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Модифікація структури приповерхневого шару епітаксійних плівок Y3Fe5O12/Gd3Ga5 O при іонній імплантації: Автореф. дис… канд.

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I?i?noa?noai INA?OE Oe?a?ie I?EEA?IAONUeEEE oi?aa?neoao?IAI? A.
NOAOAIEEA

OEA*OE I?eny Ieeiea?aia

OAeE 538.975+537.534.9

IIAeEO?EAOe?ss NO?OEOO?EI?EIIAA?OIAAIAI OA?OAI?OAEN?EIEO IE?AIE
Y3FE5O12/GD3GA5O12I?E ?III?E ?IIEAIOAOe??.

01.04.18 — O?ceea ? o?i?y iiaa?oi?.

Aaoi?aoa?ao

aeena?oaoe?? ia caeiaoooy iaoeiaiai nooiaiy

eaiaeeaeaoa o?ceei-iaoaiaoe/ieo iaoe

?aaii-O?aie?anuee — 1999

Aeena?oaoe??th ? ?oeiien

?iaioa aeeiiaia a eaai?aoi??? o?ceee iaai?oieo ie?aie I?eea?iaonueeiai
oi?aa?neoaoo ?iai? A. Noaoaieea I?i?noa?noai ina?oe Oe?a?ie

Iaoeiaee ea??aiee:

aeieoi? o?ceei-iaoaiaoe/ieo iaoe, i?ioani? Inoao?e/oe Aiaaeai
Einoyioeiiae/, caa?aeoaa/ eaoaae?e iaoaeio?ceee I?eea?iaonueeiai
oi?aa?neoaoo.

Io?oe?ei? iiiiaioe:

aeieoi? o?ceei-iaoaiaoe/ieo iaoe, i?ioani? Iaoeianueeee Aiae??e
I?anoiae/, aea?aeaaiee oi?aa?neoao “Euea?anueea iie?oaoi?ea”, caa?aeoaa/
eaoaae?e iai?ai?ia?aeieeiai? aiaeo?ii?ee, i.Euea?a;

eao?aao Aea?aeaaii? i?ai?? Oe?a?ie a aaeoc? iaoee ? oaoi?ee, aeieoi?
o?ceei-iaoaiaoe/ieo iaoe, i?ioani? Aeiaaioae Ieeiea ?aaiiae/,
Oaeai?iaenueeee oi?aa?neoao. i?ioani? eaoaae?ith oaa?aeio?eueii?
aiaeo?ii?ee, i.Oaeai?iae.

I?ia?aeia onoaiiaa:

?inoeooo iaoaeio?ceee IAI Oe?a?ie, i.Ee?a.

Caoeno a?aeaoaeaoueny “4” aeiaoiy 1999 ?ieo i 11 aiaeei? ia can?aeaii?
niaoe?ae?ciaaii? a/aii? ?aaee E 20.051.03 a I?eea?iaonueeiio
oi?aa?neoao? ?iai? A. Noaoaieea ca aae?anith: 284029,
i.?aaii-O?aie?anuee, aoe. Oaa/aiea, 57.

C aeena?oaoe??th iiaeia iciaeiieoenue a iaoeia?e a?ae?ioaoe?
I?eea?iaonueeiai oi?aa?neoaoo ?iai? A. Noaoaieea (aoe. Oaa/aiea,57).

Aaoi?aoa?ao ?ic?neaiee “1”aa?aniy 1999 ?.

A/aiee nae?aoa?

niaoe?ae?ciaaii? a/aii? ?aaee E 20.051.03,

eaiaeeaeao o?ceei-iaoaiaoe/ieo iaoe
Eeai?/ea A.I.

. CAAAEUeIA OA?AEOA?ENOEEA ?IAIOE

Aeooaeuei?noue oaie. Iaeieie ?c iaea?eueo oe?iei aeei?enoiaoaaieo a
i?eno?iyo ooieoe?iiaeueii? i?e?iaeaeo?ii?ee iaai?oieo iaoa??ae?a ?
oa?eo-a?aiaoe (OA). Cie?aia, ai?oaen?ei? iiiie?enoae?/i? ie?aee
cae?ci-?o???aiai a?aiaoo (C?A) Y3Fe5O12, ae?iuai? ia i?aeeeaaeoe? ?c
aaaeie?i?e-aae??aiai a?aiaoo (AAA) Gd3Ga5O12, ? iaeieie ?c iaea?eueo
ia?niaeoeaieo iaoa??ae?a aeey noai?aiiy i?eno?i?a ?ici?ciaaaiiy,
eiio?ieth ? ia?iaee neaiae?a a naioeiao?iaiio ae?aiacii?. Ia?aiao?e
oaeeo i?eno?i?a aecia/athoueny aeanoeainoyie oiieiai i?eiiaa?oiaaiai
oa?o, a yeiio ooo/ii noai?aii ii oiauei? a?aae??io o?ceei-o?i?/ieo
aeanoeainoae.

Iiooe ? ?ic?iaea iaoiae?a iie?auaiiy aeanoeainoae i?eiiaa?oiaaiai oa?o
ai?oaen?eieo ie?aie oa?eo-a?aiao?a, a oiio /ene? C?A, caeia? nooo?aa
i?noea a ?icaeoeo no/anii? i?e?iaeaeo?ii?ee. Iaeiei ?c ia?niaeoeaieo
iaoiae?a aieeao ia i?eiiaa?oiaa? oa?e c iaoith oe?eani?yiiaaiiai
iaaeaiiy ?i niaoeeo?/ieo aeanoeainoae, ? ?iiia ?iieaioaoe?y (??),
oi?eaeuei? iiaeeeaino? yei? iia’ycai? ianaiia?aae ?c ia??aiiaaaei?noth
naiiai i?ioeano, ui aea? iiaeeea?noue iiaeieaoe i?eioeeiia? iaiaaeaiiy
iaoiae?a o?i?ei-oa?i?/ii? ia?iaee. O ?iieaioiaaieo ie?aeao C?A c
iaiaeii??aei?noth iaai?oieo ia?aiao??a ii oiauei? aeyaeaii ?yae iiaeo
o?ce/ieo aoaeo?a ? iniaeeainoae, ye? iathoue oai?aoe/ia ? i?aeoe/ia
cia/aiiy. A ie?aeao C?A c iaiaeii??aeiei i?eiiaa?oiaaei oa?ii eaaoa
caoaeaeothoueny ni?i-oaeeueia? ?aciiaine. Ii??a aeieeiaiiy
iae?i?eieo aoaeo?a (iai?eeeaae, aaoiiiaeoeyoe?? ni?i-oaeeueiaeo
caoaeaeaiue) ia aeaa ii?yaeee iaioee, i?ae a ie?aeao, iaeii??aeieo ii
oiauei?. E??i oiai, a ?iieaioiaaieo ie?aeao C?A iiaeia caoaeaeoaaoe
iai?ii? ni?iia? oaee? c iaaaaaoi iaioith aeiaaeeiith, ye?
iioe?ththoueny c aeoaea iaeeie ao?aoaie. A ?iieaioiaaieo ie?aeao
Y3Fe5O12 ?nio? aeniea (aei 80%) aoaeoeai?noue ia?aoai?aiiy ?iioeueniiai
IA*-neaiaeo a a?aeo/? iai?ii? ni?iia? oaee? (INO). Oe? iniaeeaino?
?iieaioiaaieo ie?aie cae?ci-?o???aiai a?aiaoo aeei?enoiaothoueny aeey
noai?aiiy iiaiai eeano i?eno?i?a ooieoe?iiaeueii? IA*-aeaeo?ii?ee, ui
?iaeoue aeooaeueiith ?ic?iaeo oai?aoe/ieo iniia oe?eaiai?yieaii?
iiaeeo?eaoe?? ?o i?eiiaa?oiaaeo oa??a. Cie?aia, ?icoi?iiy i?ioean?a,
ye? a?aeaoaathoueny a oaeiio oa??, ? iaiao?aeiith ia?aaeoiiaith
io?eiaiiy iaoa??ae?a c iio??aieie o?ce/ieie aeanoeainoyie, ui iio?aao?
aeaeuei?oiai eiiieaeniiai oai?aoe/iiai ? aenia?eiaioaeueiiai
aeine?aeaeaiiy. ??oaiiy aeaii? caaea/? i?aae’yaey? aei?noe? aeiiae aei
iaoiae?a aeine?aeaeaiiy. Aiie iiaeii? aooe ia?oeioth/eie, iiaa?oiaai
/ooeeaeie, ianoe a nia? ye?nio, ? iaia’yceiai e?euee?nio oa?aeoa?enoeee.
Oaeei aeiiaai a?aeiia?aeathoue, cie?aia, iaoiaee eiiaa?n?eii?
aeaeo?iiii? ianaaoa??anueei? niaeo?ineii?? (EAIN) oa iaoaiaoe/iiai
iiaeaethaaiiy, ye? aoee iniiaieie iaoiaeaie aeine?aeaeaiiy i?ae /an
aeeiiaiiy aeaii? ?iaioe.

Ca’ycie ?iaioe c iaoeiaeie i?ia?aiaie, ieaiaie, oaiaie . ?iaioa aeeiiaia
a oiae? ?ic?iaee iaoeiaeo i?ia?ai Iaoe?iiaeueii? Aeaaeai?? iaoe Oe?a?ie
oa aeine?aeaeaiue, iia’ycaieo ?c iaoeiaith oaiaoeeith I?i?noa?noaa
ina?oe Oe?a?ie.

Iaoa ? caaea/? aeine?aeaeaiiy. Iniiaiith iaoith aeaii? ?iaioe aoei
aea/aiiy ci?ie o?ce/ieo ia?aiao??a iiaeeo?eiaaieo aiane?aeie
?iieaioaoe?? eaaeeo ? aaaeeeo ?ii?a i?eiiaa?oiaaeo iaiaeii??aeieo oa??a
ai?oaen?eieo oa?eo-a?aiaoiaeo ie?aie iaoiaeaie iaoaiaoe/iiai
iiaeaethaaiiy oa eiiaa?n?eii? aeaeo?iiii? ianaaoa??anueei?
niaeo?ineii??.

I?e i?iaaaeaii? aenia?eiaioaeueieo aeine?aeaeaiue ? oai?aoe/ieo
?ic?aooie?a ae??ooaaeenue oae? eiie?aoi? iaoeia? caaea/?:

1.Aea?? oa ?ic?iaea iaoiae?a oai?aoe/iiai ?ic?aooieo i?ioean?a, ye?
a?aeaoaathoueny i?e ?iieaioaoe?? eaaeeo oa aaaeeeo ?ii?a a
ai?oaen?aeuei? ie?aee cae?ci-?o???aiai a?aiaoo.

2.Canoinoaaiiy iaoiae?a iaoaiaoe/iiai iiaeaethaaiiy aeey ?ic?aooie?a
i?io?e?a ?iieaioaoe??, i?io?e?a ci?uaieo ?ii?a iao?eoe?, aonoeie
eiao?oe??io?a ci?uaiiy, yaea?ieo oa aeaeo?iiieo aia?aaoe/ieo ao?ao,
ia?oeo /ioe?ueio iiiaio?a ?iciiae?eo ?iieaioiaaieo ?ii?a, aonoeie
aoiiieo c?oeiaiue, ye? oa?aeoa?ecothoue i?ioean ?iiii? ?iieaioaoe?? a
iiiie?enoae?/i? ie?aee Y3Fe5O12/Gd3Ga5O12.

3.?icaeoie iaoiae?a iaoaiaoe/ii? ia?iaee aenia?eiaioaeueieo eiiaa?n?eieo
aeaeo?iiieo ianaaoa??anueeeo niaeo??a cae?ca a?ae C?A- no?oeoo?.

4.Aecia/aiiy oa?aeoa?ieo iniaeeainoae iaoai?cio iiaeeo?eaoe??
i?eiiaa?oiaaiai oa?o o aeiaaeeo ?iieaioaoe?? eaaeeo ? aaaeeeo ?ii?a.

5.Anoaiiaeaiiy aca?iica’yceo ?ic?aoiaaieo ia?aiao??a ?iiii? ?iieaioaoe??
?c e?enoae?/iith ? iaai?oiith no?oeoo?ith i?eiiaa?oiaaeo oa??a
?iieaioiaaieo ie?aie cae?ci-?o???aiai a?aiaoo.

Iaoeiaa iiaecia iaea?aeaieo ?acoeueoao?a. C aeei?enoaiiyi iaoiaeo
Iiioa-Ea?ei ia iia? OI?O?AI ?ic?iaeaii iaoaiaoe/ia caaacia/aiiy aeey
/enaeueiiai ?ic?aooieo aaee/ei, ye? oa?aeoa?ecothoue i?ioean
?iieaioaoe?? aoaeue-yeeo ?ii?a a aaaaoieiiiiiaioi? i?oai? ? aeei?enoaii
eiai aeey ?ic?aooieo ia?aiao??a ia?aeiieo ? aoi?eiieo i?ioean?a ?iiii?
?iieaioaoe?? a ai?oaen?ei? ie?aee cae?ci-?o???aiai a?aiaoo.

?ic?aoiaaii ia?o? /ioe?e iiiaioe ?iciiae?eo ?iieaioiaaieo ?ii?a eenith
oa ieo’yeo a C?A. Aia?oa ia iniia? e?euee?nieo oa?aeoa?enoee c?iaeaii
aeeoa?aioe?aoe?th oei?a aia?aaoe/iiai i?eo ii aeeaei? i?e aoiaeaeaii?
?iieaioiaaieo ?ii?a ieo’yeo a iaoa??ae cae?ci-?o???aiai a?aiaoo.

Aia?oa ?ic?aoiaaii:

– i?io?e? ci?uaieo ?ii?a iao?eoe? a i?eiiaa?oiaaiio oa?? Y3Fe5O12 ii ii
eiaeiiio ni?oo cie?aia;

– aaee/eie i?oaei?o oa iai?oaei?o aia?aaoe/ieo ao?ao a ?iieaioiaaiiio
oa?? C?A;

– i?io?e? aaeain?e, ooai?aieo i?ae /an ?iieaioaoe?? ?ii?a O+ oa As+
aea?aieo aia?a?e a C?A;

– e?euee?ni? oa?aeoa?enoeee i?ioeano ?icieeaiiy iiaa?oiaaiai oa?o
iaoa??aeo cae?ci-?o???aiai a?aiaoo i?ae /an ?iieaioaoe?? aea?aieo ni?o?a
?ii?a;

– i?io?eue aonoeie aia?aiaeae?eaiiy a aeaeo?iiio oa yaea?io i?aenenoaie;

– aonoeio aoiiieo c?oeiaiue, yea ia? i?noea i?i ?iieaioaoe?? ?ii?a O+ oa

As+.

?ic?aoiaaii i?io?e? eiioeaio?aoe?? ?iieaioiaaieo ?ii?a oa aeaeyae
iaeiiai ie?aiiai eaneaaeo aoiiieo c?oeiaiue i?e ?? eenith oa ieo’yeo a
C?A. E??i oiai, ia iia? OI?O?AI ?ic?iaeaii i?ia?aiia caaacia/aiiy aeey
a?aeiiaeaiiy ooieoe?? iaaeoiieeo ia?aiao??a ianaaoa??anueeeo niaeo??a ii
iaoiaeo Oanna-?oaa?/a.

I?aeoe/ia cia/aiiy iaea?aeaieo ?acoeueoao?a.Oai?aoe/i? iaoiaeeee,
?ic?iaeai? a aeena?oaoe?ei?e ?iaio? ia iniia? iaoiaeo Iiioa-Ea?ei,
aeicaieythoue io?eiaoe oi/io ? aenia?eiaioaeueii iaaeinooiio
?ioi?iaoe?th i?i aeaoae? aeeneiaoeaieo i?ioean?a, ye? a?aeaoaathoueny
i?ae /an ?? a i?eiiaa?oiaaiio oa?? aaaaoieiiiiiaioieo iaoa??ae?a, a oiio
/ene? cae?ci-?o???aiai a?aiaoo. Eiioeaioe?y aia?aaoe/ieo oa?aeoa?enoee
?iiii? ?iieaioaoe??, yea ?ic?iaeaia a aeai?e ?iaio?, aea? iiaeeea?noue
aeyaeoe aoaeoe aia?aaoe/ieo i?e?a, ?o oei oa eieae?caoe?th ii oiauei?
?iieaioiaaiiai oa?o, ui iiaeeaeth? ?icoi?iiy iaoai?ci?a
aeaoaeoiooai?aiiy o iueiio.

?ic?aooiie oai?aoe/ieo iniia i?ioean?a, ye? ?i?oe?ththoueny ?iiiei
io/eii, aeicaiey? aea?aoe iioeiaeueiee ?aaeei ?iiii? ?iieaioaoe??
?io?aooieiaei oeyoii c iaoith oe?eani?yiiaaii? iiaeeo?eaoe??
o?ceei-o?i?/ieo aeanoeainoae ii?ooaiiai i?eiiaa?oiaaiai oa?o iaoa??aeo.

Ii?aeiaiiy oai?aoe/ieo ?acoeueoao?a iiaeaethaaiiy c ?ioa?i?aoaoe??th
aenia?eiaioaeueieo EAI niaeo??a aeyaeee iniaeeaino? aieeao ?iiii?
?iieaioaoe?? ia iiaeeo?eaoe?th iaai?oii? i?e?ino?oeoo?e i?eiiaa?oiaaiai
oa?o Y3Fe5O12/Gd3Ga5O12.

Ca /an aeeiiaiiy aeena?oaoe?eii? ?iaioe aeey io?eiaiiy /enaeueieo
?acoeueoao?a iiaeaethaaiiy ?? oa ?ic?aooieo eiiaa?n?eieo aeaeo?iiieo
ianaaoa??anueeeo niaeo??a ?ic?iaeaii eiiieaen i?ia?ai, ye? iiaeia
aeei?enoiaoaaoe aeey ?ic?aooieo iio??aieo aaee/ei aeey aoaeue-yeeo
iaoa??ae?a aeia?eueiiai neeaaeo.

Iieiaeaiiy, ye? aeiinyoueny ia caoeno.

1.Iaoiaeeea ?ic?aooieo ia iniia? iaoiaeo Iiioa-Ea?ei iniiaieo
e?euee?nieo aaee/ei, ye? oa?aeoa?ecothoue i?ioean ?iiii? ?iieaioaoe?? a
i?oai? aaaaoieiiiiiaioiiai neeaaeo.

2. I?e ia?aaeuaii? e?eoe/ieo cia/aiue oaeeo ia?aiao??a, ye aonoeie
aia?aiaeae?eaiiy, aonoeie e?i?eiiai eiao?oe??ioo ci?uaiiy, aonoeie
aoiiieo c?oeiaiue i?e oiia?, ui iana ?iieaioiaaiiai ?iio ? a?eueoith
a?ae iane ie?aieo aoii?a i?oai?, iiaeia iaeiicia/ii noaa?aeaeoaaoe i?i
iayai?noue aia?aaoe/ieo i?e?a o i?eiiaa?oiaaiio oa?? ie?aee a i?ioean?
?iiii? ?iieaioaoe??.

3. I?e ?iieaioaoe?? ?ii?a ieo’yeo c aia?a??th 60 keV o cae?ci-?o???aee
a?aiao aii?o?caoe?y i?eiiaa?oiaaiai oa?o a?aeaoaa?oueny ca ?aooiie
iayaiino? aia?aaoe/ieo i?e?a o?ueio oei?a: ?ii?caoe?eiiai, oaieiaiai oa
i?eo ci?uaiue, ye? ? a?aeiia?aeaeueieie ca iioeiaeaeaiiy e?enoae?/ii?
a?aoee, i?e/iio ae?y eiaeiiai c i?e?a ? aeii?ioth/ith ia oa?aeoa?i?e
aeey iueiai aeeaei?: ?ii?caoe?eiiai i?eo – a i?eiiaa?oiaaiio oa??
oiaueiith 10 ii; i?eo ci?uaiue – a?ae 8 aei 25 ii; oaieiaiai i?eo – aei
60 ii, oiaoi ii an?e aeeaei? ?iieaioiaaiiai oa?o.

Iniaenoee aianie caeiaoaa/a. Ieaioaaiiy iaoiae?a ?ica’ycaiiy iinoaaeaii?
caaea/?; iaoeiaa iaa?oiooaaiiy aea?aieo iaoiae?a oa ia’?eo?a
aeine?aeaeaiiy.

?ic?iaea eiiieaeno iaoaiaoe/ieo i?ia?ai ii iaoiaeeoe? ?ic?aooieo
ia?aiao??a ia?aeiieo ? aoi?eiieo i?ioean?a ?iiii? ?iieaioaoe?? a
cae?ci-?o???aee a?aiao; ?ic?iaea i?aeoiae?a oa aeai?eoi?a ?ic?aooieo
aenia?eiaioaeueieo eiiaa?n?eieo aeaeo?iiieo ianaaoa??anueeeo niaeo??a oa
?ic?aooiie ooieoe?e aonoeie ?iciiae?eo ia?aiao??a iaaeoiiei? aca?iiae??.

I?iaaaeaiiy /enaeueieo ?ic?aooie?a, aiae?c io?eiaieo oai?aoe/ieo oa
aenia?eiaioaeueieo ?acoeueoao?a oa noai?aiiy ocaaaeueithth/eo
oai?aoe/ieo iiaeaeae.

Ai?iaaoe?y ?acoeueoao?a aeena?oaoe??. Iniiai? ?acoeueoaoe ?iaioe
iaaiai?thaaeeny oa aeiiia?aeaeeny ia iaoeiaeo nai?ia?ao, oeieao,
eiioa?aioe?yo, a oiio /ene? ia ??? I?aeia?iaei?e ia?aae? ii
yaea?ii-niaeo?ineii?/ieo aeine?aeaeaiiyo iaaeoiieeo aca?iiae?e
(Aeia-Aoa, 1989); Ananithci?e oeie?-nai?ia?? “Ni?i-oaeeueiaa aeaeo?ii?ea
IA*” (Euea?a, 1989); ? I?aeia?iaeiiio neiiic?oi? “O?ceei-o?i?/ia
iaoai?ea eiiiiceoe?eieo iaoa??ae?a” (?aaii-O?aie?anuee, 1993); ?V
I?aeia?iaei?e eiioa?aioe?? “O?ceea ? oaoiieia?y oiieeo ie?aie”
(?aaii-O?aie?anuee, 1997); ?? I?aeia?iaei?e oeie?-eiioa?aioe?? ”
Physical problem in material science of semiconductors” (*a?i?aoe?,
1997); I?aeia?iaei?e eiioa?aioe?? “INTAS – UCRAINE WORKSHOP on
Condensed Matter Physics” (Euea?a, 1998).

Ioae?eaoe??. Iaoa??aee aeena?oaoe?? aeeeaaeaii a 18 ioae?eaoe?yo, a
oiio /ene? a 7 noaooyo a iaoeiaeo aeo?iaeao ? a 2 noaooyo a ca??ieeao
iaoeiaeo i?aoeue .

No?oeoo?a oa ia’?i ?iaioe. Aeena?oaoe?eia ?iaioa neeaaea?oueny ?c ?c
anooio, 4 ?icae?e?a, aeniiae?a oa nieneo aeei?enoaieo aeaea?ae. Ianya
aeena?oaoe?? 145 noi??iie. Aeena?oaoe?y i?noeoue 53 ?enoiee, 7
oaaeeoeue oa 155 a?ae?ia?ao?/ieo aeaea?ae.

INIIAIEE CI?NO ?IAIOE.

O anooi? iaa?oioiaaii aeooaeuei?noue oaie, noi?ioeueiaaii iaoo ?
caaaeaiiy aeine?aeaeaiiy, a?aecia/aii iaoeiao iiaecio ? i?aeoe/io
oe?ii?noue iaea?aeaieo ?acoeueoao?a, i?eaaaeaii iieiaeaiiy, ye?
aeiinyoueny ia caoeno.

Ia?oee ?icae?e i?noeoue aiae?oe/iee iaeyae e?oa?aoo?e, yeee aena?oeth?
oai?aoe/i? ? aenia?eiaioaeuei? aniaeoe aeine?aeaeoaaii? oaiaoeee o
a?o/eciyi?e oa ca?oa?aei?e iaoeia?e e?oa?aoo??. ?icaeyiooi e?enoae?/io
oa iaai?oio no?oeoo?o ai?oaen?eieo ie?aie C?A oa iiaeeo?eaoe?th
aeanoeainoae i?eiiaa?oiaaiai oa?o aiane?aeie ?iieaioaoe?? ??cieie
ni?oaie ?ii?a. ?nio? o?niee ca’ycie i?ae iiaeeo?eaoe??th aeanoeainoae ?
i?e?ino?oeoo?ieie ia?aoai?aiiyie a i?eiiaa?oiaaeo oa?ao, oiio ia?
aaeeea cia/aiiy aea/aiiy ? ?icoi?iiy aieeao o?ce/ieo i?ioean?a,
aeeeeeaieo ?iieaioaoe??th, ia aeanoeaino? i?eiiaa?oiaaiai oa?o ? ie?aee
C?A. I?e aeinyaiaii? e?eoe/ieo aeic ?iieaioiaaieo ?ii?a
niinoa??aa?oueny aii?o?caoe?y i?eiiaa?oiaaiai oa?o. Ia aeeaey/enue ia
aaeeeo e?euee?noue aeine?aeaeaiue a oe?e aaeoc?, eiie?aoi? iaoai?cie
oeeo yaeu aei oeeo i?? caeeoathoueny ia cian?i c?icoi?eeie, a oiio iaia?
caaaeueii? oai??? aii?o?caoe?? i?e ?? aaaaoiaeaiaioieo e?enoae?a.
Nooi?iue ? oa?aeoa? iioeiaeaeaiue caeaaeeoue a?ae aaaaoueio ia?aiao??a.
Eeaneo?eaoe?th oeeo ci?i ? ?o oi/io i?e?iaeo anoaiiaeoe a caaaeueiiio
aeiaaeeo iaiiaeeeai, oiio a e?oa?aoo?? iaaiaeyoueny oa?aeoa?enoeee
iioeiaeaeaiiai oa?o aeey eiaeiiai eiie?aoiiai ?aaeeio ?? ? c’yniaothoue
aeii?ioth/? iaoai?cie.

Anoaiiaeaii, ui i?e ii?ii?iaii? iaoa??aeo iao?eoe? eaaeeie ?iiaie i?e
iaaaeeeeo aeicao ( (6/0.3-1) i?e 1.1016ni-2 i?ecaiaeeoue aei ci?ie aaeaioiino? cae?ca o ia?ao?aeiiio
oa?? a caeaaeiino? a?ae e?enoaeia?ao?/iiai iieiaeaiiy. Cae?ci a
ieoa-iieiaeaii? a ?acoeueoao? aenieiaeiciai? ?? eeniai /anoeiai
iiieaeo? naith aaeaioi?noue c 3 aei 2 , a cae?ci a oao?a-iieiaeaii?
caeeoa?oueny o?ueioaaeaioiei.

10. I?e ?iieaioaoe?? oyaeeeie ?iiaie As+ aenieiaeiciaa ?iieaioaoe?y ia
i?eaiaeeoue aei ?icuaieaiiy ia?aiaai?oiiai aeoaeaoo a ianaaoa??anueeeo
niaeo?ao, ui, i/aaeaeii, iaoiiaeaii oei, ui ia?ao?ae e?enoae?/ii?
a?aoee a aii?oiee noai i?ioiaeeoue ia a ?acoeueoao? iaeiie/aiiy oa
ceeooy oi/eiaeo aeaoaeo?a, a a ?acoeueoao? ooai?aiiy ie?aieo aii?oieo
cii a iaeano? eiaeiiai o?aeo cie?aia aiane?aeie aeieeiaiiy aia?aaoe/ieo
i?e?a.

Iniiaiee ci?no ?iaioe aeeeaaeaii a ioae?eaoe?yo:

1. Inoaoee/oe A.E., Iueuiea A.I., Naieaae/ A.E., Oaaei?ea A.Ae.,
Ai?ii/ae (Oea/oe) I.I. No?oeoo?iia e niaeo?aeueiia enneaaeiaaiea
eiieaioe?iaaiiiai ai?ii aeaeaci-eoo?eaaiai a?aiaoa. Ienueia a AEOO,
1988.- o.14, a.5.- n.466-469.

2. Inoaoee/oe A.E., Oaaei?ea A.Ae., Ieaeiee A.A., Coaei A.E., Ai?ii/ae
(Oea/oe) I.I. No?oeoo?iia e iaaieoiia ?acoii?yaei/aiea a
oa??eo-a?aiaoiauo ieaieao, eiieaioe?iaaiiuo eiiaie ooi?a. OOO,1990.-
o.32, ?11.- n.3422-3424.

3. Inoaoee/oe A.E., Oea/oe A.I., Ai?ii/ae (Oea/oe) I.I. I aiciiaeiii
iaoaiecia aii?oecaoeee iiaa?oiinoe oa??eo-a?aiaoiauo ieaiie aneaaenoaea
eiiiie eiieaioaoeee. Iaoaeeioeceea e iiaaeoea oaoiieiaee, 1994.-o.16,
?8.- n.51-54.

4. Inoao?e/oe A.E., Ie?eiee A.A., Ieeei?a A.I., Ai?ii/ae (Oea/oe) I.I.,
Aeneiaiaenueeee I.E., Naiai A.O., Aoiaithe N.Ae. E?enoae?/ia ? iaai?oia
no?oeoo?a ?iieaioiaaieo ?iiaie ai?o ie?aie cae?ci-?o???aiai a?aiaoo aei
? i?ney a?aeiaeo. Oe?. o?c. aeo?iae, 1994.-o.39, ?7,8.- n.848-852.

5. Oea/oe I.I., Oea/oe A.I. Iannaaoa??anuee? aeine?aeaeaiiy
cae?ci-?o???aiai a?aiaoo, ?iieaioiaaiiai aaaeeeie ?iiaie. OOAE,1999.-
o.44, ?3.- n.391-393.

6. Tkachuk O.M., Tkachuk V.M. The Local Magnetic Y3Fe5O12 Structure
Implanted by As Ions. Phys. Stat. Sol. (a), 1999.-v.172.-p.477-484.

7. A.E.Inoao?e/oe, I.I.Oea/oe, A.I.Oea/oe, A.Ae.Oaaei??a. Iaoai?ci
oi?ioaaiiy aoaeoeaieo iaaiaoieo iie?a oa ?ciia?iiai cnoao ia yae?ao Fe57
a ?o???aiio oa?eo-a?aiao? i?e eiii?e ?iieaioaoe?? eenith. AEo?iae
o?ce/ieo aeine?aeaeaiue, 1999.-o.3, ?1.-n.113-116.

8. A.I.Oea/oe, I.I.Oea/oe. Iiaeaeueia aeine?aeaeaiiy i?ioean?a ?iiii?
?iieaioaoe?? a aaaaoieiiiiiaioi? no?oeoo?e. A?niee I?eea?iaonueeiai
oi?aa?neoaoo. I?e?iaeie/i-iaoaiaoe/i? iaoee.-1995.-a.1.-n.129-131.

9. I.I.Oea/oe, A.I.Oea/oe, A.?.ssai?nueeee. Iniaeeaino? oi?ioaaiiy
iaai?oii? i?e?ino?oeoo?e ie?aie cae?ci-?o???aiai a?aiaoo, i?aeaeaieo
?iiiiio ii?ii?iaiith. A?niee I?eea?iaonueeiai oi?aa?neoaoo.
I?e?iaeie/i-iaoaiaoe/i? iaoee. –1996.- a.2.-n.109-118.

Aiioaoe?y. Oea/oe I.I. Iiaeeo?eaoeey no?oeoo?e i?eiiaa?oiaaiai oa?o
ai?oaen?eieo ie?aie Y3Fe5O12/Gd3Ga5O12 i?e ?iii?e
?iieaioaoe??.-?oeiien.

Aeena?oaoe?y ia caeiaoooy iaoeiaiai nooiaiy eaiaeeaeaoa
o?ceei-iaoaiaoe/ieo iaoe ca niaoe?aeuei?noth 01.04.18 – o?ceea ? o?i?y
iiaa?oi?. –I?eea?iaonueeee oi?aa?neoao, ?aaii-O?aie?anuee, 1999.

A aeena?oaoe?? ia iniia? iaoiaeo Iiioa-Ea?ei ?ic?iaeaii oai?aoe/iee
i?aeo?ae aei iiaeaethaaiiy ?iiii? ?iieaioaoe?? a oa?eo-a?aiaoia?
no?oeoo?e oa ?ic?aoiaaii iniiai? aia?aaoe/i? oa?aeoa?enoeee ? i?io?e?
?iciiae?e?a i?e ?iieaioaoe?? ?ii?a I+ c aia?a??th 90 eaA oa ?ii?a As+ c
aia?a??th 60 eaA a iiiie?enoae?/i? ai?oaen?ei? oa?eo-a?aiaoia? ie?aee
Y3Fe5O12/Gd3Ga5O12. Aiae?c ?acoeueoao?a iiaeaeueieo aeine?aeaeaiue
aeacaieo ?aaeei?a ?? aeaa iiaeeea?noue aecia/eoe aeii?ioth/? iaoai?cie
aeaoaeoiooai?aiiy a i?eiiaa?oiaaiio oa?? ie?aie C?A. Anoaiiaeaii, ui
i?e ?? As+ a ii?ooaiiio oa?? noai?ththoueny oiiae aeey ?nioaaiiy
aia?aaoe/ieo i?e?a o?ueio oei?a – oaieiaiai, ?ii?caoe?eiiai ? i?eo
ci?uaiue – eiaeai c yeeo ia? i?noea ia iaai?e aeeaei?. Aenia?eiaioaeuei?
eiiaa?n?ei? aeaeo?iii? ianaaoa??anuee? niaeo?e aeo?aeieo oa
?iieaioiaaieo eeniai ? ieo’yeii ie?aie Y3Fe5O12 aeyaeee iniaeeaino?
ci?ie e?enoae?/ii? ? iaai?oii? i?e?ino??eoo?e i?eiiaa?oiaaiai oa?o, ye?
ei?aeththoue ?c iiaeaeueieie aeine?aeaeaiiyie.

Eeth/ia? neiaa: iaoiae Iiioa-Ea?ei, ?iiia ?iieaioaoe?y, i?eiiaa?oiaaee
oa?, eiiaa?n?eia aeaeo?iiia ianaaoa??anueea niaeo?ineii?y,
cae?ci-?o???aee a?aiao, aia?aaoe/iee i?e.

Aiiioaoeey .Oea/oe I.I. Iiaeeoeeaoeey no?oeoo?u i?eiiaa?oiinoiiai neiy
yieoaeneaeueiuo ieaiie Y3Fe5O12/Gd3Ga5O12 i?e eiiiie
eiieaioaoeee.-?oeiienue.

Aeenna?oaoeey ia nieneaiea o/aiie noaiaie eaiaeeaeaoa
oeceei-iaoaiaoe/aneeo iaoe ii niaoeeaeueiinoe 01.04.18 – oeceee e oeiey
iiaa?oiinoe. I?eea?iaoneee oieaa?neoao, Eaaii-O?aieiane, 1999.

A aeenna?oaoeee ia iniiaa iaoiaea Iiioa-Ea?ei ?ac?aaioai oai?aoe/aneee
iiaeoiae e iiaeaee?iaaieth eiiiie eiieaioaoeee (EE) a oa??eo-a?aiaoiaua
no?oeoo?u. N iiiiuueth ?ac?aaioaiiuo i?ia?aii ?an/eoaiu iniiaiua
yia?aaoe/aneea oa?aeoa?enoeee e i?ioeee ?ani?aaeaeaiee i?e eiieaioaoeee
eiiia I+ n yia?aeae 90 eyA e eiiia As+ n yia?aeae 60 eyA a
iiiie?enoaeee/aneea yieoaeneaeueiua oa?eo-a?aiaoiaua ieaiee
Y3Fe5O12/Gd3Ga5O12. Oai?aoe/aneea ?an/aou iieacaee, /oi i?e EE
eenei?iaea ia?aciaaiea aeaoaeoia iaeaieaa eioaineaii i?ienoiaeeo ia ia
iiaa?oiinoe, a a neia oieueiie 60 ii, ?aniieiaeaiiii ia aeoaeia 70 ii
io iiaa?oiinoe ia?acoea, e ia eo ia?aciaaiea ?anoiaeoaony 53% yia?aee
EE. Oieueia ia?ooaiiiai neiy ninoaaeyao 300 ii. I?e eiieaioaoeee
ieoueyea aeaoaeou ia?acothony, a iniiaiii, a oiieii i?eiiaa?oiinoiii
neia oieueiie 10 ii iaiin?aaenoaaiii o iiaa?oiinoe, e ia eo ia?aciaaiea
eniieuecoaony 88% yia?aee eiieaioaoeee. Oieueia ia?ooaiiiai neiy ?aaia
60 ii.

I?ioeee eiieaioe?iaaiiie i?eiane oa?aeoa?ecothony oaeeie aaee/eiaie:
i?e EE I+: Rp=144 ii, Rp=56 ii; i?e ee As+ Rp=24 ii, Rp=10.5ii e
ei??aee?otho n yenia?eiaioaeueii ecia?aiiuie i?ioeeyie iaoiaeii
aoi?e/iie eiiiie iann-niaeo?iiao?ee. I?ioeee niauaiiuo eiiia iao?eoeu a
iaieo neo/ayo iaoiaeyony ianeieueei aeeaea e iiaa?oiinoe ia?acoea.

?an/ao eaneaaeia aoiiiuo noieeiiaaiee iieacae, /oi 1 eii eenei?iaea a
n?aaeiai iiaeao nianoeoue 740 aoiiia AEEA, a 1 eii iuoueyea – aei 1000
aoiiia, eioi?ua, a naith i/a?aaeue, eieoeee?otho aoi?e/iua eaneaaeu.
Aeey aiciiaeiinoe n?aaiaiey yooaeoia EE ?aciuie eiiaie auea ?an/eoaia
eeiaeiay ieioiinoue eiyooeoeeaioa niauaiey Wh, aaee/eia eioi?iai
ninoaaeea 3 eiiii e 16eiiii aeey O+ e As+ niioaaonoaaiii. Iineaaeiaa
cia/aiea yaeyaony aaee/eiie ii?yaeea eeiaeiie ieioiinoe aoiiiie AEEA a
iai?aaeaiee [111].

O?iaaiue iia?aaeaeaiey i?eiiaa?oiinoiiai neiy oaeaea oa?aeoa?ecoaony
ieioiinoueth aoiiiuo noieeiiaaiee n a ia?ooaiiii neia a n?aaiaiee n
aoiiiie ieioiinoueth iaoa?eaea iao?eoeu, oi anoue iaoa?eaea AEEA, ?aaiie
8.4.1022 ni-3. Aaee/eia n yaeyaony ooieoeeae aeicu EE e i?e
eiieaioaoeee As+ aeicaie auoa D= 2.1014 ni-2 cia/eoaeueii i?aauoaao
aoiiioth ieioiinoue a?aiaoa. ?an/aou iieacaee, /oi oaeea eaneaaeu
aoiiiuo noieeiiaaiee oaea iaeuecy n/eoaoue eeiaeiuie, a ieo i?ienoiaeyo
ea/anoaaiiua eciaiaiey, oi anoue i?aaaee?otho yia?aaoe/aneea ieee.

Onoaiiaeaii, /oi i?e EE As+ a ia?ooaiiii neia nicaeathony oneiaey aeey
nouanoaiaaiey yia?aaoe/aneeo ieeia o?ao oeiia – oaieiaiai,
eiiecaoeeiiiiai e ieea niauaiee – eaaeaeue ec eioi?uo oa?aeoa?ai aeey
ii?aaeaeaiiie aeoaeiu. Yenia?eiaioaeueiua eiiaa?neiiiua yeaeo?iiiua
iannaaoy?ianeea niaeo?u enoiaeiuo e eiieaioe?iaaiiuo eenei?iaeii e
iuoueyeii ieaiie Y3Fe5O12 iieacaee iniaaiiinoe eciaiaiey e?enoaeee/aneie
e iaaieoiie iee?ino?oeoo?u i?eiiaa?oiinoiiai neiy, eioi?ua ei??aee?otho
n iiaeaeueiuie enneaaeiaaieyie. Onoaiiaeaii, /oi aeey aeic EE I+,
iaiueoa 6.1013 ni-2 iaaieoiia oii?yaei/aiea en/acaao aneaaenoaea
eneaaeaiey aaiiao?ee einaaiiiai iaiaiiiiai acaeiiaeaenoaey a oeaii/ea
Fea3+ – O2- – Fed3+, ?ac?uaa oeaii/ee e oaaee/aiey ?annoiyiey iaaeaeo
iaaieoiuie eiiaie a ?acoeueoaoa aeaoi?iaoeee ?aoaoee. Iaeneiaeueiia
?ac?ooaiea e?enoaee/aneie ?aoaoee eiaao ianoi ia aeoaeia 100 ii.
Iiaeii i?aaeiieiaeeoue, /oi ca?iaeaeaiea ia?aiaaieoiie oacu i?ienoiaeeo
ia oaeie aea aeoaeia. N iaai?ii aeicu i?ienoiaeeo aii?oecaoeey
iiaa?oiinoiiai neiy, en/aciiaaiea iaaieoiiai oii?yaei/aiey e ?aceee ?ino
eioaineaiinoe aeoaeaoa a EYIN aeaeaca, eioi?ue niioaaonoaoao
ia?aiaaieoiie oaca, ia?acothuaeny ca aeaoiy iaoaieciaie: eneaaeaiey e
?ac?ooaiey e?enoaeee/aneie ?aoaoee.

I?e EE eenei?iaeii iaaethaeaaony naeaeoeaiia ?ac?ooaiea aieiiiie e
eaoeiiiie iiae?aoaoie. Aunieiaeiciaay EE nii?iaiaeaeaaony iiyaeaieai
eiiia aeaeaca n aaeaioiinoueth 2.

EE ieoueyeii ii?eaiaeeo e ?ac?ooaieth iaaieoiiai oii?yaei/aiey a
?acoeueoaoa ia?aciaaiey ioaeaeueiuo aii?oiuo cii e eneaaeaiey
eieaeueiiai ie?oaeaiey eiiia Fe3+ oi/a/iuie ?aaeeaoeeiiiuie aeaoaeoaie.
?an/aou iieacaee, /oi iaeiiio eiieaioe?iaaiiiio eiio As+ niioaaonoaoao
aii?oiay iaeanoue iauaiii a 500 aoiiia AEEA, eioi?ua neoaeao ianoii
noiea oi/a/iuo ?aaeeaoeeiiiuo aeaoaeoia. Eo eiioeaio?aoeey i?e aeica
8.1013 ni-2 a iiaa?oiinoiii oa?a 40 ii ninoaaeyao 8%. I?e aeicao EE
ieoueyea ii?yaeea 2-4.1014 ni-2 e auoa i?ienoiaeeo eciaiaiea iaoaiecia
aeaoaeoiia?aciaaiey. Ioaeaeueiua aii?oiua iaeanoe acaeiiaeaenoaotho
iaaeaeo niaie, a ?aaeeaoeeiiiua aeaoaeou neeueii aeaoi?ie?otho
e?enoaeee/aneoth ?aoaoeo (a/a 1.5%). Oieueia aii?oiiai neiy i?e oaeeo
aeicao, niaeanii i?ecaaaeaiiui ?an/aoai, ninoaaeyao 40 ii, n oaeeo
aeoaei auoiaeeo ieiei 45% eiiaa?neiiiuo yeaeo?iiia, /oi ei??aee?oao n
aaee/eiie ia?aiaaieoiie oacu. Iineaaeiyy ninoaaeyao i?e yoii 40% e n
iaai?ii aeicu ia oaaee/eaaaony.

Aunieiaeiciaay EE iuoueyeii ia i?eaiaeeo e ?anuaieaieth ia?aiaaieoiiai
aeoaeaoa, eae a neo/aa EE eenei?iaeii. Yoi iiaeao auoue naycaii n
?acee/iuie iaoaieciaie aii?oecaoeee i?eiiaa?oiinoiiai neiy: iaeiieaiey e
iauaaeeiaiey oi/a/iuo ?aaeeaoeeiiiuo aeaoaeoia i?e eiieaioaoeee I+ e
ia?aciaaiey aii?oiuo iaeanoae aie?oa eaaeaeiai o?aea eiia aneaaenoaea
ianooieaiey yia?aaoe/aneeo ieeia i?e eiieaioaoeee As+.

Eeth/aaua neiaa: iaoiae Iiioa-Ea?ei, eiiiay eiieaioaoeey,
i?eiiaa?oiinoiue neie, eiiaa?neiiiay yeaeo?iiiay iannaaoy?ianeay
niaeo?ineiiey, aeaeaci-eoo?eaaue a?aiao, yia?aaoe/aneee iee.

Summary. Tkachuk O.M. Modification of the surface layer structure of
the Y3Fe5O12/Gd3Ga5O12 epitaxial film under the ion implantation.

The dissertation for the Candidate Degree in Physics and Mathematics
Speciality 01.04.18 – Physics and Chemistry of surface. Precarpathian
University, 1999, Ivano-Frankivsk.

In the dissertation on the base of Monte-Carlo method has been
elaborated the theoretical approach of the ion implantation
modelling in the ferrit-garnet structures and calculated the energy
characteristics and distribution profiles after ion implantation O+ with
90 keV energy and As+ with 60 keV energy in the monocrystalline
epitaxial ferrit-garnet films Y3Fe5O12/Gd3Ga5O12. The data analysis of
model investigations of ion implantation regimes allowed to
determine of dominant mechanisms of the defects in the YIG film surface
layers.

During the As+ implantation in the surface layer has been created
the conditions for the existence the energy peaks of three types –
thermal, ionizing and displacing peaks. Each of this peaks take place
on the certain depth. The experimental conversion electron mossbauer
spectra of the source and implanted by O+ and As+ samples of the
Y3Fe5O12 films show the peculiarities in the changes of the
crystalline and magnetic microstructure of the surfaces layer, which
correlate with the model investigations.

Key words: Monte-Carlo method, ion implantation, surface layer,
conversion electron mossbauer spectroscopy, ittrium-iron garnet, energy
peaks.

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