?aoai?aiiy a ie?aeiaeo
nenoaiao (a-Si, a-Ge, e-Ge)/(Cr, Ni, Cu)/I oa Cu/Cr/I i?e oa?iiia?iaoe?
oa i?ae ae??th aeaeo?iiiiai io/ea. Aeaeo?iiia?ao?/ii cao?eniaaii
ooai?aiiy niieoe Ni2Si, Ni3Si, Cu5Si, GeO2, Cr3O oa Cr2O3.

Iaianaiiy iie?eooy oiaueiith iaioa 1 ii ?c Ge oa Si ia iaoaeaa? ie?aee
Cr, Ni , Cu i?ecaiaeeoue aei ciaioaiiy OEI oa ca?eueoaiiy i?ia?aeiino? o
aeiaaeeo ie?aie Ge/Cr/I ? Ge/Ni/I.

Ie?aee oeio II/Ia/I o a?aie/iiio aeiaaeeo aeaioa?iai? ie?aee (diie(d) c
oi/ee ci?o aeaeo?io?ce/ieo aeanoeainoae iiaeia ?icaeyaeaoe ye ie?aee
iaoae?a c iie?eooyi.

Aia?oa aenia?eiaioaeueii iieacaii, ui iaianaiiy iie?eooy ?c Ge ia ie?aee
Cr ? Ni coiiaeth? ciaioaiiy eiao?oe??ioa iicaeiaaeiuei? oaici/ooeeaino?,
ui iiynith?oueny i?ioeanaie aeeooc?? aoii?a iie?eooy ii iaaeao ca?ai o
aaciao ie?aeo.

I?iaiae?ciaaia ieoaiiy i?i iiaeeea? iaoai?cie, ye? coiiaeththoue aoaeoe
ciaioaiiy OEI oa EO iaoaeaaeo ie?aie c iie?eooyi; iieacaii, ui iniiaiei
oaeei iaoai?ciii ? ca?eueoaiiy eiao?oe??ioa i?ioiaeaeaiiy aeaeo?iiii
iaae? ca?ai o ?acoeueoao? aaeineiiaeaiiy ?oiuei? no?oeoo?e i?e aeeooc??
aoii?a iie?eooy.

Oai?aoe/ia ioe?iea oa aenia?eiaioaeuei? ?acoeueoaoe c aeine?aeaeaiiy
aeeaaeo aeneoii?a Aaiue?-Iiooa o ciaioaiiy OEI ? EO ie?aeiaeo nenoai
Ge/(Cr, Ni)/I ? Si/Cu/I iieacothoue, ui, yeui ? ?aae?co?oueny aeaiee
iaoai?ci, eiai aeeaae iaaaaaoi iaioee ii??aiyii ?c aeeaaeii
ca?iiiaaeiai? aeeooc??.

C oi/ee ci?o aeaeo?io?ce/ieo aeanoeainoae iaoaeaa? ie?aee c
iai?ai?ia?aeieeiaei iie?eooyi iiaeia ?icaeyaeaoe ye iiaee eean ie?aeiaeo
iaoa??ae?a aai ye ie?aee c iiaeeo?eiaaieie iie?eooyi aeanoeainoyie.

NIENIE AEEI?ENOAIEO AeAEA?AE

Eiaai A.N., Ooeaaa A.I. Enneaaeiaaiey a IIOe OOOE ii iaoaeeioeceea
aaeooiiuo eiiaeainaoia, iieo/aaiuo ec ?ac?aaeaiiuo ia?iaaciauo nianae//
O?oaeu aaeooiiiai iauanoaa.- *.III.- Oa?ueeia: IIOe OOOE, 1997.-
N.16-29.

Schoder K., Walsh L. Effect of Ge overlayers on the electrical
resistance of thin Cr films// J. Vac. Sci. Technol. A.- 1991.- V.9.-
?3.- P.577-580.

NIENIE IIOAE?EIAAIEO I?AOeUe

Iaeiiaeai?aoe E.A., Ia/a?aiei TH.I., Iiaianthe I.I., I?ioeaiei E.A.,
*i?iion A.I. Yeaeo?ioece/aneea naienoaa iaeii- e iiiaineieiuo ieaiie
iaoaeeia. 1. Oaeaeueiia nii?ioeaeaiea e oaici/oanoaeoaeueiinoue
iaeiineieiuo ieaiie// A?niee Noinueeiai aea?aeaaiiai oi?aa?neoaoo.-
1996.- ?1(5).- N.9-17.

*i?iion A.I., Ia/a?aiei TH.I., Oiaeiieyn I.A., I?ioeaiei N.?.
Iniaeeaino? ?ici??iiai aoaeoo a aeaeo?ii?ia?aeiino? aeaioa?iaeo ie?aie c
a?aei?iieie oaiia?aoo?ieie eiao?oe??ioaie iii?o// A?niee Noinueeiai
aea?aeaaiiai oi?aa?neoaoo.- 1997.- ?1.- N.95-99.

Ia/a?aiei TH.I., Iiaianthe I.I., I?ioeaiei ?.TH., Oiaeiieyn I.A.
?ic?aooiie ia?aiao??a aeaeo?iia?aiino oiieeo iaoaeaaeo ie?aie a oiiaao
ciai?oiueiai oa aioo??oiueiai ?ici??ieo aoaeo?a// OOAE.- 1997.- O.14,
?7.- N.826-830.

I?ioeaiei ?.TH., Oiaeiieyn I.A., Ia/a?aiei TH.I., Iiaianthe I.I.
Aeaeoio?ce/i? aeanoeaino? oiieeo iie?e?enoae?/ieo ie?aie Cr, Cu, Ni oa
Ti// AEo?iae o?ce/ieo aeine?aeaeaiue.- 1998.- O.2, ?1.- N.105-108.

Ia/a?aiei TH.I., Iaeiiaeai?aoe E.A. I?ioeaiei E.A. Oeie/aneea
i?aa?auaiey a ieaieao aaiaaeey iiae aicaeaenoaeai yeaeo?iiia// AAIO.-
1998.- ?2, 3.- N. 29-32.

Protsenko I., Shovkoplas O., Chornous A., Ovcharenko Yu. Chemical and
structure transition in metallic films under influence of electrons//
International symposium on ion implantation of science and technology
(IIST’97).- Lublin: Technical University of Lublin.- 1997.- P.160-164.

Protsenko I., Shovkoplas O., Opanasyuk N., Ovcharenko Yu. The
calculation of parameters of electrecal conduction of thin
polycrystaline films Cr, Cu, Ni and Ti// Book of abstracts second
international conference MPSL’96.- Sumy: Sumy State University and Sumy
Institute of Surface Modification.- 1996.- P.35-36.

Ia/a?aiei TH.I., I?ioeaiei E.A., *i?iion A.I. Enneaaeiaaiea
yeaeo?ii?iaiaeiinoe iaoaeee/aneeo ieaiie n iieoi?iaiaeieeiaui
iie?uoeai// Iaoa?eaeu 3-e Iaaeaeoia?iaeiie eiioa?aioeee ”Oece/aneea
yaeaiey a oaa?aeuo oaeao” (e 80-eaoeth E.I. Eeooeoea).- Oa?ueeia: OAO.-
1997.- N.136.

Ia/a?aiei TH.I., Na?aethe N.I. Aeine?aeaeaiiy oaiciaoaeoo a oiieeo
iaoaeaaeo ie?aeao c iie?eooyi// Oacenu aeieeaaeia iao/ii-oaoie/aneie
eiioa?aioeee i?aiiaeaaaoaeae, nio?oaeieeia, anie?aioia e nooaeaioia.-
Noiu.- 1998.- N.17.

Ia/a?aiei TH.I. Oacia? oa o?i?/i? ia?aoai?aiiy a ie?aeao o i?ioean?
oa?iiia?iaee oa aiiaa?aeoaaiiy aeaeo?iiaie// Oacenu aeieeaaeia
iao/ii-oaoie/aneie eiioa?aioeee i?aiiaeaaaoaeae, nio?oaeieeia,
anie?aioia e nooaeaioia.- Noiu.- 1998.- N.22.

Chornous A., Ovcharenko Yu., Protsenko I. Estimation of part non-elastic
scattering electrons in films Cr, Sc, Y, V// Abstract booklet third
international conference MPSL’99.- Sumy: Sumy State University.- 1999.-
P.98.

AIIOAOe?ss

Ia/a?aiei TH.I. No?oeoo?a oa aeaeo?io?ce/i? aeanoeaino? iaoaeaaeo
ie?aie c iai?ai?ia?aeieeiaei iie?eooyi a oiiaao o?i?/ii? oa aeeooc?eii?
aca?iiae?? aoii?a.- ?oeiien.

Aeena?oaoe?y ia caeiaoooy iaoeiaiai nooiaiy eaiaeeaeaoa
o?ceei-iaoaiaoe/ieo iaoe ca niaoe?aeuei?noth 01.04.07 — o?ceea oaa?aeiai
o?ea.- Noinueeee aea?aeaaiee oi?aa?neoao, Noie, 1999.

Aeine?aeaeai? aeaeo?io?ce/i? aeanoeaino?, no?oeoo?a, aeaiaioiee oa
oaciaee neeaae iaoaeaaeo ie?aie Cr, Ni, Cu, V, Sc a oiiaao aca?iiae?? c
aoiiaie oa iieaeoeaie caeeoeiai? aoiinoa?e aai iai?ai?ia?aeieeiaiai
iie?eooy Ge oa Si (diie(1 ii). Anoaiiaeaiee aoaeo ciaioaiiy
oaiia?aoo?iiai eiao?oe??ioa iii?o oa eiao?oe??ioa iicaeiaaeiuei?
oaici/ooeeaino?, ui iia’yco?oueny ?c ca?eueoaiiyi eiao?oe??ioa
i?ioiaeaeaiiy iaae? ca?ia aeaeo?iiaie o ie?aeao iaoae?a i?ney iaianaiiy
iie?eooy oa a?aeiaethaaiiy.

Eeth/ia? neiaa: oiie? ie?aee, iie?eooy, oaiia?aoo?iee eiao?oe??io
iii?o, oaici/ooeea?noue, aeeooc?eia ? o?i?/ia aca?iiae?y, eiao?oe??ioe
i?ioiaeaeaiiy oa ?icn?thaaiiy ia iaae? ca?ia.

AIIIOAOeEss

Ia/a?aiei TH.I. No?oeoo?a e yeaeo?ioece/aneea naienoaa iaoaeee/aneeo
ieaiie n iieoi?iaiaeieeiaui iie?uoeai a oneiaeyo oeie/aneiai e
aeeoooceiiiiai acaeiiaeaenoaey aoiiia.- ?oeiienue.

Aeenna?oaoeey ia nieneaiea o/aiie noaiaie eaiaeeaeaoa
oeceei-iaoaiaoe/aneeo iaoe ii niaoeeaeueiinoe 01.04.07 — oeceea
oaa?aeiai oaea.- Noineee ainoaea?noaaiiue oieaa?neoao, Noiu, 1999.

A aeenna?oaoeee e caueoa i?aaenoaaeaiu ?acoeueoaou enneaaeiaaiee,
eceiaeaiiua a 11 iao/iuo ioaeeeaoeeyo. ?aaioa iinayuaia eco/aieth
yeaeo?ioece/aneeo naienoa, no?oeoo?u, yeaiaioiiai e oaciaiai ninoaaa
iaoaeee/aneeo ieaiie Cr, Ni, Cu, V, Sc a oneiaeyo acaeiiaeaenoaey n
aoiiaie e iieaeoeaie inoaoi/iie aoiinoa?u eee iieoi?iaiaeieeiaiai
iie?uoey Ge e Si (diie(1 ii).

I?iaaaeaiu iann-niaeo?iiao?e/aneea enneaaeiaaiey acaeiiaeaenoaey
aoiia?iuo io/eia e naaaeaneiiaeaine?iaaiiuo ieaiie iaoaeeia e
iieoi?iaiaeieeia n aacaie inoaoi/iie aoiinoa?u e onoaiiaeaia ei??aeyoeey
yoeo ?acoeueoaoia n aeaiiuie, iieo/aiiuie iaoiaeaie yeaeo?iiia?aoee e
aoi?e/iie eiiiie iann-niaeo?iiao?ee.

Onoaiiaeaiu yooaeo oiaiueoaiey oaiia?aoo?iiai eiyooeoeeaioa
nii?ioeaeaiey e eiyooeoeeaioa i?iaeieueiie oaici/oanoaeoaeueiinoe, a
oaeaea oaaee/aiea eiyooeoeeaioa i?ioiaeaeaiey a?aieoeu ca?ia yeaeo?iiaie
a ieaieao Cr e Ni iinea iaianaiey iie?uoey ec Ge e aeaeueiaeoaai
ioaeeaa. Naeaeai aiaeec iaoaieciia ?aaeecaoeee yoiai yooaeoa —
aaeni?aoeey eii?iaeiuo aoiiia, aaeni?aoeey aaeainee, oaciaua ia?aoiaeu
ia a?aieoeao ca?ai, ?aaeecaoeey yeneoiiiiai iaoaiecia i?iaiaeeiinoe, a
?acoeueoaoa /aai aue naeaeai auaiae i oii, /oi iniiaiui oaeoi?ii caeanue
yaeyaony /anoe/iia caea/eaaiea aeaoaeoiie no?oeoo?u a?aieoe ca?ai
aoiiaie iie?uoey aneaaenoaea aeeoooceiiiuo i?ioeannia.

Eeth/aaua neiaa: oiieea ieaiee, oaiia?aoo?iue eiyooeoeeaio
nii?ioeaeaiey, oaici/oanoaeoaeueiinoue, aeeoooceiiiia e oeie/aneia
acaeiiaeaenoaea, eiyooeoeeaiou i?ioiaeaeaiey e ?annaeaaiey ia a?aieoea
ca?ia.

ABSTRACT

Ovcharenko Yu.M. Structure and electrophysical properties of metal
films with the semiconductor overlayer under condition of chemical and
diffusion interaction atoms.

Thesis for a candidates degree by speciality 01.04.07 — solid state
physics.- Sumy State University, Sumy, 1999.

The electrophysical properties, structure, elements and phase
composition of metallic films Cr, Ni, Cu, V, Sc under condition of
interaction with atoms and molecules of residual gases or semiconductor
overlayer Ge, Si (dove(1 nm) were investigated. The decrease effect of
the resistance temperature coefficient, the longitudinal strain
coefficient and increase ef-fect of the specula transmission coefficient
(r) of grain boundary in films Cr and Ni were reveal by overlayer
condensation and heating. It is explain of diffusion processes of atoms
Ge in metal by grain boundary.

Key words: thin films, overlayer, resistance temperature coefficient,
longitudinal strain coefficient, chemical and diffusion interaction,
specula transmission coefficient of grain boundary and grain boundary
reflection coefficient.

PAGE

PAGE 8

?enoiie 4 — Ci?ia ?ioaineaiino? aeayeeo i?e?a ia ian-niaeo?ao i?e
eiiaeainaoe?? ie?aee aa?iai?th

Iacaaaeath/e ia oa, ui aoiia?i? io/ee oa na?aeineiiaeainiaai? ie?aee
aca?iiae?thoue c aeayeeie eiiiiiaioaie caeeoeiai? aoiinoa?e, iiaeia
c?iaeoe aeniiaie i?i aeineoue aenieo /enoioo iaea?aeoaaieo c?ace?a,

?enoiie 4 — Ci?ia ?ioaineaiino? aeayeeo i?e?a ia ian-niaeo?ao i?e
eiiaeaina-oe?? ie?aee aa?iai?th

Aca?iiae?y na?aeineiiaeainiaaieo ie?aie c aoiiaie oa iieaeoeaie
caeeoeiai? aoiinoa?e iiaea i?eaanoe aei ooai?aiiy iiaa?oiaaeo nieaa?a c
a?aei?iieie, i?ae o ia’?i? ie?aee, aeanoeainoyie, ui iiaea nooo?ai
aieeiooe ia

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