Сучасні підходи у визначенні параметрів глибоких рівнів в напівпровідниках методом релаксаційної спектроскопії: Автореф. дис… канд. фіз.-мат. наук /

Ee?anueeee Oi?aa?neoao ?iai? Oa?ana Oaa/aiea

Aieei TH??e Aieiaeeie?iae/

OAeE 621.382

No/ani? i?aeoiaee o aecia/aii? ia?aiao??a

aeeaieeo ??ai?a a iai?ai?ia?aeieeao iaoiaeii

?aeaenaoe?eii? niaeo?ineii??

Niaoe?aeuei?noue

01.04.10 – o?ceea iai?ai?ia?aeiee?a oa ae?aeaeo?ee?a

Aaoi?aoa?ao

aeena?oaoe?? ia caeiaoooy iaoeiaiai nooiaiy

eaiaeeaeaoa o?ceei-iaoaiaoe/ieo iaoe

Ee?a – 1999

Aeena?oaoe??th ? ?oeiien

?iaioa aeeiiaia a Ee?anueeiio oi?aa?neoao? ?iai? Oa?ana Oaa/aiea.

Iaoeiaee ea??aiee: O?aoye Ieaa Aaneeueiae/

aeieoi? o?c.-iao. iaoe, i?ioani?, caa.eaoaae?ith,

Ee?anueeee oi?aa?neoao ?iai? Oa?ana Oaa/aiea.

Io?oe?ei? iiiiaioe: Eiiauaiei Aaea??e Ieeieaeiae/,

aeieoi? o?c.-iao. iaoe, no. i. ni?a?ia?oiee,

caa. a?aeae?eii,

?inoeooo o?ceee iai?ai?ia?aeiee?a IAI Oe?a?ie.

E?ae/einueeee Aiaoie?e Ieeieaeiae/,

aeieoi? o?c.-iao. iaoe, no. i. ni?a?ia?oiee,

o.a.i. caa. a?aeae?eii,

?inoeooo o?ceee IAI Oe?a?ie.

I?ia?aeia onoaiiaa: Oaeai?iaenueeee aea?aeaaiee oi?aa?neoao.

Caoeno a?aeaoaeaoueny ‘24’ o?aaiy 1999 ?. i 16.00 aiaeei? a aoae. ?46 ia
can?aeaii? niaoe?ae?ciaaii? a/aii? ?aaee Ae26.001.31 a Ee?anueeiio
oi?aa?neoao? ?iai? Oa?ana Oaa/aiea ca aae?anith: 252127, Ee?a-127, i?.
Aeooeiaa, 6, ?aae?io?ce/iee oaeoeueoao.

C aeena?oaoe??th iiaeia iciaeiieoeny o a?ae?ioaoe? Ee?anueeiai
oi?aa?neoaoo ?iai? Oa?ana Oaa/aiea (i. Ee?a, aoe. Aieiaeeie?nueea, 58)

Aaoi?aoa?ao ?ic?neaiee 23 ea?oiy 1999?.

A/aiee nae?aoa?

niaoe?ae?ciaaii? a/aii? ?aaee A.A. Oeaa?i

Caaaeueia oa?aeoa?enoeea ?iaioe

Aeooaeuei?noue oaie. Aea/aiiy oa?aeoa?enoee iaoa??aeo a?ae?a?a? aaaeeeao
?ieue a oaoiieia?? ae?iaieoeoaa iai?ai?ia?aeieeiaeo i?eeaae?a. Aeeaie?
??ai? o caai?iiai?e aia?aaoe/i?e cii? iai?ai?ia?aeieea aieeaathoue ia
ia?aiao?e iai?ai?ia?aeieeiaeo i?eeaae?a. Oeae aieea iiaea aooe ye
iiceoeaiei (iai?eeeaae, a ?ac? aaaaeaiiy aeii?oee cieioa a e?aii?e aeey
ciaioaiiy /ano aeeooy iin??a ca?yaeo a oaeaeeiae?th/eo ae?iaeao), oae ?
iaaaoeaiei (ye o ?ac? ciaioaiiy aoaeoeaiino? aei?ii?iaiiy a
na?oeiae?iaeao oa eaca?ao /a?ac iayai?noue aacaei?ii?ithaaeueieo
?aeiia?iaoe?eieo aeiaethaa/?a). A iaio aeiaaeeao ?nio? iaiao?aei?noue
eiio?ieth iayaiino? aeeaieeo ??ai?a oa aecia/aiiy ?o aeaeo?io?ce/ieo
ia?aiao??a.

sseui ii??aithaaoe an? iayai? iaoiaee eiio?ieth ia?aiao??a aeeaieeo
??ai?a, oi aeyaeoueny, ui iaea?eueo? ia?aaaae iaaea? ?aeaenaoe?eia
niaeo?ineii?y aeeaieeo ??ai?a, nei?i/aii ?NA?. Iaoiae aeicaiey?
?ic??ciyoe aeiaethaa/? aeey iniiaieo ? iainiiaieo iin??a, ?a?no?oaaoe
aeeaie? oeaio?e i?e eiioeaio?aoe??, ui neeaaea? iaeio aeanyoeoeny/io
a?ae eiioeaio?aoe?? a?eueieo iin??a (i?e oeueiio iaeiaeiai aeia?a
?a?no?othoueny ye aei?ii?ithaaeuei?, oae ? aacaei?ii?ithaaeuei?
oeaio?e). Iaoiae ia? aenieo ?icae?eueio caeaoi?noue, aeicaiey? aeineoue
i?inoi ?ioa?i?aooaaoe aeai? aenia?eiaioo, aea? ciiao aecia/eoe oae?
ia?aiao?e: ?icoaooaaiiy aeeaieeo ??ai?a a caai?iiai?e cii? a oe?ieiio
ae?aiacii? aia?a?e, i?io?eue eiioeaio?aoe?? aeeaieeo ??ai?a, ia?a??c
caoiieaiiy aeey aeaeo?ii?a oa ae??ie.

Aeine?aeaeaiiy ia?aiao??a aeeaieeo ??ai?a iaoiaeii ?NA? aaco?oueny ia
aeniiiaioe?aeuei?e caeaaeiino? ?iiino? aeine?aeaeoaaii? no?oeoo?e a?ae
/ano i?e ci?i? oaiia?aoo?e i?ae /an ae?? ca?aeithth/eo ?iioeuen?a
iai?oae. Oiae? aeey ciaoiaeaeaiiy aaee/eie neaiaeo oa noaei? /ano
?aeaenaoe?? aeei?enoiao?oueny /aniaee aeene?ei?iaoi? ?c cai?iiiiiaaiith
Eaiaii ei?aeyoe?eiith ooieoe??th (oaeee i?aeo?ae a?aeiiee ye iaoiae
“aocueeeo no?ia?a”). Aeei?enoaiiy ?ioiai iaoiaeo “oe?ieeo no?ia?a”
aeicaiey? aeiaeoeny i?aeaeuaiiy ni?aa?aeiioaiiy neaiae/ooi, aea aeiaaa?
oneeaaeiaiiy ?ic?aooieiai? /anoeie /a?ac neeaaei?oo caeaaei?noue oi?ie
?NA?-niaeo?o a?ae /aniaeo ia?aiao??a ei?aeyoe?eii? ooieoe??.

?nio? oe?eee eiiieaen ieoaiue aeooaeueiee aeey ?ic?iaee aaaaoueio
no/anieo iai?ai?ia?aeieeiaeo i?eeaae?a, a?aeiia?aeue ia ye? aeiaaa?
cia/ii? iiaeeo?eaoe?? noaiaea?oiiai iaoiaeo ?NA?. Na?aae oeeo ieoaiue
ne?ae a?aecia/eoe: a) i?iaeaio ciaioaiiy ?ici???a iai?ai?ia?aeieeiaeo
aeaiaio?a, ui cacae/ae aeeeeea? ? ciaioaiiy ?o ?iiino?;
a) aeine?aeaeaiiy oa?aeoa?enoee aeeaieeo ??ai?a, ui ?aeaenothoue c
aeecueeeie /aniaeie noaeeie; a) aecia/aiiy ia?aiao??a iiaa?oiaaeo oa
ia’?iieo ??ai?a o aeiaaeeo ?o eaac?iaia?a?aiiai ?iciiae?eo ca aia?a??th.

Naia ?ica’ycaiith oeeo aeooaeueieo i?iaeai i?enay/aii aeena?oaoe?eio
?iaioo.

Ca’ycie ?iaioe c iaoeiaeie ieaiaie Ee?anueeiai oi?aa?neoaoo ?iai? Oa?ana
Oaa/aiea. Iniiai? ?acoeueoaoe ?iaioe io?eiai? i?e aeeiiaii? iaoeiaeo oai
eaoaae?e iai?ai?ia?aeieeiai? aeaeo?ii?ee ?aae?io?ce/iiai oaeoeueoaoo
Ee?anueeiai oi?aa?neoaoo ?iai? Oa?ana Oaa/aiea «Aea/aiiy aieeao
aeii?oeiaeo oa aeaoaeoieo noai?a ia aeaeo?io?ce/i? aeanoeaino?
iai?ai?ia?aeiee?a ? no?oeoo? ia ?o iniia?» (?419, 1991-1993);
«?aeaenaoe?eiee niaeo?iiao? aeeaieeo ??ai?a» (?625, AeEIO 1992-1993);
«Aeine?aeaeaiiy aea?aaeaioieo noai p-i-n-ae?iae?a i?e ci?i? ciai?oi?o
ae?th/eo oaeoi??a oa ?o aeei?enoaiiy aeey iiaeaethaaiiy ea?oth/eo
i?eno?i?a ?aae?iaei??thaaeueii? aia?aoo?e» (?126-89, aini.aeiaia?? c
EIAe?IOI 1989-1990).

Iaoa oa caaaeaiiy ?iaioe. Iaoa aeena?oaoe?eii? ?iaioe aaciina?aaeiuei
aeieeaa? c eiea ia?ae?/aieo aeua caaaeaiue ? iieyaa? o noai?aii?
aenia?eiaioaeueieo iaoiaeee aecia/aiiy ia?aiao??a aeeaieeo ??ai?a o an?o
aeiaaeeao ?o i?iyaeaiiy: iiiiaia?aaoe/i? ??ai?; iiiiaia?aaoe/i? ??ai? c
aeecueeeie /anaie ?aeaenaoe?? (aeiaaeie neeaaeiiai niaeo?o); aeeaie?
??ai? c eaac?iaia?a?aiei ?iciiae?eii ca aia?a??th. ?icaeoie
i?e?iaeaeo?ii?ee aeiaaa? aaeaioaoe?? iaoiaeeee ?aeaenaoe?eii?
niaeo?ineii?? aeeaieeo ??ai?a aei no/anieo ia’?eo?a (aeine?aeaeaiiy
iai?ai?ia?aeieeiaeo i?eeaae?a c iaeeie aaee/eiaie ?iiino?).

Iaoeiaa iiaecia ?iaioe

?ic?iaeaii oa noai?aii iia?oi?e aia?aoii-i?ia?aiiee eiiieaen ii
aeine?aeaeaiith ia?aiao??a aeeaieeo ??ai?a o iai?ai?ia?aeieeiaeo
no?oeoo?ao, i???ioiaaiee ia aei??thaaiiy neaiae?a ?aeaenaoe?? i?eeaae?a
c iaeeie ?iiinoyie.

Noai?aii no/aniee aaoiiaoeciaaiee niaeo?iiao? aeeaieeo ??ai?a i?eaeaoiee
aeey eiiieaeniiai aiae?co aeine?aeaeoaaeueii? no?oeoo?e ca iaeia
oaiia?aoo?ia neaioaaiiy.

Iioei?ciaaii aeaeyae ei?aeyoe?eii? ooieoe?? ?aeaenaoe?eiiai
niaeo?iiao?o.

Aia?oa canoiniaaii iaoiae Iaoaea c aeei?enoaiiyi aei iaeiii??ii?
iioei?caoe?? iaoiaeo Aeaa?na-Naaia-Eaii?-Iaoaea (AeNEI) aeey aecia/aiiy
aeaeo?io?ce/ieo ia?aiao??a aeeaieeo ??ai?a, ui ?aeaenothoue c aeecueeeie
/aniaeie noaeeie.

Anoaiiaeaii iiaee e?eoa??e aeey aecia/aiiy ia?a??co caoiieaiiy aeeaieeo
??ai?a, ui oa?aeoa?ecothoueny eaac?iaia?a?aiei ?iciiae?eii ii aia?a??.

Aaeaioiaaii aei ?aaeueieo oiia aenia?eiaioo iaoiaeeeo aecia/aiiy
ia?aiao??a aeeaieeo ??ai?a, ui oa?aeoa?ecothoueny eaac?iaia?a?aiei
?iciiae?eii ii aia?a??, c aeei?enoaiiyi aeaioeaiaeueiiai no?iaiaaiiai
iaeiie/oaa/a.

I?aeoe/ia cia/aiiy iaea?aeaieo ?acoeueoao?a iieyaa? a oiio, ui
a) ?ic?iaeaii aaoiiaoeciaaiee niaeo?iiao? aeeaieeo ??ai?a, yeee
aeicaiey? aeine?aeaeoaaoe ia?aiao?e aeeaieeo ??ai?a o iai?ai?ia?aeieeao
o oe?ieiio ae?aiacii? oaiia?aoo? oa a?eii ai?n??, a) ?ic?iaeaii
iaoiaeeeo ia?iaee ia?aiao??a aeeaieeo ??ai?a, ui ?aeaenothoue c
aeecueeeie oa?aeoa?ieie /anaie, a) ?ic?iaeaii iaoiaeeeo aecia/aiiy
ia?aiao??a aeeaieeo ??ai?a, ui oa?aeoa?ecothoueny eaac?iaia?a?aiei
niaeo?ii i?e aeei?enoaii? aeaioeaiaeueiiai no?iaiaaiiai iaeiie/oaa/a.

Ai?iaaoe?y ?iaioe. Iniiai? ?acoeueoaoe ?iaioe aeiiia?aeaeeny ia: III
Ananithci?e eiioa?aioe?? “O?ce/i? iniiae iaae?eiino? oa aeaa?aaeaoe??
iai?ai?ia?aeieeiaeo i?eeaae?a”, Eeoei?a, 27-29 o?aaiy 1991?. oa
eiioa?aioe?? ?a?iiaenueei? ni?eee aeine?aeaeaiiy iaoa??ae?a (E-MRS),
No?anao?a (O?aioe?y), 16-19 /a?aiy, 1998. E??i oiai, ?acoeueoaoe ?iaioe
aeiiia?aeaeeny ia iaoeiaeo nai?ia?ao a Ee?anueeiio oi?aa?neoao? ?iai?
Oa?ana Oaa/aiea.

Ioae?eaoe??. Iaoa??aee aeena?oaoe?? iioae?eiaai? a 6 ae?oeiaaieo
i?aoeyo, na?aae yeeo 3 noaoo? a iaoeiaeo aeo?iaeao, 2 ioae?eaoe?? o
ca??ieeo oac aeiiia?aeae ia iaoeiaeo eiioa?aioe?yo oa 1 aaoi?nueea
na?aeioeoai.

Iniaenoee aianie aaoi?a. A aeena?oaoe?? ocaaaeueiaii ?acoeueoaoe
aenia?eiaioaeueieo aeine?aeaeaiue, aeeiiaieo aaciina?aaeiuei aaoi?ii:
aaoi? a?aa o/anoue a iinoaiiaoe? caaea/, ui aa?eoee a aeena?oaoe?th, a
aeai?? iaoiae?a ?o ?ica’ycaiiy, a ?ic?iaoe? aia?aoiiai oa i?ia?aiiiai
caaacia/aiiy, a oaeiae, a ?ioa?i?aoaoe?? ?acoeueoao?a ?ic?aooie?a oa
aenia?eiaio?a.

No?oeoo?a oa ianya ?iaioe. Aeena?oaoe?y neeaaea?oueny c anooio, naie
?icae?e?a, aeniiae?a oa ia?ae?eo oeeoiaaii? e?oa?aoo?e c 73
iaeiaioaaiue. Aeena?oaoe?th aeeeaaeaii ia 129 noi??ieao, ye? i?noyoue
ae?oeiaaiee oaeno, 52 ?enoiee.

INIIAIEE CI?NO ?IAIOE

O anooi? iaa?oioiaaia aeooaeuei?noue oaie aeena?oaoe??, noi?ioeueiaaia
iaoa oa caaaeaiiy, ioa?aeoa?eciaaia i?aeoe/ia oe?ii?noue ?iaioe oa
noi?ioeueiaai? iieiaeaiiy, ui aeiinyoueny ia caoeno. Iiaeaii ei?ioeee
iaeyae ?iaioe ii ?icae?eai.

Ia?oee ?icae?e i?enay/aiee iaeyaeo ?nioth/eo iaoiae?a aeine?aeaeaiiy
aeeaieeo ??ai?a o iai?ai?ia?aeieeiaeo no?oeoo?ao. I?iaaaeaii ?o
ii??aiyeueiee aiae?c, oa a?aecia/aii iniiai? iaaeie?ee oa ia?aaaae.
C?iaeaii aeniiaie, ui iaee?aua ii?aeiaiiy oe?ieeo iiaeeeainoae
aeine?aeaeaiiy oa oi/iino? aecia/aiiy ia?aiao??a aeeaieeo ??ai?a
i?eoaiaiia iaoiaeo ?aeaenaoe?eii? niaeo?ineii?? aeeaieeo ??ai?a (?NA?).

Ae?oaee ?icae?e i?noeoue o nia? iaeyae o?ce/ieo iniia ?aeaenaoe?eii?
niaeo?ineii?? aeeaieeo ??ai?a. Ooo i?iaaaeaii aiae?c ?nioth/eo iaoiae?a
?aeaenaoe?eii? niaeo?ineii?? aeeaieeo ??ai?a: iaoiaeo iino?eii? ?iiino?
oa iaoiaeo iino?eii? iai?oae. Iaaaaeaii iniiai? oai?aoe/i?
ni?aa?aeiioaiiy, ye? aeicaieythoue aecia/eoe ia?aiao?e aeeaieeo ??ai?a o
eiaeiiio c oeeo aeiaaee?a. Aeacaii ia aeioe?euei?noue ii?aeiaiiy iaoiaeo
?aeaenaoe?? ?iiino? c iaoiaeii ?aeaenaoe?? no?oio.

A o?aoueiio ?icae?e? ?ica’ycaii i?iaeaio aeae?eaiiy ?c aea?aaeaioieo
noai iaea?eueo iioe?aieo iai?ai?ia?aeieeiaeo i?eeaae?a neaiae?a
i?iii?oe?eieo ?aaeoeai?e (?iiino?) oa aeoeai?e (no?oio) /anoei?
eiiieaeniiai neaiaeo, yeee i?enooi?e ia aoiae? aei??thaaeueiiai o?aeoo
?aeaenaoe?eiiai niaeo?iiao?a aeeaieeo ??ai?a. Iaoiaeii a??ooaeueieo
i?eeaae?a, iieacaii, ui aeei?enoaiiy aiaeiaiaiai ia?aiiiaeoaa/a c
ianooiiith o?eueo?aoe??th ?acoeueoaoo ia?aiiiaeaiiy neaiae?a, aeicaiey?
aeae?eeoe a?aeiia?aei? eiiiiiaioe c noia?iiai neaiaeo ?aeaenaoe??. Oaeei
/eiii aoei i?iiiaeaeueiaaii ?iaioo ?a?no?oth/i? /anoeie ?aeaenaoe?eiiai
niaeo?iiao?a aeeaieeo ??ai?a.

A /aoaa?oiio ?icae?e? iienaii aia?aoio eiino?oeoe?th ?ic?iaeaiiai
niaeo?iiao?o aeeaieeo ??ai?a.

Aiia neeaaea?oueny ?c aeaio aieiaieo /anoei:

1. ?ioa?oaenii?, a ye?e ciaoiaeyoueny aocee, ui aeicaieeee
aaoiiaoecoaaoe niaeo?iiao? ia no/aniiio ??ai? (c aeei?enoaiiyi
i?eeaaeiaiai ?ioa?oaeno IEEE-488) oa neio?ii?coaaoe ?iaioo aiaeiaiai?
/anoeie. Aeei?enoaiiy no/anii? i?e?iaeaeo?iiii? aeaiaioii? aace oa
eaa?oeaai? noaa?e?caoe?? aeicaieeee aa?aiooaaoe aenieo oi/i?noue
aecia/aiiy /aniaeo oa?aeoa?enoee aeine?aeaeoaaiiai ?aeaenaoe?eiiai
i?ioeano. Aaaeeeao ?ieue a?aeaaaeaii oa?aeoa?enoeeai ei?aeyoe?eii?
ooieoe?? niaeo?iiao?o. A?ae oe??? ooieoe?? caeaaeeoue ?icae?eueia
caeaoi?noue oa /ooeea?noue aecia/aiiy ia?aiao??a aeeaieeo ??ai?a.
Cae/aeii, oe? aaee/eie iathoue ??cio caeaaei?noue a?ae /aniaeo
ia?aiao??a ei?aeyoe?eii? ooieoe??, a oiio, a aeayeeo aeiaaeeao aoaa?
iio??aii caaacia/eoe aenieo ?icae?eueio caeaoi?noue, a /ooeea?noue
aeicaiey? ei?aeoii ia?iaeoe ?NA?-neaiae. A ?ioeo aeiaaeeao, iio??aii
cao?enoaaoe neaiae ia oii? ooi?a. A yeino? aaciai? ei?aeyoe?eii?
ooieoe?? niaeo?iiao?o aeey aeine?aeaeaiiy ia?aiao??a aeeaieeo ??ai?a
aeei?enoiao?oueny ooieoe?y:

“A?eii ai?n??” a oeueiio aeiaaeeo aei??aith? 3.537t0. Ae?ac aeey
?NA?-niaeo?o ia? oaeee aeaeyae:

,

,

, o aeiaaeeo iai?io ?-ai aeeaieiai ??aiy c ciiith i?ia?aeiino? (c
aaeaioiith ciiith);

SYMBOL 68 \f «Symbol» Ei — aia?aaoe/ia a?aenoaiue ?-ai aeeaieiai ??aiy
a?ae e?ath o??? aeicaieaii? ciie, c yeith iai?ith?oueny aeaiee ??aaiue;

SYMBOL 115 \f «Symbol» ni, SYMBOL 115 \f «Symbol» pi — ia?a??c
caoiieaiiy ia ?-e aeeaieee ??aaiue aeaeo?ii?a oa ae??ie;

vn, vp — oaieiaa oaeaee?noue aeaeo?ii?a oa ae??ie, a?aeiia?aeii.

Ci?ia aaee/eie t0 aeicaiey? i?iaiaeeoe a?aeiia?aeio ci?io aaee/eie
“a?eia ai?n??”. I?e oeueiio a iaeano? iaeeo /aniaeo noaeeo i?ioeano
?aeaenaoe?? ?iiino? aeine?aeaeaiiy a?aeaoaa?oueny iaoiaeii “aocueeeo
no?ia?a”, a o aeiaaeeo o?eaaeiai i?ioeano ?aeaenaoe?? — i?aoeth? iaoiae
“oe?ieeo no?ia?a”. A?aooaaaoe ia??iaee/i?noue i?ioeano, iiaeia c?iaeoe
aeniiaie i?i noae?noue ni?aa?aeiioaiiy neaiae/ooi i?e ei?ioeeo ? i?e
aeiaaeo “a?eiao ai?n??”. Aaee/eia iaeneioio ?NA?-i?eo i?e an?o a?eiao
ai?n?? iia’ycaia c aaee/eiith ?NA?-neaiaeo N?NA? =(N(0.39 ? ia
caeaaeeoue a?ae /aniaeo eiiiiiaio. E??i oiai, iiaeeeaino? oi?ioaa/a
aeicaieythoue i?ia?aiiei oeyoii anoaiiaethaaoe aeia?eueiee (c
a?aeiia?aeiith aeene?aoi?noth) aeaeyae ei?aeyoe?eii? ooieoe??.

2. Aiaeiaiaa /anoeia neeaaea?oueny c caaeath/i? oa ?a?no?oth/i? /anoei.
Aiia aeicaiey? c aenieith noaa?euei?noth caaia?oaaoe neaiaee, ye?
aeathoue ciiao ea?oaaoe oiiaaie aenia?eiaioo oa ?a?no?oaaoe ?NA?-neaiae.
I?aeaeuaiiy /anoioe aei??thaaiue aeicaiey? aeine?aeaeoaaoe a?eueoee
ae?aiacii iai?ai?ia?aeieeiaeo no?oeoo?, i?ae a?aeii? aiaeiae.
Ca?eueoaiiy aei??thaaeueii? /anoioe aa?aioo? oi/i?noue aei??thaaiiy
?aeaenaoe?eieo i?ioean?a c iaeeie /aniaeie noaeeie, ine?eueee oea
aeicaiey? caaacia/eoe a?aeiia?aeio nioao i?iioneaiiy aei??thaaeueiiai
o?aeoo.

Caaaeueia aeie-noaia aaoiiaoeciaaiiai ?aeaenaoe?eiiai

niaeo?iiao?a aeeaieeo ??ai?a

Aeae? a ?iaio? iaaaaeaii ?ic?iaeai? noaie aoce?a oa iiaeoe?a, ui
aoiaeyoue aei neeaaeo niaeo?iiao?a.

Caaaeyee aenieei ia?aiao?ai ?ic?iaeaiiai niaeo?iiao?a, aenia?eiaioaeueii
i?aeoaa?aeaeaia iiaeeea?noue eiai aeei?enoaiiy aeey aeine?aeaeaiiy
ia?aiao??a aeeaieeo ??ai?a a no?oeoo?ao c iaeeie ?iiinoyie
(p-i-n-ae?iaee). Ine?eueee, eiino?oeoe?y p-i-n-ae?iaeo oa?aeoa?eco?oueny
neaaeith caeaaei?noth ?iiino? ca?aeiaiiai oa?o a?ae cai?ioii? iai?oae,
oi aeey ei?aeoiiai aeine?aeaeaiiy ia?aiao??a aeeaieeo ??ai?a iaiao?aeii
i?iaanoe iiia?aaeith ?iaeaeoe?th iin??a a ca?aeiaio ?-iaeanoue.
Aiae?coth/e aieea ??cieo aeic (-ii?ii?iaiiy aaeaeiny ia?aaeaa/eoe
?aae?aoe?eio no?ee?noue p-i-n-ae?iae?a. I?aaenoaaeaii ?acoeueoaoe
aeine?aeaeaiiy III-no?oeoo?. Aeiaaaeaia iiaeeea?noue aeae?eaiiy neaiaeo
iiaa?oiaaeo ??ai?a a?ae neaiaeo ia’?iieo ??ai?a ca aeiiiiiaith ci?ie
oiia aenia?eiaioo.

A i’yoiio ?icae?e? iienaii i?ia?aiia caaacia/aiiy ?ic?iaeaiiai
aaoiiaoeciaaiiai niaeo?iiao?a. A?ae eiai yeino? caeaaeeoue iaae?ei?noue
?iaioe nenoaie a oe?eiio, iiaeeea?noue ci?ie oiia i?iaaaeaiiy
aenia?eiaioo oa oi/i?noue aecia/aiiy ia?aiao??a. Iieacaii, ui ?ic?iaeaia
i?ia?aiia caaacia/aiiy aeicaiey? iiaiith i??ith ?aae?coaaoe iiaeeeaino?
aia?aoii? /anoeie niaeo?iiao?o. Aiii aecia/a?oueny iaae?eiith ?iaioith
oa, caaaeyee iiaeoeueiiio i?aeoiaeo, iiaea aooe eaaei iiaeao?eiaaii i?ae
aeia?euei? aia?aoi? aocee aaoiiaoeciaaiiai ?aeaenaoe?eiiai niaeo?iiao?o.

Oinoee ?icae?e i?enay/aii iaoiaeeoe? ia?iaee ?acoeueoao?a
?NA?-aenia?eiaioo o aeiaaeeo ?aeaenaoe?? aeeaieeo oeaio??a c aeecueeeie
/aniaeie ia?aiao?aie (aeiaaeie neeaaeiiai ?NA?-niaeo?o). Aei oeueiai
/ano i?iaeaio aeae?eaiiy iiiiaia?aaoe/ieo neeaaeiaeo ia iiaeia aoei
aaaaeaoe ?ica’ycaiith. ?aeeiei i?aeoiaeii, yeee aeicaieya io?eiaoe
ia?aiao?e aeeaieeo ??ai?a o aeaiiio aeiaaeeo aoea ia?iaea /anoeie
?NA?-niaeo?o, yea aeae?eyeany ca e?eoa???i aeniiiaioe?aeueiino?. Aea
cia/ia ao?aoa oi/iino?, a a aeayeeo aeiaaeeao neeaaeiiu? c aecia/aiiyi
oaiia?aoo?iiai ae?aiaciio aeniiiaioe?aeueiino?, ia aeaaaee ciiae c
aenieith aeinoia??i?noth aeei?enoiaoaaoe oeth iaoiaeeeo.

A aeena?oaoe?? aeey aecia/aiiy ia?aiao??a aia?oa canoiniaaii iaoiae
Iaoaea c aeei?enoaiiyi aeey iaeiii??ii? iioei?caoe?? iaoiaeo
Aeaa?na-Naaia-Eaii?-Iaoaea (AeNEI). I?e oeueiio aeei?enoaiee neaiae a?ae
on?o oaiia?aoo?ieo oi/ie, i?e an?o aei??yieo cia/aiiyo a?eii ai?n??.
Aeiaaaeaii iaeiicia/i?noue ?icae?eaiiy oa io?eiaii aenieo oi/i?noue
aecia/aiiy ia?aiao??a aeeaieeo ??ai?a.

Aia?oa aac iiia?aaeiuei? o?eueo?aoe?? /e ?ioa?iieyoe?? aeaieo
aenia?eiaioo io?eiaii cia/ia i?eaeooaiiy ooi?a, ui aeicaieeei nooo?ai
i?aeaeueoe /ooeea?noue niaeo?iiao?a.

Aoei i?iaiae?ciaaii caeaaei?noue oi/iino? iaaeeaeaiiy a?ae e?eueeino?
e?ie?a iioei?caoe?? i?e ??ci?e e?eueeino? “a?eii ai?n??”. Anoaiiaeaii,
ui aeua oi/i?noue iaaeeaeaiiy ia? i?noea i?e ia?iaoe? ii a?eueoiio /eneo
“a?eii ai?n??”, ui i?aeoaa?aeaeo? iaiao?aei?noue eiiieaeniiai aiae?co
c?ace?a.

Aeine?aeaeaii oaeiae, caeaaei?noue oi/iino? iaaeeaeaiiy a?ae e?eueeino?
e?ie?a iioei?caoe?? i?e ??ciiio ni?aa?aeiioaii? neaiae/ooi. Anoaiiaeaii,
ui iaa?oue eiee a?aeiioaiiy neaiae/ooi aei??aithaaei 2, oi/i?noue
iaaeeaeaiiy neeaaeaea 8%. Ca oaeeo aenia?eiaioaeueieo oiia iaoiae Eaiaa
ia aeicaiey? io?eiaoe ia?aiao?e aeeaieeo ??ai?a c caaeia?eueiith
oi/i?noth, a aeei?enoaiiy iiia?aaeiuei? o?eueo?aoe?? iiaea nooo?ai
iia??oeoe ?icae?eueio caeaoi?noue iaoiaeo. I?e ca?eueoaii?
ni?aa?aeiioaiiy neaiae/ooi oi/i?noue iaaeeaeaiiy cia/ii c?inoa?.

E??i oiai, a aeena?oaoe?? aeiaaaeaii, ui ?ic?iaeaia iaoiaeeea iiaea
aeei?enoiaoaaoeny i?e aeine?aeaeaii? ia?aiao??a aeeaieeo ??ai?a ??ciiai
ciaeo ?aeaenaoe??. Ca ?aooiie aaaaoiaei??ii? (ii aeae?eueeio “a?eiao
ai?n??”) ia?iaee ?nio? iiaeeea?noue aeno?aiieyoe?? ?NA?-niaeo?o ca
oaiia?aoo?i? iaae? niaeo?iiao?o.

Nueiiee ?icae?e i?enay/aiee aea/aiith ia?aiao??a aeeaieeo ??ai?a ia
iaae? ?icae?eo Si-SiC. Aeei?enoaiiy iiaeo iaoa??ae?a (SiC, ii?enoee
e?aii?e) oaeiae aeiaaa? aoaeoeaii? iaoiaeeee eiio?ieth ia?aiao??a
aeeaieeo ??ai?a, ye? oa?aeoa?ecothoueny eaac?iaia?a?aiei aia?aaoe/iei
niaeo?ii. Ia?iaea ?NA?-niaeo??a aeeaieeo ??ai?a i?e iayaiino?
aia?aaoe/ii? ciie c eaac?iaia?a?aiei ?iciiae?eii ia iiaea aooe
i?iaaaeaia ca o?aaeeoe?eieie iaoiaeeeaie. Oiio a aeena?oaoe??, io?eiaii
?ioaa?aeueia ??aiyiiy, yea iia’yco? i?ae niaith /aniao caeaaei?noue
?iiino? iai?ai?ia?aeieeiai? no?oeoo?e oa ?iciiae?e eiioeaio?aoe??
aeeaieeo ??ai?a ca aia?a??th. ??aiyiiy ?ic’ycaii a?aeiinii
eiioeaio?aoe?? o aeaio aeiaaeeao: aeey aeiaaeeo eaac?iaia?a?aiiai
niaeo?o aeeaieeo ??ai?a oa iiiaeeiieiai aeeaieiai ??aiy. Ia?aa??ea
i?aoeacaeaoiino? iaoiaeeee i?iaiaeeeanue ia ciiaeaeueiaaieo neaiaeao
?aeaenaoe?? oa aeiaaea iiaeeea?noue aecia/aiiy ia?aiao??a aeeaieeo
??ai?a o iaio aeiaaeeao. Iniaeeaa oaaaa i?eae?eaia aeiaaeeo
eaac?iaia?a?aiiai niaeo?o. Ciaeaeaii aeai?eoi aecia/aiiy aaee/eie
ia?a??co caoiieaiiy aeeaieiai ??aiy, ui ?aeaeno? c iaea?eueoith /aniaith
noaeith. Ciath/e ca’ycie ia?a??co caoiieaiiy oa aia?a?? ?ii?caoe?? /a?ac
/an ?aeaenaoe??, c aeaieo aenia?eiaioo aaea?oueny ?ic?aooaaoe aia?a?th
?ii?caoe?? a?aeiia?aeiiai aia?aaoe/iiai ??aiy. Oaeei /eiii aecia/aii
?iciiae?e eiioeaio?aoe?? aeeaieeo ??ai?a ii aia?a?? o aeiaaeeo ?o
eaac?iaia?a?aiiai ?iciiae?eo.

Aeiaaaeaii, ui ?NA?-neaiae a aeine?aeaeoaai?e no?oeoo?? ia? a?aeiioaiiy
naia aei noai?a a iaeano? ?icae?eo Si-SiC. Caaaeyee iiaeeeainoyi
niaeo?iiao?o aecia/aii a oe?ieiio /aniaiio ae?aiacii? ia?aiao?e neaiaeo
?aeaenaoe??, ui iaiiaeeeai c?iaeoe ia a?aeiieo aiaeiaao i?e aeei?enoaii?
aeaioeaiaeueiiai no?iaiaaiiai iaeiie/oaa/a. Cia/ii aeiiiaiaii iaoiaeeeo
ia?iaee ?NA?-neaiaeo i?e ?aeaenaoe?? ??ai?a c eaac?iaia?a?aiei niaeo?ii.
Aeei?enoiaoth/e oeth iaoiaeeeo aecia/aii ia?aiao?e oaeeo ??ai?a ia iaae?
?icae?eo Si-SiC oa aeine?aeaeaii aieea a?aeiaethaaiiy a aeniei/anoioi?e
ieaci? c i?aeaeuaiei i?ae?a??aii a aoiinoa?? N2+H2(10%).

INIIAI? ?ACOEUeOAOE OA AENIIAEE

?ic?iaeaii aaoiiaoeciaaiee niaeo?iiao?o aeeaieeo ??ai?a c iaoith
aeine?aeaeaiiy ?aeaenaoe?eieo i?ioean?a o i?eeaaeao c iaeeie ?iiinoyie.

Noai?aii iaoiaeeeo i?iaaaeaiiy aenia?eiaioo c iiaeeea?noth eiiieaeniiai
aiae?co aeaeo?io?ce/ieo ia?aiao??a aeeaieeo ??ai?a ca iaeia oaiia?aoo?ia
neaioaaiiy.

?ic?iaeaii i?ia?aiia caaacia/aiiy aeey ea?oaaiiy oiaeii aenia?eiaioo oa
ia?iaee eiai ?acoeueoao?a.

Iioei?ciaaii caaaeueiee aeaeyae ei?aeyoe?eii? ooieoe?? ?aeaenaoe?eiiai
niaeo?iiao?o c iaoith i?aeaeuaiiy aeinoia??iino? oa yeino? ?acoeueoao?a
aei???a.

Noai?aii iaoiaeeeo ia?iaee ?acoeueoao?a aeine?aeaeaiiy
iai?ai?ia?aeieeiaeo no?oeoo?, a yeeo iiaeeeaa ?aeaenaoe?y ?iiino? c
aeecueeeie /aniaeie cia/aiiyie.

?ic?iaeaiee aeai?eoi aecia/aiiy ia?a??co caoiieaiiy aeeaieeo ??ai?a, ui
oa?aeoa?ecothoueny eaac?iaia?a?aiei aia?aaoe/iei niaeo?ii.

?ic?iaeaii oa aaeaioiaaii iaoiae aecia/aiiy ia?aiao??a aeeaieeo ??ai?a o
aeiaaeeo eaac?iaia?a?aiiai aia?aaoe/iiai niaeo?o i?e aeei?enoaii?
?aeaenaoe?eiiai niaeo?iiao?o aeeaieeo ??ai?a c aeaioeaiaeueiei
no?iaiaaiei iaeiie/oaa/ai.

Ioae?eaoe??

Aieei TH.A., Eeeue/eoeueea N.N., Eeeue/eoeueea O.N., No??oa A.?.,O?aoye
I.A. I?i ?ieue iiaa?oiaaeo noai?a a ia?aianaii? oioino?oio a no?oeoo?ao
iaoae-ooiaeueiee ae?aeaeo?ee-iai?ai?ia?aeiee. // OOAE. – 1994. – ? 6. –
n. 723–726.

2 Boiko Yu. V., Tretyak O.V., Schmatov A.A. Generator of low-frequency
pulses for a deep-level transient spectrometer. // Instruments and
Experimental Techniques. – v.37 – ? 3, part 1, 1994. – p.317–320

3. Aieei TH.A., A?yciia Ae.A., O?aoye I.A. ?icae?eaiiy neeaaeiiai
?NA?-niaeo?o. // A?niee Ee?anueeiai oi?aa?neoaoo, na??y:
O?ceei-iaoaiaoe/i? iaoee, ? 3, 1997. – n. 240–249.

4. A.n. ? 1588212, NNN?, Ono?ienoai aeey eiio?iey iieoi?iaiaeieeiauo
no?oeoo? / TH.A.Aieei, I.A.O?aoye, A.A.Oiaoia (Oe?aeia). – 1988 a.

5. Lazarouk S., Browski P., Gorbach T., Smertenko P., Svechnikov S.,

Boyko Y., Buzaneva E., Chukova O., Nedelko S., Tretyak O., Pavesi L.
Study of the recombination mechanisms and defects of porous silicon
light emitting devices. // European Materials research society, Final
book of abstracts, Strasbourg, 16-19 June, 1998., B-35.

6. Aieei TH.A., O?aoye I.A. Eniieueciaaiea iaoiaeia ?NA? aeey eiio?iey
ia/aeueiuo noaaeee acaeiiaeaenoaey iaoaeea e e?aiiey n aa?uea?ii Oiooee
// Oac. aeieeaaeia, III Ananithciay eiioa?aioeey “Oece/aneea iniiau
iaae?aeiinoe e aeaa?aaeaoeee iieoi?iaiaeieeiauo i?eai?ia”, Eeoeiaa,
27–29 iay 1991 a. – Eeoeiaa. – /.II, 1991. – N.8.

***

Aiioaoe?y

Aieei TH.A. No/ani? i?aeoiaee o aecia/aii? ia?aiao??a aeeaieeo ??ai?a a
iai?ai?ia?aeieeao iaoiaeii ?aeaenaoe?eii? niaeo?ineii?? – ?oeiien.

Aeena?oaoe?y ia caeiaoooy iaoeiaiai nooiaiy eaiaeeaeaoa
o?ceei-iaoaiaoe/ieo iaoe ca niaoe?aeuei?noth 01.04.10 – o?ceea
iai?ai?ia?aeiee?a oa ae?aeaeo?ee?a. – Ee?anueeee oi?aa?neoao ?iai?
Oa?ana Oaa/aiea, Ee?a, 1999.

Aeena?oaoe?y i?enay/aia aeine?aeaeaiith ia?aiao??a aeeaieeo ??ai?a a
iai?ai?ia?aeieeao a oeo aeiaaeeao, eiee o?aaeeoe?eiee i?aeo?ae c
aeei?enoaiiyi iaoiaeeee ?aeaenaoe?eii? niaeo?ineii?? ia aeicaiey?
io?eiaoe a?aeiia?aei? ia?aiao?e. ?icaeyiooi i?aeoiaee aei aecia/aiiy
ia?aiao??a aeeaieeo ??ai?a o iai?ai?ia?aeieeao oa i?eeaaeao ia ?o
iniia?. ?ic?iaeaii oa noai?aii aaoiiaoeciaaiee ?aeaenaoe?eiee
niaeo?iiao? aeeaieeo ??ai?a, i???ioiaaiee ia aeine?aeaeaiiy no/anieo
iai?ai?ia?aeieeiaeo i?eeaae?a c iaeeie aaee/eiaie ?aeaenoth/i? ?iiino?.
Iiaeeo?eiaaii caaaeueiee aeaeyae ei?aeyoe?eii? ooieoe?? aeaioeaiaeueiiai
no?iaiaaiiai iaeiie/oaa/a, ui aeicaieeei i?aeaeueoe ye?noue oa
aeinoia??i?noue aecia/aiiy iniiaieo ia?aiao??a aeeaieeo ??ai?a. Noai?aii
i?ia?aiia caaacia/aiiy, ui aeicaiey? a iiai?e i??? ?aae?coaaoe
aei??thaaeuei? iiaeeeaino? aaoiiaoeciaaiiai niaeo?iiao?a oa i?iaanoe,
a?aeiia?aeiei /eiii, ia?iaeo ?acoeueoao?a aenia?eiaioo. Noai?aii
iaoiaeeee io?eiaiiy ia?aiao??a aeeaieeo ??ai?a o aeiaaeeo ?aeaenaoe??
?iiino? a?ae aeeaieeo ??ai?a c aeecueeeie /aniaeie noaeeie (aeiaaeie
neeaaeiiai ?NA?-niaeo?o) oa ?o eaac?iaia?a?aiiai aia?aaoe/iiai
?iciiae?eo.

Ca aeiiiiiaith ?ic?iaeaiiai aia?aoii-i?ia?aiiiai eiiieaeno aeine?aeaeaii
ieceo iai?ai?ia?aeieeiaeo i?eeaae?a.

Eeth/ia? neiaa: ?aeaenaoe?eia niaeo?ineii?y aeeaieeo ??ai?a (?NA?),
?aeaenaoe?y ?iiino?, eieae?ciaai? noaie a caai?iiai?e cii?, aia?a?y
?ii?caoe??, ia?a??c caoiieaiiy, a?eii ai?n??.

***

Abstract

Boiko Yu.V. The modern approaches for definition of parameters of deep
levels in semiconductors by the transient spectroscopy method. –
Manuscript.

Thesis for a candidate degree by speciality 01.04.10 – physics of
semiconductors and dielectrics. – Kiev T.Shevchenko University, Kiev,
1999.

The dissertation is devoted to research of parameters of deep levels in
semiconductors when the traditional approach based on the transient
spectroscopy technique does not allow to receive the appropriate
parameters. Automated transient spectrometer of deep levels focused on
research of modern semiconductor devices with small transient capacity
is developed and made. The techniques of reception of parameters of
deep levels are developed for the cases of the capacity relaxation from
deep levels with close temporary constant (case of a complex
DLTS-spectrum) and capacity relaxation from a band of deep levels (case
of quasi-continuous DLTS-spectrum) with use of the two-channel
strobe-control store. A number of semiconductor devices is investigated
with the use of the developed techniques.

Key words: deep levels transient spectroscopy (DLTS), capacity
relaxation, local states in forbidden band, energy of ionisation,
capture cross-section, rate window.

***

Aiiioaoeey

Aieei TH.A. Nia?aiaiiua iiaeoiaeu i?e ii?aaeaeaiee ia?aiao?ia aeoaieeo
o?iaiae a iieoi?iaiaeieeao iaoiaeii ?aeaenaoeeiiiie niaeo?ineiiee. –
?oeiienue.

Aeenna?oaoeey ia nieneaiea o/?iie noaiaie eaiaeeaeaoa
oeceei-iaoaiaoe/ieo iaoe ii niaoeeaeueiinoe 01.04.10 – oeceea
iieoi?iaiaeieeia e aeeyeaeo?eeia. – Eeaaneee oieaa?neoao eiaie Oa?ana
Oaa/aiei, Eeaa, 1999.

Aeenna?oaoeey iinayuaia enneaaeiaaieth ia?aiao?ia aeoaieeo o?iaiae a
iieoi?iaiaeieeao a oao neo/ayo, eiaaea o?aaeeoeeiiiue iiaeoiae n
eniieueciaaieai iaoiaeeee ?aeaenaoeeiiiie niaeo?ineiiee (?NAO) ia
iicaieyao iieo/eoue niioaaonoaothuea ia?aiao?u. A ?aaioa
i?iaiaeece?iaaiu nouanoaothuea iaoiaeeee ii?aaeaeaiey ia?aiao?ia
aeoaieeo o?iaiae. I?iiiaeaee?iaaia ia YAI ?aaioa ioaeaeueiuo oceia e
aeieia ?aeaenaoeeiiiiai niaeo?iiao?a. ?ac?aaioai e ecaioiaeai
aaoiiaoece?iaaiiue ?aeaenaoeeiiiue niaeo?iiao? aeoaieeo o?iaiae,
i?eaioe?iaaiiue ia enneaaeiaaiea nia?aiaiiuo iieoi?iaiaeieeiauo
i?eai?ia n iaeuie aaee/eiaie ?aeaene?othuae ?ieinoe. Iiaeeoeoee?iaai
iauee aeae ei??aeyoeeiiiie ooieoeee aeaooeaiaeueiiai no?iae?oaiiai
iaeiieoaey, /oi iicaieeei iiauneoue ea/anoai e aeinoiaa?iinoue
ii?aaeaeaiey iniiaiuo yeaeo?ioece/aneeo ia?aiao?ia aeoaieeo o?iaiae
(aeoaeio caeaaaiey, na/aiea caoaaoa e eiioeaio?aoeeth). Nicaeaii
i?ia?aiiiia iaania/aiea, iicaieythuaa a iieiie ia?a ?aaeeciaaoue
ecia?eoaeueiua aiciiaeiinoe aaoiiaoece?iaaiiiai niaeo?iiao?a e iiauneoue
ea/anoai ia?aaioee ?acoeueoaoia yenia?eiaioa. Enneaaeiaaii aeeyiea
?acee/iuo aeic (-iaeo/aiey ia yeaeo?ioece/aneea ia?aiao?u
iieoi?iaiaeieeiauo i?eai?ia n iaeuie aaee/eiaie ?ieinoe
(iieoi?iaiaeieeiaua p-i-n-aeeiaeu). Ia i?eia?a no?oeoo?u
iaoae-ooiaeueiue aeeyeaeo?ee-iieoi?iaiaeiee aeieacaia aiciiaeiinoue
?acaeaeaiey neaiaea ?aeaenaoeee ia eiiiiiaiou ioaaonoaaiiua ca
?aeaenaoeeth iauaiiuo e iiaa?oiinoiuo ninoiyiee.

?ac?aaioaia iaoiaeeea iieo/aiey ia?aiao?ia aeoaieeo o?iaiae i?e
?aeaenaoeee ?ieinoe io aeoaieeo o?iaiae n aeeceeie a?aiaiiuie
iinoiyiiuie (neo/ae neiaeiiai ?NAO-niaeo?a). A aeenna?oaoeee aeey
ii?aaeaeaiey ia?aiao?ii aia?aua eniieueciaai iaoiae
Aeaaena-Naaia-Eaiie-Iaoyea (AeNEI). I?e yoii aia?aua aeey ia?aaioee
?acoeueoaoia eniieuecoaony neaiae io anao oaiia?aoo?iuo oi/ae,
ecia?aiiue i?e ianeieueeeo cia/aieyo ieia yiennee. Eniieueciaaiea oaeiai
iiaeoiaea iicaieeei aac i?aaeaa?eoaeueiie oeeueo?aoeee
yenia?eiaioaeueiuo aeaiiuo aeiaeoueny nouanoaaiiiai iiauoaiey
/oanoaeoaeueiinoe niaeo?iiao?a aeoaieeo o?iaiae. ?ac?aaioaiiay iaoiaeeea
iicaieyao ia?aaaouaaoue ?NAO-neaiae ?aciiai ciaea ?aeaenaoeee (a neo/aa
ia?aca?yaeee aeoaieeo o?iaiae c ?aciui ca?yaeiaui ninoiyieai). E?iia
oiai, ca n/ao iiiaiia?iie ia?aaioee nouanoaoao aiciiaeiinoue
yeno?aiieyoeee ?NA?-niaeo?a ca oaiia?aoo?iua i?aaeaeu niaeo?iiao?a.

Iaee/ea aeoaieeo o?iaiae, oa?aeoa?ecothueony iai?a?uaiui aia?aaoe/aneei
niaeo?ii, ia a?aieoeao ?acaeaea iieoi?iaiaeieeiauo i?eai?ia o?aaoao
iaee/ey aoaeoeaiie iaoiaeeee ii?aaeaeaiey eo ia?aiao?ia. A aeenna?oaoeee
?ac?aaioaia iaoiaeeea iieo/aiey ?ani?aaeaeaiey eiioeaio?aoeee aeoaieeo
o?iaiae ii yia?aee i?e eniieueciaaiee aeaooeaiaeueiiai no?iae?oaiiai
iaeiieoaey. Iaeaeai aeai?eoi ii?aaeaeaiey na/aiey caoaaoa. Eiay naycue
na/aiey caoaaoa e yia?aee eiiecaoeee iin?aaenoaii a?aiaie ?aeaenaoeee, n
yenia?eiaioaeueiuo aeaiiuo au/eneyaony yia?aey eiiecaoeee
niioaaonoaothuaai aeoaieiai o?iaiy. Eniieueciaaiea aeaiiie iaoiaeeee
iicaieeei ii?aaeaeeoue ia?aiao?u aeoaieeo o?iaiae ia a?aieoea ?acaeaea
Si-SiC e enneaaeiaaoue aeeyiea ioaeeaa a A*-ieacia n iiauoaiiui
iiaeia?aaii a aoiinoa?a N2+H2(10%).

Eeth/aaua neiaa: ?aeaenaoeeiiiay niaeo?ineiiey aeoaieeo o?iaiae (?NAO),
?aeaenaoeey ?ieinoe, eieaeeciaaiiua ninoiyiey a cai?au?iiie ciia,
yia?aey eiiecaoeee, na/aiea caoaaoa, ieii yiennee.

PAGE

PAGE

Inoeeeia?ao

IBM PC/AT

I?eno??e aeaiaeo

?ioa?oaenia /anoeia oa caaeath/ee

iecueei/anoioiee aaia?aoi?

O283

A7-34

O283

Aiaeiaiaa /anoeia

aaoiiaoeciaaiiai niaeo?iiao?a

aeeaieeo ??ai?a

E??inoao

c? c?aceii

A5-47

Uci?u.

A5-46

Ucai

A5-47

Uiaa??aa/a

Iaa??aa/

Eaiae ni?eueiiai

ei?enooaaiiy

Aioo??oiy iaa?no?aeue

aeaea?ae aeeaeaiiy

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