IAOe?IIAEUeIA AEAAeAI?ss IAOE OE?A?IE

?INOEOOO O?CEEE

IOCAIEI IEAIA IEAENAIAe??AIA

OAeE 621.315.592.

Aeine?aeaeaiiy i?ioean?a ooai?aiiy oa

a?aeiaeo oa?iiaeaoaeo?a a e?aii??

01.04.07- o?ceea oaa?aeiai o?ea

AAOI?AOA?AO

aeena?oaoe?? ia caeiaoooy iaoeiaiai nooiaiy

eaiaeeaeaoa o?ceei- iaoaiaoe/ieo iaoe

Ee?a -1999

Aeena?oaoe??th ? ?oeiien

?iaioa aeeiiaia o a?aeae?e? o?ceee ?aae?aoe?eieo i?ioean?a ?inoeoooo
o?ceee IAI Oe?a?ie

Iaoeiaee ea??aiee: aeieoi? o?c.-iao. iaoe, E?ae/einueeee Aiaoie?e
Ieeieaeiae/, ?inoeooo o?ceee IAI Oe?a?ie,

a.i. caa?aeoaa/a a?aeae?eii

Io?oe?ei? iiiiaioe : aeieoi? o?c.-iao. iaoe, i?ioani?, Aaae/ A?e?e
Iaeneiiae/, ?inoeooo o?ceee iai?ai?ia?aeiee?a IAI Oe?a?ie, caa?aeoaa/
a?aeae?eii.

aeieoi? o?c.-iao. iaoe, i?ioani?, Aeaieeue/aiei Ai?en Ieaenaiae?iae/,
?inoeooo o?ceee IAI Oe?a?ie, i?ia?aeiee iaoeiaee ni?a?ia?oiee.

I?ia?aeia onoaiiaa: Ee?anueeee iaoe?iiaeueiee oi?aa?neoao
?i.O.A.Oaa/aiea, ?aae?io?ce/iee oaeoeueoao, eaoaae?a iai?ai?ia?aeieeiai?
aeaeo?ii?ee

Caoeno a?aeaoaeaoueny “25” eenoiiaaea 1999 ?. i 16 aiae. ia can?aeaii?
niaoe?ae?ciaaii? a/aii? ?aaee Ae 26.159.01 a ?inoeooo? o?ceee IAI
Oe?a?ie ca aae?anith: 252028, Ee?a — 28, i?. Iaoee, ? 46.

Aaoi?aoa?ao ?ic?neaiee “25” aeiaoiy 1999 ?.

C aeena?oaoe??th iiaeia iciaeiieoenue a a?ae?ioaoe? ?inoeoooo o?ceee.

A/aiee nae?aoa?

niaoe?ae?ciaaii? a/aii? ?aaee
?uoe A.A.

CAAAEUeIA OA?AEOA?ENOEEA ?IAIOE

Aeooaeuei?noue oaie Oniiaiei iaoa??aeii no/anii?
iai?ai?ia?aeieeiai? i?e?iaeaeo?ii?ee ? e?aii?e. Ae?iaieoeoai i?aeoe/ii
on?o e?aii??aeo i?eeaae?a oa ?ioaa?aeueieo noai oei aai ?ioei /eiii
iia’ycaia c oa?i?/iith ia?iaeith. Oiio, aeineoue aaaeeeai
anoaiiaeoe, ye? ci?ie a?aeaoaathoueny a Si a i?ioean? oa?i?/iiai
aieeao, oae ye i?ia??aaiiy e?aii?th (iaa?oue ei?ioei/ania ? i?e
ii??aiyii iaaenieeo oaiia?aoo?ao) iiaea nooo?ai ci?ieoe eiai
aeaeo?e/i? ia?aiao?e, noai?eoe iia? no?oeoo?i? aeaoaeoe oa i?ecaanoe
aei ia?aaoaeiae oeo, ui aaea ?niothoue o aeo?aeiiio iaoa??ae?. Aeey
e?aii?th, ae?iuaiiai iaoiaeii *io?aeuenueeiai, oey i?iaeaia ia?
iniaeeaa cia/aiiy a ca’yceo c i?aoeei?oaoe??th iniiaii? oiiiai?
aeii?oee — eenith. Ia?aaeuoth/e a a?eueoino? i?aeoe/ii aaaeeeaeo
aeiaaeeao ca eiioeaio?aoe??th an? ?io? aeii?oee, naia eenaiue aecia/a?
ci?io aeanoeainoae Si a i?ioean? oa?iiia?iaie (OI) oa i?ae ii?ii?iaiiyi.
Oea ca’ycaii c oei, ui aoiie eenith, aeaeo?e/ii iaeo?aeuei? o aeo?aeiiio
noai?, aoiaeyoue aei neeaaeo iniiaieo oa?ii- oa ?aae?aoe?eieo aeaoaeo?a
Si (oa?iiaeiii??a, A-oeaio??a).

E??i oiai, i?e ae?iuoaaii? e?enoae?a iaoiaeii *io?aeuenueeiai ?nio?
oe?eee ?yae i?e/ei, ui i?eaiaeyoue aei iiyae i?e?ineii?/ieo oeoeooaoe?e
aeii?oee eenith (IOE) a ?o ia’?i?. ?nioaaiiy oaeeo i?e?ineii?/ieo
iaiaeii??aeiinoae iaaaaeaia, iniaeeai eiee IOE noathoue ni?a?ici??ieie c
?ici??aie aeaiaio?a i?e?inoai. Iaiaeii??aeiino? i?inoi?iai?
eieae?caoe?? eenith a e?aii?? c ?ici??aie iaioa 10 iei (aeiaaeeia oaee?
iioe/iiai iiaeeiaiiy aoiiaie eenith a Si) ? iaaeinooiieie aeey
aeine?aeaeaiiy o?aaeeoe?eieie i?yieie iaoiaeaie. I?ioa IOE a?ae?a?athoue
nooo?ao ?ieue a i?ioeanao ooai?aiiy, cieuaiiy oa aeayeeo aeanoeainoyo
eeniaai?nieo oa?ii- oa ?aae?aoe?eieo aeaoaeo?a. Oeei coiiaeaii
i?aeoe/iee ?ioa?an aeine?aeeoe caeaaei?noue oaiio ?o aaia?aoe??,
aeenioe?aoe?? aai ia?aaoaeiae a?ae i?inoi?iaiai ?iciiae?eo oa oaciaiai
noaio eenith, iayaiino? ?ioeo aeii?oie, aeanieo no?oeoo?ieo oa
?aae?aoe?eieo aeaoaeo?a. Iniaeea?noth aeaii? ?iaioe ? ni?iaa io?eiaoe
iiao ?ioi?iaoe?th i?i i?e?iaeo oa aeanoeaino? oa?iiaeaoaeo?a a Si c
aiae?co aieeao iiia?aaeiuei? oa?iiia?iaee oa ii?ii?iaiiy naia ia
e?iaoeeo ooai?aiiy eeniaaeo aeaoaeo?a, aaiethoe?th ?o aeanoeainoae a
oiae? iaeiie/aiiy ? cieuaiiy. Oea ? ia?aaeoiiaeei iaoo oa eiie?aoi?
iai?yiee ?? ?aae?caoe?? a aeena?oaoe?ei?e ?iaio?.

Ca’ycie ?iaioe c iaoeiaeie i?ia?aiaie, oaiaie. Aeena?oaoe?ei?
aeine?aeaeaiiy ca’ycai? c ianooiieie oaiaie iaoeiai-aeine?aeii? ?iaioe
a?aeae?eo o?ceee ?aae?aoe?eieo i?ioean?a ?inoeoooo IAI Oe?a?ie:
“Aeine?aeaeaiiy o?ce/ieo aeanoeainoae ?aae?aoe?eieo oa oa?i?/ieo
aeaoaeo?a a ia’?i? ? ia iiaa?oi? iaiaoaeaaeo e?enoae?a ia?niaeoeaii?
i?e?i- oa iioiaeaeo?ii?ee”, “Aeine?aeaeaiiy i?ioean?a aca?iiae??
?aae?aoe?eieo, oaoiieia?/ieo ? oa?i?/ieo aeaoaeo?a a e?aii??, aa?iai??,
noi?oao Si-Ge oa a i?e?iaeaeo?iiieo i?eeaaeao ia ?o iniia?”.

Iaoa ?iaioe — io?eiaoe iiao ?ioi?iaoe?th i?i i?e?iaeo oa aeanoeaino?
eeniaaeo oa?iiaeaoaeo?a, aecia/eoe iiaeeea? caniae i?aeaeuaiiy
oa?iinoaa?eueiino? e?aii??aeo iaoa??ae?a aeey oaa?aeio?eueii?
aeaeo?ii?ee.

Iniiai? iaoeia? caaaeaiiy aeine?aeaeaiue.

1. Aeine?aeaeaiiy aieeao iiia?aaeiuei? oa?iiia?iaee ia e?iaoeeo
aaia?aoe?? oa a?aeiaeo eeniaaeo oa?iiaeiii??a a iiiie?enoae?/iiio Si.

2.Aeine?aeaeaiiy e?iaoeee iaeiie/aiiy aeaeo?e/ii aeoeaieo oa?iiaeaoaeo?a
i?e ??cieo oaiia?aoo?ao. Aecia/aiiy oa?aeoa?enoee oa?iiaeaoaeo?a, ui
ooai?ththoueny i?e oaiia?aoo?? i?i?ioio oaiia aaia?aoe?? oa?iiaeiii??a.

3. Ii??aiyeueia aeine?aeaeaiiy e?iaoeee ?iciaaeo oaa?aeiai ?ic/eio
aeii?oee eenith oa ci?ie aioo??oi?o i?oaeieo iai?oaeaiue (AII) a?aoee Si
c o?eaae?noth aenieioaiia?aoo?ii? oa?iiia?iaee.

Iaoeiaa iiaecia io?eiaieo ?acoeueoao?a:

1. Aia?oa aenia?eiaioaeueii aeyaeaii ca?eueoaiiy /anoioiiai oaeoi?a ( oa
aia?a?? aeoeaaoe?? a?aeiaeo Aa a c?aceao, ui i?ieoee iiia?aaeith
aenieioaiia?aoo?io oa?iiia?iaeo. Cai?iiiiiaaii ?ioa?i?aoaoe?th oeueiai
aoaeoo, i?iaaaeaii ioe?ieo e?i?eieo ?ici???a i?e?ioeoeooaoe?e aeii?oee
eenith ia iniia? aiae?co e?iaoeee iaeiie/aiiy oa a?aeiaeo OAe-1.

2. Aia?oa aeyaeaia ia?aaoaeiaa oa?iiaeiii??a a Si a i?ioean? a?aeiaeo
i?e 5300N, a oaeiae aiiiaeueii iecueeee ia?a??c caoiieaiiy aeaeo?ii?a
ieie. Cai?iiiiiaaii iiyniaiiy oeueiai oaeoo oa ia/ooeeaino? aei ae??
?ii?coth/i? ?aae?aoe??, yea a?oioo?oueny ia a?aooaaii? aeaeo?inoaoe/iiai
ae?aioaaiiy aca?iiae?? neoi/aiue oa?iiaeiii??a c ?ooiieie ca?yaeaie.

3.Aeine?aeaeaii aieea oa?iiia?iaee i?e 10500 N ia aioo??oi? i?oaei?
iai?oaeaiiy a a?aooe? Si. Aia?oa anoaiiaeaii e?euee?niee aca?iica’ycie
i?ae ci?iith AII oa ?ici??aie /anoeiie SiO2 -oace.

I?aeoe/ia cia/aiiy iaea?aeaieo ?acoeueoao?a.

Io?eiai? a aeena?oaoe?ei?e ?iaio? aenia?eiaioaeuei? ?acoeueoaoe
iaiao?aei? aeey ?ic?iaee i?iieneiaiai niiniao eiio?iethaaiiy
iaiaeii??aeiinoae (c ?ici??aie 0.1-10 i?e?ii) ?iciiae?eo aeii?oee
eenith, ye? ia aeyaeythoueny o?aaeeoe?eieie iaoiaeaie ao?aeiiai
eiio?ieth. E?ioeaaei ?acoeueoaoii ai?iaaaeaeaiiy oaeeo oaoiieia?e aoaea
cia/ia ciaioaiiy a?aeo a ae?iaieoeoa? i?eeaae?a i?e?iaeaeo?ii?ee,
iie?ioaiiy noaa?eueiinoe ?o ?iaioe oa oaeaeeiae??.

Iniaenoee aianie caeiaoaa/a a iaea?aeaiiy iaoeiaeo aeaieo, aeeeaaeaieo
o aeena?oaoe??, iieyaa? a aeeiiaii? aenia?eiaioaeueieo aeine?aeaeaiue,
?o ia?iaoe? oa o/ano? a oai?aoe/iiio aiae?c?. A ?iaioao, aeeiiaieo ?acii
?c ni?aaaoi?aie ? aeeth/aieo aei aeena?oaoe??, aaoi? aecia/ea ci?io
ia?aiao??a a?aeiaeo eeniaaeo oa?iiaeiii??a, acya o/anoue a ?ic?iaoe?
iaoaiaoe/ii? iiaeae? i?ioeano a?aeiaeo oa?iiaeiii??a a iiia?aaeiuei
oa?iiia?iaeaieo c?aceao, yea aeicaiey? iiynieoe aeyaeaio ci?io [3].
Noi?ioethaaa iaoai?ci aiiiaeueii iaei? aoaeoeaiino? aca?iiae?? OAe-530 c
a?eueieie iin?yie [1,4-7], anoaiiaea e?euee?niee ca’ycie i?ae c?inoaiiyi
aioo??oi?o i?oaeieo iai?oaeaiue a?aoee e?aii?th oa ?ici??aie /anoeiie
SiO2- oace [2]. Aeniiaee ? iieiaeaiiy noi?ioeueiaai? aaoi?ii iniaenoi.

Ai?iaaoe?y ?acoeueoao?a aeena?oaoe??. Iniiai? ?acoeueoaoe
aeena?oaoe?eii? ?iaioe aeiiia?aeaeenue oa iaaiai?thaaeenue ia: 16-th
General Conference of the Condensed Matter Division European Physical
Society, Leuven, 25-28 August 1997; i?aeaea?aeaai?e eiioa?aioe?? c
o?ceee ?aae?aoe?eieo yaeu oa ?aae?aoe?eiiio iaoa??aeiciaanoao, 3-10
aa?aniy 1998?. a i.Aeoooa; eiioa?aioe?? High purity silicon V (The
Electrochemical Society, Inc. 10 South Main Street Pennington, New
Jersey, USA); i?aeia?iaei?e oeie?-eiioa?aioe?? a i.O?oneaaoe?, 24-29
/a?aiy 1999?.; 8-th International conference of Gettering And Defect
Engineering in Semiconductor Technology GADEST’99, Hoor, Sweden, 25-28
September, 1999.

Ioae?eaoe??. Iniiaiee ci?no ?iaioe ? ocaaaeueiaiiyi iaoeiaiai aei?iaeo
aaoi?a, ?acoeueoaoe yeiai iioae?eiaai? o 6 noaooyo ? oacao aeiiia?aeae
ia iaoeiaeo eiioa?aioe?yo.

No?oeoo?a oa ianya ?iaioe. Aeena?oaoe?eia ?iaioa neeaaea?oueny c
anooio, i’yoe ?icae?e?a, caeeth/ii? /anoeie oa nieneo aeei?enoaii?
e?oa?aoo?e. Iniiaiee ci?no ?iaioe aeeeaaeaii ia 106 noi??ieao
ae?oeiaaiiai oaenoo, ?ethno?iaaiiai 20 ?enoieaie oa 4 oaaeeoeyie. Nienie
e?oa?aoo?e i?noeoue 137 iaeiaioaaiue.

INIIAIEE CI?NO ?IAIOE

O anooi? iaa?oioiaaia aeooaeuei?noue aeeiiaiiai aeine?aeaeaiiy,
eiie?aoeciaai? eiai iniiai? iaoeia? caaaeaiiy, aeeeaaeai? iaoeiaa
iiaecia oa i?aeoe/ia cia/ei?noue io?eiaieo ?acoeueoao?a. A?aecia/aii
iniaenoee aianie caeiaoaa/a.

A ia?oiio ?icae?e? i?aaenoaaeaii iaeyae iniiaieo e?oa?aoo?ieo aeaieo
i?i oaciaee noai aeii?oee eenith a Si, iniaeeaino? ?iciaaeo ia?ane/aiiai
oaa?aeiai ?ic/eio I? , ?icaeyiooi iniiai? ?nioth/? iiaeae?
oa?iiaeiii??a, a oaeiae iniaeeaino? iiaaae?iee oa?iiaeiii??a, iia’ycai?
c iaiaeii??aei?noth i?inoi?iaiai ?iciiae?eo eenith. Ia iniia? aiae?co
oeeo aeaieo iieacaii ca’ycie e?iaoeee iaeiie/aiiy oa a?aeiaeo
eeniaai?nieo aeaoaeo?a c aeii?oeiai-aeaoaeoiei noaiii e?enoaeo. Iniaeeao
oaaao i?eae?eaii ?ie? i?e?iiaiaeii??aeiiai ?iciiae?eo aeii?oee eenith oa
eeniaai?nieo aeaoaeo?a. Ia oe?e iniia? noi?ioeueiaaia iinoaiiaea caaea/?
aeine?aeaeaiiy: c aiae?co e?iaoeee aaia?aoe?? oa a?aeiaeo eeniaai?nieo
oa?iiaeaoaeo?a io?eiaoe aeiaeaoeiao ?ioi?iaoe?th i?i nooi?iue
iaiaeii??aeiino? ?o ?iciiae?eo, i?i aieea oaei? iaiaeii??aeiino? ia
aeanoeaino? oa?iiaeaoaeo?a oa ia iiaaae?ieo ia?aiao??a Si i?e
oa?iiia?iaeao.

Eiie?aoi? aenia?eiaioaeuei? caaea/?, ye? caieaiiaaii ?ica’ycaoe aoee
ianooiieie:

1. Aeine?aeeoe aieea oa?i?/ii? ia?aae?noi??? ia e?iaoeeo iaeiie/aiiy
oa a?aeiaeo OAe-1.

2. Aeine?aeeoe iniaeeaino? e?iaoeee iaeiie/aiiy oa ci?ie aia?aaoe/ieo
oa?aeoa?enoee oa?iiaeaoaeo?a, ye? aeieeathoue a Si i?e oa?iiia?iaoe?
a i?ii?aeiiio ?ioa?aae? oaiia?aoo? i?ae OAe-1 oa OAe-2.

3. Aeine?aeeoe e?iaoeeo ?iciaaeo oaa?aeiai ?ic/eio I? oa ci?ie
aioo??oi?o i?oaeieo iai?oaeaiue a a?aooe? Si a oiae? i?aoeei?oaoe??
eenith i?e 10500N.

A ae?oaiio ?icae?e? iienaii iniiai? aenia?eiaioaeuei? iaoiaeeee, ui
canoiniaoaaeenue a aeai?e ?iaio? (oa?iiia?iaee oa ii?ii?iaiiy e?enoae?a
e?aii?th, aei??e aoaeoo Oieea, ieoiiiai aeaeo?iiii?o, ?*- iiaeeiaiiy,
DLTS). Aeeeaaeaii iaoiaeeee ia?iaee aenia?eiaioaeueieo aeaieo.

A o?aoueiio ?icae?e? i?aaenoaaeaii ?acoeueoaoe aeine?aeaeaiue aieeao
iiia?aaeiuei? oa?iiia?iaee i?e 8000 N (IOI-800) ia e?iaoeeo aaia?aoe??
oa a?aeiaeo eeniaaeo oa?iiaeiii??a, ui ooai?ththoueny a Si i?e 4500 N.

Aoaeoeai?noue ooai?aiiy eeniaai?nieo oa?iiaeiii??a (OAe) a iaeano? 450
0N nooo?ai caeaaeeoue a?ae iiia?aaeiuei? oa?iiia?iaee (IOI) e?enoae?a
e?aii?th [1]. Iaei??th c i?e/ei oeueiai iiaea aooe ?ic/eiaiiy a oiae?
IOI aeayeeo ca?iaee?a OAe, ye? caaaeaee ? o aeo?aeiiio e?enoae?.
Iai?eeeaae, ca?iaeeaie oa?iiaeiii?ieo eiiieaen?a SiOm iiaeooue aooe
iiia?aaei? aei ieo eiiieaene SiOm-1 [2]. I?iaeaia iieyaa? a oiio, ui
i?e 450 0N aeey ooai?aiiy eiiieaen?a iaa?oue c m=2 iio??aai
eiao?oe??io aeeooc?? eenith (DI) a Si ia aeae?eueea ii?yaee?a aeuee ca
?aaeueiee. Oei a?eueoa aaaeei iiynieoe ?nioaaiiy i?e?ineoi/aiue OAe, ui
niinoa??aathoueny a aaaaoueio ?iaioao [3,4]. Iiaeeeaei iiyniaiiyi iiaea
aooe i?eiouaiiy i?i ?nioaaiiy o aeo?aeiiio Si i?e?ioeoeooaoe?e
eiioeaio?aoe?? aeii?oee eenith (IOE), a yeeo eieaeueia eiioeaio?aoe?y
aoii?a eenith cia/ii aeua ca ?ioaa?aeueio. Oiio aoiie eenith aaea o
aeo?aeiiio noai? iiaeooue ciaoiaeeoenue aeinoaoiuei aeecueei uia
anoeaiooe ooai?eoe eiiieaene. Oaeei /eiii IOE oaeiae iiaeia anioe?thaaoe
c iiiyooyi ca?iaee?a aeey OAe. Anoaiiaeaiiy ae?enii? i?e?iaee ca?iaee?a
i?eioeeiiai aaaeeeai aeey ?ic?iaee cania?a i?aeaeuaiiy
oa?iinoaa?eueiino? Si. Iaoa ?iaioe, ?acoeueoaoe yei? iiaeaii a o?aoueiio
?icae?e?, iieyaaea naia a aecia/aii? yeee c oeeo aeaio oei?a ca?iaee?a
a?eueoa a?aeiia?aea? ae?eniino?. Aieea IOE ia e?iaoeeo iaeiie/aiiy ?
a?aeiaeo OAe i?ney iiia?aaeiuei? oa?iiia?iaee iiaea ?noioii
a?ae??ciyoeny a?ae aieeao ca?iaee?a o aeaeyae? i?aoeei?oao?a SiOm-1.

Iaie aeine?aeaeoaaany aieea iiia?aaeiuei? aenieioaiia?aoo?ii?
oa?iiia?iaee Si ia e?iaoeeo aaia?aoe?? OAe, aaeaea a?aeiii, ui oaea OI
oiia?eueith? i?ioeane ooai?aiiy oa?iiaeiii??a [5]. Iniiaiith i?e/eiith
oaeiai aieeao oa?iiia?iaee aaaaea?oueny ciaioaiiy e?eueeino? ca?iaee?a
iaeaooi?o oa?iiaeiii?ieo eiiieaen?a o oi?i? SiOm-1. [6]. I?e
aeine?aeaeaii? aeei?enoiaoaaeenue c?acee, ae??cai? c iaeiiai
iiiie?enoaeo aacaeeneieaoe?eiiai Si aac aoaeue-yeeo oa?iiia?iaie i?ney
ae?iuoaaiiy. Aei??thaaiiy ieoiiiai aeaeo?iiii?o ( aeeiioaaeeny 4-o
ciiaeiaei iaoiaeii i?e e?iiaoi?e oaiia?aoo??. Eiioeaio?aoe?y a?eueieo
aeaeo?ii?a (ne) aecia/aeany c (, a?aoiaoth/e, ui ?ooeea?noue aeaeo?ii?a
i?e oe?e oaiia?aoo?? noaiiaeoue 1350 ni2 / (A(n). Noia?ia (oiaoi anio
oei?a) eiioeaio?aoe?y oa?iiaeiii??a (Noae) aecia/aeany c ??cieoe? n?-
n0, aea n0, n? — eiioeaio?aoe?y a?eueieo aeaeo?ii?a o aeo?aeieo oa
oa?iiia?iaeaieo c?aceao a?aeiia?aeii (iaoooth/e oa?iiaeoeaioi?aie, ui
ooai?ththoueny i?e 800 Ni ca 30 oaeeei, eiioeaio?aoe?y yeeo na < 3.1013 ni-3). Ia ?en. 1 iaaaaeaii oaeaeeino? aaia?aoe?? oa?iiaeiii??a: IIa - a c?aceo aac iiia?aaeiuei? oa?iiia?iaee, IIa - a c?aceo, ui i?ieoia IOI i?e 8000 N. Aeaeii, ui a?eueo ??ce? ci?ie oaeaeeino? aaia?aoe?? OAe (dNoae /dt ) a?aeaoaathoueny ia naieo ?aii?o aoaiao oa?iiia?iaee. Oa?aeoa?ii, ui o aeo?aeieo c?aceao oaii aaia?aoe?? OAe ii??aiyii c ii/aoeiaei ciaioo?oueny, a a iiia?aaeiuei oa?iiia?iaeaieo ca?eueoo?oueny c /anii OI. A?aeiae OAe, ooai?aieo i?e 450 0N, aea/aany iaie i?e aeaio oaiia?aoo?ao - 510 ? 515 0N. Ia ?en.2 i?eaaaeaii caeaaeiino? eiioeaio?aoe?? oa?iiaeiii??a a?ae /ano OI i?e 5150N: a - aeey c?acea aac IOI , a - aeey c?acea, ui i?ieoia IOI-800 ia?aae aaaaeaiiyi oa?iiaeiii??a. E?aiee a?aeiia?aeathoue aeaiei aenia?eiaioa, nooe?euei? e?i?? - eiii'thoa?iie ai?ieneiaoe?? aeniiiaioe?aeueiith ooieoe??th aeaeo o = A0 exp(- t/(). Iiia?aaeiy oa?iiia?iaea i?e 800 0N ?noioii niia?eueith? i?ioean a?aeiaeo OAe-450. Aecia/aia iaie c aenia?eiaio?a ii a?aeiaeo OAe-450 i?e 510 ? 515 0N aia?a?y aeoeaaoe?? a?aeiaeo (Aa) ? /anoioiee oaeoi? a?aeiaeo (() ?noioii ca?eueoothoueny i?ney IOI i?e 8000N. Aeey ??cieo a?oi c?ace?a Ea =1,64 - 1,88 aA; (( =6.3 108 - 2.3 107 n-1 ) aac IOI ? Ea=2,3 - 2,47 aA; (( =1.8 1011 - 2.4 1012 n-1) i?ney IOI-800. Oaea ca?eueoaiiy ia iiaeeeai iiynieoe ciaioaiiyi eiioeaio?aoe?? ca?iaee?a o aeaeyae? SiOm-1 i?aoeeiioao?a a oiae? IOI-800. Aaaaeath/e ae ca?iaeeaie IOE, ci?io ia?aiao??a a?aeiaeo iiaeia iiynieoe aieeaii i?oaeieo iai?oaeaiue a e?enoae?/i?e a?aooe?, ye? noai?ththoueny IOE ? a?aeiia?aeieie neoi/aiiyie OAe. A iniiaieo iiaeaeyo oa?iiaeiii??a [7], aeeooc?y aoii?a eenith ? aieiaiei /eiieeii, ui e?i?oo? ye i?ioean ooai?aiiy OAe, oae ? i?ioean ?o a?aeiaeo. Ioaea, ci?ia Aa iiaea a iaai?e i??? oa?aeoa?ecoaaoe ci?io oiia aeeooc?? Ii. Oiae? ca?eueoaiiy Aa i?ney IOI-800 icia/a? oiia?eueiaiiy aeeooc?? Ii . Aacoth/enue ia io?eiaieo ?acoeueoaoao, iiaeia i?eionoeoe, ui "i?enei?aia" aeeooc?y I? a i?ioean? aaia?aoe?? OAe aeanoeaa o?eueee oei aoiiai eenith, ye? ciaoiaeyoueny a iai?oaeaieo iaeanoyo e?enoaea ana?aaeei? i?e?ioeoeooaoe?e c aenieeie cia/aiiyie eiioeaio?aoe?? eenith. O aeiaaeeo a?aeiaeo oa?iiaeiii?iiai eiiieaeno /a?ac aeenioe?aoe?th, aoii eenith iiaeiai a?ae?eoe ia aeayeo a?aenoaiue (o, uia ia aooe caoiieaiei eiiieaenii ciiao. Ioe?ieii (o ?c ni?aa?aeiioaiiy: aea D - eiao?oe??io aeeooc?? aeenia?niiai eenith (a ?ac? a?aeiaeo c?ace?a, ui i?ieoee IOI-800). ( - /an a?aeoiaeo aoiia eenith ia a?aenoaiue (o (aecia/a?oueny aenia?eiaioaeueii ye noaea a?aeiaeo OAe ). Aaee/eia (o ia? cia/aiiy a?ae 13 aei 30 A. Oeth ae naio a?aenoaiue iiaeaii ioe?ieoe, anoaiiaeaoe ca’ycie i?ae (o oa aia?a??th iiey i?oaeii? aeaoi?iaoe??, yeo iathoue eiiieaene SiOm . I?e??aith?ii aia?a?th i?oaeiiai iiey aei oaieiai?: aea A - aeaoi?iaoe?eiee ca?yae aeaoaeoo; N11 , N12, N44 - i?oaei? noae? e?aii?th; Nsi =5(1022 ni-3 - eiioeaio?aoe?y aoii?a Si a e?enoae?. Cia/aiiy (o io?eiai? ca oi?ioeith (2) iio?aieythoue a ?ioa?aae cia/aiue io?eiaieo ca oi?ioeith (1). ?icaeyaeath/e a?aeiae oa?iiaeiii??a a c?aceao aac iiia?aaeiuei? OI, a oi?ioe? (1) cai?noue D i?aenoaaey?ii D( - eiao?oe??io i?enei?aii? aeeooc?? eenith, yeee aecia/aii c e?iaoeee aaia?aoe?? oa?iiaeiii??a. I?aenoaaeyth/e a?aeiia?aei? aenia?eiaioaeuei? cia/aiiy ( , io?eio?ii (x = 730 A. Iiynieoe oaea aaeeea cia/aiiy (x iiaeia o?eueee a i?eiouaii?, ui aoii eenith ia? aeeoe ca iaae? i?e?ioeoeooaoe?? eiioeaio?aoe?? aeii?oee eenith aai neoi/aiiy oa?iiaeiii??a c ?ici??aie ii?yaeeo nioaiue aiano?ai?a. Oaeei /eiii, e?euee?niee aiae?c i?eaaaeaieo aenia?eiaioaeueieo ?acoeueoao?a na?ae/eoue i?i i?enei?aiiy aeeooc?? eenith ana?aaeei? IOE ? i?e?ineoi/aiue oa?iiaeiii??a. ?acii c aaeeeith eieaeueiith eiioeaio?aoe??th eenith a IOE oea cia/ii i?enei?th? i?ioean ooai?aiiy oa?iiaeiii??a ? aea? iiaeeea?noue iiynieoe ?o ?aaeueiee oaii aaia?aoe??. A /aoaa?oiio ?icae?e? aeeeaaeaii ?acoeueoaoe aeine?aeaeaiue aeanoeainoae oa?iiaeaoaeo?a ia?ao?aeiiai oeio i?ae OAe-1 oa OAe-2. Aecia/aii, ui oaiia?aoo?a 5300 N a?aeiia?aea? i?i?iaeuei?e aoaeoeaiino? aaia?aoe?? eeniaai?nieo oa?iiaeiii??a a ae?aiacii? oaiia?aoo? 500-6000N. Aeine?aeaeaiiy oaiia?aoo?ieo caeaaeiinoae aoaeoo Oieea (?en.3) iieacaee, ui a i?ioean? OI i?e 5300N o?eaae?noth 5-75 aiaeei ooai?ththoueny aeae?eueea aeecueei ?ici?uaieo aeiii?ieo ??ai?a a caai?iiai?e cii?, ye? iathoue oaeaee?noue aaaaeaiiy ia ii?yaeie iaioo i?ae OAe-1. Aia?a?y ?ii?caoe?? oeeo ??ai?a ciaioo?oueny ?c ca?eueoaiiyi o?eaaeino? OI. Aiae?c niaeo??a DLTS na?ae/eoue, ui ooai?th?oueny ia iaioa 3 ??ai?a, ye? iaeaaeaoue OAe-530 (?en.4). Cia/aiiy aia?a?? ?ii?caoe?? oa ia?a??co caoiieaiiy iin??a no?oio oeaio?aie, ui a?aeiia?aeathoue eiaeiiio eiie?aoiiio i?eo DLTS, i?aaenoaaeaii a oaaeeoe? 1. Aeaeo?iii? ??ai? oa?aeoa?ecothoueny aeoaea iaeith aia?a??th ?ii?caoe?? oa aiiiaeueii iecueeeie cia/aiiyie ia?a??co caoiieaiiy iin??a ca?yaeo. Iaeiei c iiaeeeaeo iiyniaiue oeueiai oaeoo iiaea aooe aeoaea iaiaeii??aeiee i?inoi?iaee ?iciiae?e aeine?aeaeoaaieo oeaio??a. Ia?a??c caoiieaiiy aeaeo?ii?a ia iiceoeaii ca?yaeaeaiee oeaio? iiaeia i?aaenoaaeoe o aeaeyae?:aea - r = e2Z/4(((IkT - ?aae?on caoiieaiiy, eZ - ca?yae oeaio?a, L - ia?aiao?, ui ia caeaaeeoue a?ae oaiia?aoo?e. sseui OAe ciaoiaeyoueny a neoi/aiiyo, aea ?o eieaeueia eiioeaio?aoe?y cia/ii aeua, i?ae na?aaeiy, oi oea iiaea i?eaanoe aei ae?aioaaiiy, ui aieeia ia ?o aca?iiae?th c ?ooiieie ca?yaeaie. C o?aooaaiiyi ae?aioaaiiy (i?e Z =1) cia/aiiy r iiaeia ciaeoe ?c ae?aco: aea rD - aeaaa?anueeee ?aae?on ae?aioaaiiy. ?c (4) aecia/aeenue cia/aiiy ?aae?on?a caoiieaiiy r i?e oaiia?aoo?ao, ui a?aeiia?aeathoue i?eai ia niaeo?ao DLTS, ? i?aenoaaeyeenue a (3). ?c ii??aiyiiy c aenia?eiaioaeueieie cia/aiiyie ( anoaiiaeaii, ui ni?aiaae?iiy aeinyaa?oueny i?e eieaeuei?e eiioeaio?aoe?? OAe (1017- 1019) ni-3, ui ocaiaeaeo?oueny c aeaieie, io?eiaieie a ?ioeo ?iaioao iaoiaeaie iaeieooiaiai ?icn?thaaiiy na?oea [3] oa c aiae?co iiaaae?iee oie?anueei? ?ooeeaino? [4]. ?acoeueoaoe aei???a niaeo??a DLTS i?ney aeaeo?iiiiai ii?ii?iaiiy aeicith 1014- 2(1016 ni-3 na?ae/aoue i?i a?aenooi?noue aca?iiae?? OAe-530 c ?aae?aoe?eieie aeaoaeoaie (?Ae): oa?aeoa?enoeee ? eiioeaio?aoe?y OAe-530 ia ci?iththoueny. A naith /a?ao iayai?noue a Si ??cieo eiioeaio?aoe?e OAe-530 ia aieeaa? ia e?iaoeeo iaeiie/aiiy A-, A-oeaio??a oa aeeaaeain?e. A i’yoiio ?icae?e? iaaaaeai? ?acoeueoaoe aeine?aeaeaiiy oa?iiaeaoaeo?a, ye? aeieeathoue a oiae? ?iciaaeo ia?ane/aiiai oaa?aeiai ?ic/eio eenith a e?aii?? i?e eiai oa?iiia?iaoe? i?e 10500N. ?icaeyiooi iniaeeaino? aioo??oiueiai aaoa?oaaiiy ?aae?aoe?eieo aeaoaeo?a. Ooai?aiiy eeniaaeo oa?iiaeaoaeo?a (cie?aia oa?iiaeiii??a) a e?aii??, i?i ye? aiai?eeinue aeua, cae/aeii aaaea aei iia??oaiiy oa?aeoa?enoee i?eeaae?a, aeaioiaeaieo ia eiai iniia?. I?ioa aenieee ai?no eenith a e?enoaeao oa eiai aeanoea?noue ooai?thaaoe ??ciiiai?oi? eiiieaene i?e oa?iiia?iaeao oni?oii aeei?enoiao?oueny c iaoith aaoa?oaaiiy aeeaieeo aeii?oie. Aenieioaiia?aoo?ia ia?iaea e?aii?th aaaea aei aeieeiaiiy a eiai ia’?i? i?e?ii?aoeei?oao?a SiO2- oace. Naia aiie oa noiooi? aeaoaeoe, ye? aeieeathoue a a?aooe? i?e ?o ooai?aii? aenooiathoue a ?ie? aaoa?a aeey iaaaaeaieo aeii?oie. Iaiao?aeiith oiiaith aoaeoeaiino? aaoa?a ?, ye na?ae/aoue e?oa?aoo?i? aeai?, noai?thaai? iei a a?aooe? e?aii?th aioo??oi? iai?oaeaiiy. Oea oaeiae noino?oueny ? aaoa??a aeey ia?aeiieo ?aae?aoe?eieo aeaoaeo?a. Oae aoaeoeaieie aaoa?aie ?aae?aoe?eieo aeaoaeo?a a e?aii?? ? i?aoeei?oaoe ??aeeicaiaeueieo aeaiaio?a, ui noai?ththoue cia/i? iai?oaeaiiy a?aoee. Oiio aenieioaiia?aoo?io ia?iaeo e?aii?th, yea i?eaiaeeoue aei ooai?aiiy SiO2- oace ni?iaoaaee aeei?enoaoe c iaoith i?aeaeuaiiy ?aae?aoe?eii? no?eeino? [8]. Aeyaeeinue, ui SiO2- oaca ia aieeaa? ia iaeiie/aiiy iniiaieo ?aae?aoe?eieo aeaoaeo?a A- oa A-oeaio??a. Iiaeeeai, ui i?aoeei?oaoe SiO2- oace ? aeaea?aeii aioo??oi?o i?oaeieo iai?oaeaiue i?e aenieeo oaiia?aoo?ao, a i?e oaiia?aoo?? ii?ii?iaiiy (300E) ia noai?ththoue aioo??oi?o i?oaeieo iai?oaeaiue (AII) aeinoaoi?o aeey aoaeoo aaoa?oaaiiy. Oiio i?e oaiia?aoo?? 40E iaie aeine?aeaeoaaeenue ci?ie AII, ui aeieeathoue a e?aii?? i?e 10500N a caeaaeiino? a?ae o?eaaeino? oa?iiia?iaee oa e?iaoeea aeoiaeo eenith c iioe/ii aeoeaiiai noaio. Aeyaeaii, ui aioo??oi? i?oaei? iai?oaeaiiy c?inoathoue ?c o?eaae?noth OI- 10500N ye t3/2. Oa?aeoa?ii, ui /enaeueii cia/aiiy AII a Si ia
ii?yaeie aeu? i?ae a Si eaaiaaiiio aaaeie?i??i. I?aoeei?oaoe aaaeie?i?y
? aoaeoeaiei aaoa?ii ia?aeiieo ?aae?aoe?eieo aeaoaeo?a a e?aii??.
Io?eiai? ?acoeueoaoe aeeeeeathoue caieoaiiy: /iio /anoeiee SiO2-oace
(aoaeoeaiee aaoa? aeey oaoiieia?/ieo aeiiioie), noai?thth/e iai?oaeaiiy
ia ii?yaeie a?eueoi aiiae o?, ui noai?ththoueny a e?aii?? i?aoeei?oaoaie
aaaeie?i?y, ia aieeaathoue ia iaeiie/aiiy ?aae?aoe?eieo aeaoaeo?a.
Iiaeia eeoa i?eionoeoe, ui iaoaiici aioo?ioiueiai aaoa?oaaiiy
?aae?aoe?eieo aeaoaeo?a a e?aii?? oa ?ieue AII a oeueiio i?ioean?
neeaaeiio? iiae oea aaaaeaeiny ?aiioa.

A caeeth/i?e /anoei? i?eaaaeaii ia?ae?e aieiaieo ?acoeueoao?a
aeine?aeaeaiue oa caaaeuei? aeniiaee.

AIEIAI? ?ACOEUeOAOE OA AENIIAEE:

1.Aenia?eiaioaeueii iieacaii, ui iiia?aaeiy OI i?e 8000N i?eaiaeeoue aei
ca?eueoaiiy aia?a?? aeoeaaoe?? a?aeiaeo oa /anoioiiai oaeoi?a a?aeiaeo
oa?iiaeiii??a, noi?iiaaieo a Si i?e 4500N c Ea =1,64 — 1,88 aA; (( =6.3
108 — 2.3 107 n-1) aei Ea=2,3 — 2,47 aA; (( =1.8 1011 — 2.4 1012 n-1).
Io?eiai? aeai? iiyniththoueny aieeaii IOI-800 ia i?e?ioeoeooaoe??
aeii?oee eenith, ye? ? o aeo?aeiiio e?enoae?. C?iaeaii ioe?ieo ?o
e?i?eieo ?ici???a, yea nyaa? nioaiue aiano?ai.

2. ?acoeueoaoe aiae?co e?iaoeee iaeiie/aiiy oa a?aeiaeo OAe-450
aeicaieythoue aaaaeaoe, ui i?enei?aia aeeooc?y aoii?a eenith a Si
coiiaeaia aieeaii i?oaeieo aeaoi?iaoe?e, noai?thaaieo i?e?ioeoeooaoe?yie
eiioeaio?aoe?? oe??? aeii?oee, a nai? i?e?ioeoeooaoe?? a?ae?a?athoue
?ieue ca?iaee?a aeey i?aoeei?oaoe?? eenith, a oiio /ene? ? a oi?i?
oa?iiaeiii??a.

3. Aeyaeaii, ui a?aeiae Si i?e 5300N i?eaiaeeoue aei iiyae o?ueio iiaeo
aia?aaoe/ieo ??ai?a, ye? iaeaaeaoue i?eeei oa?iiaeiii?ai. Aia?a?y ?o
?ii?caoe?? ciaoiaeeoueny a iaaeao (0.019-0.058)aV ? caeaaeeoue a?ae
o?eaaeino? a?aeiaeo: i?e ca?eueoaii? /ano oa?iiia?iaee aia?a?y
?ii?caoe?? ciaioo?oueny. C ?acoeueoao?a aei???a DLTS anoaiiaeaii, ui c?
ca?eueoaiiyi /ano a?aeiaeo ia? i?noea ia?aaoaeiaa oeeo oa?iiaeiii??a,
yea i?iyaey?oueny o cieeiaii? a?eueo aeeaieeo ??ai?a i?e iaeii/aniiio
ca?eueoaii? eiioeaio?aoe?? i?ee?oeo. Aia?oa aeyaeaii ?nioaaiiy OAe c
aiiiaeueii iaeei ia?a??cii caoiieaiiy aeaeo?ii?a (10-18 — 10-20 ni-2)

4. Iieacaii, ui oa?iiaeaoaeoe, ye? aaiaeyoueny i?e OI-5300N ia
ci?iththoue nai?o ia?aiao??a i?ae ae??th aeaeo?iiiiai ii?ii?iaiiy ? ia
aieeaathoue ia iaeiie/aiiy iniiaieo ?aae?aoe?eieo aeaoaeo?a Si (A- oa
A-oeaio??a, aeeaaeain?e). Aeey iiyniaiiy aiiiaeueii neaaei? aca?iiae??
OAe-530 c ?ooiieie ca?yaeaie o aeaeyae? a?eueieo aeaeo?ii?a oa
ca?yaeaeaieo ?aae?aoe?eieo aaeain?e cai?iiiiiaaii iiaeaeue, ca?aeii yei?
oea ? iane?aeeii ae?aioaaiiy OAe-530 a i?e?ineoi/aiiyo. Io?eiaii
e?euee?nio ioe?ieo eieaeueii? eiioeaio?aoe?? OAe-530 a i?e?ineoi/aiiyo,
ui iiaea nyaaoe 1017- 1019ni-3.

5. Aeyaeaii, ui oa?iiia?iaea i?e 10500N i?eaiaeeoue aei aeieeiaiiy
neeueieo aioo??oi?o i?oaeieo iai?oaeaiue a e?enoaeao Si. ?ioaineai?noue
oeeo iai?oaeaiue ia?aaeuo? ?ioaineai?noue aioo??oi?o iai?oaeaiue, ui
noai?ththoueny an?ia a?aeiieie ia oeae /an aeii?oeaie, a oiio /ene?
?ciaaeaioieie oa ??aeeicaiaeueieie aeaiaioaie. C? ca?eueoaiiyi /ano OI
i?e 10500 N, oe? iai?oaeaiiy c?inoathoue ca caeiiii t3/2.

6. C ii??aiyeueiiai aiae?co e?iaoeee ?iciaaeo oaa?aeiai ?ic/eio aeii?oee
eenith oa e?iaoeee c?inoaiiy aioo??oi?o i?oaeieo iai?oaeaiue a e?enoaeao
e?aii?th, anoaiiaeaii, ui i?e/eiith aeieeiaiiy AII a oiae? OI-1050 ?
ooai?aiiy oa c?inoaiiy ?ici???a i?e?i/anoeiie SiO2- oace.

INIIAI? ?ACOEUeOAOE AeENA?OAOe??

AEEEAAeAII A IOAE?EAOe?ssO

Iaeiao A.A., N??aoeueeee A.I., E?ae/einueeee A.I., Iocaiei I.I. «I?i
aeaye? aeanoeaino? oa?iiaeiii??a, ui ooai?ththoueny a e?aii?? i?e 530
0N»// OOAE.-1998.- o.43, a.2, n.219-223.

Eonoia A.A., Iaeiao A.A., O??ia/ei I..I., Iocaiei I.I., E?anueei I.I.
«Aieea i?aoeei?oaoe?? aeii?oee eenith i?e 1050 0N ia i?oaei? iai?oaeaiiy
a e?aii??»// OOAE.-1998.- o.43, a.5, n.626-629.

Iaeiao A.A., Iocaiei I.I., Eaaaeae?i I.I., E?ae/einueeee A.I., E?anueei
I.I. «I?i aeaye? iniaeeaino? aaia?aoe?? oa a?aeiaeo oa?iiaeiii??a a
e?aii??»// OOAE.-1999.- o.44, a.8, n.1011-1016.

Iaeiao A.A., E?ae/eineee A.I., Eaaaeaeei A.I., Oeiioeue A.I., Iocaiei
A.A., E?anueei I.I. «?ieue iee?iiaiaeii?iaeiiai ?ani?aaeaeaiey noieia
aeey eiiiiiaioia ia? O?aieaey a ?aaeeaoeeiiiie aeaa?aaeaoeee naienoa
iiiie?enoaee/aneiai e?aiiey»,Oacenu iaaeainoaea?noaaiiie eiioa?aioeee ii
oeceea ?aaeeaoeeiiiuo yaeaiee e ?aaeeaoeeiiiiio iaoa?eaeiaaaeaieth (3-10
naioya?y 1998 aiaea, a.Aeoooa), AAIO, a.3(69), 4(70) n.43-44.

Iaeiao A.A., E?ae/eineee A.I., Eaaaeaeei A.I., Oeiioeue A.I., Iocaiei
A.A., E?anueei I.I. «?ieue iee?iiaiaeii?iaeiiai ?ani?aaeaeaiey noieia
aeey eiiiiiaioia ia? O?aieaey a ?aaeeaoeeiiiie aeaa?aaeaoeee naienoa
iiiie?enoaeee/aneiai e?aiiey»// AAIO.-1998.-a.73-74, n. 121-125.

Iaeiao A.A., Ne?aoeeee A.I., E?ae/eineee A.I., Iocaiei A.A.
«Yeaeo?e/aneea naienoaa e?aiiey, oa?iiia?aaioaiiiai i?e 530 0N»//
OOI.-1998.- o.32, ?9, n.1049-1053.

Neimash V.B., Siratskii V.M., Kraichinskii A.M. and Puzenko O.O., Claeys
C. and Simoen E. «Thermal oxygen donors with an anomalus small electron
capture cross section» Electrochemical Society Proceedings.- 1998,
V.98-13, p.200-210.

Nienie e?oa?aoo?e, ui oeeooaaeany:

1.Bourret A.// Proc. 3rd Intern. conf. on semiconductors/ Ed. by L.C.
Kimerling, J.M.Parsey, Jr.- Coronado, 1984.- New York: Met. Soc. of
AIME, 1985.- P. 129-146.

2. Kaizer W., Frisch H., Reiss H. Mechanism of the Formation of Donor
States in Heat-Treated Silicon // Phys.Rev.-1958.-V.112, N 5.-P.
1546-1554.

3.Eaaaeaeei A.I., Iaeiao A.A., Oeiioeue A.I., Oaoiaoeia A.E., Aaooieia
A.A., Ai?iieia A.A., Ai?iieiaa A.E., Eaeeiooeei A.I Aeeyiea
oa?iiaeiii?ia ia iaeioaeiaia ?annayiea naaoa a e?aiiee// OOAE.- 1993.-
O. 38.- N 1, N. 34-39.

4.Eaaaeae?i I.I., Iaeiao A.A., Oeiioeue A.I., Oi?ia? E.?. Iaoai?cie
aieeao oa?iiaeiii??a ia oie?anueeo ?ooeea?noue o Si // OOAE.- 1995.-
O.40, N 10, N. 1079-1082.

5. Markevich V.P., Murin L.I Thermal Donor Formation in Pre-Heat-Treated
n-Si:O Crystals// Phys. Stat. Solidi.- 1989.- v.A111, N 2.- P.
K149-K154.

6. Murin L.I., Markevich V.P. // Proc. Int. Conf. on Sciense and
Technology of Defect Control in Semiconductors, Yokohama, Japan, 1989,
Ed. by K. Sumino (North-Holland, Amsterdam, 1990) P. 190.

7. A.I.Aaae/, I.E.Aeaoeeai, A.O.Aaiaa? //Eenei?iae a iiiie?enoaeeao
e?aiiey. Eeaa. – «Eioa?i?ann EOAe».-1997, 239 n.

8. E?ae/eineee A.I., Iaeiao A.A., Naaai O.?., Ne?aoeeee A.I., Oeiioeue
A.I., Oaoiaoeia A.E., Oeiaee/ A.E. ?aaeeaoeeiiiia aeaoaeoiia?aciaaiea a
Si, oa?iiia?aaioaiiii i?e 10500N.- OOAE, o.34, N7, n. 1071-1074 (1989)

Iocaiei I.I. Aeine?aeaeaiiy i?ioean?a ooai?aiiy oa a?aeiaeo
oa?iiaeaoaeo?a a e?aii??.- ?oeiien.

Aeena?oaoe?y ia caeiaoooy iaoeiaiai nooiaiy eaiaeeaeaoa
o?ceei-iaoaiaoe/ieo iaoe ?c niaoe?aeueiino? 01.04.07 — o?ceea oaa?aeiai
o?ea.- ?inoeooo o?ceee IAI Oe?a?ie, Ee?a, 1999?.

Aeena?oaoe?th i?enay/aii iiaeaeueoiio aea/aiith i?e?iaee oa
aeanoeainoae eeniaaeo oa?iiaeaoaeo?a a e?aii??. Aeine?aeaeoaaeenue
aeanoeaino? oa?iiaeiii??a, ye? ooai?ththoueny a Si i?e eiai
oa?iiia?iaoe? i?e 4500N oa 5300N, a oaeiae ci?ia aioo??oi?o i?oaeieo
iai?oaeaiue a?aoee e?aii?th i?e ooai?aii? a eiai ia‘?i? /anoeiie SiO2
-oace.

Aeyaeaii, ui iiia?aaeiy ia?iaea e?aii?th i?e 8000N i?eaiaeeoue aei
ci?ie ia?aiao??a a?aeiaeo oa?iiaeiii??a-450, ui iiynith?oueny a?eueo
iaeii??aeiei ?iciiae?eii aeii?oee eenith. E?i?ei? ?ici??e
i?e?ioeoeooaoe?e aeii?oee eenith a e?aii?? nyaathoue nioi?
aiano?ai.Oa?iiaeiii?e ooai?ththoueny a neoi/aiiyo c aenieith eieaeueiith
eiioeaio?aoe??th, i?iyaeyth/e i?e oeueiio aeanoeaino? ia aeanoea?
ie?aiiio aeaoaeoia? (iai?eeeaae aiiiaeueii iaeee ia?a??c caoiieaiiy
aeaeo?ii?a, a?aenooi?noue aca?iiae?? c ia?aeiieie ?aae?aoe?eieie
aeaoaeoaie).

Eeth/ia? neiaa: e?aii?e, i?e?ioeoeooaoe?? aeii?oee eenith,
oa?iiia?iaea, oa?iiaeiii?e, a?aeiae oa?iiaeaoaeo?a.

Puzenko E. The investigation of generation processes and annealing of
thermodefects in silicon. Manuscript.

Thesis for a candidate’s degree by speciality 01.04.07 – solid-state
physics.- Institute of Physics, National Academy of Sciences of Ukraine,
Kyiv, 1999.

Thesis for a candidate’s degree is devoted to investigation of the
nature and behavior of oxygen thermodefects in silicon. The properties
of so-called thermal donors (TD) generated in silicon crystals by means
a heat treatment at 4500C and 5300C and variation of internal elastic
lattice strain under heat treatment at 1050 0C were studied.

It was found that priliminary heat treatment of silicon under
8000 C leads to change of annealing parameters of thermodonors-450 and
it can be explained by more homogeneous distribution of oxygen impurity.
The linear size of impurity oxygen microfluctuation is up to 100A.
Thermodonors are created in micro-accumulations with high local
concentration and have specific properties (for examle anomaleously
cross-section of electrons, non-interaction with primary radiation
defects).

Key words: silicon, impurity oxygen microfluctuation, heat treatment,
thermodonors, annealing of thermodefects.

Iocaiei A.A. Enneaaeiaaiea i?ioeannia ia?aciaaiey e ioaeeaa
oa?ie/aneeo aeaoaeoia a e?aiiee.- ?oeiienue.

Aeenna?oaoeey ia nieneaiea o/aiie noaiaie eaiaeeaeaoa
oeceei-iaoaiaoe/aneeo iaoe ii niaoeeaeueiinoe 01.04.07 — oeceea
oaa?aeiai oaea.- Einoeooo oeceee Iaoeeiiaeueiie Aeaaeaiee Iaoe Oe?aeiu,
Eeaa, 1999 a.

Aeenna?oaoeey iinayuaia eco/aieth i?e?iaeu e naienoa eenei?iaeiuo
oa?iiaeaoaeoia a e?aiiee n oeaeueth iieo/aiey iaoiaeia oi?aaeyaiiai
aeeyiey ia naienoaa iaoa?eaeeia aeey iee?iueaeo?iieee. Iieo/aiu
?acoeueoaou iieaciua aeey ?ac?aaioee ia?niaeoeaiiai iaoiaea iiauoaiey
oa?iinoaaeeueiinoe e?aiiey n iiiiuueth eiio?iey iee?iiaiaeii?iaeiinoe
?ani?aaeaeaiey eenei?iaea a au?auaiiuo e?enoaeeao. Enneaaeiaaeenue
naienoaa oa?iiaeiii?ia, ia?acothueony a Si i?e aai oa?iiia?aaioea i?e
4500N e 5300N, a oaeaea eciaiaiea aioo?aiieo oi?oaeo iai?yaeaiee ?aoaoee
e?aiiey i?e oa?iiia?aaioeao a iaeanoe 10500N.

Iaia?oaeaii, /oi i?aaeaa?eoaeueiay aunieioaiia?aoo?iay ia?aaioea
e?aiiey i?eaiaeeo e aieaa iaeii?iaeiiio ?ani?aaeaeaieth i?eiane
eenei?iaea. A ?acoeueoaoa, i?ioeannu ia?aciaaiey e ioaeeaa eenei?iaeiuo
oa?iiaeiii?ia i?ioiaeyo n aieueoae yia?aeae aeoeaaoeee, /ai a oii
neo/aa, eiaaea aeeooocey aoiiia eenei?iaea onei?aia a iieyo oi?oaeo
aeaoi?iaoeee, aucaaiiuo iee?ioeoeooaoeeyie i?eiane eenei?iaea. Onei?aiea
aeeooocee eenei?iaea aeaao aiciiaeiinoue iauynieoue ?aaeueii
iaaethaeaaiua nei?inoe aaaaeaiey eenei?iaeiuo oa?iiaeiii?ia a e?aiiee.

Auyaeaii, /oi eeiaeiua ?acia?u iee?ioeoeooaoeee i?eiane eenei?iaea a
e?aiiee aeinoeaatho nioie aiano?ai.

Iaia?oaeaii, /oi oa?iiia?aaioea e?aiiey i?e 5300N i?eaiaeeo e
aicieeiiaaieth a aai cai?auaiiie ciia o?ao iiauo o?iaiae, eioi?ua
i?eiaaeeaaeao iaeeei oa?iiaeiii?ai. Yia?aey eo eiiecaoeee caaeneo io
aeeeoaeueiinoe oa?iiia?aaioee: n oaaee/aieai a?aiaie ioaeeaa yia?aey
eiiecaoeee oiaiueoaaony. Ec ?acoeueoaoia ecia?aiee DLTS, onoaiiaeaii,
/oi ai a?aiy oa?iiia?aaioee i?ienoiaeeo ia?ano?ieea yoeo oa?iiaeiii?ia,
eioi?ay i?iyaeyaony a oiaiueoaiee aeoaieeo o?iaiae i?e iaeiia?aiaiiii
aicieeiiaaiee aieaa iaeeeo. Auyaeaiiua oa?iiaeiii?u oa?aeoa?ecothony
aiiiaeueii iaeui na/aieai caoaaoa (10-18 — 10-20 ni-2), ia eciaiytho
naieo ia?aiao?ia iiae aeaenoaeai yeaeo?iiiiai iaeo/aiey e ia aeeytho ia
iaeiieaiea iniiaiuo ?aaeeaoeeiiiuo aeaoaeoia Si (A-, A-oeaio?ia,
aeeaaeainee). Aeey iauyniaiey aiiiaeueii iaeiai acaeiiaeaenoaey OAe-530
n iiaeaeaeiuie ca?yaeaie a aeaea yeaeo?iiia e ca?yaeaiuo ?aaeeaoeeiiiuo
aaeainee, i?aaeeiaeaia iiaeaeue, niaeanii eioi?ie yoi anoue neaaenoaeai
ye?aie?iaaiey OAe-530 a iee?ineiieaieyo. Eiee/anoaaiiay ioeaiea
eiioeaio?aoeee OAe-530 a iee?ineiieaiee aeinoeaaao aaee/eiu 1017-
1019ni-3.

Yenia?eiaioaeueiua e oai?aoe/aneea enneaaeiaaiey iicaieeee onoaiiaeoue
eiee/anoaaiioth acaeiinaycue iaaeaeo eciaiaieai aioo?aiieo oi?oaeo
iai?yaeaiee ?aoaoee e ?acia?aie /anoeoe SiO2 -oacu, eioi?ua ia?acothony
i?e oa?iiia?aaioea eenei?iaeiniaea?aeauaai e?aiiey i?e 10500N. Auyaeaii,
/oi oaaee/aiea iai?yaeaiee ei?aee?oao n oaaee/aieai ?acia?ia
eenei?iaeiuo /anoeoe. Eeth/aaua neiaa: e?aiiee, iee?ioeoeooaoeee i?eiane
eenei?iaea, oa?iiia?aaioea, oa?iiaeiii?u, ioaeea oa?iiaeaoaeoia.

.

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